CN110815147A - Micro-displacement platform driven by piezoelectric ceramics - Google Patents
Micro-displacement platform driven by piezoelectric ceramics Download PDFInfo
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Abstract
The invention relates to a micro-displacement output platform with a two-stage amplification mechanism, which mainly comprises a driving part, an amplification part, a motion execution part and a measurement part. The driving part mainly realizes the function by piezoelectric ceramics, and realizes the pre-tightening of the piezoelectric ceramics by a disc spring; the amplifying part is formed by combining a traditional hinge and a flexible hinge; the measuring section is constituted by an ultrasonic-based measuring device. The micro-displacement mechanism has high output displacement precision and quick dynamic response, the disc spring has the characteristics of keeping the pretightening force constant in the process of outputting the displacement by the piezoelectric ceramics, and the parasitic displacement can be effectively eliminated by the symmetrical distribution of the hinge. The micro-displacement mechanism overcomes the defect that only piezoelectric ceramics can be used for realizing small-displacement output, can realize the stepless amplification of the piezoelectric ceramics output displacement by adjusting the mechanism according to actual needs, and realizes the multi-scale output precision from nano-scale to millimeter-scale. The invention can be applied to the correction of the precision of the ultrasonic probe in measuring the fixed film thickness.
Description
The technical field is as follows:
the invention belongs to the field of mechanical precision displacement driving, and particularly relates to a micro-displacement platform driven by piezoelectric ceramics.
Background art:
since mechanical parts such as gears and bearings rely on lubricants (oil, water, etc.) to reduce frictional wear during use, the thickness of an oil film or a water film has a crucial influence on the service performance and the service time of the mechanical parts. If the film thickness is too thin, the surfaces of the parts can be in direct contact, the friction and the temperature between the parts can be increased rapidly after a period of time, abrasion occurs, and even serious mechanical operation accidents are caused. Therefore, the monitoring and calibration of the thickness of the oil film or the water film have important significance for industrial production. The existing oil film or water film measuring method comprises a resistance method, a capacitance method, an optical interference method and the like, which have the advantages and certain limitations, for example, the resistance method can not accurately display the actual oil film or water film thickness due to the short circuit effect of metal particles or surface roughness peaks separated from the surface of a friction pair caused by abrasion, can not measure the oil film or water film thickness of a certain determined part, and can only be used for measuring whether the oil film or water film is formed; the capacitive method has to destroy the actual working surface in order to mount the electrodes; the optical interference method requires that at least one side of the friction pair is made of a light-transmitting substance, so that the optical interference method can only carry out some measurements in a laboratory and is difficult to apply to actual measurement. The ultrasonic method, which uses the reflection and transmission characteristics of ultrasonic waves in a medium, can be used to calculate the thickness of an oil film or a water film by performing special processing on a reflection signal. The method has the advantages that (1) the method belongs to a nondestructive detection method, ultrasonic waves are transmitted from the outside of a friction pair to the inside of the friction pair, and the thickness of an oil film or a water film is judged by reflected and transmitted energy, so that the friction pair does not need to be damaged, and the method can be used for measuring the thickness of the oil film or the water film in actual working conditions, and is incomparable with other methods; (2) the straight-line propagation characteristic of the ultrasonic wave reserves the advantages of the optical method, and the strong penetration capability of the ultrasonic wave makes up the defects of the optical method; (3) the focusable properties of ultrasound provide the possibility of measuring the thickness of a certain small area of an oil or water film, and it is not disturbed by metal particles etc. as in the resistive method. Although the ultrasonic method has such a remarkable advantage, the effect of the method depends mainly on the measurement accuracy of the ultrasonic probe. However, at present, few devices for checking and calibrating the measurement accuracy of the ultrasonic probe are provided, the calibration accuracy is generally not high, and in addition, no device integrating low-accuracy and high-accuracy checking is provided. Therefore, in order to correct the precision of the ultrasonic probe in measuring the thickness of the fixed film, the invention designs a novel micro-displacement mechanism.
In recent years, with the development of microelectronics, micromachines, ultra-precision tests, machining and other subjects, micro-displacement mechanisms are rapidly developed and widely applied. The current micro-displacement mechanism mainly comprises: linear motor type micro-displacement mechanism, mechanical transmission type micro-displacement mechanism, torsional friction transmission type micro-displacement mechanism, elastic deformation type micro-displacement mechanism, piezoelectric element type micro-displacement mechanism, thermal deformation type micro-displacement mechanism, magnetostriction type micro-displacement mechanism and some other types of micro-displacement mechanisms. The most widely used micro-displacement mechanism is one driven by piezoelectric ceramics, and although it has the advantages of simple structure, small size, high resolution, high precision, and automatic micro-feeding, the piezoelectric ceramics has a small driving displacement stroke, so it is necessary to use an amplifying mechanism to amplify the output displacement. The current amplifying mechanisms commonly used at home and abroad mainly comprise a lever mechanism, a diamond-shaped amplifying mechanism and a bridge-type amplifying mechanism. However, as the movement realized by the lever mechanism is rotation, parasitic displacement can be generated; the two mechanisms of the rhombus and the bridge are similar, the displacement input and output directions of the two mechanisms are vertical, generally, the two mechanisms are in displacement input in two horizontal directions, one ends of the two mechanisms in the two vertical directions are fixed, and the other ends of the two mechanisms in the two horizontal directions are output, the Chinese patent CN104037319A is similar to the arrangement mode, and once the input displacements in the two horizontal directions of the piezoelectric ceramics are different, the output rigidity of the mechanism is lower. In the chinese patent CN1570567A, once the piezoelectric ceramics with different sizes are replaced, the piezoelectric ceramics cannot be used in combination with the original amplifying mechanism, so the replaceability is poor; in addition, the magnification scale of the magnification mechanism cannot be changed after the design and assembly of the magnification mechanism. Therefore, in order to solve the problems of single amplification ratio, poor replaceability, low output rigidity and the like of the traditional piezoelectric ceramic amplification mechanism and combine with the actual requirement of precision check of the ultrasonic probe during measurement of the thickness of the fixed oil film or the water film, the invention seeks to design a novel piezoelectric ceramic micro-displacement platform.
The invention content is as follows:
the invention aims to overcome the defects in the prior art, and a novel micro-displacement platform is required to be designed to solve the problems of single amplification ratio, poor replaceability and low output rigidity of the traditional piezoelectric ceramic amplification mechanism.
In order to achieve the purpose, the micro-displacement platform driven by piezoelectric ceramics is realized by the following technical scheme:
the whole mechanism comprises four parts: a driving part I, an amplifying part II, a movement executing part III and a measuring part IV; the drive part I mainly realizes functions by piezoelectric ceramics, the amplifying part II consists of two-stage transmission and two-stage amplification, the motion executing part III consists of an upper L-shaped plate, a lower L-shaped plate, an angular displacement adjusting device and a displacement lifting platform, and the measuring part IV consists of a measuring device based on ultrasonic waves. The invention can realize two working modes: firstly, high-precision small displacement motion is carried out within the stroke range of the piezoelectric ceramics; secondly, in order to overcome the defect of small output displacement of the piezoelectric ceramics, the parasitic displacement is eliminated and stepless amplification (the amplification ratio can be adjusted randomly) is carried out through a two-stage transmission mechanism and a two-stage amplification mechanism, so that larger output displacement is obtained.
The piezoelectric ceramics directly drives the execution part to output micro displacement, and the output quantity is the stroke range of the piezoelectric ceramics; the piezoelectric ceramic is driven to generate micro displacement, and the amplification mechanism is used for amplifying and outputting the micro displacement in a mode of combining a lever transmission principle and a triangular amplification principle.
