CN102435353A - Force sensor with two-level force resolution based on flexible Roberts mechanism - Google Patents

Force sensor with two-level force resolution based on flexible Roberts mechanism Download PDF

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Publication number
CN102435353A
CN102435353A CN2011102745227A CN201110274522A CN102435353A CN 102435353 A CN102435353 A CN 102435353A CN 2011102745227 A CN2011102745227 A CN 2011102745227A CN 201110274522 A CN201110274522 A CN 201110274522A CN 102435353 A CN102435353 A CN 102435353A
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China
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flexible
platform
cutting groove
roberts
roberts mechanism
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CN102435353B (en
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刘敬猛
蒋俊
陈文杰
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Beihang University
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Beihang University
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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses a force sensor with two-stage force resolution based on a flexible Roberts mechanism. The eddy current displacement sensor is arranged on the bracket in a holding manner; the bracket is fixed with the sensitive body through a screw; the displacement detection piece is fixed on a first platform of the sensitive body through a screw; one end of the probe penetrates through the through hole of the front plate surface of the sensitive body and then is installed in the threaded hole of the first platform. The sensitive body of the invention is processed into two groups of flexible Roberts linear motion mechanisms by adopting a wire cut electrical discharge machining mode. The two groups of flexible mechanisms are symmetrically arranged, so that high-precision linear motion of the motion platform is guaranteed, and parasitic errors of the mechanisms are reduced. Meanwhile, as a sensitive structural part of the force sensor, the sensitive body adopts one part and does not need to be assembled, so that the problems of friction, clearance and the like caused by assembly of the traditional force sensor are effectively avoided. The sensor of the present invention can effectively achieve two levels of force resolution, which cannot be achieved by conventional force sensors.

Description

Force transducer based on the two-stage power resolution of flexible Roberts mechanism
Technical field
The present invention relates to a kind of force transducer, more particularly say, be meant a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism.
Background technology
In the nano-imprint process process, if adopt different imprint process (hot padding and ultraviolet stamping), the scope of its force of impression is different.Realize real-time monitoring, just must have a kind of force transducer that can satisfy different range force of impression and different resolution requirement force of impression in the moulding process.
In scanning probe microscopy, when probe scanning has different hardness surperficial, just need probe have variable rigidity and resolution.
Existing force transducer is based on the metering system of foil gauge mostly; Foil gauge is attached to the surface of testee; When foil gauge produces microdeformation; Convert deformation signal into voltage signal through resistance bridge, analog voltage signal is converted into the digital signal of being convenient to Computer Processing through AD converter again.Some other force transducer is like piezoelectric force transducer, pressure resistance type force transducer, capacitance-type force sensor and optical force sensor.
Piezoelectric force transducer is through piezoelectric under external force, and the principle that can produce a voltage signal comes power is measured, but the shortcoming of this force transducer is the increase along with external force, and the electric signal of piezoelectric unit output will be decayed fast; The pressure resistance type force transducer is through pressure drag material under external force, and the significant principle that changes can take place its resistance measures external force, and this force transducer receives neighbourhood noise, and is very big like the influence of temperature etc.; The capacitance-type force sensor utilization under external force; Electric capacity up and down between two sheet metals displacement change; Thereby the principle that causes the change of capacitance size is measured external force; The force transducer of this form has been widely used in micro electronmechanical (MEMS) field at present, is used to make high-precision Micro-force sensor; The optical force sensor detects semi-girder distortion under external force through optical device, and the principle that optical signalling converts voltage signal into is measured external force, and for example atomic force microscope (AFM) is exactly to utilize such principle to come work.
