CN202487547U - Wet silicon wafer automatic separation device - Google Patents
Wet silicon wafer automatic separation device Download PDFInfo
- Publication number
- CN202487547U CN202487547U CN2012201194161U CN201220119416U CN202487547U CN 202487547 U CN202487547 U CN 202487547U CN 2012201194161 U CN2012201194161 U CN 2012201194161U CN 201220119416 U CN201220119416 U CN 201220119416U CN 202487547 U CN202487547 U CN 202487547U
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- silicon chip
- sucker
- control module
- basket
- silicon wafer
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Abstract
A wet silicon wafer automatic separation device comprises a water tank. A silicon wafer basket and an elevator mechanism are arranged in the water tank, wherein a silicon wafer is obliquely placed in the silicon wafer basket and the elevator mechanism is driven by a first motor. The front side and the rear side of the top of the silicon wafer basket are respectively provided with a guard plate and the guard plates are provided with through holes. The through holes are connected with a first gas generator or a first hydraulic device. A sucker in parallel with the silicon wafer is arranged above the silicon wafer basket and the sucker is provided with a plurality of sucking nozzles. A contact stylus capable of moving upward and downward penetrates through the sucking nozzles. The contact stylus is connected with a control module. The bottom of the silicon wafer basket is provided with a pinhole and the contact stylus can penetrate through the pinhole. The sucker is arranged on a guide rail in sliding mode through a support. A cylinder drives the support to slide on the guide rail. A roller flushed with the top of the silicon wafer basket is arranged in the water tank. A second motor drives the roller to rotate and the direction of rotation of the roller is opposite to the direction of motion of the sucker on the guide rail after the sucker sticks to the silicon wafer. The wet silicon wafer automatic separation device has the advantages of achieving automatic separation of wet silicon wafers, improving separation efficiency, and reducing fragment rate of silicon wafers.
Description
Technical field
The utility model belongs to photovoltaic or semiconductor applications, and a kind of wet silicon chip auto plate separation device is provided.
Background technology
At photovoltaic or semiconductor applications; It is to adopt multi-line cutting process mostly that silico briquette is processed into silicon chip; Because this technology is to adopt steel wire to drive silicon carbide abrasive to cut,, must could these mortars be removed through cleaning so after cutting is accomplished, can adhere to a lot of mortars on the silicon chip.Between cleaning, need earlier these silicon chips to be handled through simple, such as come unstuck, impurity such as hank knotting that silicon chip surface is removed in prerinse and mortar, again silicon chip is inserted the silicon chip basket at last, adopt acid solution, alkali lye that silicon chip is carried out ultrasonic cleaning.At present, the enterprise that produces silicon chip mostly adopts the manual mode burst, then silicon chip is inserted the silicon chip basket one by one; Because more residual mortars of meeting between the silicon chip; Add the active force of water, what can adsorb between the silicon chip is very tight, and the manual mode burst is because firmly uneven; Therefore be easy to silicon chip is broken into pieces, burst efficient is also lower.
The utility model content
The purpose of the utility model is to provide a kind of wet silicon chip auto plate separation device, is used for solving high, the inefficient problem of burst of fragment rate that prior art manual mode burst causes.