A micro displacement platform driven by piezoelectric ceramics comprises a main body structure which comprises four parts: the device comprises a driving part I, an amplifying part II, a movement executing part III and a measuring part IV, wherein the main structure of the driving part I comprises a 1-small base, a 2-left upright post, a 3-right upright post, a 4-disc spring, a 5-disc spring gasket, a 6-piezoelectric ceramic shell, a 7-piezoelectric ceramic, an 8-output shaft, a 9-deformation plate, a 10-pretightening bolt, an 11-conversion disc, a 12-locking nut gasket, a 13-locking nut, a 14-locking nut M10, a 15-locking nut gasket M10 and a 39-piezoelectric ceramic power supply; the main structure of the amplifying part II comprises 16-connecting parts (connecting bolts, connecting gaskets and connecting nuts), 17-driving rods 1, 18-intermediate rods, 19-driving rods 2, 20-U-shaped rod guide rails, 21-first-stage amplifying mechanisms, 22-conversion compression mechanisms (221-springs, 222-trapezoidal blocks, 223-adjusting nuts and 224-locking nuts), 23-U-shaped rods, 24-second-stage amplifying mechanisms, 25-hinged supports, 26-pin shafts, 27-hinged support supports, 28-guide rails and 29-trapezoidal block supports; the motion execution part III comprises a left motion execution part and a right motion execution part which adopt the same structure, but when small displacement output is carried out, the driving part I is directly connected with the left motion execution part, but when large displacement output is carried out, the driving part I is connected with the amplifying part II to transfer the displacement to the right motion execution part; the main structure of the right movement executing part comprises an upper L-shaped plate 30, a lower L-shaped plate 31, an oil groove 32, an angular displacement adjusting device 34, a connecting plate 35, a displacement lifting platform 36, a supporting seat 37 and a connecting bolt 38; the main structure of the measurement part IV comprises a 33-ultrasonic probe, a 40-ultrasonic pulse transmitting/receiving instrument, a 41-oscilloscope, a 42-PC, a 43-lead and a 44-large base;
the small base 1 is of a disc-shaped structure, a left upright column 2 and a right upright column 3 which have supporting and fixing functions are fixedly arranged on the upper surface of the small base 1, the upper ends of the left upright column 2 and the right upright column 3 are respectively provided with a thread structure and a pre-tightening bolt 10 which have pre-tightening functions, a deformation plate 9 is arranged between the left upright column 2 and the right upright column 3, one end of the deformation plate is fixed with the left upright column 2 through the pre-tightening bolt 10, and the other end of the deformation plate is fixed with the right upright column 3 through the pre; a circular groove is processed in the center of the small base 1, piezoelectric ceramics 7 are placed in the circular groove, and a piezoelectric ceramic shell 6 for protection and fixation is arranged outside the piezoelectric ceramics 7; the lower end of the piezoelectric ceramic 7 is respectively provided with a gasket 5 and a disc spring 4, and the disc spring 4 can apply a reaction force to the piezoelectric ceramic 7 for pre-tightening when being extruded; an output shaft 8 at the upper end of the piezoelectric ceramic 7 is in close contact with the lower side surface of the deformation plate 9, so that the piezoelectric ceramic 7 is pre-tightened by the pre-tightening bolt 10, the deformation plate 9 and the disc spring 4 together, and the piezoelectric ceramic 7 has better output performance after being subjected to pre-tightening force;
the pre-tightening process of the piezoelectric ceramic 7 is to adjust the pre-tightening bolt 10 to compress the deformation plate 9 and the piezoelectric ceramic 7 and further compress the disc spring 4, so that the deformation of the disc spring 4 reaches 0.85H0At this time, the disc spring 4 acts against the piezoelectric ceramic 7 to pre-tighten the piezoelectric ceramic 7; the micro displacement generated by the piezoelectric ceramic 7 is output through the elastic deformation of the deformation plate 9; the disc spring 4 is a soft disc spring, and the deformation amount delta is 0.80H0～0.90H0In the process, the variation range of the pretightening force is very small, the same pretightening force needs to be ensured during each pretightening, and the influence on the experimental result caused by different pretightening forces in the experimental process is avoided; the deformation delta of the disc spring 4 is controlled by the same number of clockwise rotations of the left and right pre-tightening bolts 10, and the specific deformation can be measured by detecting the downward movement distance of the conversion disc 11 through a displacement sensor;
a locking nut 13 and a gasket 12 are arranged under the conversion disk 11; the tail end of the output shaft 8 is in threaded connection with the switching disc 11, the position of the switching disc 11 is fixed through the locking nut 13 and the gasket 12, when the switching disc 11 rotates to different positions along the axis of the output shaft 8, the switching disc 11 can be respectively connected with the left movement executing part and the amplifying part II through threaded holes in the switching disc 11, and two displacement executing routes can be respectively realized: if a small displacement output route is executed, the piezoelectric ceramic 7 of the driving part I extends under the action of driving voltage to drive the output shaft 8 to move upwards, the conversion disc 11 in threaded connection with the output shaft 8 drives the lower L-shaped plate 31 of the left movement executing part to move upwards, so that different film thicknesses are formed with the upper L-shaped plate 30, and an ultrasonic probe 33 fixed on the surface of the upper L-shaped plate 30 receives signals and then transmits the signals to the measuring part IV for signal analysis, so that a film thickness value is obtained; if a large-displacement output route is executed, the piezoelectric ceramic 7 of the driving part I extends under the action of driving voltage to drive the output shaft 8 to move upwards, the conversion disc 11 in threaded connection with the output shaft 8 transfers the movement to the amplifying part II, and finally drives the lower L-shaped plate 31 of the right-side movement executing part to move upwards after the displacement transfer and amplification, so that different film thicknesses are formed with the upper L-shaped plate 30, and an ultrasonic probe 33 fixed on the surface of the upper L-shaped plate 30 receives signals and then transfers the signals to the measuring part IV for signal analysis, so that a film thickness value is obtained; the lead 43 connects the ultrasonic probe 33, the ultrasonic pulse transmitter/receiver 40, the oscilloscope 41 and the PC42 in sequence, and finally transmits the data acquired by the ultrasonic probe 33 to the PC 42;
the transmission rod 17, the middle rod 18 and the transmission rod 19 are sequentially connected, and the left end of the transmission rod 17 is connected with the conversion disc 11 through a bolt, wherein the rotation fulcrums of the transmission rod 17, the middle rod 18 and the transmission rod 19 are all arranged at the center of the rod body, only motion is transmitted, and motion displacement is not amplified; the right end of the transmission rod 19 is provided with a first-stage amplification mechanism 21 with a V-shaped structure, two sides of the first-stage amplification mechanism are respectively connected with a U-shaped rod 23 through a conversion compression mechanism 22, the bottom end of a trapezoid block support 29 is fixed on the upper surface of a large base 44 and is positioned right below the conversion compression mechanism 22 to support the conversion compression mechanism 22, the U-shaped rod 23 is positioned inside a U-shaped rod guide rail 20, the U-shaped rod guide rail 20 is positioned between the trapezoid block support 29 and a hinged support 27, the bottom end of the U-shaped rod guide rail is fixed on the upper surface of the large base 44 to ensure that the U-shaped rod 23 moves up and down in the vertical direction, a second-stage amplification mechanism 24 is positioned right above the U-shaped rod 23 and is connected with the U-shaped rod 23 through a bolt, two ends of the second-stage amplification mechanism 24 are connected with the hinged support 25 through a pin shaft 26, the hinged support 25 is fixed on, the output end of the second-stage amplifying mechanism 24 is located at the inner side of the guide rail 28, the bottom end of the guide rail 28 is also fixed on the upper surface of the large base 44 to ensure the displacement output in the vertical direction, the first-stage amplifying mechanism 21 and the second-stage amplifying mechanism 24 both comprise 5 flexible hinges made of circular arc spring steel material and are symmetrically distributed to effectively eliminate parasitic displacement, one flexible hinge is located at the input end of the first-stage amplifying mechanism 21, two flexible hinges are symmetrically distributed at two sides above the input end of the first-stage amplifying mechanism 21, the other two flexible hinges are symmetrically distributed at two sides of the output end of the second-stage amplifying mechanism 24, the first-stage amplifying mechanism 21 is used for amplifying displacement in the vertical direction and eliminating parasitic displacement in the horizontal direction, the transmission mode is one input and two outputs, and the first amplified displacement is transmitted to the U-shaped rod 23 through the conversion and compression mechanism 22, further transmitted to the second stage amplification mechanism 24 to continue amplifying the vertical displacement and eliminating the horizontal parasitic displacement; the first stage amplification mechanism 21 can realize stepless amplification (arbitrary ratio adjustment), and the combined use with the second stage amplification mechanism 24 can better realize ratio amplification; the stepless amplification of the first stage amplification mechanism 21 is mainly realized by converting the adjusting nut 223 in the compression mechanism 22, wherein the adjusting nut 223 is integrated with the screw rod, the size of the input angle is changed, and further the change of the amplification factor is realized, and the locking nut 224 in the compression mechanism 22 locks the adjusted first stage amplification mechanism 21, such as: rotating the adjusting nut 223 to push the first-stage amplification mechanism 21 to reach A ' from the point A, and decreasing the input angle from gamma to gamma ', so that the amplification factor is increased from 1/tan gamma to 1/tan gamma ';
the angular displacement adjusting device 34 can drive the upper L-shaped plate 30 to rotate around the X direction, and can also rotate around the Y direction, so as to correct the parallelism error between the upper surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31; the displacement lifting platform 36 can adjust the initial position of the upper L-shaped plate 30 before the experiment, namely, the initial distance between the upper L-shaped plate 30 and the lower L-shaped plate 31 is controlled, the upper L-shaped plate 30 is kept static after the test is started, and the lower L-shaped plate 31 moves upwards along with the extension of the piezoelectric ceramic 7, so that different film thicknesses can be formed; wherein the displacement lifting platform 36 is fixed on the upper end of the supporting seat 37 through a connecting bolt 38, and the displacement lifting platform 36 is also connected with the left angular displacement adjusting device 34 through a connecting plate 35;
the micro displacement generated by the piezoelectric ceramic 7 is transmitted to the output shaft 8 through the upward bending deformation of the deformation plate 9, the output shaft 8 is connected with the conversion disc 11 through a bolt, if a small displacement output route is executed, the conversion disc 11 is directly connected with the lower L-shaped plate 31, the output displacement of the piezoelectric ceramic 7 drives the lower L-shaped plate 31 to move upwards through transmission, so that the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30 is reduced, namely the film thickness is reduced, when the voltage applied by the piezoelectric ceramic 7 is reduced, the piezoelectric ceramic 7 is shortened, the elastic deformation of the deformation plate 9 is recovered to drive the output shaft 8 and the conversion disc 11 to return to the initial position, and then the lower L-shaped plate 31 connected with the conversion disc 11 is brought back to the initial position; if a large-displacement output route is executed, the conversion disk 11 is connected with the amplifying part II, and the output part of the amplifying part II is connected with the lower L-shaped plate 31, the output displacement of the piezoelectric ceramic 7 is transmitted and amplified to drive the lower L-shaped plate 31 to move upwards, so that the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30 is reduced, namely the film thickness is reduced, when the voltage applied by the piezoelectric ceramic 7 is reduced, the piezoelectric ceramic 7 is shortened, the elastic action of the deformation plate 9 drives the output shaft 8 and the conversion disk 11 to move back, and then the amplifying part II connected with the conversion disk 11 is brought back to the initial position, the advantages of no gap and elastic restoring force of the flexible hinge ensure that the amplifying part II is restored to the initial position under the driving of the conversion disk 11, and the lower L-shaped plate 31 is driven by the amplifying part.
