CN202564198U - Bare chip supply device - Google Patents
Bare chip supply device Download PDFInfo
- Publication number
- CN202564198U CN202564198U CN2012200420273U CN201220042027U CN202564198U CN 202564198 U CN202564198 U CN 202564198U CN 2012200420273 U CN2012200420273 U CN 2012200420273U CN 201220042027 U CN201220042027 U CN 201220042027U CN 202564198 U CN202564198 U CN 202564198U
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- Prior art keywords
- jack
- tube
- nude film
- cutting blade
- vacuum pressure
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- 230000007246 mechanism Effects 0.000 claims abstract description 70
- 230000009471 action Effects 0.000 claims abstract description 15
- 238000009434 installation Methods 0.000 claims description 58
- 238000001179 sorption measurement Methods 0.000 claims description 23
- 239000000853 adhesive Substances 0.000 claims description 12
- 230000001070 adhesive effect Effects 0.000 claims description 12
- 230000000630 rising effect Effects 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 230000008676 import Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000005755 formation reaction Methods 0.000 description 15
- 230000008859 change Effects 0.000 description 9
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
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Abstract
The utility model provides a bare chip supply device, simplifying the exchange work of a jacking tank arranged on a tank mounting unit of a jacking mechanism. The bare chip supply device is constructed to exchangeably and clampingly maintain a jacking tank (27) at a tank mounting unit (55) of a jacking mechanism (18) through a clamping mechanism (49); a connector unit of a vacuum pressure ingress pipe is arranged downward at the lower part of the jacking tank (27); the vacuum pressure ingress pipe ingresses the vacuum pressure for adsorbing a cutting disc into the jacking tank (27) when the vacuum pressure ingress pipe performs the jacking action; the tank mounting unit (55) of the jacking mechanism (18) is provided with a vacuum pressure supply port unit (57) which is used for connecting the connector unit of a vacuum pressure ingress pipe of the jacking tank (27); and when the jacking tank (27) is clampingly maintained at the tank mounting unit (55), the clamping position of the jacking tank (27) is positioned by connecting the connector unit of the vacuum pressure ingress pipe of the jacking tank (27) with the vacuum pressure supply port unit (57).
Description
Technical field
The utility model relates to a kind of nude film feedway, and it utilizes the jack-up tube to be pasted with and cuts into the below jack-up of the telescopic cutting blade of tessellated wafer from this cutting blade, the nude film that utilizes adsorption mouth absorption to be partitioned into from the wafer on this cutting blade.
Background technology
Existing nude film feedway such as patent documentation 1 (TOHKEMY 2010-129949 communique) record; Utilizing adsorption mouth absorption when being pasted with the nude film that is partitioned into from wafer on the telescopic cutting blade that cuts into tessellated wafer and pick up; Utilize the jack-up tube with the jack-up under this adhesive portion of the adhesive portion that is pasted with the nude film that will adsorb in the cutting blade; The adhesive portion of this nude film is peeled off from cutting blade partly; Simultaneously, utilize this nude film of adsorption mouth absorption and pick up from cutting blade.
And then; In patent documentation 1; In order to select the jack-up tube according to the size of the nude film on the cutting blade etc.; On jacking mechanism, be four kinds of jack-up tubes of radial installation with 90 degree spacings, make in four kinds of jack-up tubes with cutting blade on the jack-up tube that conforms to of the size etc. of nude film rotate to position up, utilize this jack-up tube jack-up cutting blade.
Patent documentation 1: TOHKEMY 2010-129949 communique
But; In the formation of above-mentioned patent documentation 1; From be installed on jacking mechanism 4 the tube installation portion four kinds of jack-up tubes in; Select with cutting blade on the jack-up tube that is consistent of the size etc. of nude film and use, but under the situation of the jack-up tube that in four kinds of jack-up tubes, is not consistent with the size of nude film etc., need pull down 4 places that are installed on jacking mechanism an installation portion some jack-up tubes and be replaced by the jack-up tube that is consistent with the size of nude film etc.
But in the formation of above-mentioned patent documentation 1, because the jack-up tube will be installed on the tube installation portion of jacking mechanism through bolt, therefore, the replacing operation of jack-up tube becomes time-consuming operation of taking a lot of work.
