CN202465859U - Linear winding vacuum coating device - Google Patents
Linear winding vacuum coating device Download PDFInfo
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- CN202465859U CN202465859U CN2011205764668U CN201120576466U CN202465859U CN 202465859 U CN202465859 U CN 202465859U CN 2011205764668 U CN2011205764668 U CN 2011205764668U CN 201120576466 U CN201120576466 U CN 201120576466U CN 202465859 U CN202465859 U CN 202465859U
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Abstract
The utility model discloses a linear winding vacuum coating device, which comprises a plurality of vacuum chambers arranged linearly, wherein a through hole is arranged between any two adjacent vacuum chambers; the first vacuum chamber is an unreeling chamber; the last vacuum chamber is a rolling chamber; a coating chamber is arranged between the unreeling chamber and the rolling chamber; an unreeling roller is arranged in the unreeling chamber; a rolling roller is arranged in the rolling chamber; a first vacuum lock is arranged between the unreeling chamber and the adjacent vacuum chamber; and a second vacuum lock is arranged between the rolling chamber and the adjacent vacuum chamber. According to the utility model, the linear winding vacuum coating device is linear; the number of the vacuum chambers can be increased or reduced according to practical requirements of a process; the linear winding vacuum coating device is convenient to use; films are linear in the processing process; therefore, the linear winding vacuum coating device can be applied to coating a plurality of films with different hardness; the application range is wide; in the event of maintaining equipment, single vacuum chamber can be independently maintained; and the maintenance cost is low.
Description
Technical field
The utility model relates to the coiling technical field of vacuum plating, particularly a kind of orthoscopic coiling vacuum coater.
Background technology
The device that is usually used in coating thin film at present is generally the cartridge type vacuum apparatus; This equipment only is provided with a Vakuumkammer cylindraceous; Mechanisms such as let off roll, wind-up roll and film deflector roll are set in the Vakuumkammer, and the whole coating process of film (comprising oven dry, plated film etc.) is all accomplished in this Vakuumkammer.There is following defective in this cartridge type vacuum apparatus in production application:
(1) this device structure is complicated, and cost of equipment maintenance is high;
(2) the vacuum interior space of this equipment is little, can only be applicable to the plated film processing of the thin-film material that material is softer, and is inapplicable for the harder material of material (like the thin slice copper coin etc.);
(3) this equipment only is provided with a Vakuumkammer, when novel material need is changed in the plated film completion, opens the vacuum atmosphere that destroys whole production technology behind the Vakuumkammer easily, influences normally carrying out of follow-up coating process, also influences quality product easily.
(4) this equipment only is provided with a Vakuumkammer; So having only the technology of plated film and oven dry during coating thin film can carry out in this Vakuumkammer; And the technologies such as cleaning of film must adopt miscellaneous equipment to handle in addition, make complex process, and the degree of cleaning of film also are difficult to controlled.Simultaneously, when needs carried out mask process to film, this equipment also can't be realized this technology.
The utility model content
The purpose of the utility model is to overcome the deficiency of prior art, and the orthoscopic coiling that a kind of maintenance cost is lower, the scope of application is also wider vacuum coater is provided.
The technical scheme of the utility model is: a kind of orthoscopic coiling vacuum coater; Comprise linearly a plurality of Vakuumkammers of formula arrangement; Be provided with through hole between two adjacent arbitrarily Vakuumkammers; First Vakuumkammer is for unreeling the chamber, and last Vakuumkammer is the rolling chamber, unreels between chamber and the rolling chamber and is provided with coating chamber; Unreel the indoor let off roll that is provided with, the indoor wind-up roll that is provided with of rolling; Unreel between the Vakuumkammer that the chamber is adjacent and be provided with first vacuum lock, be provided with second vacuum lock between the Vakuumkammer that the rolling chamber is adjacent.
Said a plurality of Vakuumkammer also comprises the first ion bombardment treatment chamber, first baking vessel, second baking vessel and the second ion bombardment treatment chamber; According to the throughput direction of film, unreel chamber, the first ion bombardment treatment chamber, first baking vessel, coating chamber, second baking vessel, the second ion bombardment treatment chamber and rolling chamber and set gradually.
Said coating chamber has 3, and 3 coating chambers are arranged in a linear and are located between first baking vessel and second baking vessel, and 3 coating chamber structures are identical.
Be provided with planar target and mask mechanism in the said coating chamber, mask mechanism is located at the planar target below, and mask mechanism below is a film.
