CN202610322U - Gas spraying head - Google Patents
Gas spraying head Download PDFInfo
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- CN202610322U CN202610322U CN 201220174122 CN201220174122U CN202610322U CN 202610322 U CN202610322 U CN 202610322U CN 201220174122 CN201220174122 CN 201220174122 CN 201220174122 U CN201220174122 U CN 201220174122U CN 202610322 U CN202610322 U CN 202610322U
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- Prior art keywords
- gas
- sprinkler head
- air inlet
- uptake
- port
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- 238000005507 spraying Methods 0.000 title 1
- 230000009471 action Effects 0.000 claims abstract description 29
- 238000013022 venting Methods 0.000 claims description 39
- 230000000740 bleeding effect Effects 0.000 claims description 9
- 239000007789 gas Substances 0.000 description 148
- 238000009826 distribution Methods 0.000 description 15
- 239000012530 fluid Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 240000001439 Opuntia Species 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Nozzles (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A gas showerhead comprising at least a showerhead body, characterized in that: the sprinkler body is provided with a gas action surface and a plurality of air inlet holes, the air inlet holes are symmetrically distributed along two vertical directions on the gas action surface at an angle of 45 degrees, and the total number of the air inlet holes is 980-1050. The positions of some air inlets are replaced by a plurality of observation holes which are arranged in a straight line.
Description
Technical field
The utility model relates to a kind of gas sprinkler head, and particularly relevant for a kind of air inlet port with symmetrical distribution, is applied to the gas sprinkler head of Metalorganic chemical vapor deposition (MOCVD) extension of LED.
Background technology
Along with the development of coating process, in the reaction process of chemical vapour deposition, how gas being sprayed onto equably just becomes important problem in the chamber.To this, gas distribution module (gas distribution module), particularly gas sprinkler head (gas showerhead) has been played the part of important role.
To the design and the structure of gas distribution module or gas sprinkler head, there have been several patents to propose.The mode pilot-gas turnover that U.S. Pat 7138336 B2 and U.S. Pat 7641939 B2 adopt sprinkler head air inlet, chamber side to bleed.U.S. Pat 6921437 discloses a kind of gas distribution module that is pre-mixed precursor gases, but is not suitable for the technology that precursor gases can not be pre-mixed.U.S. Pat 6478872 discloses a kind of method that delivers the gas to chamber, and the sprinkler head that is used for delivering gas.Yet the complex structure that should design, and manufacturing cost is expensive.
The utility model content
The purpose of the utility model is to provide a kind of gas sprinkler head, has processing simply, and can form the advantage that uniform gas distributes.
For realizing above-mentioned purpose, the gas sprinkler head that the utility model provides comprises a sprinkler head main body at least; Wherein, this sprinkler head main body has a gas action face and most air inlet ports, and those air inlet ports are to be miter angle along two vertical direction on this gas action face to be symmetrically distributed; And the total number of those air inlet ports is between 980～1050; Wherein, partly the position of those air inlet ports is replaced by a plurality of vision slits, and those vision slits are arranged in a linear.
Described gas sprinkler head, wherein respectively the air inlet area of this air inlet port at 11mm
2～12mm
2Between.
Described gas sprinkler head, wherein the spacing of those air inlet ports is between 10mm～16mm.
Described gas sprinkler head, wherein total air inlet area of those air inlet ports account for this gas action face area 3%～10% between.
Described gas sprinkler head, wherein the spacing of those vision slits is between 20mm～22mm.
Described gas sprinkler head, wherein the aperture of vision slit is between 7.5mm～8.5mm.
Described gas sprinkler head, wherein respectively this air inlet port comprises:
One first uptake is to supply one first gas;
One taper perforate, the position is in this gas action face and connect this first uptake; And
At least one second uptake is connected with this taper perforate, to supply one second gas.
Described gas sprinkler head, wherein this at least one second uptake ring be located at this first uptake around.