The utility model content
So the problem that the utility model is wanted to solve provides a kind of nude film feedway, it can make the replacing operation of the jack-up tube of the tube installation portion that is installed on jacking mechanism oversimplify.
In order to solve above-mentioned problem; The utility model of first aspect provides a kind of nude film feedway; The adsorption mouth of the nude film that it jacking mechanism, absorption that possesses the jack-up tube knee-action that makes the wafer pallet that is pasted with the telescopic cutting blade that cuts into tessellated wafer and spreads out, makes the below that is disposed at said cutting blade is partitioned into from the wafer on the said cutting blade; When adsorbing the nude film on the said cutting blade by said adsorption mouth and picking up; Utilize said jack-up tube with the jack-up under this adhesive portion of the adhesive portion that is pasted with the nude film that will adsorb in the said cutting blade, and the adhesive portion of this nude film is peeled off from cutting blade partly, simultaneously; Utilize said adsorption mouth this nude film of absorption and pick up from said cutting blade; Wherein, said jack-up tube for through the engaging unit can engaging the formation of the tube installation portion that remains in said jacking mechanism with the mode that other jack-up tubes are changed, in the bottom of said jack-up tube towards the connection oral area that has the vacuum pressure ingress pipe; Said vacuum pressure ingress pipe upper surface to said jack-up tube when carrying out the jack-up action imports the vacuum pressure that is used to adsorb said cutting blade; And, be provided with the vacuum pressure that oral area connects that is connected of the vacuum pressure ingress pipe of said jack-up tube at the tube installation portion of said jacking mechanism and supply with oral area, when making said jack-up tube engaging remain in this installation portion; The connection oral area of the vacuum pressure ingress pipe through making this jack-up tube is supplied with oral area with said vacuum pressure and is connected, and the clamped position of this jack-up tube is positioned.
In the utility model; Owing to through the engaging unit jack-up tube is engaged the tube installation portion that remains in jacking mechanism, therefore, can pull down the jack-up tube from the tube installation portion of jacking mechanism simply; And; When making the engaging of other jack-up tubes remain in the tube installation portion of jacking mechanism, the connection oral area of the vacuum pressure ingress pipe through making this jack-up tube is connected with the vacuum pressure supply oral area of tube installation portion, can be simply the clamped position of this jack-up tube be positioned; This jack-up tube is engaged simply remain in an installation portion, and can carry out the replacing operation of jack-up tube simply.
In this case, preferably, like second aspect; The jack-up tube is made up of base component and tube main body; Said tube main body is can be assembled on this base component by the state of application of force unit to the top application of force up or down, and said base component is located in said engaging unit, and; Be provided with retainer in said tube main body; This retainer is used for carrying out the jack-up action at said jack-up tube the time makes the rising of this main body stop at upper surface and the said cutting blade position contacting of this main body, the retainer of said jacking mechanism said tube main body when said jack-up tube carries out the jack-up action and fixed wall butt and after the rising of this main body is stopped, also making said installation portion rising ormal weight; Make the jack-up pin of being located in this main body outstanding to the top thus, the said cutting blade of jack-up from the hole of the upper surface of this main body.
In this constitutes, can make the base component engaging of jack-up tube remain in the tube installation portion of jacking mechanism, and can make by the tube main body of application of force unit and can be supported on up or down on this base component to the top application of force.Thus; When the jack-up tube carries out the jack-up action; Can carry out the jack-up action of following jack-up pin: after the rising of this main body stops at the upper surface and cutting blade position contacting of a main body; An installation portion is risen, the jack-up pin in the main body is given prominence to and the jack-up cutting blade to the top from the hole of the upper surface of this main body.
The utility model also can be provided with said engaging unit, many places at the jack-up tube; But like the third aspect; Be preferably following formation: a place only is set on the jack-up tube states the engaging unit, be provided with charge and discharge operations portion in this engaging unit, this charge and discharge operations portion switches clamped position and removes the position with engaging.In view of the above, the operator just can change the jack-up tube through once-through operation.