Furthermore, the left upright post 2 and the right upright post 3 are symmetrically arranged by taking the center of the small base 1 as a reference;
furthermore, the disc spring 4 of the present invention has an outer diameter D of 18mm, an inner diameter D of 9.2mm, a thickness t of 0.45mm, an outer height H of 1.05mm, and an inner height H0＝0.6mm，H0/t＝1.3；
Furthermore, the external dimension of the piezoelectric ceramic 7 is 10 multiplied by 54mm, the nominal displacement is 60um, the nominal voltage is 150V, the maximum non-displacement output thrust is 3600N, the rigidity is 66N/um, the electrostatic capacity is 18 muF, and the resonant frequency of the piezoelectric ceramic is 28 KHz;
furthermore, the deformation plate 9 is made of 65Mn spring steel, the thickness is 2.5mm, and the width of the compression surface is 16 mm;
furthermore, the upper L-shaped plate 30 and the lower L-shaped plate 31 are made of light aluminum, the upper surfaces and the lower surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31 are required to be precisely ground, the machined surface roughness is 0.01um, and the parallelism tolerance between the upper surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31 is 0.4 um;
furthermore, the connecting plate 35 is of a T-shaped structure, the transverse part of the T-shaped structure is connected with the upper end of the displacement lifting table 36, and the vertical part of the T-shaped structure is connected with the angular displacement adjusting device 34;
furthermore, in the invention, the stroke of the displacement lifting platform 36 is 25mm, and the minimum resolution is 10 um;
furthermore, the output voltage of the piezoelectric ceramic power supply 39 is 0 to +150V, and the working environment temperature is 0 to 45 ℃.
The specific operation steps of the micro-displacement platform driven by the piezoelectric ceramics are carried out as follows:
s1, building and assembling the micro displacement platform according to the general assembly drawing;
s2, pre-tightening the piezoelectric ceramic 7 to ensure that the pre-tightening force is the same each time and the compression displacement of the disc spring 4 is the same; calibrating the output displacement of the lower L-shaped plate 31 of the motion execution part in two implementation routes of small displacement (no amplification) and large displacement (amplification); the parallelism error of the lower L-shaped plate 31 and the upper L-shaped plate 30 is measured by using a dial gauge, then the parallelism error is corrected by the angular displacement adjusting device 34, the parallelism between the upper planes of the upper L-shaped plate 30 and the lower L-shaped plate 31 meets the tolerance requirement, and the initial film thickness between the upper L-shaped plate 30 and the lower L-shaped plate 31 is h by moving the upper L-shaped plate 30 by using the displacement lifting platform 360；
S3, adjusting the preload bolt 10 to make the disc spring 4 compressed and deformed, when the compression quantity δ of the disc spring is 0.85H0When the piezoelectric ceramic 7 reaches the expected pre-tightening state, after the piezoelectric ceramic 7 is powered on and voltage is applied, the piezoelectric ceramic 7 is stretched and deformed, so that the deformation plate 9 is elastically deformed, and the generated micro displacement is output through the output shaft 8;
s4, when selecting to execute a small displacement route, directly transmitting the displacement of the output shaft 8 to a left movement executing part through the conversion disk 11 without an amplifying mechanism, enabling the lower L-shaped plate 31 to move upwards, thereby reducing the film thickness between the lower L-shaped plate 31 and the upper L-shaped plate 30, obtaining a time domain reflection signal of an oil film or a water film by measuring through the ultrasonic probe 33, transmitting the time domain reflection signal to the PC42 through the ultrasonic pulse transmitting/receiving instrument 40 and the oscilloscope 41, then carrying out online fast Fourier transform on the reflection signal through a calculation module in the PC42 to obtain a frequency domain curve graph of the reflection signal, finally carrying out data processing to obtain a first measured film thickness value, carrying out multiple measurements on the fixed film thickness, and obtaining the difference between the measured film thickness value h and a theoretical film thickness value h' through an arithmetic mean deviation formula; adjusting the power supply voltage of the piezoelectric ceramic 7 for multiple times, changing the distance h' between the lower L-shaped plate 31 and the upper L-shaped plate 30, namely the theoretical film thickness, obtaining a measured film thickness value h through the ultrasonic probe 33, instruments and arithmetic mean deviation, and checking the precision of the ultrasonic probe 33 in measuring the fixed film thickness;
s5, when the large displacement route is selected, the micro displacement output from the output shaft 8 needs to pass through the amplifying mechanism, that is, the amplified displacement is transmitted to the right motion executing part through the two-stage transmission and the two-stage amplification in the amplifying mechanism, so that the lower L-shaped plate 31 moves upward, thereby reducing the film thickness between the lower L-shaped plate 31 and the upper L-shaped plate 30, and then measuring a time domain reflection signal of an oil film or a water film by the ultrasonic probe 33 in the measuring part, transmitting to the PC42 via the ultrasonic pulse transmitter/receiver 40 and the oscilloscope 41, then, the calculation module in the PC42 performs fast Fourier transform on the reflected signal to obtain a frequency domain curve graph of the reflected signal, and finally performs data processing to obtain a first film thickness measurement value, measuring the fixed film thickness for multiple times, and obtaining the difference between the measured film thickness value h and the theoretical film thickness value h' by using an arithmetic mean deviation formula; the power supply voltage of the piezoelectric ceramic 7 is adjusted for a plurality of times, the distance h' between the lower L-shaped plate 31 and the upper L-shaped plate 30, namely the theoretical film thickness, is changed, the measured film thickness value h is obtained through the ultrasonic probe 33, instruments and arithmetic mean deviation, and the precision of the ultrasonic probe 33 for measuring the fixed film thickness is checked.
Compared with the prior art, the invention has the following beneficial effects:
1. the device of the invention has the alternatives that: compared with the traditional arrangement mode that the piezoelectric ceramics are nested in the amplifying mechanism, the piezoelectric ceramics are independently arranged as the driver, so that the flexibility and the replaceability of the mechanism are improved, the ceramics with different sizes can be put in, the amplifying mechanism can be replaced, and different combinations are realized; in addition, the piezoelectric ceramic driver has the advantages of simple structure, small size, high precision and good dynamic property;
2. the invention overcomes the defect that the piezoelectric ceramic can only output micro displacement, and can realize two working modes according to requirements: high-precision micro-displacement output is realized within the stroke range of the piezoelectric ceramics, and nanoscale displacement output is realized; amplifying the output displacement of the two-stage amplification mechanism to obtain displacement output with a large measuring range;
3. the invention can realize the stepless amplification of the output displacement of the piezoelectric ceramics: the amplification factor of the first-stage amplification mechanism is 1/tan gamma, and the amplification factor can be adjusted by changing the input angle gamma to realize stepless amplification, so that the micro-displacement platform realizes multi-scale displacement output from nanometer to millimeter;
4. the piezoelectric ceramic of the invention always works under constant pretightening force: the piezoelectric ceramic is pre-tightened under the combined action of the pre-tightening bolt and the disc spring, so that the piezoelectric ceramic is stretched after being electrified, the deformation plate generates elastic deformation, and the output of micro displacement is realized; the disc spring is used as a main part for pre-tightening the piezoelectric ceramics, has the advantages of small deformation and large output force, can apply pre-tightening force to the piezoelectric ceramics in a narrow space, and can ensure that the pre-tightening force applied to the piezoelectric ceramics in working is constant when the disc spring has a certain deformation amount, thereby being beneficial to ensuring the repeated movement precision of the piezoelectric ceramics;
5. the device of the invention can automatically return to the original position after the experiment is finished: the deformation plate (65Mn spring steel) not only plays a role in assisting pre-tightening when the piezoelectric ceramic is stretched, but also can enable the moving part to return to the original position after the experiment is finished; when the driving voltage is 0 after the experiment is finished, the piezoelectric ceramic is shortened, the elastic recovery action of the deformation plate drives the output shaft and the conversion disc to return to the initial position, and then the lower L-shaped plate connected with the conversion disc is driven to return to the initial position; in addition, the advantages of no gap, elastic restoring force and the like of the flexible hinge also ensure that the moving part in the amplifying part returns to the original position when the driving voltage is 0;
6. the invention can effectively reduce parasitic displacement: the amplifying part adopts a mode of combining a common hinge and a flexible hinge, the common hinge has high transmission efficiency, but parasitic displacement exists, and the deformation of the flexible hinge is utilized to eliminate; the first-stage amplification mechanism and the second-stage amplification mechanism are symmetrically distributed and also have the advantage of eliminating parasitic displacement.
Description of the drawings:
fig. 1 is a schematic view of the overall structure of an apparatus according to the present invention, in which: (a) distribution diagram of the whole structure, (b) enlarged schematic diagram of part I, II, and (c) top view of part structure.
FIG. 2 is a schematic diagram of an embodiment of the apparatus to which the present invention relates, wherein: (a) a schematic diagram of a small displacement (without magnification), and (b) a schematic diagram of a large displacement (with magnification).
Fig. 3 is a schematic view of a driving portion of an apparatus according to the present invention, in which: (a) an isometric view of the drive portion, and (b) a front view of the drive portion.
Fig. 4 is a schematic diagram of an implementation of the apparatus according to the invention.
Fig. 5 is a schematic view of a measuring part of the apparatus according to the present invention.
Fig. 6 is a schematic view of an enlarged portion of the apparatus to which the invention relates, wherein: (a) a structure view of an enlarged part, and (b) a schematic view of the enlarged part.