In order to solve the problems of the technologies described above; The utility model provides a kind of wet silicon chip auto plate separation device; Comprise that one is equipped with the water tank of water, be provided with the elevating mechanism that a silicon chip basket and is positioned at said silicon chip basket one side in the said water tank, said silicon chip basket is used to tilt the silicon chip of the some range upon range of settings of placement; Said elevating mechanism and one is located at the first outer motor of said water tank and is connected; Said first motor is connected with a control module, and said elevating mechanism makes that by said first motor-driven silicon chip in the vertical direction in the said silicon chip basket moves down; Both sides are respectively equipped with a backplate before and after the said silicon chip basket top; Said two backplates are oppositely arranged; Offer some through holes on the said backplate; Said through hole is connected with one first gas generating unit or one first hydraulic devices, and said first gas generating unit or one first hydraulic devices are connected with said control module;
Said silicon chip basket top is provided with the sucker that laterally arranges with silicon chip; Said sucker is provided with some suction nozzles; Be equipped with a contact pilotage movable up and down on the said sucker, said silicon chip basket bottom offers and can hold the pin hole that said contact pilotage penetrates, and said sucker slides through a support and is located on the guide rail; Said support is slided on said guide rail by an air cylinder driven, and said contact pilotage all is connected with said control module with cylinder;
Be provided with in the said water tank one with the concordant roller in said silicon chip basket top; Said roller is positioned at the side that said sucker is adsorbed onto the direction of motion behind the silicon chip; Said roller is located at outer second motor-driven rotation of said water tank by one; Said second motor is connected with said control module; It is opposite that the rotation direction of said roller and said sucker are adsorbed onto behind the silicon chip direction of motion on said guide rail, and one or more silicon chips of the uppermost silicon chip below bonding of said sucker absorption are by in the said silicon chip basket of the rotation refoulement of said roller.
Further, the said water tank outside is provided with a conveyer belt, and said driving-belt is positioned at the side that said sucker is adsorbed onto the direction of motion behind the silicon chip, and said conveyer belt is moved horizontally by one the 3rd motor-driven, and said the 3rd motor is connected with said control module.
Further, said conveyer belt both sides are respectively equipped with a gib block, offer some pores on the said gib block, and said pore is connected with one second gas generating unit, and said second gas generating unit is connected with said control module.
Further, said sucker is respectively equipped with chamfering near the both sides of said two gib blocks.
Further, offer some equally distributed grooves on the said sucker.
Further, offer many rows and said suction nozzle apopore arranged side by side on the said sucker, said apopore is connected with one second hydraulic devices, and said second hydraulic devices is connected with said control module.
Further, said support is provided with the sucker inductor that is connected with said control module.
Particularly, the angle of inclination of the silicon chip on the said elevating mechanism is 1 ~ 45 °.
Particularly, said guide rail is obliquely installed, and the angle of inclination of said guide rail is identical with the angle of inclination of said silicon chip.
Further, said water tank upper is provided with the supersonic generator that is immersed in the water.
The wet silicon chip auto plate separation device that the utility model provides through the cooperation of parts such as elevating mechanism, sucker, contact pilotage, roller, has been realized the auto plate separation of wet silicon chip, has improved burst efficient, has reduced the fragment rate of silicon chip.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the utility model; To do to introduce simply to the accompanying drawing of required use among the embodiment below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work property, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the wet silicon chip auto plate separation schematic representation of apparatus that the utility model embodiment provides.
Fig. 2 is the sketch map of the sucker that provides of the utility model embodiment.
Embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment will be carried out clear, intactly description.
A kind of wet silicon chip auto plate separation device as depicted in figs. 1 and 2, that the utility model embodiment provides comprises that one is equipped with the water tank 1 of water; Be provided with the elevating mechanism 3 that a silicon chip basket 2 and is positioned at silicon chip basket 2 one sides in the water tank 1; Silicon chip basket 2 is used to tilt the silicon chip 4 of the some range upon range of settings of placement, and the angle of inclination of silicon chip is 1 ~ 45 °, and elevating mechanism 3 and is located at the water tank 1 first outer motor 5 and is connected; First motor 5 is connected with a control module (not shown); Control module is used to control first motor 5 and starts and stop, and elevating mechanism 3 is driven by first motor 5, makes that silicon chip 4 in the vertical directions in the silicon chip basket 2 move down.