The utility model of first～third aspect as described above; Can the quantity of the tube installation portion that is arranged at jacking mechanism only be made as 1; Perhaps; Like fourth aspect, also can be following formation: be provided with a plurality of installation portions at jacking mechanism, the nude film feedway possesses a travel mechanism; This travel mechanism moves the position of stating a plurality of installation portions, and the size or the corresponding jack-up tube of kind of nude film with on the cutting blade that makes engaging remain in a plurality of jack-up tubes of said a plurality of installation portions is positioned at the jack-up operating position.In view of the above, remain in a plurality of jack-up tubes of a plurality of installation portions of jacking mechanism,, then need not to change the jack-up tube, therefore, can reduce the number of times of the replacing operation of jack-up tube if there are the corresponding jack-up tubes such as size with nude film in engaging.
Description of drawings
Fig. 1 is the stereogram of the nude film feedway of the utility model one embodiment:
Fig. 2 is the stereogram that is provided with the component-mounting machine of nude film feedway;
Fig. 3 is the stereogram of jacking mechanism part;
Fig. 4 (a) and (b) are amplification stereograms of two kinds of different jack-up tubes of diameter;
Fig. 5 pulls down the amplification stereogram that the jack-up tube is represented from the tube installation portion of jacking mechanism;
Fig. 6 (a) is that the tube installation portion at jacking mechanism is provided with the amplification stereogram that jack-up tube and clamping bar are positioned at the state of non-clamping position, (b) is the front view of this figure;
Fig. 7 (a) is that the tube installation portion at jacking mechanism is provided with the amplification stereogram that jack-up tube and clamping bar are positioned at the state of clamped position, (b) is the front view of this figure;
Fig. 8 is the exploded view of clamp system.
Label declaration
11 ... The nude film feedway; 12 ... The feed bin maintaining part; 13 ... Supporting plate is pulled out platform; 14 ... The supporting plate exhaustion mechanism; 15 ... Auxiliary manipulator; 15a ... Adsorption mouth; 16 ... The mechanism of shuttling back and forth; 17 ... Switching mechanism; 18 ... Jacking mechanism; 19 ... NG (bad) conveyer belt; 20 ... The mouth changer; 21 ... Nude film; 22 ... The wafer supporting plate; 23 ... The wafer mounting panel; 24 ... Camera; 25 ... Component-mounting machine; 26 ... Mouth shuttles back and forth; 27 ... The jack-up tube; 28 ... The supporting plate main body; 32 ... Control device; 37 ... Fixed wall; 41 ... Base component; 42 ... Sliding axle; 43 ... The tube main body; 45 ... Retainer; 47 ... The vacuum pressure ingress pipe; 49 ... Clamp system (engaging unit); 50 ... Clamp shaft; 51 ... Engagement pin; 52 ... Clamping bar (dismounting operating portion); 53 ... Disk spring washer (application of force unit); 55 ... The tube installation portion; 56 ... Tube rotating mechanism (tube travel mechanism); 57 ... Vacuum pressure is supplied with oral area; 58 ... Alignment pin; 60 ... Holes for clamping; 61 ... Make a concession groove
Embodiment
Below, the embodiment that the mode that will be used to implement the utility model is specialized describes.
As shown in Figure 1, the nude film feedway of present embodiment 11 is pulled out the formation of platform 13, supporting plate exhaustion mechanism 14, auxiliary manipulator 15, the mechanism 16 of shuttling back and forth, switching mechanism 17, jacking mechanism 18 (with reference to Fig. 3), NG conveyer belt 19, mouth changer 20 etc. for possessing feed bin maintaining part 12 (pallet tower), supporting plate.As shown in Figure 2, this nude film feedway 11 is set to that supporting plate is pulled out the feed appliance that platform 13 inserts component-mounting machines 25 state with groove is set.
In the feed bin in the feed bin maintaining part 12 that can be accommodated in nude film feedway 11 up or down, can divide multistage to mix lift-launch and carry the wafer supporting plate 22 that is equipped with nude film 21 and carry the pallet supporting plate (not shown) that is equipped with trays of parts.Wafer supporting plate 22 becomes following formation: will be pasted with the telescopic cutting blade (not shown) that cuts into tessellated wafer (a plurality of nude film 21) and under the state that launches, be installed on the wafer mounting panel 23 with circular peristome, and utilize screw clamp etc. that this wafer mounting panel 23 is installed on the supporting plate main body 28.In addition, the expansion of cutting blade can be carried out through any means, for example, cutting blade is installed on wafer mounting panel 23 from the below with the state that utilizes circular rings to push up up gets final product.
