CN202282324U - Sample stage for field emission semi-naked magnetic scanning electron microscope - Google Patents

Abstract

The utility model relates to a sample stage for a field emission semi-naked magnetic scanning electron microscope, which can be effectively capable of observing a magnetic solid bulk sample, simultaneously placing a plurality of samples of small size or a single sample of large size on the sample stage, increasing the work efficiency of the scanning electron microscope and reducing the preparation difficulty of the sample. The sample stage comprises a stage body and a fixation head, wherein a cavity is formed on an upper surface of the stage body, a fixation hole communicated with the cavity is arranged on the vertical side wall of the stage body, a fixation body is arranged in the fixation hole and a fixation head is arranged in a center position of the lower part of the stage body. The sample stage has features of novel, special and simple structure, easy production and convenient, safe and simple use. The sample stage is suitable for various field emission scanning electron microscopes; the magnetic bulk sample is firmly fixed on a sample fixation device of the sample stage, the sample is prevented from being absorbed on an objective lower pole-piece to result into physically damaging an objective lens, a loading cavity of the sample stage is changed into four cylindrical cavities or a rectangular cavity, so as to load a plurality of samples of small size or single sample of large size, increase the work efficiency of the scanning electron microscope and reduce the preparation difficulty of the sample.

Description

A kind of the half-naked magnetic scanning Electronic Speculum of emission used sample stage

Technical field

The utility model relates to a kind of the half-naked magnetic scanning Electronic Speculum of emission and uses sample stage, is used for fixing and loads magnetic solid block sample in field emission microscope, to observe safely and reliably.

Background technology

Sample stage is one of critical component of scanning electron microscopy, and it is in order to carrying sample, and characterizes the local feature of sample through optical system imaging.Yet; The object lens of ESEM and scanning coil all are to be controlled by electromagnetic field usually; And it is shorter with sample distance to be observed; The half-naked magnetic scanning Electronic Speculum of emission more need be waited to observe the sample submergence or partly be immersed in the magnetic field of object lens, has sample is adsorbed onto pole shoe under the object lens so use is launched half-naked magnetic scanning electron microscopic observation carrying magnetic solid block sample, causes the risk of object lens physical damage.Therefore, have can not be in order to the weakness of the block sample of observation band magnetic retention for field emission scanning electron microscope.In addition, the sample bench commonly used of field emission scanning electron microscope has very big restriction to the quantity and the size of loading sample at present, only is applicable to the observation of single small size sample, causes ESEM to have inefficiency and the harsh shortcoming of specimen preparation condition.

Summary of the invention

To above-mentioned situation; For overcoming the defective of prior art; The purpose of the utility model is to provide a kind of the half-naked magnetic scanning Electronic Speculum of emission to use sample stage; Can effectively solve in order to observing magnetic solid block sample, and sample bench can place a plurality of small size samples or single large dimension specimen simultaneously, improve the operating efficiency and the problem that reduces the preparation difficulty of sample of ESEM.

The technical scheme that the utility model solves is, includes stage body and fixing head, and cavity is arranged above the stage body, on the vertical sidewall of stage body the fixing hole that is communicated with cavity arranged, and fixed body is housed in the fixing hole, and there is fixing head at stage body lower central place.

The utility model is novel unique, simple in structure, is prone to produce; Easy to use; Safety is applicable to various field emission scanning electron microscopes, through the sample fixture of sample bench; Can realize the fixedly securing of the block sample of carrying magnetic, avoid sample to cause the danger of object lens physical damage being adsorbed to pole shoe under the object lens under the object lens magnetic field.In addition; This sample bench has also improved the sample stage device; Through the loading cavity of sample bench being changed system into four cylindrical cavities or a cuboid cavity; To realize loading, improved the operating efficiency and the preparation difficulty that has reduced sample of ESEM to a plurality of small size samples or single large dimension specimen.Therefore, this use is novel to have adaptability widely to a plurality of small sizes or the magnetic solid block sample of single large scale, can improve the operating efficiency of ESEM largely.

Description of drawings

Fig. 1 is the cross sectional side view of the utility model.

Fig. 2 is the vertical view (the fixing hole place cuts open) of the utility model.

Fig. 3 is the fixed body structure chart of the utility model.

Fig. 4 is another embodiment vertical view of the utility model.

Embodiment

Elaborate below in conjunction with the embodiment of accompanying drawing to the utility model.