Both sides, front and back, said silicon chip basket 2 tops are respectively equipped with a backplate 6, two backplates 6 and are oppositely arranged, and offer some through holes 61 on the backplate 6; Through hole 61 can have many rows; Through hole 61 is connected with one first gas generating unit (not shown), and this first gas generating unit is connected with said control module, and this control module is used to control first gas generating unit and starts and stop; The gas that this first gas generating unit produces sprays from the through hole 61 on the backplate 6; Side is blown to uppermost silicon chip 4 and the silicon chip 4 below it before and after silicon chip basket 2 tops, to reduce the adhesion between these two silicon chips 4, is convenient to uppermost silicon chip 4 and separates with a silicon chip 4 below it.
Certainly; Said through hole 61 also can be connected with one first hydraulic devices (not shown); This first hydraulic devices is connected with said control module; This control module is used to control first hydraulic devices and starts and stop, and the water with certain hydraulic pressure that this first hydraulic devices produces sprays from the through hole 61 on the backplate 6, and side is to uppermost silicon chip 4 and a silicon chip 4 water sprays below it before and after silicon chip basket 2 tops; To reduce the adhesion between these two silicon chips 4, be convenient to uppermost silicon chip 4 and separate with a silicon chip 4 below it.
Said silicon chip basket 2 tops are provided with the sucker 7 that laterally arranges with silicon chip 4; Be that sucker 7 also is obliquely installed; Sucker 7 is provided with the suction nozzle 71 that some silica gel materials are processed, and is equipped with a contact pilotage 72 movable up and down on the sucker 7, and contact pilotage 72 is located at a side of sucker 7; Contact pilotage 72 is connected with said control module, and silicon chip basket 2 bottoms offer and can hold the pin hole (not shown) that contact pilotage 72 penetrates.When silicon chip 4 drives motion straight up by elevating mechanism 3 and during with contact pilotage 72 jack-up, contact pilotage 72 is passed to said control module with this signal, control module is controlled first motor 5 and is shut down; Elevating mechanism 3 quits work; Silicon chip 4 stops to move upward, and sucker 7 beginnings simultaneously are air-breathing, and silicon chip 4 is adsorbed onto on the sucker 7; When sucker 7 is drawn onto silicon chip 4, first gas generating unit or first hydraulic devices that are connected with through hole 61 on the backplate 6 quit work after sucker 7 leaves silicon chip basket 2 fully.Because the active force between contact pilotage 72 and the silicon chip 4 is little, is unlikely to damage silicon chip 4, contact pilotage 72 also makes between silicon chip 4 and the sucker 7 and leaves certain clearance during by silicon chip 4 jack-up.
Said sucker 7 slides through a support 73 and is located on the guide rail 74 that is obliquely installed; Guide rail 74 also is obliquely installed; And the angle of inclination of guide rail 74 is identical with the angle of inclination of silicon chip 4; Support 73 is driven on guide rail 74 by a cylinder (not shown) and slides, and this cylinder is connected with said control module, and this cylinder is also controlled start and stop by said control module.
Further, also be provided with the sucker inductor 75 that is connected with said control module on the said support 73, when silicon chip 4 bursts finish; There is not silicon chip 4 in the silicon chip basket 2 and elevating mechanism 3 when continuing to drive silicon chip baskets 2 and rising; Because silicon chip basket 2 bottoms offer and can hold the pin hole that contact pilotage 72 penetrates, so the contact pilotage on the sucker 7 72 can be by silicon chip basket 2 jack-up, contact pilotage 72 can't be controlled first motor 5 through said control module and shut down; Promptly first motor 5 is rotated further; Elevating mechanism 3 continues to drive silicon chip baskets 2 and rises, and silicon chip basket 2 continues to rise and with support 73 jack-up, the sucker inductor of installing on the support 73 75 is sensed support 73 by after the jack-up; Sucker inductor 75 is passed to said control module with this signal, and this control module is controlled first motor 5 and shut down and send alarm sound.