Take a broad view of existing force transducer, the force transducer of every kind of form all has its relative merits, and the specific occasion needs to adopt the sensor of particular form down.But still there is following some deficiency in existing force transducer: (1) existing force transducer can't be realized two-stage even multistage power resolution, and its measurement range receives the restriction of resolution.Under the situation that multistage power resolution requirement is arranged, can't satisfy measurement requirement; (2) the output signal of existing force transducer all is a faint simulating signal, receives influence of environmental noise very big; (3) precision and the resolution of existing force transducer are subject to the force measurement scope.That is to say that when the precision of sensor and resolution improved, the measurement range of sensor will reduce, vice versa.
Summary of the invention
The force transducer that the purpose of this invention is to provide a kind of two-stage power resolution based on flexible Roberts mechanism, this force transducer adopt two groups of flexible Roberts mechanisms to overlap, and utilize on the substrate deformation mechanism of self leaf spring to realize force measurement; On the other hand, the displacement of adopting eddy current displacement sensor to measure moving component, rather than the distortion of leaf spring self in the Roberts mechanism, thus reduced the interference of outside noise signal, improved the measuring accuracy of force transducer.
The present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and this force transducer includes sensitive body (1), support (2), displacement detecting part (3), eddy current displacement sensor (4) and probe (5);
Sensitive body (1) adopts Electric Discharge Wire-cutting Technology to be cut with the flexible Luo Baici mechanism (1A) of A, the flexible Luo Baici mechanism (1B) of B, the flexible Luo Baici mechanism (1C) of C, the flexible Luo Baici mechanism (1D) of D, the flexible Luo Baici mechanism (1E) of E, the flexible Luo Baici mechanism (1F) of F, the flexible Luo Baici mechanism (1G) of G, the flexible Luo Baici mechanism (1H) of H on the one hand;
Sensitive body (1) adopts Electric Discharge Wire-cutting Technology to be cut with first cutting groove (151), second cutting groove (152), the 3rd cutting groove (153), the 4th cutting groove (154), the 5th cutting groove (161), the 6th cutting groove (162), the 7th cutting groove (163), the 8th cutting groove (164) on the other hand;
It between the other end of one end of first cutting groove (151) and second cutting groove (152) H breach shape flexible hinge (1P); It between the other end of one end of second cutting groove (152) and the 3rd cutting groove (153) E breach shape flexible hinge (1M); It between the other end of one end of the 3rd cutting groove (153) and the 4th cutting groove (154) A breach shape flexible hinge (1I); It between the other end of one end of the 4th cutting groove (154) and first cutting groove (151) D breach shape flexible hinge (1L); It between the other end of one end of the 5th cutting groove (161) and the 6th cutting groove (162) G breach shape flexible hinge (1O); It between the other end of one end of the 6th cutting groove (162) and the 7th cutting groove (163) F breach shape flexible hinge (1N); It between the other end of one end of the 7th cutting groove (163) and the 8th cutting groove (164) B breach shape flexible hinge (1J); It between the other end of one end of the 8th cutting groove (164) and the 5th cutting groove (161) C breach shape flexible hinge (1K); Said cutting groove is divided into first platform (12), second platform (13) and the 3rd platform (14) with sensitive body (1);
Displacement detecting part (3) is installed on first platform (12);
Support (2) is installed on the 3rd platform (14);
First cutting groove (15) is provided with first spacing preiection (15A), second spacing preiection (15B), the 3rd spacing preiection (15C) and the 4th spacing preiection (15D); First spacing preiection (15A), second spacing preiection (15B) and first are regulated nail (6), second adjusting is followed closely when one group of (7) formation is used to measure pulling force and regulated; The 3rd spacing preiection (15C), the 4th spacing preiection (15D) constitute when another group is used for gaging pressure with the 3rd adjusting nail (8), the 4th adjusting nail (9) to be regulated;
The A plate face (11A) of sensitive body (1) is provided with A through hole (101), A threaded hole (102), B threaded hole (103); A through hole (101) is used for probe (5) and passes; A threaded hole (102) is used to install first and regulates nail (6); B threaded hole (103) is used to install second and regulates nail (7);