Supporting plate exhaustion mechanism 14 is for pulling out mechanism that platform 13 pull out from the feed bins in the feed bin maintaining part 12 to supporting plate with any supporting plate of wafer supporting plate 22, pallet supporting plate, and it constitutes and can pick up the position (below be called " component-mounting machine is used the pull-out location ") of part or nude film on the supporting plate and pull out supporting plate near any position of the pull-out location of feed bin (below be called " auxiliary manipulator is used the pull-out location ") the adsorption mouth of utilizing component-mounting machine 25 (with reference to Fig. 2) (not shown).Component-mounting machine uses the pull-out location to pull out the position (apart from feed bin position farthest) of the front end of platform 13 as supporting plate, and auxiliary manipulator uses the position of pull-out location for the nude film 21 on the cutting blade of adsorption mouth (not shown) the absorption wafer supporting plate 22 that can utilize auxiliary manipulator 15.
Shuttling back and forth, mechanism 16 receives the part that the adsorption mouth of utilizing auxiliary manipulator 15 picks up through the mouth 26 of shuttling back and forth and the adsorption mouth of utilizing component-mounting machine 25 is transferred to the position that can pick up.
Jacking mechanism 18 (with reference to Fig. 3) is arranged at supporting plate and pulls out platform 13, and constitutes and can move along XY direction (supporting plate is pulled out the Width and the vertical direction thereof of platform 13) at the area of space below the cutting blade of wafer supporting plate 22.And; Wafer supporting plate 22 is pulled out to component-mounting machine with pull-out location and the situation of auxiliary manipulator with arbitrary position of pull-out location under; Adhesive portion through utilizing the nude film 21 that jack-up tube 27 will pick up being pasted with in the cutting blade is jack-up partly from its below; The adhesive portion of this nude film 21 is peeled off from cutting blade partly, made nude film 21 come-ups become the state that is easy to pick up.Jacking mechanism 18 constitutes; In order to select jack-up tube 27 according to the size and the kind of nude film 21; Multiple (for example four kinds) jack-up tube 27 is set to radial with predetermined angular spacing (in the present embodiment with 90 ° of spacings), jack-up tube 27 rotations of carrying out the jack-up action are until the position that becomes up.Formation and installation method to jack-up tube 27 detail in the back.
Jacking mechanism 18 constitutes servomotor (not shown) is moved up and down as drive source and jacking mechanism 18 integral body.When the nude film picking action; If jacking mechanism 18 rises and the upper end of jack-up tube 27 contacts with the cutting blade of wafer supporting plate 22; Then be arranged at the retainer 45 and fixed wall 37 (with reference to Fig. 3) butt of this jack-up tube 27 in this position, the rising of jack-up tube 27 stops, and then if proceed vertical motion; Then jack-up pin (not shown) is outstanding to the top from the hole of the upper surface of jack-up tube 27, the adhesive portion of the nude film 21 that being pasted with in the jack-up cutting blade will be adsorbed (adsorption site of adsorption mouth).Under this situation,, can adjust the jack-up height of jack-up pin through the rotation amount of adjustment as the servomotor of drive source.
In addition, NG conveyer belt 19 is the conveyer belts of discharging bad part and adsorbing bad nude film 21.
(1) situation of small die 21
Under the situation of small die 21; Nude film 21 is comparatively difficult to the extracting exchange of the adsorption mouth of the auxiliary manipulator 15 → mouth 26 → component-mounting machine 25 that shuttles back and forth; Therefore; Pull out wafer supporting plate 22 to component-mounting machine with the pull-out location from feed bin maintaining part 12, and utilize the adsorption mouth of component-mounting machine 25 directly to pick up the nude film 21 on the cutting blade of this wafer supporting plate 22.
(2) situation of the nude film 21 of the size except that above-mentioned
Under the situation of nude film 21 with the size that can grasp exchange nude film 21; To shorten the set-up time is purpose; Feed bin in feed bin maintaining part 12 is pulled out wafer supporting plate 22 to auxiliary manipulator with the pull-out location; Utilize the adsorption mouth of auxiliary manipulator 15 to pick up the nude film 21 on the cutting blade of this wafer supporting plate 22; And the mouth 26 that shuttles back and forth that utilizes the mechanism 16 of shuttling back and forth receives these nude films 21 and is transferred to the take-off location of regulation, and at this take-off location, the adsorption mouth of utilizing component-mounting machine 25 is picked up nude film 21 from the mouth 26 that shuttles back and forth of the mechanism 16 of shuttling back and forth.