Be provided with an elastic roller 8 concordant in the said water tank 1 with silicon chip basket 2 tops; Roller 8 is positioned at the side that sucker 7 is adsorbed onto the direction of motion behind the silicon chip 4; Roller 8 is located at the water tank 1 second motor (not shown) driven in rotation outward by one; This second motor also is connected with said control module, and this control module is used to control this second electric motor starting and stops, and it is opposite that the rotation direction of roller 8 and sucker 7 are adsorbed onto silicon chip 4 directions of motion of back on guide rail 74.When sucker 7 sucked up a uppermost silicon chip 4, this uppermost silicon chip 4 can following one or more silicon chips 4 by adhesive tape, when sucker 7 moves to roller 8 places; Uppermost silicon chip 4 is positioned at roller 8 tops; Can do not stopped, and the unnecessary silicon chip 4 of uppermost silicon chip 4 belows bonding can be stopped by roller 8, because the absorption affinity between sucker 7 and the uppermost silicon chip 4 is much larger than the adhesion between each silicon chip 4 by roller 8; It is opposite that the rotation direction of roller 8 and sucker 7 are adsorbed onto silicon chip 4 directions of motion of back on guide rail 74; Therefore, the unnecessary silicon chip 4 of uppermost silicon chip 4 belows bonding can be scraped by the rotation of roller 8, and in the refoulement silicon chip basket 2.Further, in the present embodiment, through increasing water temperature, water temperature is controlled at 40 ~ 80 ℃, the adhesion between each silicon chip 4 can reduce, and is more conducive to roller 8 the unnecessary silicon chip 4 that uppermost silicon chip 4 belows bond is scraped; In addition, through increasing the roughness and the rotating speed of roller 8, be beneficial to roller 8 equally the unnecessary silicon chip 4 that uppermost silicon chip 4 belows bond is scraped.
Because the through hole 61 on the backplate 6 is blown through first gas generating unit or can make the silicon chip 4 generation shakes in the water cause fragment through the first hydraulic devices water spray; Therefore should reduce as far as possible blow or water spraying time; The utility model the through hole of backplate 6 61 blow or water spray in, sucker 7 beginnings are air-breathing, reached certain vacuum degree when air-breathing; Sucker 7 is by the right-hand motion to silicon chip basket 2 on guide rail 74 of said air cylinder driven; In case sucker 7 leaves elastic roller 8, the first gas generating units or first hydraulic devices quits work immediately, the through hole 61 on the backplate 6 stops to blow or water spray immediately;, also be convenient to next silicon chip 4 and get back to tram to be inhaled because of blowing or the long fragment that produces of water spraying time to prevent silicon chip 4.
Further, said water tank 1 top is provided with the supersonic generator 10 that is immersed in the water, and supersonic generator 10 shakes in water, makes the water generates vibrations, produces the gap thereby make between each silicon chip 4, is convenient to the burst of silicon chip 4.
Further; Said water tank 1 outside is provided with a conveyer belt 9; Driving-belt 9 is positioned at the side that sucker 7 is adsorbed onto the direction of motion behind the silicon chip 4; Conveyer belt 9 is driven by one the 3rd motor (not shown) and moves horizontally, and the 3rd motor also is connected with said control module, and this control module is used to control the 3rd electric motor starting and stops.Conveyer belt 9 both sides are respectively equipped with a gib block 91; Gib block 91 is used for the silicon chip of falling on the conveyer belt 94 is led, and offers some pores 92 on the gib block 91, and pore 92 is connected with one second gas generating unit (not shown); This second gas generating unit also is connected with said control module; This control module is used to control this second gas generating unit and starts and stop, and the gas that this second gas generating unit produces blows out from the pore 92 on the gib block 91, from side direction the silicon chip 4 that is adsorbed on the sucker 7 is blown; To reduce the adhesion between silicon chip 4 and the sucker 7, be convenient to silicon chip 4 and separate from sucker 7.