Fig. 7 is a schematic view of a switching compression mechanism of the apparatus according to the present invention, in which (a) an enlarged schematic view of the switching compression mechanism and (b) a schematic view of stepless enlargement.
Fig. 8 is a schematic diagram of the characteristic curve of the disc spring of the device according to the invention.
Fig. 9 is a schematic diagram of the voltage-displacement calibration of the device to which the present invention relates.
FIG. 10 is a schematic illustration of the parallelism measurement of an apparatus according to the invention, in which: (a) a schematic diagram of parallelism measurement, (b) a schematic diagram of two mutually perpendicular lines on the upper surface of the upper L-shaped plate, and (c) a schematic diagram of the DF line in the Z direction.
FIG. 11 is a schematic diagram of the measurement of the reflection coefficient of the device according to the present invention, wherein: (a) measurement in air media (solving for the frequency characteristics of the incident wave), (b) measurement in oil (water) media (solving for the frequency characteristics of the reflected wave).
In the figure: the main structure of the device comprises four parts: the device comprises a driving part I, an amplifying part II, a movement executing part III and a measuring part IV, wherein the main structure of the driving part I comprises a 1-small base, a 2-left upright post, a 3-right upright post, a 4-disc spring, a 5-disc spring gasket, a 6-piezoelectric ceramic shell, a 7-piezoelectric ceramic, an 8-output shaft, a 9-deformation plate, a 10-pretightening bolt, an 11-conversion disc, a 12-locking nut gasket, a 13-locking nut, a 14-locking nut M10, a 15-locking nut gasket M10 and a 39-piezoelectric ceramic power supply; the main structure of the amplifying part II comprises 16-connecting parts (connecting bolts, connecting gaskets and connecting nuts), 17-driving rods 1, 18-intermediate rods, 19-driving rods 2, 20-U-shaped rod guide rails, 21-first-stage amplifying mechanisms, 22-conversion compression mechanisms (221-springs, 222-trapezoidal blocks, 223-adjusting nuts and 224-locking nuts), 23-U-shaped rods, 24-second-stage amplifying mechanisms, 25-hinged supports, 26-pin shafts, 27-hinged support supports, 28-guide rails and 29-trapezoidal block supports; the motion execution part III comprises a left motion execution part and a right motion execution part which adopt the same structure, but when small displacement output is carried out, the driving part I is directly connected with the left motion execution part, but when large displacement output is carried out, the driving part I is connected with the amplifying part II to transfer the displacement to the right motion execution part; the main structure of the right movement executing part comprises an upper L-shaped plate 30, a lower L-shaped plate 31, an oil groove 32, an angular displacement adjusting device 34, a connecting plate 35, a displacement lifting platform 36, a supporting seat 37 and a connecting bolt 38; the main structure of the measurement part IV comprises a 33-ultrasonic probe, a 40-ultrasonic pulse transmitting/receiving instrument, a 41-oscilloscope, a 42-PC, a 43-lead and a 44-large base.
The specific implementation mode is as follows:
the invention is further described by the following examples in conjunction with the accompanying drawings.
Example 1:
the micro-displacement platform driven by piezoelectric ceramics is realized by the following technical scheme:
a micro displacement platform driven by piezoelectric ceramics comprises a main body structure which comprises four parts: the device comprises a driving part I, an amplifying part II, a movement executing part III and a measuring part IV, wherein the main structure of the driving part I comprises a 1-small base, a 2-left upright post, a 3-right upright post, a 4-disc spring, a 5-disc spring gasket, a 6-piezoelectric ceramic shell, a 7-piezoelectric ceramic, an 8-output shaft, a 9-deformation plate, a 10-pretightening bolt, an 11-conversion disc, a 12-locking nut gasket, a 13-locking nut, a 14-locking nut M10, a 15-locking nut gasket M10 and a 39-piezoelectric ceramic power supply; the main structure of the amplifying part II comprises 16-connecting parts (connecting bolts, connecting gaskets and connecting nuts), 17-driving rods 1, 18-intermediate rods, 19-driving rods 2, 20-U-shaped rod guide rails, 21-first-stage amplifying mechanisms, 22-conversion compression mechanisms (221-springs, 222-trapezoidal blocks, 223-adjusting nuts and 224-locking nuts), 23-U-shaped rods, 24-second-stage amplifying mechanisms, 25-hinged supports, 26-pin shafts, 27-hinged support supports, 28-guide rails and 29-trapezoidal block supports; the motion execution part III comprises a left motion execution part and a right motion execution part which adopt the same structure, but when small displacement output is carried out, the driving part I is directly connected with the left motion execution part, but when large displacement output is carried out, the driving part I is connected with the amplifying part II to transfer the displacement to the right motion execution part; the main structure of the right movement executing part comprises an upper L-shaped plate 30, a lower L-shaped plate 31, an oil groove 32, an angular displacement adjusting device 34, a connecting plate 35, a displacement lifting platform 36, a supporting seat 37 and a connecting bolt 38; the main structure of the measurement part IV comprises a 33-ultrasonic probe, a 40-ultrasonic pulse transmitting/receiving instrument, a 41-oscilloscope, a 42-PC, a 43-lead and a 44-large base.
The small base 1 is of a disc-shaped structure, a left upright column 2 and a right upright column 3 which have supporting and fixing functions are fixedly arranged on the upper surface of the small base 1, the upper ends of the left upright column 2 and the right upright column 3 are respectively provided with a thread structure and a pre-tightening bolt 10 which have pre-tightening functions, a deformation plate 9 is arranged between the left upright column 2 and the right upright column 3, one end of the deformation plate is fixed with the left upright column 2 through the pre-tightening bolt 10, and the other end of the deformation plate is fixed with the right upright column 3 through the pre; a circular groove is processed in the center of the small base 1, piezoelectric ceramics 7 are placed in the circular groove, and a piezoelectric ceramic shell 6 for protection and fixation is arranged outside the piezoelectric ceramics 7; the lower end of the piezoelectric ceramic 7 is respectively provided with a gasket 5 and a disc spring 4, and the disc spring 4 can apply a reaction force to the piezoelectric ceramic 7 for pre-tightening when being extruded; an output shaft 8 at the upper end of the piezoelectric ceramic 7 is in close contact with the lower side surface of the deformation plate 9, so that the piezoelectric ceramic 7 is pre-tightened by the pre-tightening bolt 10, the deformation plate 9 and the disc spring 4 together, and the piezoelectric ceramic 7 has better output performance after being subjected to pre-tightening force;
the pre-tightening process of the piezoelectric ceramic 7 is to adjust the pre-tightening bolt 10 to compress the deformation plate 9 and the piezoelectric ceramic 7 and further compress the disc spring 4, so that the deformation of the disc spring 4 reaches 0.85H0At this time, the disc spring 4 acts against the piezoelectric ceramic 7 to pre-tighten the piezoelectric ceramic 7; the micro displacement generated by the piezoelectric ceramic 7 is output through the elastic deformation of the deformation plate 9; the disc spring 4 is a soft disc spring, and the deformation amount delta is 0.80H0～0.90H0In the process, the variation range of the pretightening force is very small, the same pretightening force needs to be ensured during each pretightening, the influence on the experimental result caused by different pretightening forces in the experimental process is avoided, and the characteristic curve of the disc spring is shown in an attached figure 8; the deformation delta of the disc spring 4 is controlled by the same number of clockwise rotations of the left and right pre-tightening bolts 10, and the specific deformation can be measured by detecting the downward movement distance of the conversion disc 11 through a displacement sensor;
a locking nut 13 and a gasket 12 are arranged under the conversion disk 11; the tail end of the output shaft 8 is in threaded connection with the switching disc 11, the position of the switching disc 11 is fixed through the locking nut 13 and the gasket 12, when the switching disc 11 rotates to different positions along the axis of the output shaft 8, the switching disc 11 can be respectively connected with the left movement executing part and the amplifying part II through threaded holes in the switching disc 11, and two displacement executing routes can be respectively realized: if a small displacement output route (as shown in fig. 2 a) is executed, the piezoelectric ceramic 7 of the driving part I is extended under the action of the driving voltage to drive the output shaft 8 to move upwards, the conversion disk 11 in threaded connection with the output shaft 8 drives the lower L-shaped plate 31 of the left movement executing part to move upwards, so that different film thicknesses are formed with the upper L-shaped plate 30, and the ultrasonic probe 33 fixed on the surface of the upper L-shaped plate 30 receives signals and then transmits the signals to the measuring part IV for signal analysis, so that a film thickness value is obtained; if a large displacement output route (as shown in fig. 2 b) is executed, the piezoelectric ceramic 7 of the driving part I extends under the action of driving voltage to drive the output shaft 8 to move upwards, the conversion disc 11 in threaded connection with the output shaft 8 transmits the movement to the amplifying part II, and finally drives the lower L-shaped plate 31 of the right movement executing part to move upwards after displacement transmission and amplification, so that different film thicknesses are formed with the upper L-shaped plate 30, and the ultrasonic probe 33 fixed on the surface of the upper L-shaped plate 30 receives signals and transmits the signals to the measuring part IV for signal analysis, so that a film thickness value is obtained; the lead 43 connects the ultrasonic probe 33, the ultrasonic pulse transmitter/receiver 40, the oscilloscope 41 and the PC42 in sequence, and finally transmits the data acquired by the ultrasonic probe 33 to the PC 42;
