CN102435353A - Force sensor with two-stage force resolution based on flexible Roberts mechanism - Google Patents
Force sensor with two-stage force resolution based on flexible Roberts mechanism Download PDFInfo
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- CN102435353A CN102435353A CN2011102745227A CN201110274522A CN102435353A CN 102435353 A CN102435353 A CN 102435353A CN 2011102745227 A CN2011102745227 A CN 2011102745227A CN 201110274522 A CN201110274522 A CN 201110274522A CN 102435353 A CN102435353 A CN 102435353A
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Abstract
The invention discloses a force sensor with two-stage force resolution based on a flexible Roberts mechanism. The eddy current displacement sensor is arranged on the bracket in a holding manner; the bracket is fixed with the sensitive body through a screw; the displacement detection piece is fixed on a first platform of the sensitive body through a screw; one end of the probe penetrates through the through hole of the front plate surface of the sensitive body and then is installed in the threaded hole of the first platform. The sensitive body of the invention is processed into two groups of flexible Roberts linear motion mechanisms by adopting a wire cut electrical discharge machining mode. The two groups of flexible mechanisms are symmetrically arranged, so that high-precision linear motion of the motion platform is guaranteed, and parasitic errors of the mechanisms are reduced. Meanwhile, as a sensitive structural part of the force sensor, the sensitive body adopts one part and does not need to be assembled, so that the problems of friction, clearance and the like caused by assembly of the traditional force sensor are effectively avoided. The sensor of the present invention can effectively achieve two levels of force resolution, which cannot be achieved by conventional force sensors.
Description
Technical field
The present invention relates to a kind of force transducer, more particularly say, be meant a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism.
Background technology
In the nano-imprint process process, if adopt different imprint process (hot padding and ultraviolet stamping), the scope of its force of impression is different.Realize real-time monitoring, just must have a kind of force transducer that can satisfy different range force of impression and different resolution requirement force of impression in the moulding process.
In scanning probe microscopy, when probe scanning has different hardness surperficial, just need probe have variable rigidity and resolution.
Existing force transducer is based on the metering system of foil gauge mostly; Foil gauge is attached to the surface of testee; When foil gauge produces microdeformation; Convert deformation signal into voltage signal through resistance bridge, analog voltage signal is converted into the digital signal of being convenient to Computer Processing through AD converter again.Some other force transducer is like piezoelectric force transducer, pressure resistance type force transducer, capacitance-type force sensor and optical force sensor.
Piezoelectric force transducer is through piezoelectric under external force, and the principle that can produce a voltage signal comes power is measured, but the shortcoming of this force transducer is the increase along with external force, and the electric signal of piezoelectric unit output will be decayed fast; The pressure resistance type force transducer is through pressure drag material under external force, and the significant principle that changes can take place its resistance measures external force, and this force transducer receives neighbourhood noise, and is very big like the influence of temperature etc.; The capacitance-type force sensor utilization under external force; Electric capacity up and down between two sheet metals displacement change; Thereby the principle that causes the change of capacitance size is measured external force; The force transducer of this form has been widely used in micro electronmechanical (MEMS) field at present, is used to make high-precision Micro-force sensor; The optical force sensor detects semi-girder distortion under external force through optical device, and the principle that optical signalling converts voltage signal into is measured external force, and for example atomic force microscope (AFM) is exactly to utilize such principle to come work.
Take a broad view of existing force transducer, the force transducer of every kind of form all has its relative merits, and the specific occasion needs to adopt the sensor of particular form down.But still there is following some deficiency in existing force transducer: (1) existing force transducer can't be realized two-stage even multistage power resolution, and its measurement range receives the restriction of resolution.Under the situation that multistage power resolution requirement is arranged, can't satisfy measurement requirement; (2) the output signal of existing force transducer all is a faint simulating signal, receives influence of environmental noise very big; (3) precision and the resolution of existing force transducer are subject to the force measurement scope.That is to say that when the precision of sensor and resolution improved, the measurement range of sensor will reduce, vice versa.
Summary of the invention
The force transducer that the purpose of this invention is to provide a kind of two-stage power resolution based on flexible Roberts mechanism, this force transducer adopt two groups of flexible Roberts mechanisms to overlap, and utilize on the substrate deformation mechanism of self leaf spring to realize force measurement; On the other hand, the displacement of adopting eddy current displacement sensor to measure moving component, rather than the distortion of leaf spring self in the Roberts mechanism, thus reduced the interference of outside noise signal, improved the measuring accuracy of force transducer.