The B plate face (11B) of sensitive body (1) is provided with C threaded hole (104), D threaded hole (105); C threaded hole (104) is used to install the 3rd and regulates nail (8); D threaded hole (105) is used to install the 4th and regulates nail (9);
The flexible Luo Baici mechanism of A (1A) is connected with second platform (13) through A breach shape flexible hinge (1I); The flexible Luo Baici mechanism of B (1B) is connected with first platform (12) through B breach shape flexible hinge (1J); The flexible Luo Baici mechanism of C (1C) is connected with first platform (12) through C breach shape flexible hinge (1K); The flexible Luo Baici mechanism of D (1D) is connected with second platform (13) through D breach shape flexible hinge (1L); The flexible Luo Baici mechanism of E (1E) is connected with second platform (13) through E breach shape flexible hinge (1M); The flexible Luo Baici mechanism of F (1F) is connected with first platform (12) through F breach shape flexible hinge (1N); The flexible Luo Baici mechanism of G (1G) is connected with first platform (12) through G breach shape flexible hinge (1O); The flexible Luo Baici mechanism of H (1H) is connected with second platform (13) through H breach shape flexible hinge (1P);
The riser (22) of support (2) is provided with central through hole (23); The top of this central through hole (23) is provided with slit (24); This slit (24) is divided into A support arm (25) and B support arm (26) with the upper end of riser (22), and A support arm (25) is provided with through hole, and B support arm (26) is provided with C through hole (27);
Central through hole (23) is used to place eddy current displacement sensor (4); Eddy current displacement sensor (4) connects top nut (2B) realization after the C through hole (27) that passes through A screw (2A) on the B support arm (26), through hole on the A support arm (25) are installed in the clamping on the support (2);
Two through holes on the base (21) of support (2) are coaxial with E threaded hole (106) and F threaded hole (107) maintenance on the sensitive body (1); And through cooperating of B screw (106A) and E threaded hole (106) and cooperating of C screw (107A) and F threaded hole (107), thereby realization is fixedly mounted on support (2) on the 3rd platform (14);
Displacement detecting part (3) is installed on first platform (12), promptly cooperates with G threaded hole (108) and E screw (109A) cooperates with H threaded hole (109) through D screw (108A), and realization is installed in displacement detecting part (3) on first platform (12); The check-out console (31) of displacement detecting part (3) is relative with eddy current displacement sensor (4), and the check-out console (31) of the sensitivity end of eddy current displacement sensor (4) and displacement detecting part (3) has spacing d, d=1.3～1.5mm;
Eddy current displacement sensor (4) is installed on the support (2), and the check-out console (31) of the sensitivity end of eddy current displacement sensor (4) and displacement detecting part (3) has spacing d, d=1.3～1.5mm;
One end of probe (5) is nose cone (51), and the other end of probe (5) is threaded connector (52); A through hole (101), B through hole (110) rear thread that the threaded connector (52) of probe (5) passes sensitive body (1) in order are connected in the J threaded hole (111).
The advantage of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism is:
1. going up at sensitive components (sensitive body 1) adopts the mode of Wire EDM to process.Utilize two groups of flexibility Roberts mechanism overlap joints, two groups of flexibility Roberts mechanism symmetric arrangement have guaranteed the high precision rectilinear motion of belly board, have promptly reduced the parasitic error of mechanism.Simultaneously, this sensitive components (sensitive body 1) is a part, need not assemble, thereby avoid problems such as friction that conventional force sensors brought by assembling, gap effectively.
2. the configuration that is symmetrical set that go up to adopt 8 flexible Roberts mechanisms (per 4 flexible Roberts mechanisms constitute a group) at sensitive components (sensitive body 1) obtains first platform and the second platform motion mechanism.
3. on sensitive components (sensitive body 1), 4 set screw are housed; Adjusting through set screw; Can change the spacing of the spacing preiection and second platform 13, thereby change the effective range that first order power is differentiated in the two-stage power resolution, satisfy requirement with different measuring scope.