the transmission rod 17, the middle rod 18 and the transmission rod 19 are sequentially connected, and the left end of the transmission rod 17 is connected with the conversion disc 11 through a bolt, wherein the rotation fulcrums of the transmission rod 17, the middle rod 18 and the transmission rod 19 are all arranged at the center of the rod body, only motion is transmitted, and motion displacement is not amplified; the right end of the transmission rod 19 is provided with a first-stage amplification mechanism 21 with a V-shaped structure, two sides of the first-stage amplification mechanism are respectively connected with a U-shaped rod 23 through a conversion compression mechanism 22, the bottom end of a trapezoid block support 29 is fixed on the upper surface of a large base 44 and is positioned right below the conversion compression mechanism 22 to support the conversion compression mechanism 22, the U-shaped rod 23 is positioned inside a U-shaped rod guide rail 20, the U-shaped rod guide rail 20 is positioned between the trapezoid block support 29 and a hinged support 27, the bottom end of the U-shaped rod guide rail is fixed on the upper surface of the large base 44 to ensure that the U-shaped rod 23 moves up and down in the vertical direction, a second-stage amplification mechanism 24 is positioned right above the U-shaped rod 23 and is connected with the U-shaped rod 23 through a bolt, two ends of the second-stage amplification mechanism 24 are connected with the hinged support 25 through a pin shaft 26, the hinged support 25 is fixed on, the output end of the second-stage amplifying mechanism 24 is located at the inner side of the guide rail 28, the bottom end of the guide rail 28 is also fixed on the upper surface of the large base 44 to ensure the displacement output in the vertical direction, the first-stage amplifying mechanism 21 and the second-stage amplifying mechanism 24 both comprise 5 flexible hinges made of circular arc spring steel material and are symmetrically distributed to effectively eliminate parasitic displacement, one flexible hinge is located at the input end of the first-stage amplifying mechanism 21, two flexible hinges are symmetrically distributed at two sides above the input end of the first-stage amplifying mechanism 21, the other two flexible hinges are symmetrically distributed at two sides of the output end of the second-stage amplifying mechanism 24, the first-stage amplifying mechanism 21 is used for amplifying displacement in the vertical direction and eliminating parasitic displacement in the horizontal direction, the transmission mode is one input and two outputs, and the first amplified displacement is transmitted to the U-shaped rod 23 through the conversion and compression mechanism 22, further transmitted to the second stage amplification mechanism 24 to continue amplifying the vertical displacement and eliminating the horizontal parasitic displacement; the first stage amplification mechanism 21 can realize stepless amplification (arbitrary ratio adjustment), and the combined use with the second stage amplification mechanism 24 can better realize ratio amplification; the stepless amplification of the first stage amplification mechanism 21 is mainly realized by converting the adjusting nut 223 in the compression mechanism 22, wherein the adjusting nut 223 and the screw rod are integrated, the size of the input angle is changed, and further the amplification factor is changed, and the locking nut 224 in the compression mechanism 22 locks the adjusted first stage amplification mechanism 21, and the specific principle is shown in fig. 7, such as: rotating the adjusting nut 223 to push the first-stage amplification mechanism 21 to reach A ' from the point A, and decreasing the input angle from gamma to gamma ', so that the amplification factor is increased from 1/tan gamma to 1/tan gamma ';
the angular displacement adjusting device 34 can drive the upper L-shaped plate 30 to rotate around the X direction (as shown in fig. 10 b), and can also rotate around the Y direction, so as to correct the parallelism error between the upper surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31; the displacement lifting platform 36 can adjust the initial position of the upper L-shaped plate 30 before the experiment, namely, the initial distance between the upper L-shaped plate 30 and the lower L-shaped plate 31 is controlled, the upper L-shaped plate 30 is kept static after the test is started, and the lower L-shaped plate 31 moves upwards along with the extension of the piezoelectric ceramic 7, so that different film thicknesses can be formed; wherein the displacement lifting platform 36 is fixed on the upper end of the supporting seat 37 through a connecting bolt 38, and the displacement lifting platform 36 is also connected with the left angular displacement adjusting device 34 through a connecting plate 35;
the micro displacement generated by the piezoelectric ceramic 7 is transmitted to the output shaft 8 through the upward bending deformation of the deformation plate 9, the output shaft 8 is connected with the conversion plate 11 through a bolt, if a small displacement output route is executed, the conversion plate 11 is directly connected with the lower L-shaped plate 31, the output displacement of the piezoelectric ceramic 7 drives the lower L-shaped plate 31 to move upwards through transmission, so that the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30 is reduced, namely the film thickness is reduced (shown in figure 4), when the voltage applied by the piezoelectric ceramic 7 is reduced, the piezoelectric ceramic 7 is shortened, the elastic deformation of the deformation plate 9 is recovered to drive the output shaft 8 and the conversion plate 11 to return to the initial position, and then the lower L-shaped plate 31 connected with the conversion plate 11 is brought back to the initial position; if a large-displacement output route is executed, the conversion disk 11 is connected with the amplifying part II, and the output part of the amplifying part II is connected with the lower L-shaped plate 31, the output displacement of the piezoelectric ceramic 7 is transmitted and amplified to drive the lower L-shaped plate 31 to move upwards, so that the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30 is reduced, namely the film thickness is reduced, when the voltage applied by the piezoelectric ceramic 7 is reduced, the piezoelectric ceramic 7 is shortened, the elastic action of the deformation plate 9 drives the output shaft 8 and the conversion disk 11 to move back, and then the amplifying part II connected with the conversion disk 11 is brought back to the initial position, the advantages of no gap and elastic restoring force of the flexible hinge ensure that the amplifying part II is restored to the initial position under the driving of the conversion disk 11, and the lower L-shaped plate 31 is driven by the amplifying part.
Further, in the embodiment, the left upright post 2 and the right upright post 3 are symmetrically arranged by taking the center of the small base 1 as a reference;
further, in this embodiment, the disc spring 4 has an outer diameter D of 18mm, an inner diameter D of 9.2mm, a thickness t of 0.45mm, an outer height H of 1.05mm, and an inner height H0＝0.6mm，H0/t＝1.3；
Furthermore, in the embodiment, the external dimension of the piezoelectric ceramic 7 is 10 × 10 × 54mm, the nominal displacement is 60um, the nominal voltage is 150V, the maximum non-displacement output thrust is 3600N, the rigidity is 66N/um, the electrostatic capacity is 18 μ F, and the resonant frequency of the piezoelectric ceramic is 28 KHz;
further, in the present embodiment, the material of the deformation plate 9 is 65Mn spring steel, the thickness is 2.5mm, and the width of the pressure receiving surface is 16 mm;
further, in this embodiment, the upper L-shaped plate 30 and the lower L-shaped plate 31 are made of light aluminum, the upper surfaces and the lower surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31 need to be precisely ground, the machined surface roughness is 0.01um, and the parallelism tolerance between the upper surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31 is 0.4 um;
further, in this embodiment, the connecting plate 35 is a T-shaped structure, a transverse portion of the T-shaped structure is connected to an upper end of the displacement lifting table 36, and a vertical portion of the T-shaped structure is connected to the angular displacement adjusting device 34;
further, in this embodiment, the stroke of the displacement elevating platform 36 is 25mm, and the minimum resolution is 10 um;
furthermore, in the embodiment, the output voltage of the piezoelectric ceramic power supply 39 is 0 to +150V, and the working environment temperature is 0 to 45 ℃.