Described gas sprinkler head, the wherein central axes of the hub of this second uptake and this first uptake.
Described gas sprinkler head, wherein the hub of the hub of this second uptake and this first uptake has angle.
Described gas sprinkler head, wherein this first uptake and this sprinkler head main body is formed in one or this first uptake through being spirally connected or welding process is connected on this sprinkler head main body.
Described gas sprinkler head also comprises a central venting port of the central position that is positioned at this gas action face.
Described gas sprinkler head wherein should be made up of most venting holes by central authorities' venting port.
Described gas sprinkler head wherein should bleeding of central authorities' venting port be held to this sprinkler head main body indent.
Described gas sprinkler head, the discharge directions that wherein should central authorities' venting port and the airintake direction of those air inlet ports are parallel to each other.
Described gas sprinkler head, the ratio of leaving area that wherein should central authorities' venting port and total air inlet area of those air inlet ports is less than 0.03.
Described gas sprinkler head, wherein this sprinkler head main body also comprises at least one circular row gas port, this circular row gas port is that the center is balanced configuration with this central authorities' venting port.
Described gas sprinkler head, wherein this circular row gas port comprises by most venting holes and constituting.
Described gas sprinkler head, wherein the end of bleeding of this circular row gas port is to this sprinkler head main body indent.
Described gas sprinkler head, wherein the airintake direction of the discharge directions of this circular row gas port and those air inlet ports is parallel to each other.
In sum, the gas sprinkler head of the utility model has the air inlet port that is the miter angle symmetric offset spread along two vertical direction on the gas action face, configuration thus, and the gas sprinkler head of the utility model can generate the good atmosphere of uniformity coefficient in processing chamber.This air inlet structure that is the miter angle symmetric offset spread also has processing advantage simple, cheap for manufacturing cost.The utility model also replaces partly air inlet port with vision slit, therefore is able to the indoor situation of observation chamber during technology.The air inlet port of the utility model can also have plural uptake, according to circumstances the two or more gas of uniform mixing.In addition, the gas sprinkler head of the utility model also can comprise central venting port and circular row gas port, can make gas distribution more even, also can in technological reaction, take out the by product of dereaction, promotes the technology yield.
Description of drawings
Fig. 1 is the three-dimensional view of the gas sprinkler head painted according to the utility model first embodiment.
Fig. 2 A is the front view of the gas sprinkler head of Fig. 1.
Fig. 2 B is the sectional view along the A-A line of Fig. 2 A.
Fig. 2 C is the partial enlarged drawing of Fig. 2 B.
Fig. 2 D is the air inlet port sectional view of the gas sprinkler head of another embodiment of the utility model.
Fig. 3 A is the front view of the gas sprinkler head painted according to the utility model second embodiment.
Fig. 3 B is that the gas sprinkler applications of second embodiment is in the sectional view of distribution device in gas-fluid.
Fig. 4 A is the front view of the gas sprinkler head painted according to the utility model the 3rd embodiment.
Fig. 4 B is that the gas sprinkler applications of the 3rd embodiment is in the sectional view of distribution device in gas-fluid.
Primary clustering nomenclature in the accompanying drawing:
100,200,400 gas sprinkler heads; 101,201,401 first gas supply orifices; 102,202,402 sprinkler head main bodys; 103,203,403 second gas supply orifices; 104,204,404 gas action face; 106,206,406 air inlet ports; 106a first uptake; 106b taper perforate; 106c second uptake; 208,408 central venting ports; 208a, 410a venting hole; The 208b end of bleeding; 300,500 distribution device in gas-fluid; 302,502 chambers; 304,504 plummers; 306,506 substrates; 410 circular row gas ports; A1, a2 hub; G1 first gas; G2 second gas.