4. on sensitive components (sensitive body 1), 8 flexible Roberts mechanisms link to each other with motion platform through the gentle hinge of disconnected arm of 8 breach shapes respectively, have avoided mechanism that the concentrated problem of stress takes place in motion process effectively.
5. adopt eddy current displacement sensor as tested force measurement equipment; Go up the displacement of moving cell through detecting sensitive components (sensitive body 1); Rather than the distortion of leaf spring self is measured by the size of dynamometry in the Roberts mechanism; Thereby greatly reduced the interference of outside noise signal, improved the measuring accuracy of force transducer.
6. eddy current displacement sensor adopts hold-fast body to fix, and can regulate the distance of displacement sensor probe and check-out console easily, demarcates and surveying work thereby be very easy to.
7. the device of the two-stage power resolution sensor of the present invention's design is few, simple in structure, and measuring accuracy is high.
Description of drawings
Fig. 1 is the structural drawing of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
Figure 1A is another visual angle structural drawing of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
Figure 1B is the front elevation of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
Fig. 2 is the structural drawing of sensitive body of the present invention.
Fig. 2 A is another visual angle structural drawing of sensitive body of the present invention.
Fig. 2 B is the vertical view of sensitive body of the present invention.
Fig. 2 C is the A-A cut-open view of Fig. 2 B.
Fig. 3 is the structural drawing of support of the present invention.
Fig. 4 is the structural drawing that the present invention pops one's head in.
Fig. 5 is the stressed schematic diagram of force transducer that the present invention is based on the two-stage power resolution of flexible Roberts mechanism.
In the drawings: 1. Sensitive body 11A.A board ? 11B.B board ? 101.A 102.A hole threaded holes? ? 103.B threaded holes 104.C threaded holes 105.D threaded holes 106.E threaded holes 106A.B screws 107.F threaded holes 107A.C Screw 108.G threaded holes 108A.D screw 109.H threaded holes 109A.E screws 110.B hole ? 111.J threaded holes 12 first platform 13 second platform 14. third platform 151. first cutting grooves 152. second cutting groove 153. third cutting slot 154. The fourth cutting slots ? 15A. first limit raised 15B. second limit raised 15C. third limiting bump ? ? 15D. fourth limiting bump 161. fifth cutting slot 162. sixth cutting grooves ? 163. seventh cutting grooves 164. eighth cut groove 1A.A flexible Roberts institutions 1B.B flexible Roberts institutions 1C.C flexible flexible Roberts Roberts institutions 1D.D institutions 1E.E flexible Roberts institutions 1F.F flexible flexible Roberts Roberts institutions 1G.G institutions 1H.H flexible Roberts institutions 1I.A notched shaped flexible hinge? 1J.B shaped notch flexure hinges 1K.C notched shaped notch flexure hinge 1L.D shaped flexible hinge 1M.E shaped notch flexure hinges ? 1N.F notched shaped notch flexure hinge 1O.G shaped flexible hinge 1P.H shaped notch flexure hinges 2. bracket ? 21 base 22. riser 23. center bore 24. gap ? 25.A arm 26.B 27.C arm hole ? 2A.A screws 2B. nuts ? 3. displacement detecting member ? 31. detection plate 4 eddy current displacement sensor ? 5. probe 51. conical head ? 52. nipple 6 first adjustment screw 7 second adjustment screw 8. third adjustment screw? ? 9. fourth adjustment screw
Embodiment
To combine accompanying drawing that the present invention is done further detailed description below.
Shown in Fig. 1, Figure 1A, Figure 1B, the present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and this force transducer includes sensitive body 1, support 2, displacement detecting part 3, eddy current displacement sensor 4 and pops one's head in 5.
Support 2 is installed on the 3rd platform 14 of sensitive body 1, promptly through B screw 106A and E threaded hole 106 cooperate and C screw 107A with realize cooperating of F threaded hole 107 support 2 is fixedly mounted on the side of the 3rd platform 14 of sensitive body 1.