(3) situation of trays of parts
Under the situation of trays of parts, the feed bin in feed bin maintaining part 12 is pulled out the pallet supporting plate to component-mounting machine with the pull-out location, and utilizes the adsorption mouth of component-mounting machine 25 directly to pick up the trays of parts on this pallet supporting plate.
Then, use Fig. 3 to Fig. 8 that the formation and the installation method of jack-up tube 27 are described.
Jack-up tube 27 can be assembled in tube main body 43 formations on this base component 41 up or down by base component 41 with via a plurality of (for example 2) sliding axle 42; Be fixed with a main body 43 in the upper end of each sliding axle 42; Each sliding axle 42 is set at application of force unit such as spring in the spring case 44 of base component 41 to the top application of force; Thus, tube main body 43 quilts are to the top application of force.
Be provided with retainer 45 in tube main body 43; This retainer 45 is used for carrying out the jack-up action at jack-up tube 27 time makes the rising of this main body 43 stop at the upper surface and the cutting blade position contacting of this main body 43; When jack-up tube 27 carries out the jack-up action; The retainer 45 of tube main body 43 makes the rising of this main body 43 stop with fixed wall 37 (with reference to Fig. 3) butt after; Also make base component 41 rising ormal weights, make the jack-up pin (not shown) that is arranged in this main body 43 give prominence to ormal weight, jack-up cutting blade to the top thus from the hole of the upper surface of this main body 43.
In addition; On tube main body 43; Mode with outstanding downwards is provided with vacuum pressure ingress pipe 47 [with reference to Fig. 6 (b), Fig. 7 (b)]; This vacuum pressure ingress pipe 47 upper surface to tube main body 43 when carrying out the jack-up action imports the vacuum pressure that is used to adsorb cutting blade, and the connection oral area of this vacuum pressure ingress pipe 47 connects base component 41 and outstanding downwards.
On the other hand; Connects along the vertical direction as the clamp shaft 50 of clamp system 49 of engaging unit and also can rotate and can be supported on base component 41 up or down; Connect in the bottom of this clamp shaft 50 and to be fixed with engagement pin 51 (with reference to Fig. 8), the both ends of this engagement pin 51 are two side-prominent to clamp shaft 50.Be fixed with clamping bar 52 (dismounting operating portion) in the upper end of this clamp shaft 50; Embed a plurality of disk spring washers 53 (application of force unit) between clamping bar 52 in this clamp shaft 50 and the base component 41, the elastic force through this disk spring washer 53 to clamp shaft 50 to the top application of force.This clamp system 49 only is arranged on a place of base component 41.
Jack-up tube 27 like above-mentioned formation is as shown in Figure 4, prepares multiple jack-up tube 27 selecting according to the size and the kind of the nude film of wanting jack-up 21.In each jack-up tube 27; The differences such as diameter/number of the diameter of tube main body 43 and inner jack-up pin thereof only, part in addition (supporting construction of the connection oral area of base component 41, clamp system 49, vacuum pressure ingress pipe 47, tube main body 43 etc.) is carried out generalization.
On the other hand; On jacking mechanism 18; Be provided with a plurality of (for example 4) tube installation portion 55 that is used to install a plurality of (for example 4) jack-up tube 27 with predetermined angular spacing (for example 90 ° of spacings), move with the predetermined angular spacing along direction of rotation through tube rotating mechanism 56 (tube travel mechanism) position of each installation portion 55.
On each installation portion 55, be provided with the vacuum pressure that oral area connects that is connected of the vacuum pressure ingress pipe 47 of jack-up tube 27 with the position relation of regulation and supply with oral area 57 and alignment pin 58.When making jack-up tube 27 engaging remain in a tin installation portion 55; The connection oral area of the vacuum pressure ingress pipe 47 through making this jack-up tube 27 is supplied with oral area 57 with vacuum pressure and is connected; And make the location hole (not shown) of the lower surface portion that is formed at base component 41 and alignment pin 58 chimeric, and the clamped position of this jack-up tube 27 is positioned.