The present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and this force transducer includes sensitive body (1), support (2), displacement detecting part (3), eddy current displacement sensor (4) and probe (5);
Sensitive body (1) adopts Electric Discharge Wire-cutting Technology to be cut with the flexible Luo Baici mechanism (1A) of A, the flexible Luo Baici mechanism (1B) of B, the flexible Luo Baici mechanism (1C) of C, the flexible Luo Baici mechanism (1D) of D, the flexible Luo Baici mechanism (1E) of E, the flexible Luo Baici mechanism (1F) of F, the flexible Luo Baici mechanism (1G) of G, the flexible Luo Baici mechanism (1H) of H on the one hand;
Sensitive body (1) adopts Electric Discharge Wire-cutting Technology to be cut with first cutting groove (151), second cutting groove (152), the 3rd cutting groove (153), the 4th cutting groove (154), the 5th cutting groove (161), the 6th cutting groove (162), the 7th cutting groove (163), the 8th cutting groove (164) on the other hand;
It between the other end of one end of first cutting groove (151) and second cutting groove (152) H breach shape flexible hinge (1P); It between the other end of one end of second cutting groove (152) and the 3rd cutting groove (153) E breach shape flexible hinge (1M); It between the other end of one end of the 3rd cutting groove (153) and the 4th cutting groove (154) A breach shape flexible hinge (1I); It between the other end of one end of the 4th cutting groove (154) and first cutting groove (151) D breach shape flexible hinge (1L); It between the other end of one end of the 5th cutting groove (161) and the 6th cutting groove (162) G breach shape flexible hinge (1O); It between the other end of one end of the 6th cutting groove (162) and the 7th cutting groove (163) F breach shape flexible hinge (1N); It between the other end of one end of the 7th cutting groove (163) and the 8th cutting groove (164) B breach shape flexible hinge (1J); It between the other end of one end of the 8th cutting groove (164) and the 5th cutting groove (161) C breach shape flexible hinge (1K); Said cutting groove is divided into first platform (12), second platform (13) and the 3rd platform (14) with sensitive body (1);
Displacement detecting part (3) is installed on first platform (12);
Support (2) is installed on the 3rd platform (14);
First cutting groove (15) is provided with first spacing preiection (15A), second spacing preiection (15B), the 3rd spacing preiection (15C) and the 4th spacing preiection (15D); First spacing preiection (15A), second spacing preiection (15B) and first are regulated nail (6), second adjusting is followed closely when one group of (7) formation is used to measure pulling force and regulated; The 3rd spacing preiection (15C), the 4th spacing preiection (15D) constitute when another group is used for gaging pressure with the 3rd adjusting nail (8), the 4th adjusting nail (9) to be regulated;
The A plate face (11A) of sensitive body (1) is provided with A through hole (101), A threaded hole (102), B threaded hole (103); A through hole (101) is used for probe (5) and passes; A threaded hole (102) is used to install first and regulates nail (6); B threaded hole (103) is used to install second and regulates nail (7);
The B plate face (11B) of sensitive body (1) is provided with C threaded hole (104), D threaded hole (105); C threaded hole (104) is used to install the 3rd and regulates nail (8); D threaded hole (105) is used to install the 4th and regulates nail (9);
The flexible Luo Baici mechanism of A (1A) is connected with second platform (13) through A breach shape flexible hinge (1I); The flexible Luo Baici mechanism of B (1B) is connected with first platform (12) through B breach shape flexible hinge (1J); The flexible Luo Baici mechanism of C (1C) is connected with first platform (12) through C breach shape flexible hinge (1K); The flexible Luo Baici mechanism of D (1D) is connected with second platform (13) through D breach shape flexible hinge (1L); The flexible Luo Baici mechanism of E (1E) is connected with second platform (13) through E breach shape flexible hinge (1M); The flexible Luo Baici mechanism of F (1F) is connected with first platform (12) through F breach shape flexible hinge (1N); The flexible Luo Baici mechanism of G (1G) is connected with first platform (12) through G breach shape flexible hinge (1O); The flexible Luo Baici mechanism of H (1H) is connected with second platform (13) through H breach shape flexible hinge (1P);
The riser (22) of support (2) is provided with central through hole (23); The top of this central through hole (23) is provided with slit (24); This slit (24) is divided into A support arm (25) and B support arm (26) with the upper end of riser (22), and A support arm (25) is provided with through hole, and B support arm (26) is provided with C through hole (27);
Central through hole (23) is used to place eddy current displacement sensor (4); Eddy current displacement sensor (4) connects top nut (2B) realization after the C through hole (27) that passes through A screw (2A) on the B support arm (26), through hole on the A support arm (25) are installed in the clamping on the support (2);
Two through holes on the base (21) of support (2) are coaxial with E threaded hole (106) and F threaded hole (107) maintenance on the sensitive body (1); And through cooperating of B screw (106A) and E threaded hole (106) and cooperating of C screw (107A) and F threaded hole (107), thereby realization is fixedly mounted on support (2) on the 3rd platform (14);
Displacement detecting part (3) is installed on first platform (12), promptly cooperates with G threaded hole (108) and E screw (109A) cooperates with H threaded hole (109) through D screw (108A), and realization is installed in displacement detecting part (3) on first platform (12); The check-out console (31) of displacement detecting part (3) is relative with eddy current displacement sensor (4), and the check-out console (31) of the sensitivity end of eddy current displacement sensor (4) and displacement detecting part (3) has spacing d, d=1.3～1.5mm;
Eddy current displacement sensor (4) is installed on the support (2), and the check-out console (31) of the sensitivity end of eddy current displacement sensor (4) and displacement detecting part (3) has spacing d, d=1.3～1.5mm;
One end of probe (5) is nose cone (51), and the other end of probe (5) is threaded connector (52); A through hole (101), B through hole (110) rear thread that the threaded connector (52) of probe (5) passes sensitive body (1) in order are connected in the J threaded hole (111).