Embodiment
The utility model proposes a kind of gas sprinkler head; At least comprise a sprinkler head main body, it is characterized in that: the sprinkler head main body has gas action face and a plurality of air inlet port, and the total number of air inlet port is between 980～1050; Air inlet port is to be miter angle along two vertical direction on the gas action face to be symmetrically distributed; Wherein, partly the position of air inlet port is replaced by a plurality of vision slits, and said vision slit is arranged in a linear.
In an embodiment of the utility model, the air inlet area of above-mentioned each air inlet port is for example at 11mm
2～12mm
2Between.
In an embodiment of the utility model, the spacing of above-mentioned air inlet port is for example between 10mm～16mm.
In an embodiment of the utility model, total air inlet area of above-mentioned air inlet port for example account for the gas action face area 3%～10% between.
In an embodiment of the utility model, the spacing of above-mentioned vision slit is for example between 20mm～22mm.
In an embodiment of the utility model, the aperture of above-mentioned vision slit is for example between 7.5mm～8.5mm.
In an embodiment of the utility model, above-mentioned each air inlet port comprises: first uptake, taper perforate and at least one second uptake.Wherein first uptake is in order to supply first gas.Taper perforate position is in the gas action face and connect first uptake.Second uptake is connected with the taper perforate, in order to supply second gas.
In an embodiment of the utility model, above-mentioned at least one second uptake ring is located at around first uptake.
In an embodiment of the utility model, the central axes of the hub of above-mentioned second uptake and first uptake.
In an embodiment of the utility model, the hub of the hub of above-mentioned second uptake and first uptake has angle.
In an embodiment of the utility model, above-mentioned first uptake and sprinkler head main body are formed in one, or the mode that the first uptake utilization is spirally connected, welds or other is closely processed is connected on the sprinkler head main body.
In an embodiment of the utility model, the gas sprinkler head also can comprise that one is positioned at the central venting port of the central position of gas action face.
In an embodiment of the utility model, above-mentioned central venting port is to be made up of a plurality of venting hole.
In an embodiment of the utility model, the end of bleeding of above-mentioned central venting port is to sprinkler head main body indent.
In an embodiment of the utility model, the discharge directions of above-mentioned central venting port and the airintake direction of air inlet port are parallel to each other.
In an embodiment of the utility model, the ratio of total air inlet area of the leaving area of above-mentioned central venting port and air inlet port is less than 0.03.
In an embodiment of the utility model, above-mentioned sprinkler head main body also comprises at least one circular row gas port, and the circular row gas port is to be that the center is symmetrical arrangement with central venting port.
In an embodiment of the utility model, above-mentioned circular row gas port comprises by most venting holes and constituting.
In an embodiment of the utility model, the end of bleeding of above-mentioned circular row gas port is to sprinkler head main body indent.
In an embodiment of the utility model, the discharge directions of above-mentioned circular row gas port and the airintake direction of air inlet port are parallel to each other.
Based on above-mentioned, the gas sprinkler head of the utility model has the machining characteristics of being easy to, and it is more even that gas is mixed, and by combining air inlet and exhaust, can also let gas concentration in whole sprinkling zone, tend to consistent.
For letting the above-mentioned characteristic of the utility model can be more obviously understandable, hereinafter is special lifts embodiment, and conjunction with figs. elaborates as follows.
Please in the lump with reference to Fig. 1 and Fig. 2 A.Fig. 1 is the three-dimensional view of the gas sprinkler head that illustrated according to the utility model first embodiment.Fig. 2 A is the front view of Fig. 1.
The gas sprinkler head 100 of first embodiment comprises sprinkler head main body 102, and it has gas action face 104 and a plurality of air inlet port 106.A plurality of air inlet ports 106 mutually perpendicular first direction and second direction on the gas action face 104 are miter angle and are symmetrically distributed.Partly the position of air inlet port 106 is observed hole (viewport) and replaces, and said vision slit is with linear arrangement, and total number of air inlet port 106 is between 980～1050.The air inlet area of each air inlet port 106 is for example at 11mm
2～12mm
2Between.The spacing of air inlet port 106 and can be with identical or different along the spacing between the air inlet port 106 of second direction along the spacing between the air inlet port 106 of first direction for example between 10mm～16mm.Total air inlet area of air inlet port 106 for example account for gas action face 104 area 3%～10% between.The spacing of vision slit is for example between 20mm～22mm.The aperture of vision slit is for example between 7.5mm～8.5mm.