Said mask mechanism is a fixed mask mechanism; Comprise mask holder, receive silk dish and thread discharge disk, mask holder is a quadrilateral structure, and the limit, the left and right sides of mask holder is provided with a plurality of winding rollers; Receiving silk dish and thread discharge disk is located at respectively on the two ends of mask holder right edge; After the mask silk is emitted from thread discharge disk, be fastened through a plurality of winding rollers, the end of mask silk is wound in to be received on the silk dish.
Said mask mechanism is a synchronous mode mask mechanism, comprises mask holder, thread supply shaft, wire drawing shaft and thread pressing roller, and mask holder is a quadrilateral structure; Thread supply shaft and wire drawing shaft are located at the right and left of mask holder respectively; Thread supply shaft is provided with a plurality of thread discharge disks, and wire drawing shaft is provided with a plurality of receipts silk dishes, and thread discharge disk is provided with receipts silk dish is corresponding one by one; The output terminal of thread supply shaft and the input terminus of wire drawing shaft are respectively equipped with thread pressing roller, and the output terminal of each thread discharge disk is also corresponding to be provided with a tightening pulley.
Said first vacuum lock is identical with the second vacuum lock structure; Comprise and decide piece, upward sliding assembly and downslide assembly; Decide piece middle part and have with the through hole of Vakuumkammer is corresponding and decide the piece through hole, upward sliding assembly and downslide assembly respectively with decide piece and be connected, upward slide the both sides up and down that assembly and downslide assembly are symmetrically set in the through hole of Vakuumkammer; Last sliding assembly is located at the through hole top of Vakuumkammer, and the downslide assembly is located at the through hole below of Vakuumkammer; Last sliding assembly comprises top shoe, goes up orienting lug and upper cylinder; Top shoe one side with decide piece and be slidingly connected, top shoe opposite side and last orienting lug are slidingly connected, last orienting lug is for falling L shaped structure; Last orienting lug top with decide the piece end face and be fixedly connected; The upper cylinder output terminal is fixedly connected with the top shoe top, decides the contacted one side of piece and top shoe and is provided with pulley, the corresponding chute that is provided with on the top shoe; The side bottom of last orienting lug is provided with roller, and top shoe contacts with roller; The structure of downslide assembly and last sliding assembly symmetry; Comprise sliding block, down orienting lug and lower cylinder, sliding block and top shoe are symmetrically set in the both sides up and down of Vakuumkammer through hole, sliding block one side and decide piece and be slidingly connected; The sliding block opposite side is slidingly connected with following orienting lug; Following orienting lug is L shaped structure, and following orienting lug bottom is fixedly connected with deciding the piece bottom surface, and the lower cylinder output terminal is fixedly connected with the sliding block bottom.When this vacuum lock used, its principle was: the upper cylinder action, order about top shoe to lower slip, and the pulley of deciding on the piece matches with chute on the top shoe, decides pulley and the roller on the last orienting lug on the piece simultaneously to its guide effect of top shoe; The motion principle of downslide assembly is identical with last sliding assembly, and the heading and the top shoe of sliding block are opposite, realizes lock sealing when the bottom surface of top shoe contacts with the end face of sliding block.
When this orthoscopic coiling vacuum coater uses; Its technological principle is: unreel after indoor let off roll emits film; Be introduced into the first ion bombardment treatment chamber and carry out the cleaning surfaces processing, send into first baking vessel then and dry processing, get into again and carry out plated film in the coating chamber; After plated film was accomplished, film is sent into second baking vessel earlier dried processing, sends into the second ion bombardment treatment chamber again and carries out surface treatment, makes rete more solid, sends into the rolling of rolling chamber at last.
The utility model has following beneficial effect with respect to prior art:
This orthoscopic coiling vacuum coater is straight orthoscopic; Can increase or reduce the Vakuumkammer number according to the actual needs of technology, easy to use, film shape linearly in the course of processing; Therefore this device go for that hardness has nothing in common with each other multiple coating thin film, it is applied widely.In addition, can carry out mask process to film, can reduce traditional etching technics, simplify coating process through in the coating chamber of this device, setting up mask mechanism.Simultaneously, before plated film, set up ion bombardment and handle, can improve the degree of cleaning of film surface; Improve the quality of products, behind plated film, set up ion bombardment and handle, can make the rete of film surface more solid; Be difficult for oxidizedly, set up baking processing before and after the plated film, can realize the high temperature plated film; Make rete more firm, improve the quality of products.
This orthoscopic coiling vacuum coater adopts the setting of a plurality of Vakuumkammer linear arrangement, during maintenance of the equipment, can safeguard that separately its maintenance cost is low to single Vakuumkammer.