The advantage of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism is:
1. going up at sensitive components (sensitive body 1) adopts the mode of Wire EDM to process.Utilize two groups of flexibility Roberts mechanism overlap joints, two groups of flexibility Roberts mechanism symmetric arrangement have guaranteed the high precision rectilinear motion of belly board, have promptly reduced the parasitic error of mechanism.Simultaneously, this sensitive components (sensitive body 1) is a part, need not assemble, thereby avoid problems such as friction that conventional force sensors brought by assembling, gap effectively.
2. the configuration that is symmetrical set that go up to adopt 8 flexible Roberts mechanisms (per 4 flexible Roberts mechanisms constitute a group) at sensitive components (sensitive body 1) obtains first platform and the second platform motion mechanism.
3. on sensitive components (sensitive body 1), 4 set screw are housed; Adjusting through set screw; Can change the spacing of the spacing preiection and second platform 13, thereby change the effective range that first order power is differentiated in the two-stage power resolution, satisfy requirement with different measuring scope.
4. on sensitive components (sensitive body 1), 8 flexible Roberts mechanisms link to each other with motion platform through the gentle hinge of disconnected arm of 8 breach shapes respectively, have avoided mechanism that the concentrated problem of stress takes place in motion process effectively.
5. adopt eddy current displacement sensor as tested force measurement equipment; Go up the displacement of moving cell through detecting sensitive components (sensitive body 1); Rather than the distortion of leaf spring self is measured by the size of dynamometry in the Roberts mechanism; Thereby greatly reduced the interference of outside noise signal, improved the measuring accuracy of force transducer.
6. eddy current displacement sensor adopts hold-fast body to fix, and can regulate the distance of displacement sensor probe and check-out console easily, demarcates and surveying work thereby be very easy to.
7. the device of the two-stage power resolution sensor of the present invention's design is few, simple in structure, and measuring accuracy is high.
Description of drawings
Fig. 1 is the structural drawing of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
Figure 1A is another visual angle structural drawing of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
Figure 1B is the front elevation of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
Fig. 2 is the structural drawing of sensitive body of the present invention.
Fig. 2 A is another visual angle structural drawing of sensitive body of the present invention.
Fig. 2 B is the vertical view of sensitive body of the present invention.
Fig. 2 C is the A-A cut-open view of Fig. 2 B.
Fig. 3 is the structural drawing of support of the present invention.
Fig. 4 is the structural drawing that the present invention pops one's head in.
Fig. 5 is the stressed schematic diagram of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
In the drawings: 1. Sensitive body 11A.A board ? 11B.B board ? 101.A 102.A hole threaded holes? ? 103.B threaded holes 104.C threaded holes 105.D threaded holes 106.E threaded holes 106A.B screws 107.F threaded holes 107A.C Screw 108.G threaded holes 108A.D screw 109.H threaded holes 109A.E screws 110.B hole ? 111.J threaded holes 12 first platform 13 second platform 14. third platform 151. first cutting grooves 152. second cutting groove 153. third cutting slot 154. The fourth cutting slots ? 15A. first limit raised 15B. second limit raised 15C. third limiting bump ? ? 15D. fourth limiting bump 161. fifth cutting slot 162. sixth cutting grooves ? 163. seventh cutting grooves 164. eighth cut groove 1A.A flexible Roberts institutions 1B.B flexible Roberts institutions 1C.C flexible flexible Roberts Roberts institutions 1D.D institutions 1E.E flexible Roberts institutions 1F.F flexible flexible Roberts Roberts institutions 1G.G institutions 1H.H flexible Roberts institutions 1I.A notched shaped flexible hinge? 1J.B shaped notch flexure hinges 1K.C notched shaped notch flexure hinge 1L.D shaped flexible hinge 1M.E shaped notch flexure hinges ? 1N.F notched shaped notch flexure hinge 1O.G shaped flexible hinge 1P.H shaped notch flexure hinges 2. bracket ? 21 base 22. riser 23. center bore 24. gap ? 25.A arm 26.B 27.C arm hole ? 2A.A screws 2B. nuts ? 3. displacement detecting member ? 31. detection plate 4 eddy current displacement sensor ? 5. probe 51. conical head ? 52. nipple 6 first adjustment screw 7 second adjustment screw 8. third adjustment screw? ? 9. fourth adjustment screw
Embodiment
To combine accompanying drawing that the present invention is done further detailed description below.