When the method is used, the specific operation steps are performed as follows:
step 1, preparation work before experiment is as follows:
s1, before measurement, it should be ensured that the deformation amount of each compression of the disc spring 4 is the same, and the pretightening force of the piezoelectric ceramic 7 is the same: the deformation delta of the disc spring 4 is controlled by clockwise rotating the left and right pre-tightening bolts 10 for the same number of turns, and the specific deformation can be measured by detecting the downward movement distance of the conversion disc 11 through a displacement sensor; the output displacement of the lower L-shaped plate 31 of the motion execution part in the two implementation routes (as shown in fig. 2a and 2 b) of small displacement (no amplification) and large displacement (amplification) is calibrated as follows: applying voltages with different amplitudes to the piezoelectric ceramic 7, measuring the corresponding displacement change of the lower L-shaped plate 31 by using the installed high-precision eddy current displacement sensor, and drawing a relation curve graph of the voltage and the displacement according to the measurement principle shown in figure 9, so that the calibration of the output displacement of the lower L-shaped plate 31 is realized, and the displacement is used as the theoretical output displacement of the lower L-shaped plate 31 and can be used for calculating the theoretical thickness of an oil film or a water film subsequently;
s1, fixing the universal meter stand on the upper surface of the lower L-shaped plate 31, namely, taking the upper surface of the lower L-shaped plate 31 as a reference plane, and installing the dial indicator on the meter stand;
s2, contacting the measuring head of the indicating gauge with the upper surface of the upper L-shaped plate 30, moving the watch frame in parallel, making the measuring head move along two mutually perpendicular lines (GK and FD shown in figure 10 b) in the upper surface in sequence, and determining the parallelism error between the upper L-shaped plate 30 and the upper surface of the lower L-shaped plate 31 by measuring the parallelism error between the two lines and the reference plane;
s3, taking DF line as an example, if point F is the lowest point and point D is the highest point (as shown in fig. 10 c) in the Z-axis direction, as shown by the dial indicator, the parallelism error of the DF line with respect to the upper surface of the lower L-shaped plate 31 is Δ ═ LDEAnd tan α is equal to LDE/LFEThen the angle of inclination α is arctan (L)DE/LFE) The parallelism error and the inclination angle β of the GK line with respect to the upper surface of the lower L-shaped plate 31 can be calculated in the same manner;
s4, correcting the angle by the angular displacement adjusting device 34 according to the inclination angles α and β obtained in the step 3, and repeating the steps until the parallelism error of the upper surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31 is within the tolerance range;
and 3, checking the precision of the fixed film thickness measured by the ultrasonic probe, wherein the steps are as follows:
s1, after the assembly and construction of the experiment table and the preparation work (ensuring the pretightening force of the piezoelectric ceramic 7; calibrating the output displacement of the lower L-shaped plate 31 in the motion execution part; correcting the parallelism error of the upper surfaces of the upper L-shaped plate and the lower L-shaped plate) in the step 1-2 are completed, the displacement lifting table 36 is used for moving the upper L-shaped plate 30 to enable the initial film thickness between the upper L-shaped plate 30 and the lower L-shaped plate 31 to be h0Applying a voltage U to the piezoelectric ceramic 71Then, the piezoelectric ceramic 7 is deformed and elongated, so that elastic deformation of the deformation plate 9 is caused, the generated micro displacement is output through the output shaft 8, and the output displacement is divided into two execution paths through the conversion disk 11 to be output;
s2, if the small displacement path in FIG. 2a is executedA line that directly outputs the displacement of the piezoelectric ceramic 7 without passing through the amplification mechanism, since the switching disk 11 is bolted to the lower L-shaped plate 31 of the left-side movement performing part, the switching disk 11 drives the lower L-shaped plate 31 to move upward, thereby reducing the distance from the upper L-shaped plate 30, i.e., reducing the film thickness; according to the previous preparation, the voltage U is determined1The theoretical upward displacement of the lower L-shaped plate 31 is z1The theoretical film thickness h 'between the lower L-shaped plate 31 and the upper L-shaped plate 30'1＝(h0-z1) (ii) a The driving voltage of the piezoelectric ceramic 7 is 0-150V, the output displacement is 0-60 μm, and the minimum resolution of the driving voltage is 5mV, so that the minimum output displacement can reach 2 nm;
s3, transmitting the reflected signal (namely the reflected signal at the interface between the lower bottom surface of the upper L-shaped plate 30 and the lubricant) collected by the ultrasonic pulse transmitter/receiver 40 and the ultrasonic probe 33 into the oscilloscope 41 to obtain the time domain curve of the reflected signal, transmitting the time domain curve of the reflected signal into the PC42 through the USB connection line, and performing fast Fourier transform on the reflected signal by using a program of MATLAB software to obtain the frequency domain curve of the reflected signal;
s4, calculating the film thickness according to the following formula
In the formula: rho is the density of oil (water), c is the propagation speed of ultrasonic waves in the oil (water), f is the frequency, z' is the characteristic impedance of the aluminum block (obtained by looking up a related parameter table), and R is the reflection coefficient;
a) solving the reflection coefficient:
first, the frequency characteristics of the incident wave are determined: firstly, collecting time domain reflection signal A of aluminum plate-air interface by using ultrasonic proberefTransforming the time domain reflection signal into a frequency domain signal A using fast Fourier transformref(f) And as a reference signal, according to the formula (
z1Is the characteristic impedance of the aluminum plate, z2Is the characteristic impedance of air) to obtain the reflection coefficient R of the aluminum plate-air interfacerefThen A isref(f)＝I(f)RrefSo that incident wave I (f) is Aref(f)/Rref(as shown in FIG. 11 a);
then, an ultrasonic probe is used for collecting a time domain reflection signal A of the interface between the lower bottom surface of the upper aluminum plate and oil (or water), and the time domain reflection signal is converted into a frequency domain signal A (f) (as shown in the attached figure 11 b) by utilizing fast Fourier transform;
finally, the reflection coefficient of the interface between the lower bottom surface of the upper aluminum plate and oil (or water) can be obtained according to the reflection coefficient definition
And writing an MATLAB program to obtain the reflection coefficient R of the lower bottom surface of the upper aluminum plate and an oil (or water) interface.
b) The obtained reflection coefficient R is a frequency domain reflection signal, namely a function related to frequency, so that when the film thickness is calculated, a certain reflection coefficient value and a corresponding frequency need to be substituted, and the actual film thickness is calculated by the method;
s5, at U1The measured film thickness can be obtained at the driving voltage of (1), and the film thickness h 'can be fixed to the measured film thickness'1Multiple measurements are carried out to obtain the theoretical film thickness h'1Drawing multiple groups of actual film thicknesses h 'corresponding to the multiple groups of actual measured values'1Then the average film thickness h actually measured is obtained by using an arithmetic average deviation formula1；
S6, adjusting the voltage to U2The output displacement z of the lower L-shaped plate 31 at this time can be known from the preparation work2And theoretical value h 'of film thickness'2＝(h0-z2) And the theoretical film thickness h 'at that time was obtained in accordance with S3-S5'2Drawing multiple groups of actual film thicknesses h 'corresponding to the multiple groups of actual measured values'2Then the average film thickness h actually measured is obtained by using an arithmetic average deviation formula2；
S7, drawing a comparison curve graph of the average value h of a plurality of groups of fixed film thicknesses and the corresponding theoretical value h' according to the steps, and giving out the error and the precision of the ultrasonic probe 33 for measuring the plurality of groups of fixed film thicknesses;
s8, if the large displacement route shown in fig. 2b is implemented, that is, the output displacement of the piezoelectric ceramic 7 passes through the amplification mechanism, since the conversion disk 11 is connected with the transmission rod 17 by a bolt, the conversion disk 11 transfers the displacement to the amplification part II, the first-stage amplification mechanism 21 amplifies the input displacement and eliminates the parasitic displacement in the horizontal direction, the conversion compression mechanism 22 transfers the amplified displacement to the U-shaped rod 23, the U-shaped rod 23 transfers the displacement to the second-stage amplification mechanism 24, the displacement is continuously amplified and eliminated in the horizontal direction, and finally the displacement is transferred to the right-side motion implementation part to drive the lower L-shaped plate 31 to move upward, thereby reducing the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30, that is, reducing the film thickness; because the length m of the connecting rod in the first-stage amplification mechanism 21 is 15mm, the initial input angle γ is 30 °, the minimum input angle γ can be adjusted to 2.6 °, the deformation of the flexible hinge reaches the maximum n is 2mm, the amplification factor of the platform is 3 × 1/tan2.6 ° -66.06513, when the driving voltage is 150V, the output displacement of the piezoelectric ceramic 7 is 60um, and after amplification, the displacement finally output by the platform is 4 mm; the subsequent film thickness adjustment and data processing are the same as S3-S7, so that when a large displacement route is executed, a comparison curve graph of the average value h of a plurality of groups of fixed film thicknesses and the corresponding theoretical value h' and the error and the precision of the fixed film thickness measured by the ultrasonic probe 33 are obtained;
and S9, after the experiment is finished, the power supply is turned off, the experiment table and the experimental data are collated, and the precision and the error of the ultrasonic probe 33 in the process of measuring the fixed film thickness are given.
For solving the traditional mechanism amplification proportion singleness of enlargiing of piezoceramics, the replaceability is poor, output rigidity subalternation problem to combine ultrasonic transducer to measure the actual demand that the precision of the fixed membrane thickness need be checked, this embodiment has designed a novel piezoceramics micro displacement platform, and this platform has two kinds of execution routes: firstly, high-precision micro-displacement output is carried out within the stroke range of the piezoelectric ceramics; and secondly, in order to overcome the defect of small output displacement of the piezoelectric ceramics, the horizontal parasitic displacement of the piezoelectric ceramics is eliminated through two-stage transmission and two-stage amplification, and the vertical displacement is amplified in a stepless way (the amplification ratio can be adjusted at will), so that the unidirectional output displacement in a larger range is obtained. The platform has certain popularization and application values in the aspects of ultrasonic probe precision checking and micro-displacement output mechanisms.
The content of the present embodiment is a preferred embodiment, but the embodiment of the present embodiment is not limited to the above embodiments. After reading the above description, those skilled in the art will recognize that there are many variations, modifications, substitutions, combinations, and simplifications which may be made based on the principles of the present embodiments and therefore the scope of the present embodiments is defined by the appended claims.