In addition, the utility model also can adopt the hydraulic pressure separation method that silicon chip 4 is separated from sucker 7, and is specific as follows: on sucker 7, offer the water hole (not shown) of discharging more; Apopore and silica gel suction nozzle 71 are arranged side by side, and apopore is connected with one second hydraulic devices (not shown) again, and this second hydraulic devices also is connected with said control module; This control module is used to control this second hydraulic devices and starts and stop; During the second hydraulic devices startup work, water sprays from apopore straight down, makes between silicon chip 4 and the sucker 7 to be full of water; Though silicon chip 4 looks it is on sucker 7 like this; Silicon chip 4 has broken away from sucker 7 in fact, because be full of water between silicon chip 4 and the sucker 7, when sucker 7 is got back to water tank 1 and inhaled down a slice silicon chip 4; Opposite another roller (not shown) with roller 8 directions of motion that silicon chip 4 on the sucker 7 is provided with by water tank 1 right side scrapes, thereby silicon chip 4 is separated from sucker 7.
Further; Separate from sucker 7 for the ease of silicon chip 4; The utility model also is respectively equipped with chamfering 76 at sucker 7 near the both sides of two gib blocks 91; Be convenient to gas that the pore 92 of gib block 91 blows out from the gap that chamfering 76 gets between suckers 7 and the silicon chip 4, thereby promote silicon chip 4 to take off from sucker 7.In addition, the utility model also offers some equally distributed grooves 77 on sucker 7, and silicon chip 4 moves easily when holding silicon chip 4 through rollers 8 owing to sucker 7, and groove 77 has increased the roughness of sucker 7, produces mobile when having avoided silicon chip 4 through rollers 8; Simultaneously groove 77 is convenient to gas or water evenly is covered with whole sucker 7, avoids blowing or sprays water inhomogeneous and make silicon chip 4 produce fragments.
As depicted in figs. 1 and 2, the operation principle of the wet silicon chip auto plate separation device of the utility model is following:
(1) at first, a folded silicon chip 4 is tilted to be placed in the silicon chip basket 2, start first motor 5 through control module; First motor 5 drives elevating mechanisms 3, and elevating mechanism 3 promotes the silicon chips 4 in the silicon chip basket 2 straight up, when the contact pilotage on the sucker 7 72 during by uppermost silicon chip 4 jack-up; Contact pilotage 72 is passed to control module with this signal; Control module is controlled first motor 5 and is shut down, and elevating mechanism 3 quits work, and silicon chip 4 also stops to move upward thereupon;
(2) suction nozzle 71 beginnings on the control module control sucker 7 are air-breathing, and sucker 7 is drawn a uppermost silicon chip 4, and the through hole on the backplate 6 61 is blown or water spray simultaneously; So that uppermost silicon chip 4 separates with a silicon chip 4 below it, reached certain vacuum degree when air-breathing, sucker 7 on guide rail 74 to the 2 right-hand motions of silicon chip basket; When sucker 7 moves to roller 8 places; Uppermost silicon chip 4 is positioned at roller 8 tops, can not stopped by roller 8, and the unnecessary silicon chip 4 of uppermost silicon chip 4 belows bonding can be scraped by the rotation of roller 8; And in the refoulement silicon chip basket 2; In case sucker 7 leaves elastic roller 8, control module controls first gas generating unit or first hydraulic devices quits work, and the through hole 61 on the backplate 6 stops to blow or water spray immediately;
(3) after sucker 7 leaves fully; Control module is controlled 5 counter-rotatings of first motor, and after elevating mechanism 3 made the silicon chip 4 vertical 2 ~ 3mm of decline in the silicon chip basket 2, control module was controlled first motor 5 again and shut down; During sucker 7 process rollers 8; The unnecessary silicon chip 4 that roller 8 sticks uppermost silicon chip 4 belows scrapes, and through the rotation of roller 5 silicon chip that scrapes 4 is shifted onto in the silicon chip basket 2, and the silicon chip 4 in the silicon chip basket 2 vertically purpose of decline 2 ~ 3mm is to make the silicon chip 4 that is scraped by roller 5 get back to original position;