Shown in Fig. 1, Figure 1A, Figure 1B, the present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and this force transducer includes sensitive body 1, support 2, displacement detecting part 3, eddy current displacement sensor 4 and pops one's head in 5.
Eddy current displacement sensor 4 is installed on the support 2.
Shown in Fig. 2 C, A through hole 101, B through hole 110 that probe 5 passes on the sensitive body 1 are back through on the J threaded hole 111 that is threaded in first platform 12.
(1) sensitive body 1
Shown in Fig. 1, Figure 1A, Figure 1B, Fig. 2, Fig. 2 A, Fig. 2 B, Fig. 2 C, sensitive body 1 adopts Electric Discharge Wire-cutting Technology processing to make.(translation: Luo Baici) configuration cuts out eight flexible Luo Baici mechanisms, the i.e. flexible Luo Baici 1A of mechanism of A, the flexible Luo Baici 1B of mechanism of B, the flexible Luo Baici 1C of mechanism of C, the flexible Luo Baici 1D of mechanism of D, the flexible Luo Baici 1E of mechanism of E, the flexible Luo Baici 1F of mechanism of F, the flexible Luo Baici 1G of mechanism of G, the flexible Luo Baici 1H of mechanism of H on metallic matrix 11 according to the Roberts of designing requirement.
Shown in Fig. 2, Fig. 2 B, on sensitive body 1, adopt the gap of Electric Discharge Wire-cutting Technology cutting to include first cutting groove 151, second cutting groove 152, the 3rd cutting groove 153, the 4th cutting groove 154, the 5th cutting groove 161, the 6th cutting groove 162, the 7th cutting groove 163, the 8th cutting groove 164;
Between one end of first cutting groove 151 and the other end of second cutting groove 152 H breach shape flexible hinge 1P;
Between one end of second cutting groove 152 and the other end of the 3rd cutting groove 153 E breach shape flexible hinge 1M;
Between one end of the 3rd cutting groove 153 and the other end of the 4th cutting groove 154 A breach shape flexible hinge 1I;
Between one end of the 4th cutting groove 154 and the other end of first cutting groove 151 D breach shape flexible hinge 1L;
Between one end of the 5th cutting groove 161 and the other end of the 6th cutting groove 162 G breach shape flexible hinge 1O;
Between one end of the 6th cutting groove 162 and the other end of the 7th cutting groove 163 F breach shape flexible hinge 1N;
Between one end of the 7th cutting groove 163 and the other end of the 8th cutting groove 164 B breach shape flexible hinge 1J;
Between one end of the 8th cutting groove 164 and the other end of the 5th cutting groove 161 C breach shape flexible hinge 1K;
In the present invention, eight cutting grooves are divided into three platforms with sensitive body 1, i.e. first platform 12, second platform 13 and the 3rd platform 14.
On first platform 12 displacement detecting part 3 is installed.
On the 3rd platform 14 support 2 is installed.
Shown in Fig. 2, Fig. 2 B, in the present invention, first cutting groove 15 is provided with the first spacing preiection 15A, the second spacing preiection 15B, the 3rd spacing preiection 15C and the 4th spacing preiection 15D.Described spacing preiection (the first spacing preiection 15A, the second spacing preiection 15B, the 3rd spacing preiection 15C and the 4th spacing preiection 15D) with regulate nail (first regulate nail 6, second regulate nail the 7, the 3rd regulate nail the 8, the 4th and regulate nail 9) and cooperate the effective force measurement range that can regulate first order power resolution in the two-stage power resolution.The first spacing preiection 15A, the second spacing preiection 15B and first regulate nail 6, second and regulate one group of nail 7 formation, regulate when being used to measure pulling force; The 3rd spacing preiection 15C, the 4th spacing preiection 15D and the 3rd regulate nail the 8, the 4th and regulate nail 9 another groups of formation, regulate when being used for gaging pressure.