Displacement detecting part 3 is installed on first platform 12 of sensitive body 1, promptly through D screw 108A and G threaded hole 108 cooperate and E screw 109A realized displacement detecting part 3 is fixedly mounted on first platform 12 of sensitive body 1 with cooperating of H threaded hole 109.
Eddy current displacement sensor 4 is installed on the support 2.
Shown in Fig. 2 C, A through hole 101, B through hole 110 that probe 5 passes on the sensitive body 1 are back through on the J threaded hole 111 that is threaded in first platform 12.
(1) sensitive body 1
Shown in Fig. 1, Figure 1A, Figure 1B, Fig. 2, Fig. 2 A, Fig. 2 B, Fig. 2 C, sensitive body 1 adopts Electric Discharge Wire-cutting Technology processing to make.(translation: Luo Baici) configuration cuts out eight flexible Luo Baici mechanisms, the i.e. flexible Luo Baici 1A of mechanism of A, the flexible Luo Baici 1B of mechanism of B, the flexible Luo Baici 1C of mechanism of C, the flexible Luo Baici 1D of mechanism of D, the flexible Luo Baici 1E of mechanism of E, the flexible Luo Baici 1F of mechanism of F, the flexible Luo Baici 1G of mechanism of G, the flexible Luo Baici 1H of mechanism of H on metallic matrix 11 according to the Roberts of designing requirement.
Shown in Fig. 2, Fig. 2 B, on sensitive body 1, adopt the gap of Electric Discharge Wire-cutting Technology cutting to include first cutting groove 151, second cutting groove 152, the 3rd cutting groove 153, the 4th cutting groove 154, the 5th cutting groove 161, the 6th cutting groove 162, the 7th cutting groove 163, the 8th cutting groove 164;
Between one end of first cutting groove 151 and the other end of second cutting groove 152 H breach shape flexible hinge 1P;
Between one end of second cutting groove 152 and the other end of the 3rd cutting groove 153 E breach shape flexible hinge 1M;
Between one end of the 3rd cutting groove 153 and the other end of the 4th cutting groove 154 A breach shape flexible hinge 1I;
Between one end of the 4th cutting groove 154 and the other end of first cutting groove 151 D breach shape flexible hinge 1L;
Between one end of the 5th cutting groove 161 and the other end of the 6th cutting groove 162 G breach shape flexible hinge 1O;
Between one end of the 6th cutting groove 162 and the other end of the 7th cutting groove 163 F breach shape flexible hinge 1N;
Between one end of the 7th cutting groove 163 and the other end of the 8th cutting groove 164 B breach shape flexible hinge 1J;
Between one end of the 8th cutting groove 164 and the other end of the 5th cutting groove 161 C breach shape flexible hinge 1K;
In the present invention, eight cutting grooves are divided into three platforms with sensitive body 1, i.e. first platform 12, second platform 13 and the 3rd platform 14.
On first platform 12 displacement detecting part 3 is installed.
On the 3rd platform 14 support 2 is installed.
Shown in Fig. 2, Fig. 2 B, in the present invention, first cutting groove 15 is provided with the first spacing preiection 15A, the second spacing preiection 15B, the 3rd spacing preiection 15C and the 4th spacing preiection 15D.Described spacing preiection (the first spacing preiection 15A, the second spacing preiection 15B, the 3rd spacing preiection 15C and the 4th spacing preiection 15D) with regulate nail (first regulate nail 6, second regulate nail the 7, the 3rd regulate nail the 8, the 4th and regulate nail 9) and cooperate the effective force measurement range that can regulate first order power resolution in the two-stage power resolution.The first spacing preiection 15A, the second spacing preiection 15B and first regulate nail 6, second and regulate one group of nail 7 formation, regulate when being used to measure pulling force; The 3rd spacing preiection 15C, the 4th spacing preiection 15D and the 3rd regulate nail the 8, the 4th and regulate nail 9 another groups of formation, regulate when being used for gaging pressure.