In first embodiment; The gas distribution grid that gas sprinkler head 100 also can be disclosed with reference to TaiWan, China patent publication No. No. 201111545 (patent name: gas distribution grid and device thereof); At this this application case is incorporated herein by reference, for your guidance.For example Fig. 2 B is along the online sectional view that illustrates of the A-A of Fig. 2 A.Please with reference to Fig. 2 B, air inlet port 106 comprises the first uptake 106a, taper perforate 106b and the second uptake 106c.The first uptake 106a for example is communicated with the first gas supply orifice, 101, the second uptake 106c and for example is communicated with the second gas supply orifice 103.The visual demand adjustment of the number of the first gas supply orifice 101 and the second gas supply orifice 103; The size of for example visual gas sprinkler head 100 is provided with the more than one first gas supply orifice 101 and the second gas supply orifice 103 on sprinkler head main body 102.
Fig. 2 C is the partial enlarged drawing of single air inlet port 106 among Fig. 2 B.Fig. 2 D is the air inlet port partial enlarged drawing of another embodiment of the present invention.Please with reference to Fig. 2 C.The first uptake 106a is in order to supply the first gas G1.Taper perforate 106b position is in gas action face 104, and connects the first uptake 106a.The second uptake 106c is connected with taper perforate 106b, in order to supply the second gas G2.Wherein second uptake 106c ring is located at around the first uptake 106a, and the hub a2 of the second uptake 106c is parallel with the hub a1 of the first uptake 106a.In another embodiment, the hub a1 of the hub a2 of the second uptake 106c and the first uptake 106a θ that also can have angle is shown in Fig. 2 D.In the aforementioned embodiment, the first uptake 106a and sprinkler head main body 102 are formed in one.In other embodiments, first uptake for example also can utilize and be spirally connected, welds or other tight processing modes are connected on the sprinkler head main body.
Fig. 2 C has also presented the first gas G1 and the second gas G2 situation through air inlet port 106.When the first gas G1 got into taper perforate 106b via the first uptake 106a, meeting was because of the zone reducing speed of sudden enlargement, and the generation diffusion phenomena.This moment, the second gas G2 got into taper perforate 106b via the second uptake 106c, produced diffusion zone too.Therefore, the first gas G1 can mix in taper perforate 106b with the second gas G2 in advance, makes gas for example can more be evenly distributed in the processing chamber, promotes reaction effect.
The sprinkler head that the gas sprinkler head of the utility model also can be disclosed for No. 100127734 with reference to the TaiWan, China number of patent application is among this incorporates this application case into this paper by reference, for your guidance.For example Fig. 3 A is the front view of the gas sprinkler head that illustrated according to the utility model second embodiment.Fig. 3 B is that the gas sprinkler applications of Fig. 3 A is in the diagrammatic cross-section of distribution device in gas-fluid.