Referring to shown in Figure 2, the A plate face 11A of sensitive body 1 is provided with A through hole 101, A threaded hole 102, B threaded hole 103; A through hole 101 is used to pop one's head in and 5 passes; A threaded hole 102 is used to install first to be regulated nail 6, the first and regulates nail 6 and cooperate with the first spacing preiection 15A; B threaded hole 103 is used to install second to be regulated nail 7, the second and regulates nail 7 and cooperate with the second spacing preiection 15B.In the present invention; It is first group of stop that the first spacing preiection 15A, the second spacing preiection 15B, first regulate nail 6, the second adjusting nail 7; This first group of stop is used to regulate the spacing between second platform 13 and the 3rd platform 14; Make that under the condition of being drawn the measurement range of the first order power resolution of this force transducer is able to change.
Shown in Fig. 2 A, the B plate face 11B of sensitive body 1 is provided with C threaded hole 104, D threaded hole 105; C threaded hole 104 is used to install the 3rd to be regulated nail 8, the three and regulates nail 8 and cooperate with the 3rd spacing preiection 15C; D threaded hole 105 is used to install the 4th to be regulated nail 9, the four and regulates nail 9 and cooperate with the 4th spacing preiection 15D.In the present invention; It is second group of stop that the 3rd spacing preiection 15C, the 4th spacing preiection 15D, the 3rd regulate nail the 8, the 4th adjusting nail 9; This second group of stop is used to regulate the spacing between second platform 13 and the 3rd platform 14; Make that under the condition of pressurized the measurement range of the first order resolution of this force transducer is able to change.
Shown in Fig. 2 B, the flexible Luo Baici 1A of mechanism of A is connected with second platform 13 through A breach shape flexible hinge 1I; The flexible Luo Baici 1B of mechanism of B is connected with first platform 12 through B breach shape flexible hinge 1J; The flexible Luo Baici 1C of mechanism of C is connected with first platform 12 through C breach shape flexible hinge 1K; The flexible Luo Baici 1D of mechanism of D is connected with second platform 13 through D breach shape flexible hinge 1L; The flexible Luo Baici 1E of mechanism of E is connected with second platform 13 through E breach shape flexible hinge 1M; The flexible Luo Baici 1F of mechanism of F is connected with first platform 12 through F breach shape flexible hinge 1N; The flexible Luo Baici 1G of mechanism of G is connected with first platform 12 through G breach shape flexible hinge 1O; The flexible Luo Baici 1H of mechanism of H is connected with second platform 13 through H breach shape flexible hinge 1P.In the present invention, the design of 8 breach shape flexible hinges has avoided sensitive body 1 that the concentration phenomenon of stress takes place when measuring.
In the present invention, the flexible Roberts of on the sensitive body 18 mechanism is divided into two groups, is arranged symmetrically in the motion platform both sides.When external force F 5 acts on 12 last times of first platform through popping one's head in, the leaf spring in the flexible Roberts mechanism produces elastic deformation, has guaranteed the high precision rectilinear motion of first platform 12 and second platform 13.
In the present invention, sensitive body 1 adopts aluminium alloy 7075 materials processings.
(2) support 2
Referring to Fig. 1, Figure 1A, Figure 1B, shown in Figure 3; The riser 22 of support 2 is provided with central through hole 23; The top of this central through hole 23 is provided with slit 24; This slit 24 is divided into A support arm 25 and B support arm 26 with the upper end of riser 22, and A support arm 25 is provided with through hole (not shown among Fig. 3), and B support arm 26 is provided with C through hole 27.
Central through hole 23 is used to place eddy current displacement sensor 4.Eddy current displacement sensor 4 connects top nut 2B after the C through hole 27 that passes through A screw 2A on the B support arm 26, through hole on the A support arm 25 are installed in the clamping on the support 2 realizes.
Two through holes on the base 21 of support 2 are coaxial with 107 maintenances of F threaded hole with the E threaded hole 106 on the sensitive body 1; And through cooperating of B screw 106A and E threaded hole 106 and cooperating of C screw 107A and F threaded hole 107, thereby realization is fixedly mounted on support 2 on the 3rd platform 14.
In the present invention, support 2 adopts the mode of holding tightly that eddy current displacement sensor 4 is installed, and can regulate the sensitivity end of eddy current displacement sensor 4 and the distance between the check-out console 31 easily, demarcates and surveying work thereby be very easy to.
In the present invention, support 2 adopts aluminium alloy 5052 materials processings.
(3) the displacement detecting part 3
Shown in Fig. 1, Figure 1A, Figure 1B, displacement detecting part 3 is installed on first platform 12, promptly cooperates with G threaded hole 108 and E screw 109A cooperates with H threaded hole 109 through D screw 108A, and realization is installed in displacement detecting part 3 on first platform 12.The check-out console 31 of displacement detecting part 3 is relative with eddy current displacement sensor 4, and the check-out console 31 of the sensitivity end of eddy current displacement sensor 4 and displacement detecting part 3 has spacing d, d=1.3～1.5mm.