When (4) sucker 7 arrived the top of conveyer belt 9, the control module control cylinder quit work, and 7 in sucker stops to move; Control module is controlled the 3rd motor and is shut down also stop motion of conveyer belt 9, suction nozzle 71 blowbacks on the control module control sucker 7 simultaneously; Silicon chip 4 is applied downward pressure, and control module is controlled the startup of second gas generating unit simultaneously, and the pore 92 on the gib block 91 is blown; To reduce the adhesion between silicon chip 4 and the sucker 7, be convenient to silicon chip 4 and separate from sucker 7; After silicon chip 4 was fallen on the conveyer belt 9, control module was controlled the 3rd electric motor starting, and conveyer belt 9 begins transmissions, silicon chip 4 is transported in the silicon chip cleaning basket cleans; The control module control cylinder starts then, and air cylinder driven sucker 7 is moved to the left draws next silicon chip 4, and sucker 7 is moved to the left through before the roller 8, and sucker 7 lifts, to avoid the suction nozzle 71 and roller 8 frictions on the sucker 7;
(5) repeating step (1) ~ (4) are with silicon chip 4 burst one by one.
The above is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also are regarded as the protection range of the utility model.
Claims (10)
1. wet silicon chip auto plate separation device; It is characterized in that; Comprise that one is equipped with the water tank of water, be provided with the elevating mechanism that a silicon chip basket and is positioned at said silicon chip basket one side in the said water tank, said silicon chip basket is used to tilt the silicon chip of the some range upon range of settings of placement; Said elevating mechanism and one is located at the first outer motor of said water tank and is connected; Said first motor is connected with a control module, and said elevating mechanism makes that by said first motor-driven silicon chip in the vertical direction in the said silicon chip basket moves down;
Both sides are respectively equipped with a backplate before and after the said silicon chip basket top; Said two backplates are oppositely arranged; Offer some through holes on the said backplate; Said through hole is connected with one first gas generating unit or one first hydraulic devices, and said first gas generating unit or one first hydraulic devices are connected with said control module;
Said silicon chip basket top is provided with the sucker that laterally arranges with silicon chip; Said sucker is provided with some suction nozzles; Be equipped with a contact pilotage movable up and down on the said sucker, said silicon chip basket bottom offers and can hold the pin hole that said contact pilotage penetrates, and said sucker slides through a support and is located on the guide rail; Said support is slided on said guide rail by an air cylinder driven, and said contact pilotage all is connected with said control module with cylinder;
Be provided with in the said water tank one with the concordant roller in said silicon chip basket top; Said roller is positioned at the side that said sucker is adsorbed onto the direction of motion behind the silicon chip; Said roller is located at outer second motor-driven rotation of said water tank by one; Said second motor is connected with said control module; It is opposite that the rotation direction of said roller and said sucker are adsorbed onto behind the silicon chip direction of motion on said guide rail, and one or more silicon chips of the uppermost silicon chip below bonding of said sucker absorption are by in the said silicon chip basket of the rotation refoulement of said roller.
2. a kind of wet silicon chip auto plate separation device according to claim 1; It is characterized in that; The said water tank outside is provided with a conveyer belt; Said driving-belt is positioned at the side that said sucker is adsorbed onto the direction of motion behind the silicon chip, and said conveyer belt is moved horizontally by one the 3rd motor-driven, and said the 3rd motor is connected with said control module.
3. a kind of wet silicon chip auto plate separation device according to claim 2; It is characterized in that; Said conveyer belt both sides are respectively equipped with a gib block; Offer some pores on the said gib block, said pore is connected with one second gas generating unit, and said second gas generating unit is connected with said control module.
4. a kind of wet silicon chip auto plate separation device according to claim 3 is characterized in that said sucker is respectively equipped with chamfering near the both sides of said two gib blocks.