In addition; On tube installation portion 55; Be formed with and supply clamp shaft 50 to insert logical holes for clamping 60 from the top, be formed with along the vertical direction in the inner peripheral surface portion of this holes for clamping 60 and make a concession groove 61, this yieldings groove 61 is used to supply to insert engagement pin 51 yieldings of bottom of the clamp shaft 50 of logical holes for clamping 60.Shown in Fig. 6 (b), Fig. 7 (b); Peripheral part of the lower ending opening edge of the holes for clamping 60 in the lower surface of tube installation portion 55 is formed with inclined plane 62, and this inclined plane 62 is with from making a concession the mode channeling conduct of decline gradually of moving of engagement pin 51 accompanying rotation directions that groove 61 extracts downwards.
Under the state of non-clamping position as shown in Figure 6 (engaging remove position) rotating operation clamping bar 52, the engagement pin 51 of the bottom of clamp shaft 50 be positioned at make a concession groove 61 under, become the state that clamp shaft 50 is extracted out from holes for clamping 60.
From non-clamping position as shown in Figure 6 under the state of clamped position as shown in Figure 7 (clamped position) rotating operation clamping bar 52; The engagement pin 51 of the bottom of clamp shaft 50 from make a concession groove 61 under the position move to the direction of crossing inclined plane 62; Become the state of the lower surface that is sticked in an installation portion 55, this state keeps through the elastic force of disk spring washer 53.
The job step of then, the jack-up tube 27 that will be installed on an installation portion 55 being replaced by other jack-up tubes 27 describes.
Under the situation of pulling down the jack-up tube 27 that is installed on an installation portion 55, at first, utilize operator's finger tip to make clamping bar 52 turn to non-clamping position as shown in Figure 6 from clamped position as shown in Figure 7.Thus, the engagement pin 51 of the bottom of clamp shaft 50 is positioned at make a concession groove 61 under, become the state that can extract clamp shafts 50 from holes for clamping 60 out; Therefore; If directly to directly over promote jack-up tube 27, then clamp shaft 50 is extracted out from holes for clamping 60, jack-up tube 27 is pulled down from tube installation portion 55.
Afterwards, the jack-up tube 27 that will change is installed on an installation portion 55 according to following mode.At first; Turn under the state of non-clamping position as shown in Figure 6 at the clamping bar 52 that makes the jack-up tube 27 that to change; The connection oral area of the vacuum pressure ingress pipe 47 of jack-up tube 27 is connected with vacuum pressure supply oral area 57, and makes the location hole (not shown) of the lower surface portion that is formed at base component 41 and alignment pin 58 chimeric, thus; Clamped position to this jack-up tube 27 positions on one side; One side makes the engagement pin 51 of the bottom of clamp shaft 50 insert the yielding groove 61 of the holes for clamping 60 of tube installation portions 55, makes this clamp shaft 50 insert logical holes for clamping 60, the state (state as shown in Figure 6) that formation is extracted this engagement pin 51 downwards out from yielding groove 61.Under this state, utilize operator's finger tip to make clamping bar 52 turn to clamped position as shown in Figure 7 from non-clamping position shown in Figure 6.Thus; Become clamp shaft 50 the bottom engagement pin 51 from make a concession groove 61 under the position move and be sticked in the state of the lower surface of an installation portion 55 to the direction of crossing inclined plane 62; This state keeps through the elastic force of disk spring washer 53, thereby becomes the state that 27 engagings of jack-up tube remain in an installation portion 55.
Present embodiment according to above explanation; Owing to 27 engagings of jack-up tube are remained in the tube installation portion 55 of jacking mechanism 18 through clamp system 49; So can pull down jack-up tube 27 from the tube installation portion 55 of jacking mechanism 18 simply; And, when making 27 engagings of other jack-up tubes remain in the tube installation portion 55 of jacking mechanism 18, position through the connection oral area of the vacuum pressure ingress pipe 47 of this jack-up tube 27 and the vacuum pressure supply oral area 57 of tube installation portion 55 being connected to come simply clamped position to this jack-up tube 27; Can make these jack-up tube 27 engagings remain in an installation portion 55 simply, and can carry out the replacing operation of jack-up tube 27 simply.