In the present invention, displacement detecting part 3 adopts aluminium alloy 5052 materials processings.
(4) eddy current displacement sensor 4
Shown in Fig. 1, Figure 1A, Figure 1B, eddy current displacement sensor 4 is installed on the support 2, and the sensitivity end of eddy current displacement sensor 4 and the check-out console 31 of displacement detecting part 3 have spacing d, d=1.3～1.5mm.
In the present invention, eddy current displacement sensor 4 is used to detect the moving displacement amount of the belly board of sensitive body 1.
In the present invention, the YD9800 series eddy current displacement sensor that eddy current displacement sensor 4 employing Shanghai vibration measuring self-reacting device company limiteds produce, its displacement resolution can reach 100nm.
(5) probe 5
Referring to Fig. 1, Figure 1A, Figure 1B, Fig. 2 C, shown in Figure 4, an end of probe 5 is a nose cone 51, and the other end of probe 5 is a threaded connector 52; A through hole 101, B through hole 110 rear threads that the threaded connector 52 of probe 5 passes sensitive body 1 in order are connected in the J threaded hole 111.
In the present invention, probe 5 adopts aluminium alloy 5052 materials processings.
Referring to shown in Figure 5, the present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and this force transducer in the principle of work that realizes two-stage power resolution is:
The flexible Luo Baici 1A of mechanism of A on the sensitive body 1, the flexible Luo Baici 1D of mechanism of D, the flexible Luo Baici 1H of mechanism of H and the flexible Luo Baici 1E of mechanism of E constitute one group, form the similar rigidity value k that has
aFirst spring.Said first spring drives 13 motions of second platform under stress condition.
The flexible Luo Baici 1B of mechanism of B on the sensitive body 1, the flexible Luo Baici 1C of mechanism of C, the flexible Luo Baici 1G of mechanism of G and the flexible Luo Baici 1F of mechanism of F constitute other one group, form the similar rigidity value k that has
bSecond spring.Said second spring drives 12 motions of first platform under stress condition.
When by dynamometry when less, first spring and second spring are series relationship, and the rigidity value of this moment is k
1=k
ak
b/ (k
a+ k
b); When tested external force is big; The motion of second platform 13 is regulated nail 6 and second by first and is regulated nail 7 (when receiving tension) or the 3rd and regulate nail the 8 and the 4th adjusting and follow closely 9 (are stressed and do the time spent) and limit; This moment, first spring failure had only second springs, and the rigidity of this moment is k
2=k
bOwing on a sensitive body 1, realized the variation of two stage stiffness, therefore when carrying out same displacement detecting, sensor of the present invention can realize having the measurement requirement of two-stage power resolution and two-stage power measurement range.
The present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and the principle of work of this force transducer is:
(A) 5 receiving under the condition of external pressure when probe, second platform 13 and first platform 12 simultaneously to the right direction move;
(B) check-out console 31 of displacement detecting part 3 to the sensitivity end of eddy current displacement sensor 4 near;
(C) eddy current displacement sensor 4 detects the amount of exercise of first platform 12;
(D) after second platform 13 and the 3rd adjusting nail 8 and the 4th adjusting nail 9 contacts, 13 stop motions of second platform, first platform 12 continues to move;
(E) moving first platform 12 with the check-out console of displacement detecting part 331 continue to the sensitivity end of eddy current displacement sensor 4 near;
(F) eddy current displacement sensor 4 detects the amount of exercise of first platform 12 once more.
The force transducer based on the two-stage power resolution of flexible Roberts mechanism of the present invention design; It is eddy current displacement sensor 4; When external force through pop one's head in 5 act on sensitive body 1 12 last times of first platform; The sensitivity end of eddy current displacement sensor 4 is through variable in distance between the check-out console 31 that detects eddy current displacement sensor 4 and displacement detecting part 3, and detected displacement signal is converted into by the size of dynamometry.This metering system is through detecting the displacement of moving component, rather than the distortion of leaf spring self comes the perception measured signal, thereby has greatly reduced the interference of outside noise signal, has improved the measuring accuracy of force transducer.