Please with reference to Fig. 3 A, the gas sprinkler head 200 of second embodiment is to combine air inlet and deflated sprinkler head.Gas sprinkler head 200 comprises sprinkler head main body 202; It has gas action face 204 and a plurality of air inlet port 206; Wherein air inlet port 206 is that two vertical direction on the gas action face 204 are miter angle and are symmetrically distributed; Partly the position of air inlet port 206 is observed the hole replacement, and vision slit is to be arranged in a linear.Gas sprinkler head 200 also comprises central venting port 208, and it is positioned at the central position of gas action face 204.Central authorities' venting port 208 for example is made up of a plurality of venting hole 208a.Please with reference to Fig. 3 B.Distribution device in gas-fluid 300 comprises gas sprinkler head 200, chamber 302 and load bearing seat 304.Load bearing seat 304 for example is in order to bearing substrate 306.In a second embodiment, gas sprinkler head 200 is in order in vacuum and antivacuum plated film or similar technology, and gas is sprayed to substrate 306.The end 208b that bleeds of central authorities' venting port 208 for example can be designed to sprinkler head main body 202 indents, with gas of avoiding bleeding and the gas mixed flow of sending into chamber 302 through air inlet port 206.The discharge directions of central authorities' venting port 208 for example is parallel to each other with the airintake direction of air inlet port 206.In the present embodiment,, can make the gas concentration trend in the chamber 302 consistent, improve the quality of technology by the exhaust of central venting port 208 and the air inlet of air inlet port 206.If the technological reaction in the chamber 302 can produce by product, central venting port 208 also can detach by product early, and avoiding by product to be detained influences technological reaction for a long time.
Fig. 4 A is the front view of the gas sprinkler head that illustrated according to the utility model the 3rd embodiment.Fig. 4 B is that the gas sprinkler applications of the 3rd embodiment is in the diagrammatic cross-section of distribution device in gas-fluid.Please with reference to Fig. 4 A.Similar with second embodiment, the gas sprinkler head 400 of the 3rd embodiment also is to combine air inlet and deflated sprinkler head, and it comprises sprinkler head main body 402, and sprinkler head main body 402 has gas action face 404.A plurality of air inlet ports 406 and central venting port 408 are positioned on the gas action face 404; Wherein air inlet port 406 is that two vertical direction on the gas action face 404 are miter angle and are symmetrically distributed; Partly the position of air inlet port 406 is observed the hole replacement, and vision slit is to be arranged in a linear.In the 3rd embodiment, the ratio of total air inlet area of the leaving area of central venting port 408 and air inlet port 406 is less than 0.03.For balance air inlet and exhaust, gas sprinkler head 400 also comprises circular row gas port 410.Circular row gas port 410 for example is to be made up of a plurality of venting hole 410a, and for example is to be the center with central venting port 408, is symmetric mode and arranges.
Please with reference to Fig. 4 B.The end 410b that bleeds of circular row gas port 410 for example can be designed to sprinkler head main body 402 indents, with gas of avoiding bleeding and the gas mixed flow of sending into chamber 502 through air inlet port 406.The discharge directions of circular row gas port 410 for example is parallel to each other with the airintake direction of air inlet port 406.In the 3rd embodiment, distribution device in gas-fluid 500 comprises gas sprinkler head 400, chamber 502 and in order to the load bearing seat 504 of bearing substrate 506.In aforementioned each embodiment, the first gas supply orifice 101,201,401 and the second gas supply orifice 103,203,403 for example can be connected to gas supply source, with supply gas, can also connection traffic meter (not illustrating) with the pilot-gas flow.In addition, central venting port 208,408 and circular row gas port 410 also can the connection traffic meters, with the control free air delivery.
Though the utility model is described as above with embodiment; Right its is not in order to limit the utility model; Those skilled in the art are in spirit that does not break away from the utility model and scope; When can doing a little change and retouching, so the protection domain of the utility model is as the criterion when the content that the claim scope that look application is defined.
Claims (20)
1. a gas sprinkler head comprises a sprinkler head main body at least, it is characterized in that:
This sprinkler head main body has a gas action face and most air inlet ports; Those air inlet ports are to be miter angle along two vertical direction on this gas action face to be symmetrically distributed; And the total number of those air inlet ports is between 980～1050; Wherein, partly the position of those air inlet ports is replaced by a plurality of vision slits, and those vision slits are arranged in a linear.
2. gas sprinkler head as claimed in claim 1 is characterized in that, wherein respectively the air inlet area of this air inlet port at 11mm
2～12mm
2Between.
