CN202195992U - Accurate nano indentation testing device - Google Patents
Accurate nano indentation testing device Download PDFInfo
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- CN202195992U CN202195992U CN2011202638127U CN201120263812U CN202195992U CN 202195992 U CN202195992 U CN 202195992U CN 2011202638127 U CN2011202638127 U CN 2011202638127U CN 201120263812 U CN201120263812 U CN 201120263812U CN 202195992 U CN202195992 U CN 202195992U
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Abstract
The utility model relates to an accurate nano indentation testing device, which belongs to the field of accurate scientific instruments. The testing device mainly consists of an accurate press-in driver element, a detection element for loading signals and shifting signals and an object stage. The accurate press-in driver element mainly consists of a voice coil motor, a connector, a guide rail and a sliding block, wherein the voice coil motor and the guide rail are arranged on a base, an accurate mechanics sensor is arranged on the base through a lateral plate I, an accurate shifting sensor is arranged on the base through a lateral plate II; and the accurate mechanics sensor is used for detecting the pressure of the press-in material of a diamond pressure head, and the accurate shifting sensor is used for detecting the press-in depth of the diamond pressure head. The object stage is arranged on the accurate mechanics sensor, the diamond pressure head is arranged on a connection plate, and the connection plate is assembled on the sliding block through screws. The accurate nano indentation testing device has the advantages that the structure is simple, the machining is convenient, the volume is smaller, the positioning accuracy is high, and the response is quick; and by adopting the testing device, the deformation process and the injury mechanism of the material in the press-in process can be observed in situ under an electronic speculum. Therefore, the micro-nano mechanical properties of the material can be obtained more intuitively.
Description
Technical field
The utility model relates to the exact science instrument field of optical, mechanical and electronic integration, particularly a kind of accurate nano-indenter test device.
Background technology
Thereby nano impress/cut measuring technology mainly is to obtain load-compression distance relation curve through continuous recording load and compression distance, finally obtains the parameters such as consistency and elasticity modulus of measured material through analytic curve.Avoided in the test process can reducing test errors greatly to the searching of impression position and the measurement of impression residual area.Obtain loading of pressing in and compression distance data through impression test, draw corresponding load-depth relationship curve afterwards, through suitable mechanical model and derivation, the mechanics parameter information that can obtain enriching from this tracing analysis.At present nano-indenter test can obtain parameters such as hardness, elastic modulus, stress-strain curve, fracture toughness, creep properties, fatigue properties, adhesiveness, and the test of nanometer cut then can obtain critical adhesion and the friction factor of film etc.In-situ nano mechanical test system applies characterizes in the mechanical property of various materials such as film, heterogeneous material and crystal boundary thereof, compound substance and interface thereof, MEMS, biomaterial on nanoscale, can realize the in-situ test under the accurate location condition.Utilize it, can on nanoscale, carry out the research of mechanics of materials behavior, be the effective ways of research material nanoscale mechanical property and damage mechanism, and have good development potentiality.
The accurate driving of nanoscale (or location) technology and detection technique are the important support technology of modern high-tech field.Utilize electricity cause/magnetostriction materials, marmem, piezoelectric ceramics, voice coil motor etc. can realize accurate the driving.In recent years, along with raising and voice coil motor technology rapid development to high speed, high-accuracy position system performance requirement, voice coil motor extensively is used in the Precision Position Location Systems such as disk, laser disc location.In the detection of nano-deformation, main at present through the realization of means such as optical triangulation method, interferometric method, condenser type detection.And in the detection of tiny load, mainly utilize sensitive element to convert loading force little distortion of flexible member into, and then, deflection or electric capacity (or strain) variable quantity that caused by distortion obtain loading force through being detected.
There are many researchs to adopt indentation to confirm the mechanical property of material; The impression device of external correlative study person's design, like the impression device of Bangert and Wagendristel design, this device can be put in the ESEM vacuum chamber; But they do not carry out the in-situ monitoring of actual impression process; In fact, the instrument of their design is in order to overcome all limiting factors, to descend the detection problem of impression vestige like bearing accuracy and to small load (50 μ N – 20mN).Its major defect is to lack load and displacement transducer, so can't obtain the mechanics mechanical property of material and the relation that microstructure develops; A kind of in-situ nano impression device of realizing accurate driving through gear motor and piezoelectric element that the people such as M.A.Wall of U.S. Lao Lunsi livermore national laboratory (LLNL) and U.S. Lao Lunsi Berkeley National Laboratory (LBNL) take the lead in developing; Its major defect be since can not detect that loading force causes can't the test material mechanics parameter, can not study the influence rule of loading to the material deformation damage; The device of A.M.Minor etc. obtains loading force through voltage and its deflection relation that is applied on the piezoelectric element through converting; Cause testing complex, off-line operation link too much; The model error and the parameter error that also exist loading force to convert have influenced the credibility of test result on value.