Claims (9)
1. force transducer based on the two-stage power resolution of flexible Roberts mechanism, it is characterized in that: this force transducer includes sensitive body (1), support (2), displacement detecting part (3), eddy current displacement sensor (4) and probe (5);
Sensitive body (1) adopts Electric Discharge Wire-cutting Technology to be cut with the flexible Luo Baici mechanism (1A) of A, the flexible Luo Baici mechanism (1B) of B, the flexible Luo Baici mechanism (1C) of C, the flexible Luo Baici mechanism (1D) of D, the flexible Luo Baici mechanism (1E) of E, the flexible Luo Baici mechanism (1F) of F, the flexible Luo Baici mechanism (1G) of G, the flexible Luo Baici mechanism (1H) of H on the one hand;
Sensitive body (1) adopts Electric Discharge Wire-cutting Technology to be cut with first cutting groove (151), second cutting groove (152), the 3rd cutting groove (153), the 4th cutting groove (154), the 5th cutting groove (161), the 6th cutting groove (162), the 7th cutting groove (163), the 8th cutting groove (164) on the other hand;
It between the other end of one end of first cutting groove (151) and second cutting groove (152) H breach shape flexible hinge (1P); It between the other end of one end of second cutting groove (152) and the 3rd cutting groove (153) E breach shape flexible hinge (1M); It between the other end of one end of the 3rd cutting groove (153) and the 4th cutting groove (154) A breach shape flexible hinge (1I); It between the other end of one end of the 4th cutting groove (154) and first cutting groove (151) D breach shape flexible hinge (1L); It between the other end of one end of the 5th cutting groove (161) and the 6th cutting groove (162) G breach shape flexible hinge (1O); It between the other end of one end of the 6th cutting groove (162) and the 7th cutting groove (163) F breach shape flexible hinge (1N); It between the other end of one end of the 7th cutting groove (163) and the 8th cutting groove (164) B breach shape flexible hinge (1J); It between the other end of one end of the 8th cutting groove (164) and the 5th cutting groove (161) C breach shape flexible hinge (1K); Said cutting groove is divided into first platform (12), second platform (13) and the 3rd platform (14) with sensitive body (1);
Displacement detecting part (3) is installed on first platform (12);
Support (2) is installed on the 3rd platform (14);
First cutting groove (15) is provided with first spacing preiection (15A), second spacing preiection (15B), the 3rd spacing preiection (15C) and the 4th spacing preiection (15D); First spacing preiection (15A), second spacing preiection (15B) and first are regulated nail (6), second adjusting is followed closely when one group of (7) formation is used to measure pulling force and regulated; The 3rd spacing preiection (15C), the 4th spacing preiection (15D) constitute when another group is used for gaging pressure with the 3rd adjusting nail (8), the 4th adjusting nail (9) to be regulated;
The A plate face (11A) of sensitive body (1) is provided with A through hole (101), A threaded hole (102), B threaded hole (103); A through hole (101) is used for probe (5) and passes; A threaded hole (102) is used to install first and regulates nail (6); B threaded hole (103) is used to install second and regulates nail (7);
The B plate face (11B) of sensitive body (1) is provided with C threaded hole (104), D threaded hole (105); C threaded hole (104) is used to install the 3rd and regulates nail (8); D threaded hole (105) is used to install the 4th and regulates nail (9);
The flexible Luo Baici mechanism of A (1A) is connected with second platform (13) through A breach shape flexible hinge (1I); The flexible Luo Baici mechanism of B (1B) is connected with first platform (12) through B breach shape flexible hinge (1J); The flexible Luo Baici mechanism of C (1C) is connected with first platform (12) through C breach shape flexible hinge (1K); The flexible Luo Baici mechanism of D (1D) is connected with second platform (13) through D breach shape flexible hinge (1L); The flexible Luo Baici mechanism of E (1E) is connected with second platform (13) through E breach shape flexible hinge (1M); The flexible Luo Baici mechanism of F (1F) is connected with first platform (12) through F breach shape flexible hinge (1N); The flexible Luo Baici mechanism of G (1G) is connected with first platform (12) through G breach shape flexible hinge (1O); The flexible Luo Baici mechanism of H (1H) is connected with second platform (13) through H breach shape flexible hinge (1P);
The riser (22) of support (2) is provided with central through hole (23); The top of this central through hole (23) is provided with slit (24); This slit (24) is divided into A support arm (25) and B support arm (26) with the upper end of riser (22), and A support arm (25) is provided with through hole, and B support arm (26) is provided with C through hole (27);
Central through hole (23) is used to place eddy current displacement sensor (4); Eddy current displacement sensor (4) connects top nut (2B) realization after the C through hole (27) that passes through A screw (2A) on the B support arm (26), through hole on the A support arm (25) are installed in the clamping on the support (2);
Two through holes on the base (21) of support (2) are coaxial with E threaded hole (106) and F threaded hole (107) maintenance on the sensitive body (1); And through cooperating of B screw (106A) and E threaded hole (106) and cooperating of C screw (107A) and F threaded hole (107), thereby realization is fixedly mounted on support (2) on the 3rd platform (14);
Displacement detecting part (3) is installed on first platform (12), promptly cooperates with G threaded hole (108) and E screw (109A) cooperates with H threaded hole (109) through D screw (108A), and realization is installed in displacement detecting part (3) on first platform (12); The check-out console (31) of displacement detecting part (3) is relative with eddy current displacement sensor (4), and the check-out console (31) of the sensitivity end of eddy current displacement sensor (4) and displacement detecting part (3) has spacing d, d=1.3～1.5mm;
Eddy current displacement sensor (4) is installed on the support (2), and the check-out console (31) of the sensitivity end of eddy current displacement sensor (4) and displacement detecting part (3) has spacing d, d=1.3～1.5mm;
One end of probe (5) is nose cone (51), and the other end of probe (5) is threaded connector (52); A through hole (101), B through hole (110) rear thread that the threaded connector (52) of probe (5) passes sensitive body (1) in order are connected in the J threaded hole (111).
2. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1; It is characterized in that: first spacing preiection (15A), second spacing preiection (15B), first are regulated nail (6), the second adjusting nail (7) is first group of stop, and this first group of stop is used to regulate the spacing between second platform (13) and the 3rd platform (14).
3. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1; It is characterized in that: the 3rd spacing preiection (15C), the 4th spacing preiection (15D), the 3rd are regulated nail (8), the 4th adjusting nail (9) is second group of stop, and this second group of stop is used to regulate the spacing between second platform (13) and the 3rd platform (14).
4. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1, it is characterized in that: this force transducer in the principle of work that realizes two-stage power resolution is:
The flexible Luo Baici mechanism (1A) of A on the sensitive body (1), the flexible Luo Baici mechanism (1D) of D, the flexible Luo Baici mechanism (1H) of H and the flexible Luo Baici mechanism of E (1E) constitute one group, form the similar rigidity value k that has
aFirst spring; Said first spring drives second platform (13) motion under stress condition;
The flexible Luo Baici mechanism (1B) of B on the sensitive body (1), the flexible Luo Baici mechanism (1C) of C, the flexible Luo Baici mechanism (1G) of G and the flexible Luo Baici mechanism of F (1F) constitute other one group, form the similar rigidity value k that has
bSecond spring; Said second spring drives first platform (12) motion under stress condition;
When by dynamometry when less, first spring and second spring are series relationship, and the rigidity value of this moment is k
1=k
ak
b/ (k
a+ k
b); When tested external force was big, the motion of second platform (13) was regulated nail (6) and second by first and is regulated nail (7) or the 3rd and regulate nail (8) and the 4th and regulate nail (9) and limit, and first spring failure has only second springs at this moment, and rigidity at this moment is k
2=k
b
5. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1, it is characterized in that: sensitive body (1) adopts aluminium alloy 7075 materials processings.
6. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1, it is characterized in that: support (2) adopts aluminium alloy 5052 materials processings.
7. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1, it is characterized in that: displacement detecting part (3) adopts aluminium alloy 5052 materials processings.
8. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1, it is characterized in that: the displacement resolution of eddy current displacement sensor (4) can reach 100nm.
9. the force transducer of the two-stage power resolution based on flexible Roberts mechanism according to claim 1 is characterized in that: eddy current displacement sensor (4) is used to detect the moving displacement amount of the belly board of sensitive body (1).
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| CN 201110274522 CN102435353B (en) | 2011-09-15 | 2011-09-15 | Flexible Roberts mechanism based force sensor realizing two-stage force resolutions |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110274522 CN102435353B (en) | 2011-09-15 | 2011-09-15 | Flexible Roberts mechanism based force sensor realizing two-stage force resolutions |
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| CN102435353B CN102435353B (en) | 2013-07-10 |
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| CN109026989A (en) * | 2017-06-09 | 2018-12-18 | 中国科学院长春光学精密机械与物理研究所 | A kind of circumference guiding mechanism based on Roberts mechanism |
| CN109106143A (en) * | 2018-09-04 | 2019-01-01 | 徐州凯利尔桑拿设备有限公司 | A kind of bed with sleep quality monitoring |
| CN110082011A (en) * | 2019-04-08 | 2019-08-02 | 太原理工大学 | A kind of multistage dynamometry location displacement sensor |
| CN111579133A (en) * | 2020-05-27 | 2020-08-25 | 安徽大学 | Variable-configuration force sensor with continuously adjustable force resolution |
| CN115183919A (en) * | 2022-06-20 | 2022-10-14 | 东华大学 | Force sensor |
| CN116214583A (en) * | 2023-03-20 | 2023-06-06 | 安徽大学 | Finger force sensor based on parallel variable rigidity |
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| CN116214583A (en) * | 2023-03-20 | 2023-06-06 | 安徽大学 | Finger force sensor based on parallel variable rigidity |
| CN116214583B (en) * | 2023-03-20 | 2024-01-02 | 安徽大学 | Finger force sensor based on parallel variable rigidity |
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