Claims (9)
1. The utility model provides a micro displacement platform by piezoceramics drive which characterized in that the major structure includes four bibliographic categories: the device comprises a driving part I, an amplifying part II, a movement executing part III and a measuring part IV, wherein the main structure of the driving part I comprises a 1-small base, a 2-left upright post, a 3-right upright post, a 4-disc spring, a 5-disc spring gasket, a 6-piezoelectric ceramic shell, a 7-piezoelectric ceramic, an 8-output shaft, a 9-deformation plate, a 10-pretightening bolt, an 11-conversion disc, a 12-locking nut gasket, a 13-locking nut, a 14-locking nut M10, a 15-locking nut gasket M10 and a 39-piezoelectric ceramic power supply; the main structure of the amplifying part II comprises a 16-connecting part, a 17-transmission rod 1, an 18-middle rod, a 19-transmission rod 2, a 20-U-shaped rod guide rail, a 21-first-stage amplifying mechanism, a 22-conversion compression mechanism, a 23-U-shaped rod, a 24-second-stage amplifying mechanism, a 25-hinged support, a 26-pin shaft, a 27-hinged support, a 28-guide rail and a 29-trapezoidal block support; the motion execution part III comprises a left motion execution part and a right motion execution part which adopt the same structure, but when small displacement output is carried out, the driving part I is directly connected with the left motion execution part, but when large displacement output is carried out, the driving part I is connected with the amplifying part II to transfer the displacement to the right motion execution part; the main structure of the right movement executing part comprises an upper L-shaped plate 30, a lower L-shaped plate 31, an oil groove 32, an angular displacement adjusting device 34, a connecting plate 35, a displacement lifting platform 36, a supporting seat 37 and a connecting bolt 38; the main structure of the measurement part IV comprises a 33-ultrasonic probe, a 40-ultrasonic pulse transmitting/receiving instrument, a 41-oscilloscope, a 42-PC, a 43-lead and a 44-large base;
the small base 1 is of a disc-shaped structure, a left upright column 2 and a right upright column 3 which have supporting and fixing functions are fixedly arranged on the upper surface of the small base 1, the upper ends of the left upright column 2 and the right upright column 3 are respectively provided with a thread structure and a pre-tightening bolt 10 which have pre-tightening functions, a deformation plate 9 is arranged between the left upright column 2 and the right upright column 3, one end of the deformation plate is fixed with the left upright column 2 through the pre-tightening bolt 10, and the other end of the deformation plate is fixed with the right upright column 3 through the pre; a circular groove is processed in the center of the small base 1, piezoelectric ceramics 7 are placed in the circular groove, and a piezoelectric ceramic shell 6 for protection and fixation is arranged outside the piezoelectric ceramics 7; the lower end of the piezoelectric ceramic 7 is respectively provided with a gasket 5 and a disc spring 4, and the disc spring 4 can apply a reaction force to the piezoelectric ceramic 7 for pre-tightening when being extruded; an output shaft 8 at the upper end of the piezoelectric ceramic 7 is in close contact with the lower side surface of the deformation plate 9, so that the piezoelectric ceramic 7 is pre-tightened by the pre-tightening bolt 10, the deformation plate 9 and the disc spring 4 together, and the piezoelectric ceramic 7 has better output performance after being subjected to pre-tightening force;
a locking nut 13 and a gasket 12 are arranged under the conversion disk 11; the tail end of the output shaft 8 is in threaded connection with the switching disc 11, the position of the switching disc 11 is fixed through the locking nut 13 and the gasket 12, when the switching disc 11 rotates to different positions along the axis of the output shaft 8, the switching disc 11 can be respectively connected with the left movement executing part and the amplifying part II through threaded holes in the switching disc 11, and two displacement executing routes can be respectively realized: if a small displacement output route is executed, the piezoelectric ceramic 7 of the driving part I extends under the action of driving voltage to drive the output shaft 8 to move upwards, the conversion disc 11 in threaded connection with the output shaft 8 drives the lower L-shaped plate 31 of the left movement executing part to move upwards, so that different film thicknesses are formed with the upper L-shaped plate 30, and an ultrasonic probe 33 fixed on the surface of the upper L-shaped plate 30 receives signals and then transmits the signals to the measuring part IV for signal analysis, so that a film thickness value is obtained; if a large-displacement output route is executed, the piezoelectric ceramic 7 of the driving part I extends under the action of driving voltage to drive the output shaft 8 to move upwards, the conversion disc 11 in threaded connection with the output shaft 8 transfers the movement to the amplifying part II, and finally drives the lower L-shaped plate 31 of the right-side movement executing part to move upwards after the displacement transfer and amplification, so that different film thicknesses are formed with the upper L-shaped plate 30, and an ultrasonic probe 33 fixed on the surface of the upper L-shaped plate 30 receives signals and then transfers the signals to the measuring part IV for signal analysis, so that a film thickness value is obtained; the lead 43 connects the ultrasonic probe 33, the ultrasonic pulse transmitter/receiver 40, the oscilloscope 41 and the PC42 in sequence, and finally transmits the data acquired by the ultrasonic probe 33 to the PC 42;
the transmission rod 17, the middle rod 18 and the transmission rod 19 are sequentially connected, and the left end of the transmission rod 17 is connected with the conversion disc 11 through a bolt, wherein the rotation fulcrums of the transmission rod 17, the middle rod 18 and the transmission rod 19 are all arranged at the center of the rod body, only motion is transmitted, and motion displacement is not amplified; the right end of the transmission rod 19 is provided with a first-stage amplification mechanism 21 with a V-shaped structure, two sides of the first-stage amplification mechanism are respectively connected with a U-shaped rod 23 through a conversion compression mechanism 22, the bottom end of a trapezoid block support 29 is fixed on the upper surface of a large base 44 and is positioned right below the conversion compression mechanism 22 to support the conversion compression mechanism 22, the U-shaped rod 23 is positioned inside a U-shaped rod guide rail 20, the U-shaped rod guide rail 20 is positioned between the trapezoid block support 29 and a hinged support 27, the bottom end of the U-shaped rod guide rail is fixed on the upper surface of the large base 44 to ensure that the U-shaped rod 23 moves up and down in the vertical direction, a second-stage amplification mechanism 24 is positioned right above the U-shaped rod 23 and is connected with the U-shaped rod 23 through a bolt, two ends of the second-stage amplification mechanism 24 are connected with the hinged support 25 through a pin shaft 26, the hinged support 25 is fixed on, the output end of the second-stage amplifying mechanism 24 is located at the inner side of the guide rail 28, the bottom end of the guide rail 28 is also fixed on the upper surface of the large base 44 to ensure the displacement output in the vertical direction, the first-stage amplifying mechanism 21 and the second-stage amplifying mechanism 24 both comprise 5 flexible hinges made of circular arc spring steel material and are symmetrically distributed to effectively eliminate parasitic displacement, one flexible hinge is located at the input end of the first-stage amplifying mechanism 21, two flexible hinges are symmetrically distributed at two sides above the input end of the first-stage amplifying mechanism 21, the other two flexible hinges are symmetrically distributed at two sides of the output end of the second-stage amplifying mechanism 24, the first-stage amplifying mechanism 21 is used for amplifying displacement in the vertical direction and eliminating parasitic displacement in the horizontal direction, the transmission mode is one input and two outputs, and the first amplified displacement is transmitted to the U-shaped rod 23 through the conversion and compression mechanism 22, further transmitted to the second stage amplification mechanism 24 to continue amplifying the vertical displacement and eliminating the horizontal parasitic displacement; the first stage amplification mechanism 21 can realize stepless amplification, and the combined use with the second stage amplification mechanism 24 can better realize proportional amplification; the stepless amplification of the first stage amplification mechanism 21 is mainly realized by converting the adjusting nut 223 in the compression mechanism 22, wherein the adjusting nut 223 is integrated with the screw rod, the size of the input angle is changed, and further the change of the amplification factor is realized, and the locking nut 224 in the compression mechanism 22 locks the adjusted first stage amplification mechanism 21, such as: rotating the adjusting nut 223 to push the first-stage amplification mechanism 21 to reach A ' from the point A, and decreasing the input angle from gamma to gamma ', so that the amplification factor is increased from 1/tan gamma to 1/tan gamma ';
the angular displacement adjusting device 34 can drive the upper L-shaped plate 30 to rotate around the X direction, and can also rotate around the Y direction, so as to correct the parallelism error between the upper surfaces of the upper L-shaped plate 30 and the lower L-shaped plate 31; the displacement lifting platform 36 can adjust the initial position of the upper L-shaped plate 30 before the experiment, namely, the initial distance between the upper L-shaped plate 30 and the lower L-shaped plate 31 is controlled, the upper L-shaped plate 30 is kept static after the test is started, and the lower L-shaped plate 31 moves upwards along with the extension of the piezoelectric ceramic 7, so that different film thicknesses can be formed; wherein the displacement lifting platform 36 is fixed on the upper end of the supporting seat 37 through a connecting bolt 38, and the displacement lifting platform 36 is also connected with the left angular displacement adjusting device 34 through a connecting plate 35;
the micro displacement generated by the piezoelectric ceramic 7 is transmitted to the output shaft 8 through the upward bending deformation of the deformation plate 9, the output shaft 8 is connected with the conversion disc 11 through a bolt, if a small displacement output route is executed, the conversion disc 11 is directly connected with the lower L-shaped plate 31, the output displacement of the piezoelectric ceramic 7 drives the lower L-shaped plate 31 to move upwards through transmission, so that the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30 is reduced, namely the film thickness is reduced, when the voltage applied by the piezoelectric ceramic 7 is reduced, the piezoelectric ceramic 7 is shortened, the elastic deformation of the deformation plate 9 is recovered to drive the output shaft 8 and the conversion disc 11 to return to the initial position, and then the lower L-shaped plate 31 connected with the conversion disc 11 is brought back to the initial position; if a large-displacement output route is executed, the conversion disk 11 is connected with the amplifying part II, and the output part of the amplifying part II is connected with the lower L-shaped plate 31, the output displacement of the piezoelectric ceramic 7 is transmitted and amplified to drive the lower L-shaped plate 31 to move upwards, so that the distance between the lower L-shaped plate 31 and the upper L-shaped plate 30 is reduced, namely the film thickness is reduced, when the voltage applied by the piezoelectric ceramic 7 is reduced, the piezoelectric ceramic 7 is shortened, the elastic action of the deformation plate 9 drives the output shaft 8 and the conversion disk 11 to move back, and then the amplifying part II connected with the conversion disk 11 is brought back to the initial position, the advantages of no gap and elastic restoring force of the flexible hinge ensure that the amplifying part II is restored to the initial position under the driving of the conversion disk 11, and the lower L-shaped plate 31 is driven by the amplifying part.
2. The micro-displacement platform driven by piezoceramics according to claim 1, characterized in that the pretension process of piezoceramics 7 is that adjusting pretension bolt 10 compresses deformation plate 9 and piezoceramics 7, and then compresses disc spring 4, so that the deformation of disc spring 4 reaches 0.85H0At this time, the disc spring 4 acts against the piezoelectric ceramic 7 to pre-tighten the piezoelectric ceramic 7; the micro displacement generated by the piezoelectric ceramic 7 is output through the elastic deformation of the deformation plate 9; the disc spring 4 is a soft disc spring, and the deformation amount delta is 0.80H0～0.90H0In the process, the variation range of the pretightening force is very small, the same pretightening force needs to be ensured during each pretightening, and the influence on the experimental result caused by different pretightening forces in the experimental process is avoided; the deformation delta of the disc spring 4 is controlled by the same number of clockwise rotations of the left and right pretension bolts 10, and the specific deformation can be measured by detecting the downward movement distance of the conversion disc 11 through a displacement sensor.