Summary of the invention
The purpose of the utility model is to provide a kind of accurate nano-indenter test device; And under ESEM (SEM), carry out indentation test; Obtain the mechanical property parameters of material; Through in-situ monitoring distortion of materials under the loading is damaged; Study its deformation damage mechanism and and loading and material property between the correlativity rule, solved that apparatus structure is complicated, overall dimension is big and be difficult for realizing the problem of online detection, and solved and existing the mechanical property of materials is measured and the problem that to detect microscopic appearance be separate and separate.
The above-mentioned purpose of the utility model realizes through following technical scheme:
Accurate nano-indenter test device comprises that precision is pressed into the detecting unit of driver element, load signal detecting unit and displacement signal; Said precision is pressed into driver element and comprises voice coil motor 14, web member 13, web joint 1, guide rail 7 and slide block 8; This voice coil motor 14, guide rail 7 are separately fixed on the base 6; Web member 13 is connected with voice coil motor 14; This web member 13 is connected with web joint 1 through bolt, and web joint 1 is connected on the slide block 8, and this slide block 8 is slidingly connected with guide rail 7; Drive web joint 1 through voice coil motor 14, thereby realize slide block 8 rectilinear motion on guide rail 7;
Said load signal detecting unit comprises diamond penetrator 2, objective table 3, accurate mechanics sensor 4 and side plate I 5; This precision mechanics sensor 4 is fixed on the base 6 through side plate I 5; Objective table 3 is connected with accurate mechanics sensor 4, and diamond penetrator 2 is fixed on the web joint 1;
Said displacement signal detecting unit comprises the grating chi 12 and read head 10 of side plate II 11 and grating sensor, and this read head 10 is connected with side plate II 11 through bolt, and this side plate II 11 is fixed on the base 6; Grating chi 12 is bonding through brace 9 and web member 13, and 13 straight lines move thereby voice coil motor 14 drives the drive web member, have realized that grating chi 12 moves.
Described side plate II 11 structures are the L type, so that regulate the relative position and the depth of parallelism of read head 10 and grating chi 12.
The material of described accurate nano-indenter test device is an aluminium alloy.
The utility model is a kind ofly to collect driving, loading, detection, micro/nano level Mechanics Performance Testing and be the high-performance precision measurement system of one, and can in the cavity of micro-imaging instrument, carry out in-situ test.Can use nano impress, in-situ nano impression test in the Micromechanics performance test of all kinds of test specimens or material.The utility model adopts grating displacement sensor to come the detecting position shifting signal, and this makes whole apparatus structure fully simplify, and its signal of measuring output is digit pulse, and it is big to have sensing range, and accuracy of detection is high, the characteristics that response speed is fast.Adopt voice coil motor and grating displacement sensor, the structure of this device is fully simplified, operate more simple and convenient.The utility model adopts voice coil motor to carry out precision and drives; Voice coil motor (Voice Coil Actuator) is a kind of direct drive motor of special shape; Have simple in structure, volume is little, at a high speed, high quicken, characteristic such as big stroke, response are fast; And have linear force-stroke characteristic and higher electricity-function conversion ratio, in big stroke, all have high displacement resolution.These attributes make voice coil motor have level and smooth controllability, become the ideal device that is applied in the various forms servo pattern, more are applicable to the control system that requires the quick high accuracy location.Exact instrument is the foundation stone and the important leverage of scientific and technical innovation and socio-economic development; The utility model is the special test equipment that is used to measure the Micromechanics performance parameter that characterizes all kinds of test specimens or material; Because the abundant microminaturization of proving installation structure; So can utilize ESEM (SEM), transmission electron microscope fine measuring instruments such as (TEM), realize the online observation and the analysis of material Micromechanics performance.And can study mechanical behavior under loading of test specimen or material, damage mechanism and and loading and material property between the correlativity rule, the development of hi-tech industry clusters such as new material new process, precision optics, microelectric technique and semiconductor technology, the manufacturing of carplane key components and parts, Ferrous Metallurgy, biomedical engineering, MEMS (MEMS) technology, nanometer engineering and defence and military is had very important support impetus and wide application in industry is worth.