This orthoscopic coiling vacuum coater is provided with vacuum lock respectively in the through hole that unreels chamber and rolling chamber; More during conversion materials; Only need vacuum lock is locked, can open separately and unreel the chamber or the rolling chamber is changed, and not influence the vacuum atmosphere in other Vakuumkammer; Can guarantee normally carrying out of follow-up coating process, thereby improve the quality of products.
Description of drawings
Fig. 1 is the structural representation of this orthoscopic coiling vacuum coater.
Fig. 2 is the A-A view of Fig. 1.
The structural representation of Fig. 3 fixed mask mechanism when setting up mask mechanism in the coating chamber.
Fig. 4 is the structural representation of synchronous mode mask mechanism when setting up mask mechanism in the coating chamber.
Fig. 5 is the structural representation of first vacuum lock or second vacuum lock.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is done further to specify, but the embodiment of the utility model is not limited thereto.
Embodiment 1
A kind of orthoscopic coiling of present embodiment vacuum coater; Its structure such as Fig. 1 or shown in Figure 2; Comprise linearly a plurality of Vakuumkammers of formula arrangement, be provided with through hole between two adjacent arbitrarily Vakuumkammers, first Vakuumkammer is for unreeling chamber 1; Last Vakuumkammer is rolling chamber 7, unreels between chamber 1 and the rolling chamber 7 and is provided with coating chamber 4; Unreel let off roll 8 is set in the chamber 1, wind-up roll 9 is set in the rolling chamber 7; Unreel between the Vakuumkammer that the chamber is adjacent and be provided with first vacuum lock, be provided with second vacuum lock between the Vakuumkammer that the rolling chamber is adjacent.
Actual needs according to technology; A plurality of Vakuumkammers also can comprise the first ion bombardment treatment chamber 2, first baking vessel 3, second baking vessel 5 and the second ion bombardment treatment chamber 6; According to the throughput direction of film, unreel chamber 1, the first ion bombardment treatment chamber 2, first baking vessel 3, coating chamber 4, second baking vessel 5, the second ion bombardment treatment chamber 6 and rolling chamber 7 and set gradually.
Wherein, coating chamber 4 has 3, and 3 coating chambers are arranged in a linear and are located between first baking vessel and second baking vessel, and 3 coating chamber structures are identical.
First vacuum lock is identical with the second vacuum lock structure; Its concrete structure is as shown in Figure 5, comprises deciding piece 20, upward sliding assembly and downslide assembly, decide to have in the middle part of the piece with the through hole of Vakuumkammer is corresponding and decides piece through hole 21; Last sliding assembly and downslide assembly respectively with decide piece and be connected; Last sliding assembly and downslide assembly are symmetrically set in the both sides up and down of the through hole of Vakuumkammer, and upward sliding assembly is located at the through hole top of Vakuumkammer, and the downslide assembly is located at the through hole below of Vakuumkammer; Last sliding assembly comprises top shoe 22, goes up orienting lug 23 and upper cylinder 24; Top shoe 22 1 sides with decide piece 20 and be slidingly connected, top shoe 22 opposite sides and last orienting lug 23 are slidingly connected, last orienting lug 23 is for falling L shaped structure; Last orienting lug top with decide the piece end face and be fixedly connected; Upper cylinder 24 output terminals are fixedly connected with top shoe 22 tops, decide piece 20 and are provided with pulley 25, the corresponding chute 26 that is provided with on the top shoe with top shoe 22 contacted one sides; The side bottom of last orienting lug is provided with roller 27, and top shoe contacts with roller; The structure of downslide assembly and last sliding assembly symmetry; Comprise sliding block 28, down orienting lug 29 and lower cylinder 30, sliding block and top shoe are symmetrically set in the both sides up and down of Vakuumkammer through hole, sliding block one side and decide piece and be slidingly connected; The sliding block opposite side is slidingly connected with following orienting lug; Following orienting lug is L shaped structure, and following orienting lug bottom is fixedly connected with deciding the piece bottom surface, and the lower cylinder output terminal is fixedly connected with the sliding block bottom.When this vacuum lock used, its principle was: the upper cylinder action, order about top shoe to lower slip, and the pulley of deciding on the piece matches with chute on the top shoe, decides pulley and the roller on the last orienting lug on the piece simultaneously to its guide effect of top shoe; The motion principle of downslide assembly is identical with last sliding assembly, and the heading and the top shoe of sliding block are opposite, realizes lock sealing when the bottom surface of top shoe contacts with the end face of sliding block.