And, in the present embodiment,, therefore, have the operator just can change jack-up tube 27 through once-through operation advantage owing to only be provided with clamp system 49 at a place of the base component 41 of jack-up tube 27.But the utility model also can constitute in the many places of the base component 41 of jack-up tube 27 and be provided with clamp system 49.In addition, also can suitably change the formation of clamp system 49 (engaging unit).
And then; In the present embodiment, be provided with a plurality of installation portions 55, the position of a plurality of installation portions 55 moved through tube rotating mechanism 56 at jacking mechanism 18; The size or the corresponding jack-up tube 27 of kind of nude film 21 with on the cutting blade that feasible engaging remains in a plurality of jack-up tubes 27 of a plurality of installation portions 55 is positioned at the jack-up operating position; Therefore, there is following advantage: remain in a plurality of jack-up tubes 27 of a plurality of installation portions 55 of jacking mechanism 18 in engaging, if there are the corresponding jack-up tubes 27 such as size with nude film 21; Then need not to change jack-up tube 27, can reduce the number of times of the replacing operation of jack-up tube 27.
But the utility model can only be made as one with the quantity of the tube installation portion 55 that is arranged at jacking mechanism 18.
In addition, certainly, the utility model also can suitably change the formation of nude film feedway 11 etc., in the scope that does not break away from aim, can carry out various changes and implements.
Claims (4)
1. nude film feedway; The adsorption mouth of the nude film that it jacking mechanism, absorption that possesses the jack-up tube knee-action that makes the wafer pallet that is pasted with the telescopic cutting blade that cuts into tessellated wafer and spreads out, makes the below that is disposed at said cutting blade is partitioned into from the wafer on the said cutting blade; When adsorbing the nude film on the said cutting blade by said adsorption mouth and picking up; Utilize said jack-up tube with the jack-up under this adhesive portion of the adhesive portion that is pasted with the nude film that will adsorb in the said cutting blade; And the adhesive portion of this nude film is peeled off from cutting blade partly, simultaneously, utilize said adsorption mouth this nude film of absorption and pick up from said cutting blade; It is characterized in that
Said jack-up tube through the engaging unit can engaging the tube installation portion that remains in said jacking mechanism with the mode that other jack-up tubes are changed,
Be provided with the connection oral area of vacuum pressure ingress pipe in the bottom of said jack-up tube, said vacuum pressure ingress pipe upper surface to said jack-up tube when carrying out the jack-up action imports the vacuum pressure that is used to adsorb said cutting blade,
Be provided with the vacuum pressure that oral area connects that is connected of the vacuum pressure ingress pipe of said jack-up tube at the tube installation portion of said jacking mechanism and supply with oral area; When making said jack-up tube engaging remain in this installation portion; The connection oral area of the vacuum pressure ingress pipe through making this jack-up tube is supplied with oral area with said vacuum pressure and is connected, and the clamped position of this jack-up tube is positioned.
2. nude film feedway as claimed in claim 1 is characterized in that,
Said jack-up tube is made up of a base component and a tube main body, and said tube main body to be can being assembled on this base component by the state of application of force unit to the top application of force up or down,
Said base component is located in said engaging unit,
Be provided with retainer in said tube main body, this retainer is used for when said jack-up tube carries out the jack-up action, making the rising of this main body to stop at the upper surface and the said cutting blade position contacting of this main body,
Said jacking mechanism carries out retainer and the fixed wall butt of jack-up said tube of when action main body and after the rising of this main body is stopped at said jack-up tube; Also make said tube installation portion rising ormal weight; Make the jack-up pin of being located in this main body outstanding to the top thus, the said cutting blade of jack-up from the hole of the upper surface of this main body.
3. according to claim 1 or claim 2 nude film feedway is characterized in that,
Said engaging unit only is provided with a place on said jack-up tube,
Be provided with charge and discharge operations portion in said engaging unit, this charge and discharge operations portion switches clamped position and removes the position with engaging.