The beneficial effect of the utility model is: the displacement detecting technology that the utility model proposes reaches nanoscale, loading force resolution reaches little ox level; Simple in structure, easy to process, volume is less, bearing accuracy is high, response rapidly and can be in in-situ observation process of press under the Electronic Speculum distortion of materials process and micromechanism of damage, thereby the micro nanometer mechanics performance of more intuitive understanding material.The utility model can provide effective method and experimental facilities for the test material performance parameter, will play the promotion facilitation to fields such as material science, microelectric technique, precision optics, thin film technique, Ultraprecision Machining and defence and militaries.
Description of drawings
Fig. 1 is the one-piece construction synoptic diagram of the utility model.
Fig. 2 is the schematic top plan view of the utility model.
Fig. 3 is the structural representation that the precision of the utility model is pressed into driver element.
Fig. 4 is the structural representation of the web member of the utility model.
Among the figure: 1. web joint, 2. diamond penetrator, 3. objective table, 4. accurate mechanics sensor, 5. side plate I, 6. base, 7. guide rail, 8. slide block, 9. brace, 10. read head, 11. side plate II, 12. grating chis, 13. web members, 14. voice coil motors.
Embodiment
Further specify the detailed content and the embodiment thereof of the utility model below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 4, the accurate nano-indenter test device of the utility model comprises that precision is pressed into the detecting unit of driver element, load signal detecting unit and displacement signal; Said precision is pressed into driver element and comprises voice coil motor 14, web member 13, web joint 1, guide rail 7 and slide block 8; This voice coil motor 14, guide rail 7 are separately fixed on the base 6; Web member 13 is connected with voice coil motor 14; This web member 13 is connected with web joint 1 through bolt, and web joint 1 is connected on the slide block 8, and this slide block 8 is slidingly connected with guide rail 7; Drive web joint 1 through voice coil motor 14, thereby realize slide block 8 rectilinear motion on guide rail 7;
Said load signal detecting unit comprises diamond penetrator 2, objective table 3, accurate mechanics sensor 4 and side plate I 5; The accurate mechanics sensor 4 that this detection diamond penetrator is pressed into material pressure is fixed on the base 6 through side plate I 5; Objective table 3 is connected with accurate mechanics sensor 4, and diamond penetrator 2 is fixed on the web joint 1;
Said displacement signal detecting unit comprises the grating chi 12 and read head 10 of side plate II 11 and grating sensor, and this read head 10 is connected with side plate II 11 through bolt, and this side plate II 11 is fixed on the base 6; Grating chi 12 is bonding through brace 9 and web member 13, and 13 straight lines move thereby voice coil motor 14 drives the drive web member, have realized that grating chi 12 moves.
Described side plate II 11 structures are the L type, so that regulate the relative position and the depth of parallelism of read head 10 and grating chi 12.
The material of described accurate nano-indenter test device is an aluminium alloy; Simple in structure, be convenient to processing; And the abundant microminaturization of proving installation structure; So can utilize ESEM (SEM), transmission electron microscope fine measuring instruments such as (TEM), realize the online observation and the analysis of material Micromechanics performance.
Brace 9 usefulness double faced adhesive tapes are attached on the web member 13, and grating chi 12 is attached on the brace 9, and design is because brace 9 is dismantled easily like this, can reuse, and not only is confined to this device, also can on other device, use the grating chi.
The test specimen that the utility model is implemented the in-situ nano impression test is the three-dimensional test specimen of characteristic dimension more than the millimeter level.
The utility model is an a kind of high-performance precision measurement system, because system requirements quick high accuracy location, so select voice coil motor 14 as driver element, it has characteristics such as simple in structure, that volume is little, highly quicken, response is fast, has level and smooth controllability.Voice coil motor 14 is as direct drive motor, thereby promotes web joint 1 motion, and web joint 1 is connected with slide block 8, and diamond penetrator 2 is installed in web joint 1 end, so can realize diamond penetrator 2 steady feedings.Accurate mechanics sensor 4 stiff ends are connected with side plate I 5, and the other end is connected with objective table 3, and side plate I 5 is fixed on the base 6, and diamond penetrator 2 just can guarantee vertical each other with objective table 3 through installation.Drive web joint 1 feeding through software programming control voice coil motor 14 and just can accomplish impression experiment test specimen.Collect in the computing machine through the force signal of software programming control A/D capture card, thereby obtain load---the depth curve that impression is tested accurate mechanics sensor 4 outputs.
Referring to shown in Figure 1; Voice coil motor 14, guide rail 7, side plate I 5, side plate II 11 are assemblied on the base 6, and accurate mechanics sensor 4 is installed on the side plate I 5, and grating sensor read head 10 is installed on the side plate II 11; Grating chi 12 is attached on the brace 9, and brace 9 is attached on the web member 13.
Consult shown in Figure 2ly, objective table 3 is installed on the accurate mechanics sensor 4, and diamond penetrator 2 is installed in web joint 1 end.