When this orthoscopic coiling vacuum coater uses; Its technological principle is: unreel after let off roll in the chamber 1 emits film 19; Be introduced into the first ion bombardment treatment chamber 2 and carry out the cleaning surfaces processing, send into first baking vessel 3 then and dry processing, get into again and carry out plated film in the coating chamber 4; After plated film was accomplished, film is sent into second baking vessel 5 earlier dried processing, sends into the second ion bombardment treatment chamber 6 again and carries out surface treatment, makes rete more solid, sends into 7 rollings of rolling chamber at last.
A kind of orthoscopic coiling of present embodiment vacuum coater is compared with embodiment 1, and its difference is to set up in the coating chamber 4 mask mechanism.
Be provided with planar target and mask mechanism in the coating chamber, mask mechanism is located at the planar target below, and mask mechanism below is a film.
Wherein, planar target 18 is seen Fig. 1 or shown in Figure 2.
Mask mechanism is a fixed mask mechanism, and its structure is as shown in Figure 3, comprises mask holder 10, receives a silk dish 11 and a thread discharge disk 12; Mask holder is a quadrilateral structure; The limit, the left and right sides of mask holder is provided with a plurality of winding rollers 13, receives silk dish 11 and is located at respectively on the two ends of mask holder right edge with thread discharge disk 12, after mask silk 14 is emitted from thread discharge disk; Be fastened through a plurality of winding rollers, the end of mask silk is wound in to be received on the silk dish.When fixed mask mechanism used, its principle is: a plurality of winding rollers distributed on limit, the mask holder left and right sides according to the required pattern of film surface, after thread discharge disk is emitted the mask silk; The mask silk is wound on each winding roller, and mask silk end is fixed in to be received on the silk dish, in the coating thin film process; The mask silk is fixed on each winding roller; When needs clean the mask silk, to regulate and receive silk dish and thread discharge disk, the mask silk that needs are cleaned reclaims through receiving the silk dish; Thread discharge disk is emitted new mask silk and is wound on each winding roller, after the mask silk of whole volume on the thread discharge disk uses, again it is carried out disassembly, cleaning.
Embodiment 3
A kind of orthoscopic coiling of present embodiment vacuum coater is compared with embodiment 1, and its difference is to set up in the coating chamber 4 mask mechanism.
Be provided with planar target and mask mechanism in the coating chamber, mask mechanism is located at the planar target below, and mask mechanism below is a film.
Wherein, planar target 18 is seen Fig. 1 or shown in Figure 2.
Mask mechanism is a synchronous mode mask mechanism; Its structure is as shown in Figure 4, comprises mask holder 10, thread supply shaft 15, wire drawing shaft 16 and thread pressing roller, and mask holder is a quadrilateral structure; Thread supply shaft 15 and wire drawing shaft 16 are located at the right and left of mask holder 10 respectively; Thread supply shaft is provided with a plurality of thread discharge disks 12, and wire drawing shaft is provided with a plurality of receipts silk dishes 11, and thread discharge disk is provided with receipts silk dish is corresponding one by one; The output terminal of thread supply shaft and the input terminus of wire drawing shaft are respectively equipped with the thread pressing roller (not shown), and the output terminal of each thread discharge disk is also corresponding to be provided with a tightening pulley.When synchronous mode mask mechanism uses; Its principle is: according to the picture on surface of film; Thread discharge disk distributes with receipts silk dish is corresponding one by one, and after each thread discharge disk was emitted mask silk 14, the mask silk was led by corresponding tightening pulley; Through thread pressing roller it is pressed to film surface then, mask silk end is packed up by corresponding receipts silk dish; In the coating thin film process, the speed of mask silk is identical with the speed of film, and by corresponding motor, powder clutch and stopper transmission, the mask silk is reusable respectively for each thread supply shaft and wire drawing shaft.
As stated, can realize preferably that just the utility model, the foregoing description are merely the preferred embodiment of the utility model, be not the practical range that is used for limiting the utility model; Be that all equalizations of being done according to the utility model content change and modification, all contained by the utility model claim scope required for protection.
Claims (7)
1. orthoscopic coiling vacuum coater is characterized in that, comprises linearly a plurality of Vakuumkammers of formula arrangement; Be provided with through hole between two adjacent arbitrarily Vakuumkammers; First Vakuumkammer is for unreeling the chamber, and last Vakuumkammer is the rolling chamber, unreels between chamber and the rolling chamber and is provided with coating chamber; Unreel the indoor let off roll that is provided with, the indoor wind-up roll that is provided with of rolling; Unreel between the Vakuumkammer that the chamber is adjacent and be provided with first vacuum lock, be provided with second vacuum lock between the Vakuumkammer that the rolling chamber is adjacent.