By Fig. 1, shown in 2, the utility model includes stage body and fixing head, and cavity 1 is arranged above the stage body 5, on the vertical sidewall of stage body the fixing hole 2 that is communicated with cavity is arranged, and fixed body 3 is housed in the fixing hole, and there is fixing head 4 at stage body lower central place.

In order to guarantee result of use, described stage body is circular; Described fixed body is screw or bolt; Described cavity is circular or square, and cavity has one at least, and cavity shown in Figure 2 has 4 that are uniformly distributed with; Cavity is circular, and cavity shown in Figure 4 has 1, and cavity is square; Fig. 4 only is that with sample stage difference shown in Figure 2 the shape of cavity is different, and the type of attachment of fixed body is different.

The working condition of the utility model is; Fixing head is inserted on the base of establishing in addition (existing equipment); When loading fixed band magnetic sample; Solid block magnetic sample that can size is less is positioned in the cylindrical cavity, utilizes fixed body shown in Figure 3 (pin or screw) to pass that single-pass fixing hole and carrying magnetic sample are interior realizes fixedly securing sample with the pin-and-hole of diameter.Through this fixed form, sample can be avoided the suction-operated in object lens magnetic field, thereby has avoided the physical hazard to object lens.In addition, this sample bench can load four magnetic samples simultaneously, has improved the operating efficiency of ESEM.

Fig. 4 is the vertical view that the utlity model has a square cavity sample bench, and is as shown in Figure 4, and steady pin is inserted in the base, and this sample bench has a square cavity and two straight-through pin-and-holes.When loading fixed band magnetic sample; Can larger-size solid block magnetic sample be positioned in the square cavity; Utilize pin to pass in straight-through pin-and-hole and the carrying magnetic sample pin-and-hole, and screw with the nut two ends of will pinning with diameter, thus realization fixedly securing to sample.Because this sample bench made full use of the loading space of sample bench, thereby can realize having reduced fixing to large-size solid block magnetic sample to the requirement of specimen size and the difficulty of preparation sample.

Can find out by said structure; The utility model comprises the cavity on stage body and the stage body, and cavity is made up of four cylindrical cavities or a cuboid cavity, and fixed pin holes is made up of four single-pass pin-and-holes or two straight-through pin-and-holes; Described sample fixedly be to accomplish jointly by the fixing hole of threaded fixed body and sample stage device; It can be in order to observing magnetic solid block sample, and sample bench can place a plurality of small size samples or single large dimension specimen simultaneously, improves the operating efficiency and the preparation difficulty that reduces sample of ESEM; Compared with prior art, the utlity model has following outstanding characteristics and beneficial technical effects:

1, the fixture of sample bench, its effect are the block samples of solid and reliable ground fixed band magnetic retention, prevent that sample is adsorbed to the following pole shoe of object lens under the effect in object lens magnetic field, cause irreversible physical damage to object lens.Thereby through using this sample bench to increase the adaptability of various field emission scanning electron microscopes to the carrying magnetic sample.

2, four of sample bench cylindrical cavities can make a plurality of undersized solid block carrying magnetic samples load simultaneously and be fixed in the sample bench, and the shortcoming of having avoided at present sample bench mostly only can load individual sample has improved the operating efficiency of field emission scanning electron microscope.

3, sample bench square cavity can make a large-sized fixing block carrying magnetic sample load and be fixed in the sample bench.This sample bench has made full use of the loading space of sample bench, compares with at present most sample bench to have bigger delivered payload capability, thereby has reduced the requirement of specimen size and the difficulty of preparation sample.

Claims (4)

1. a field is launched half-naked magnetic scanning Electronic Speculum and is used sample stage; Include stage body and fixing head; It is characterized in that cavity (1) is arranged above the stage body (5), on the vertical sidewall of stage body the fixing hole (2) that is communicated with cavity is arranged; Fixed body (3) is housed in the fixing hole, and there is fixing head (4) at stage body lower central place.

2. according to claim 1 the half-naked magnetic scanning Electronic Speculum of emission used sample stage, it is characterized in that, described stage body is circular.

3. according to claim 1 the half-naked magnetic scanning Electronic Speculum of emission used sample stage, it is characterized in that described fixed body is screw or bolt.

4. according to claim 1 the half-naked magnetic scanning Electronic Speculum of emission used sample stage, it is characterized in that, described cavity is circular or square, and cavity has one at least.

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