3. gas sprinkler head as claimed in claim 1 is characterized in that wherein the spacing of those air inlet ports is between 10mm～16mm.
4. gas sprinkler head as claimed in claim 1 is characterized in that, wherein total air inlet area of those air inlet ports account for this gas action face area 3%～10% between.
5. gas sprinkler head as claimed in claim 1 is characterized in that wherein the spacing of those vision slits is between 20mm～22mm.
6. gas sprinkler head as claimed in claim 1 is characterized in that wherein the aperture of vision slit is between 7.5mm～8.5mm.
7. gas sprinkler head as claimed in claim 1 is characterized in that, wherein respectively this air inlet port comprises:
First uptake of one supply, one first gas;
One taper perforate, the position is in this gas action face and connect this first uptake; And
Second uptake of at least one supply one second gas is connected with this taper perforate.
8. gas sprinkler head as claimed in claim 7 is characterized in that, wherein this at least one second uptake ring be located at this first uptake around.
9. gas sprinkler head as claimed in claim 7 is characterized in that, wherein the central axes of the hub of this second uptake and this first uptake.
10. gas sprinkler head as claimed in claim 7 is characterized in that, wherein the hub of the hub of this second uptake and this first uptake has angle.
11. gas sprinkler head as claimed in claim 7 is characterized in that, wherein this first uptake and this sprinkler head main body is formed in one or this first uptake is spirally connected or be welded on this sprinkler head main body.
12. gas sprinkler head as claimed in claim 1 is characterized in that, also comprises a central venting port of the central position that is positioned at this gas action face.
13. gas sprinkler head as claimed in claim 12 is characterized in that, wherein should be made up of most venting holes by central authorities' venting port.
14. gas sprinkler head as claimed in claim 12 is characterized in that, wherein should bleeding of central authorities' venting port hold to this sprinkler head main body indent.
15. gas sprinkler head as claimed in claim 12 is characterized in that, the discharge directions that wherein should central authorities' venting port and the airintake direction of those air inlet ports are parallel to each other.
16. gas sprinkler head as claimed in claim 12 is characterized in that, the ratio of leaving area that wherein should central authorities' venting port and total air inlet area of those air inlet ports is less than 0.03.
17. gas sprinkler head as claimed in claim 16 is characterized in that, wherein this sprinkler head main body also comprises at least one circular row gas port, and this circular row gas port is that the center is balanced configuration with this central authorities' venting port.
18. gas sprinkler head as claimed in claim 17 is characterized in that, wherein this circular row gas port comprises by most venting holes and constituting.
19. gas sprinkler head as claimed in claim 17 is characterized in that, wherein the end of bleeding of this circular row gas port is to this sprinkler head main body indent.
20. gas sprinkler head as claimed in claim 17 is characterized in that wherein the airintake direction of the discharge directions of this circular row gas port and those air inlet ports is parallel to each other.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100224937 | 2011-12-29 | ||
| TW100224937U TWM430479U (en) | 2011-12-29 | 2011-12-29 | Gas showerhead |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202610322U true CN202610322U (en) | 2012-12-19 |
Family
ID=46722314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220174122 Expired - Lifetime CN202610322U (en) | 2011-12-29 | 2012-04-23 | Gas spraying head |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN202610322U (en) |
| TW (1) | TWM430479U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103789747B (en) * | 2012-10-26 | 2016-03-09 | 中微半导体设备(上海)有限公司 | A kind of gas spray and make the method for this gas spray |
| TWI480417B (en) | 2012-11-02 | 2015-04-11 | Ind Tech Res Inst | Air showr device having air curtain and apparatus for depositing film using the same |
-
2011
- 2011-12-29 TW TW100224937U patent/TWM430479U/en not_active IP Right Cessation
-
2012
- 2012-04-23 CN CN 201220174122 patent/CN202610322U/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| TWM430479U (en) | 2012-06-01 |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121219 |