2. orthoscopic coiling vacuum coater according to claim 1; It is characterized in that; Said a plurality of Vakuumkammer also comprises the first ion bombardment treatment chamber, first baking vessel, second baking vessel and the second ion bombardment treatment chamber; According to the throughput direction of film, unreel chamber, the first ion bombardment treatment chamber, first baking vessel, coating chamber, second baking vessel, the second ion bombardment treatment chamber and rolling chamber and set gradually.
3. orthoscopic coiling vacuum coater according to claim 2 is characterized in that said coating chamber has 3, and 3 coating chambers are arranged in a linear and are located between first baking vessel and second baking vessel, and 3 coating chamber structures are identical.
4. orthoscopic coiling vacuum coater according to claim 2 is characterized in that, is provided with planar target and mask mechanism in the said coating chamber, and mask mechanism is located at the planar target below, and mask mechanism below is a film.
5. orthoscopic coiling vacuum coater according to claim 4 is characterized in that, said mask mechanism is a fixed mask mechanism; Comprise mask holder, receive silk dish and thread discharge disk, mask holder is a quadrilateral structure, and the limit, the left and right sides of mask holder is provided with a plurality of winding rollers; Receiving silk dish and thread discharge disk is located at respectively on the two ends of mask holder right edge; After the mask silk is emitted from thread discharge disk, be fastened through a plurality of winding rollers, the end of mask silk is wound in to be received on the silk dish.
6. orthoscopic coiling vacuum coater according to claim 4 is characterized in that, said mask mechanism is a synchronous mode mask mechanism; Comprise mask holder, thread supply shaft, wire drawing shaft and thread pressing roller; Mask holder is a quadrilateral structure, and thread supply shaft and wire drawing shaft are located at the right and left of mask holder respectively, and thread supply shaft is provided with a plurality of thread discharge disks; Wire drawing shaft is provided with a plurality of receipts silk dishes; Thread discharge disk with receive that the silk dish is corresponding one by one to be provided with, the output terminal of thread supply shaft and the input terminus of wire drawing shaft are respectively equipped with thread pressing roller, the output terminal of each thread discharge disk is also corresponding to be provided with a tightening pulley.
7. orthoscopic coiling vacuum coater according to claim 1; It is characterized in that; Said first vacuum lock is identical with the second vacuum lock structure, comprises deciding piece, upward sliding assembly and downslide assembly, decide to have in the middle part of the piece with the through hole of Vakuumkammer is corresponding and decides the piece through hole; Last sliding assembly and downslide assembly respectively with decide piece and be connected; Last sliding assembly and downslide assembly are symmetrically set in the both sides up and down of the through hole of Vakuumkammer, and upward sliding assembly is located at the through hole top of Vakuumkammer, and the downslide assembly is located at the through hole below of Vakuumkammer; Last sliding assembly comprises top shoe, goes up orienting lug and upper cylinder; Top shoe one side with decide piece and be slidingly connected, top shoe opposite side and last orienting lug are slidingly connected, last orienting lug is for falling L shaped structure; Last orienting lug top with decide the piece end face and be fixedly connected; The upper cylinder output terminal is fixedly connected with the top shoe top, decides the contacted one side of piece and top shoe and is provided with pulley, the corresponding chute that is provided with on the top shoe; The side bottom of last orienting lug is provided with roller, and top shoe contacts with roller; The structure of downslide assembly and last sliding assembly symmetry; Comprise sliding block, down orienting lug and lower cylinder, sliding block and top shoe are symmetrically set in the both sides up and down of Vakuumkammer through hole, sliding block one side and decide piece and be slidingly connected; The sliding block opposite side is slidingly connected with following orienting lug; Following orienting lug is L shaped structure, and following orienting lug bottom is fixedly connected with deciding the piece bottom surface, and the lower cylinder output terminal is fixedly connected with the sliding block bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205764668U CN202465859U (en) | 2011-12-31 | 2011-12-31 | Linear winding vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205764668U CN202465859U (en) | 2011-12-31 | 2011-12-31 | Linear winding vacuum coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202465859U true CN202465859U (en) | 2012-10-03 |
Family
ID=46914036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205764668U Expired - Lifetime CN202465859U (en) | 2011-12-31 | 2011-12-31 | Linear winding vacuum coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202465859U (en) |
-
2011
- 2011-12-31 CN CN2011205764668U patent/CN202465859U/en not_active Expired - Lifetime
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121003 |
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| CX01 | Expiry of patent term |