Referring to Fig. 3, shown in Figure 4; Precision is pressed into driver element and is made up of voice coil motor 14, web member 13, web joint 1, guide rail 7, slide block 8; Wherein voice coil motor 14, guide rail 7 are installed on the base 6; Web member 13 is connected with voice coil motor 14, is connected with web joint 1 through bolt again, and web joint 1 is installed on the slide block 8.Drive through voice coil motor 14, thereby realize slide block 8 rectilinear motion on guide rail 7.
Claims (3)
1. an accurate nano-indenter test device is characterized in that: comprise that precision is pressed into the detecting unit of driver element, load signal detecting unit and displacement signal; Said precision is pressed into driver element and comprises voice coil motor (14), web member (13), web joint (1), guide rail (7) and slide block (8); This voice coil motor (14), guide rail (7) are separately fixed on the base (6); Web member (13) is connected with voice coil motor (14); This web member (13) is connected with web joint (1) through bolt, and web joint (1) is connected on the slide block (8), and this slide block (8) is slidingly connected with guide rail (7);
Said load signal detecting unit comprises diamond penetrator (2), objective table (3), accurate mechanics sensor (4) and side plate I (5); This precision mechanics sensor (4) is fixed on the base (6) through side plate I (5); Objective table (3) is connected with accurate mechanics sensor (4), and diamond penetrator (2) is fixed on the web joint (1);
Said displacement signal detecting unit comprises the grating chi (12) and the read head (10) of side plate II (11) and grating sensor, and this read head (10) is connected with side plate II (11) through bolt, and this side plate II (11) is fixed on the base (6); Grating chi (12) is bonding through brace (9) and web member (13).
2. accurate nano-indenter test device according to claim 1 is characterized in that: described side plate II (11) structure is the L type.
3. accurate nano-indenter test device according to claim 1 and 2 is characterized in that: the material of said accurate nano-indenter test device is an aluminium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202638127U CN202195992U (en) | 2011-07-25 | 2011-07-25 | Accurate nano indentation testing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202638127U CN202195992U (en) | 2011-07-25 | 2011-07-25 | Accurate nano indentation testing device |
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| CN202195992U true CN202195992U (en) | 2012-04-18 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288501A (en) * | 2011-07-25 | 2011-12-21 | 吉林大学 | Precise nanoindentation test device |
| CN104198286A (en) * | 2014-09-11 | 2014-12-10 | 浙江工业大学 | Multi-pressure-head instrumented press-in test system |
| CN104251804A (en) * | 2013-06-27 | 2014-12-31 | 富泰华工业（深圳）有限公司 | Detection device |
| CN104251804B (en) * | 2013-06-27 | 2016-11-30 | 顾玉奎 | Detection device |
| CN107544016A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | A kind of flying probe axle and its method of testing |
-
2011
- 2011-07-25 CN CN2011202638127U patent/CN202195992U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288501A (en) * | 2011-07-25 | 2011-12-21 | 吉林大学 | Precise nanoindentation test device |
| CN104251804A (en) * | 2013-06-27 | 2014-12-31 | 富泰华工业（深圳）有限公司 | Detection device |
| CN104251804B (en) * | 2013-06-27 | 2016-11-30 | 顾玉奎 | Detection device |
| CN104198286A (en) * | 2014-09-11 | 2014-12-10 | 浙江工业大学 | Multi-pressure-head instrumented press-in test system |
| CN104198286B (en) * | 2014-09-11 | 2016-09-07 | 浙江工业大学 | A kind of many pressure heads instrumentation press-in test system |
| CN107544016A (en) * | 2016-06-29 | 2018-01-05 | 大族激光科技产业集团股份有限公司 | A kind of flying probe axle and its method of testing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhao Hongwei Inventor after: Mi Jie Inventor after: Huang Hu Inventor after: Liu Changsheng Inventor after: Geng Chunyang Inventor after: Wang Hanwei Inventor after: Wang He Inventor after: Zhang Wenshuang Inventor after: Yang Jianbo Inventor before: Zhao Hongwei Inventor before: Geng Chunyang Inventor before: Huang Hu Inventor before: Xu Lixia Inventor before: Zhang Zhenpeng Inventor before: Zhang Peng |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZHAO HONGWEI GENG CHUNYANG HUANG HU XU LIXIA ZHANG ZHENPENG ZHANG PENG TO:ZHAO HONGWEI MI JIE HUANG HU LIU CHANGSHENG GENG CHUNYANG WANG HANWEI WANG HE ZHANG WENSHUANG YANG JIANBO |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120418 Termination date: 20150725 |
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| EXPY | Termination of patent right or utility model |