5. according to each described a kind of wet silicon chip auto plate separation device of claim 1 ~ 4, it is characterized in that, offer some equally distributed grooves on the said sucker.
6. a kind of wet silicon chip auto plate separation device according to claim 5; It is characterized in that; Offer many rows and said suction nozzle apopore arranged side by side on the said sucker, said apopore is connected with one second hydraulic devices, and said second hydraulic devices is connected with said control module.
7. a kind of wet silicon chip auto plate separation device according to claim 1 is characterized in that, said support is provided with the sucker inductor that is connected with said control module.
8. a kind of wet silicon chip auto plate separation device according to claim 1 is characterized in that the angle of inclination of the silicon chip on the said elevating mechanism is 1 ~ 45 °.
9. according to claim 1 or 8 described a kind of wet silicon chip auto plate separation devices, it is characterized in that said guide rail is obliquely installed, the angle of inclination of said guide rail is identical with the angle of inclination of said silicon chip.
10. a kind of wet silicon chip auto plate separation device according to claim 1 is characterized in that, said water tank upper is provided with the supersonic generator that is immersed in the water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201194161U CN202487547U (en) | 2012-03-27 | 2012-03-27 | Wet silicon wafer automatic separation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201194161U CN202487547U (en) | 2012-03-27 | 2012-03-27 | Wet silicon wafer automatic separation device |
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| Publication Number | Publication Date |
|---|---|
| CN202487547U true CN202487547U (en) | 2012-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2012201194161U Withdrawn - After Issue CN202487547U (en) | 2012-03-27 | 2012-03-27 | Wet silicon wafer automatic separation device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623372A (en) * | 2012-03-27 | 2012-08-01 | 江西赛维Ldk太阳能高科技有限公司 | Automatic wafer-separating device for wet silicon wafers |
| CN103811374A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Wafer immersion device |
| CN104979235A (en) * | 2014-04-10 | 2015-10-14 | 沈阳芯源微电子设备有限公司 | Wafer soaking device |
| CN109979857A (en) * | 2019-04-09 | 2019-07-05 | 张家港市德昶自动化科技有限公司 | Semiconductor crystal wafer silicon wafer slicing apparatus |
| CN116504690A (en) * | 2023-06-28 | 2023-07-28 | 新美光(苏州)半导体科技有限公司 | Semiconductor workpiece box |
-
2012
- 2012-03-27 CN CN2012201194161U patent/CN202487547U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623372A (en) * | 2012-03-27 | 2012-08-01 | 江西赛维Ldk太阳能高科技有限公司 | Automatic wafer-separating device for wet silicon wafers |
| CN102623372B (en) * | 2012-03-27 | 2014-07-02 | 江西赛维Ldk太阳能高科技有限公司 | Automatic wafer-separating device for wet silicon wafers |
| CN103811374A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Wafer immersion device |
| CN103811374B (en) * | 2012-11-06 | 2016-03-23 | 沈阳芯源微电子设备有限公司 | A kind of wafer infuser device |
| CN104979235A (en) * | 2014-04-10 | 2015-10-14 | 沈阳芯源微电子设备有限公司 | Wafer soaking device |
| CN104979235B (en) * | 2014-04-10 | 2017-07-07 | 沈阳芯源微电子设备有限公司 | Wafer infuser device |
| CN109979857A (en) * | 2019-04-09 | 2019-07-05 | 张家港市德昶自动化科技有限公司 | Semiconductor crystal wafer silicon wafer slicing apparatus |
| CN116504690A (en) * | 2023-06-28 | 2023-07-28 | 新美光(苏州)半导体科技有限公司 | Semiconductor workpiece box |
| CN116504690B (en) * | 2023-06-28 | 2023-10-03 | 新美光(苏州)半导体科技有限公司 | Semiconductor workpiece box |
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