4. like each described nude film feedway in the claim 1～3, it is characterized in that,
Be provided with a plurality of installation portions at said jacking mechanism,
Said nude film feedway possesses a travel mechanism; This travel mechanism moves the position of said a plurality of installation portions, and the size or the corresponding jack-up tube of kind of nude film with on the said cutting blade that makes engaging remain in a plurality of jack-up tubes of said a plurality of installation portions is positioned at the jack-up operating position.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011026790A JP5825706B2 (en) | 2011-02-10 | 2011-02-10 | Die supply device |
| JP2011-026790 | 2011-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202564198U true CN202564198U (en) | 2012-11-28 |
Family
ID=46973234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200420273U Expired - Lifetime CN202564198U (en) | 2011-02-10 | 2012-02-09 | Bare chip supply device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5825706B2 (en) |
| CN (1) | CN202564198U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104871659A (en) * | 2012-12-20 | 2015-08-26 | 富士机械制造株式会社 | Die supply device |
| CN105555117A (en) * | 2015-12-14 | 2016-05-04 | 苏州索力旺新能源科技有限公司 | Conductive sheet feeding device for terminal box production |
| CN116713837A (en) * | 2023-08-09 | 2023-09-08 | 江苏京创先进电子科技有限公司 | Wafer carrying table and wafer thinning machine |
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| JP6049221B2 (en) * | 2012-11-27 | 2016-12-21 | 富士機械製造株式会社 | Die supply device |
| JP6101361B2 (en) * | 2013-10-21 | 2017-03-22 | 富士機械製造株式会社 | Pickup device and push-up pot |
| CN104370110A (en) * | 2014-11-18 | 2015-02-25 | 苏州赛腾精密电子有限公司 | Automatic tiny material taking mechanism |
| JP6710138B2 (en) * | 2016-10-07 | 2020-06-17 | 株式会社ディスコ | Frame fixing jig |
| JP6994964B2 (en) * | 2018-01-29 | 2022-01-14 | 日立Astemo株式会社 | Buffer |
| KR20230158099A (en) | 2021-05-17 | 2023-11-17 | 야마하하쓰도키 가부시키가이샤 | Component lifting device and component mounting device |
| CN114929005B (en) * | 2022-05-27 | 2023-08-11 | 宁波复洋光电有限公司 | Auxiliary device convenient to four-color patch is installed |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3245961B2 (en) * | 1992-05-21 | 2002-01-15 | ソニー株式会社 | Chip pushing device |
| JP3817894B2 (en) * | 1998-04-06 | 2006-09-06 | 三菱電機株式会社 | Chip push-up device and die bonding device using the same |
| JP2003264203A (en) * | 2002-03-11 | 2003-09-19 | Hitachi Ltd | Manufacturing method of semiconductor device |
| JP4987400B2 (en) * | 2006-09-14 | 2012-07-25 | 芝浦メカトロニクス株式会社 | Semiconductor chip push-up device |
| JP4333769B2 (en) * | 2007-04-09 | 2009-09-16 | パナソニック株式会社 | Chip mounting apparatus and method for replacing peeling promoting head in chip mounting apparatus |
| JP2010045296A (en) * | 2008-08-18 | 2010-02-25 | Ueno Seiki Kk | Upthrust stage of upthrust device |
| JP2010129949A (en) * | 2008-12-01 | 2010-06-10 | Fuji Mach Mfg Co Ltd | Component supply apparatus |
-
2011
- 2011-02-10 JP JP2011026790A patent/JP5825706B2/en active Active
-
2012
- 2012-02-09 CN CN2012200420273U patent/CN202564198U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104871659A (en) * | 2012-12-20 | 2015-08-26 | 富士机械制造株式会社 | Die supply device |
| CN104871659B (en) * | 2012-12-20 | 2017-10-03 | 富士机械制造株式会社 | Nude film feedway |
| CN105555117A (en) * | 2015-12-14 | 2016-05-04 | 苏州索力旺新能源科技有限公司 | Conductive sheet feeding device for terminal box production |
| CN116713837A (en) * | 2023-08-09 | 2023-09-08 | 江苏京创先进电子科技有限公司 | Wafer carrying table and wafer thinning machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5825706B2 (en) | 2015-12-02 |
| JP2012169321A (en) | 2012-09-06 |
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Address after: Aichi Japan vertical city Patentee after: Fuji Corporation Address before: Aichi Japan vertical city Patentee before: Fuji Machinery Manufacturing Co., Ltd. |
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