3. The micro displacement platform driven by piezoceramics according to claim 1, characterized in that left pillar 2 and right pillar 3 are set up symmetrically with respect to the center of small base 1.
4. A micro-displacement platform driven by piezoelectric ceramics according to any of claims 1-3, characterized in that the outer diameter D of the disc spring 4 is 18mm, the inner diameter D is 9.2mm, the thickness t is 0.45mm, the outer height H is 1.05mm, and the inner height H is 1.05mm0＝0.6mm，H01.3,/t; the external dimension of the piezoelectric ceramic 7 is 10 multiplied by 54mm, the nominal displacement is 60um, the nominal voltage is 150V, the maximum output thrust without displacement is 3600N, the rigidity is 66N/um, the electrostatic capacity is 18 muF, and the resonant frequency of the piezoelectric ceramic is 28 KHz; the deformation plate 9 is made of 65Mn spring steel, the thickness is 2.5mm, and the width of the compression surface is 16 mm; go up L shaped plate 30 and the material of L shaped plate 31 down and be light metal aluminum material, go up L shaped plate 30 and the upper surface and the lower surface of L shaped plate 31 down all need carry out the precision grinding, and the roughness after the processing is 0.01um, and the depth of parallelism tolerance between the upper surface of going up L shaped plate 30 and L shaped plate 31 down is 0.4 um.
5. The micro displacement platform driven by piezoceramics of claim 4, characterized in that the connecting plate 35 is a T-shaped structure, the lateral part of the T-shaped structure is connected with the upper end of the displacement elevating platform 36, the vertical part of the T-shaped structure is connected with the angular displacement adjusting device 34.
6. A micro-displacement platform driven by piezoelectric ceramics according to any of claims 1-3, characterized in that the stroke of the displacement elevating platform 36 is 25mm, the minimum resolution is 10 um; the output voltage of the piezoelectric ceramic power supply 39 is 0 to +150V, and the working environment temperature is 0-45 ℃.
7. A micro-displacement platform driven by piezoelectric ceramics according to any of claims 1-3, characterized in that the specific operation steps are performed as follows:
s1, building and assembling the micro displacement platform according to the general assembly drawing;
s2, pre-tightening the piezoelectric ceramic 7 to ensure that the pre-tightening force is the same each time and the compression displacement of the disc spring 4 is the same; output displacement of lower L-shaped plate 31 of motion executing part in two implementation routes of small displacement and large displacementCalibrating; the parallelism error of the lower L-shaped plate 31 and the upper L-shaped plate 30 is measured by using a dial gauge, then the parallelism error is corrected by the angular displacement adjusting device 34, the parallelism between the upper planes of the upper L-shaped plate 30 and the lower L-shaped plate 31 meets the tolerance requirement, and the initial film thickness between the upper L-shaped plate 30 and the lower L-shaped plate 31 is h by moving the upper L-shaped plate 30 by using the displacement lifting platform 360；
S3, adjusting the preload bolt 10 to make the disc spring 4 compressed and deformed, when the compression quantity δ of the disc spring is 0.85H0When the piezoelectric ceramic 7 reaches the expected pre-tightening state, after the piezoelectric ceramic 7 is powered on and voltage is applied, the piezoelectric ceramic 7 is stretched and deformed, so that the deformation plate 9 is elastically deformed, and the generated micro displacement is output through the output shaft 8;
s4, when selecting to execute a small displacement route, directly transmitting the displacement of the output shaft 8 to a left movement executing part through the conversion disk 11 without an amplifying mechanism, enabling the lower L-shaped plate 31 to move upwards, thereby reducing the film thickness between the lower L-shaped plate 31 and the upper L-shaped plate 30, obtaining a time domain reflection signal of an oil film or a water film by measuring through the ultrasonic probe 33, transmitting the time domain reflection signal to the PC42 through the ultrasonic pulse transmitting/receiving instrument 40 and the oscilloscope 41, then carrying out online fast Fourier transform on the reflection signal through a calculation module in the PC42 to obtain a frequency domain curve graph of the reflection signal, finally carrying out data processing to obtain a first measured film thickness value, carrying out multiple measurements on the fixed film thickness, and obtaining the difference between the measured film thickness value h and a theoretical film thickness value h' through an arithmetic mean deviation formula; adjusting the power supply voltage of the piezoelectric ceramic 7 for multiple times, changing the distance h' between the lower L-shaped plate 31 and the upper L-shaped plate 30, namely the theoretical film thickness, obtaining a measured film thickness value h through the ultrasonic probe 33, instruments and arithmetic mean deviation, and checking the precision of the ultrasonic probe 33 in measuring the fixed film thickness;
s5, when the large displacement route is selected, the micro displacement output from the output shaft 8 needs to pass through the amplifying mechanism, that is, the amplified displacement is transmitted to the right motion executing part through the two-stage transmission and the two-stage amplification in the amplifying mechanism, so that the lower L-shaped plate 31 moves upward, thereby reducing the film thickness between the lower L-shaped plate 31 and the upper L-shaped plate 30, and then measuring a time domain reflection signal of an oil film or a water film by the ultrasonic probe 33 in the measuring part, transmitting to the PC42 via the ultrasonic pulse transmitter/receiver 40 and the oscilloscope 41, then, the calculation module in the PC42 performs fast Fourier transform on the reflected signal to obtain a frequency domain curve graph of the reflected signal, and finally performs data processing to obtain a first film thickness measurement value, measuring the fixed film thickness for multiple times, and obtaining the difference between the measured film thickness value h and the theoretical film thickness value h' by using an arithmetic mean deviation formula; the power supply voltage of the piezoelectric ceramic 7 is adjusted for a plurality of times, the distance h' between the lower L-shaped plate 31 and the upper L-shaped plate 30, namely the theoretical film thickness, is changed, the measured film thickness value h is obtained through the ultrasonic probe 33, instruments and arithmetic mean deviation, and the precision of the ultrasonic probe 33 for measuring the fixed film thickness is checked.
8. The micro-displacement platform driven by piezoelectric ceramics according to claim 1 is characterized in that the preparation before experiment mainly comprises: pre-tightening the piezoelectric ceramic to ensure that the pre-tightening force is the same each time and the compression displacement of the disc spring is the same; calibrating the output displacement of the lower L-shaped plate of the motion execution part in the small displacement implementation route and the large displacement implementation route respectively; correcting the parallelism error between the upper planes of the upper L-shaped plate and the lower L-shaped plate by using an angular displacement adjusting device fixed on the upper L-shaped plate; the experimental process comprises the following steps: when the small displacement output is selected to be executed, namely an amplification mechanism is not needed, the displacement generated by the piezoelectric ceramic is directly transmitted to the lower L-shaped plate, so that the lower L-shaped plate moves upwards, namely the thickness of an oil film or a water film between the lower L-shaped plate and the upper L-shaped plate is changed, the thickness of the film is measured through the measuring part, and finally the precision of the fixed film thickness measured by the ultrasonic probe is checked through an error processing method, namely a calculation mode of arithmetic mean deviation is adopted; when large displacement output is selected to be executed, namely the displacement generated by the piezoelectric ceramic is transmitted to the amplifying mechanism through the amplifying mechanism, the input displacement of the piezoelectric ceramic is transmitted and amplified through the two-stage transmission and the two-stage amplifying mechanism, the amplified displacement is transmitted to the lower L-shaped plate through the output end of the amplifying mechanism, so that the lower L-shaped plate moves upwards, namely the film thickness between the lower L-shaped plate and the upper L-shaped plate is changed, the film thickness is measured through the measuring part, and finally the accuracy of the fixed film thickness measured by the ultrasonic probe is checked through an error processing method, namely a calculation mode of arithmetic mean deviation is adopted.
9. The micro-displacement platform driven by piezoelectric ceramics according to claim 1, wherein the left upright post and the right upright post are symmetrically arranged with reference to the center of the small base; the outer diameter D of the disc spring is 18mm, the inner diameter D is 9.2mm, the thickness t is 0.45mm, the outer height H is 1.05mm, and the inner height H is0＝0.6mm，H01.3,/t; the external dimension of the piezoelectric ceramic is 10 multiplied by 54mm, the nominal displacement is 60um, the nominal voltage is 150V, the maximum output thrust without displacement is 3600N, the rigidity is 66N/um, the electrostatic capacity is 18 muF, and the resonant frequency of the piezoelectric ceramic is 28 KHz; the deformation plate is made of 65Mn spring steel, the thickness of the deformation plate is 2.5mm, and the width of the compression surface is 16 mm; the upper L-shaped plate and the lower L-shaped plate are made of light metal aluminum materials, the upper surface and the lower surface of the upper L-shaped plate and the lower L-shaped plate are required to be precisely ground, the machined surface roughness is 0.01um, and the parallelism tolerance between the upper surfaces of the upper L-shaped plate and the lower L-shaped plate is 0.4 um; the connecting plate is of a T-shaped structure, the transverse part of the T-shaped structure is connected with the upper end of the displacement lifting platform, and the vertical part of the T-shaped structure is connected with the angular displacement adjusting device; the stroke of the displacement lifting platform is 25mm, and the minimum resolution is 10 um; the output voltage of the piezoelectric ceramic power supply is 0 to +150V, and the working environment temperature is 0-45 ℃.
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