Referring to shown in Figure 2, the A plate face 11A of sensitive body 1 is provided with A through hole 101, A threaded hole 102, B threaded hole 103; A through hole 101 is used to pop one's head in and 5 passes; A threaded hole 102 is used to install first to be regulated nail 6, the first and regulates nail 6 and cooperate with the first spacing preiection 15A; B threaded hole 103 is used to install second to be regulated nail 7, the second and regulates nail 7 and cooperate with the second spacing preiection 15B.In the present invention; It is first group of stop that the first spacing preiection 15A, the second spacing preiection 15B, first regulate nail 6, the second adjusting nail 7; This first group of stop is used to regulate the spacing between second platform 13 and the 3rd platform 14; Make that under the condition of being drawn the measurement range of the first order power resolution of this force transducer is able to change.
Shown in Fig. 2 A, the B plate face 11B of sensitive body 1 is provided with C threaded hole 104, D threaded hole 105; C threaded hole 104 is used to install the 3rd to be regulated nail 8, the three and regulates nail 8 and cooperate with the 3rd spacing preiection 15C; D threaded hole 105 is used to install the 4th to be regulated nail 9, the four and regulates nail 9 and cooperate with the 4th spacing preiection 15D.In the present invention; It is second group of stop that the 3rd spacing preiection 15C, the 4th spacing preiection 15D, the 3rd regulate nail the 8, the 4th adjusting nail 9; This second group of stop is used to regulate the spacing between second platform 13 and the 3rd platform 14; Make that under the condition of pressurized the measurement range of the first order resolution of this force transducer is able to change.
Shown in Fig. 2 B, the flexible Luo Baici 1A of mechanism of A is connected with second platform 13 through A breach shape flexible hinge 1I; The flexible Luo Baici 1B of mechanism of B is connected with first platform 12 through B breach shape flexible hinge 1J; The flexible Luo Baici 1C of mechanism of C is connected with first platform 12 through C breach shape flexible hinge 1K; The flexible Luo Baici 1D of mechanism of D is connected with second platform 13 through D breach shape flexible hinge 1L; The flexible Luo Baici 1E of mechanism of E is connected with second platform 13 through E breach shape flexible hinge 1M; The flexible Luo Baici 1F of mechanism of F is connected with first platform 12 through F breach shape flexible hinge 1N; The flexible Luo Baici 1G of mechanism of G is connected with first platform 12 through G breach shape flexible hinge 1O; The flexible Luo Baici 1H of mechanism of H is connected with second platform 13 through H breach shape flexible hinge 1P.In the present invention, the design of 8 breach shape flexible hinges has avoided sensitive body 1 that the concentration phenomenon of stress takes place when measuring.
In the present invention, the flexible Roberts of on the sensitive body 18 mechanism is divided into two groups, is arranged symmetrically in the motion platform both sides.When external force F 5 acts on 12 last times of first platform through popping one's head in, the leaf spring in the flexible Roberts mechanism produces elastic deformation, has guaranteed the high precision rectilinear motion of first platform 12 and second platform 13.
In the present invention, sensitive body 1 adopts aluminium alloy 7075 materials processings.
(2) support 2
Referring to Fig. 1, Figure 1A, Figure 1B, shown in Figure 3; The riser 22 of support 2 is provided with central through hole 23; The top of this central through hole 23 is provided with slit 24; This slit 24 is divided into A support arm 25 and B support arm 26 with the upper end of riser 22, and A support arm 25 is provided with through hole (not shown among Fig. 3), and B support arm 26 is provided with C through hole 27.
Central through hole 23 is used to place eddy current displacement sensor 4.Eddy current displacement sensor 4 connects top nut 2B after the C through hole 27 that passes through A screw 2A on the B support arm 26, through hole on the A support arm 25 are installed in the clamping on the support 2 realizes.
Two through holes on the base 21 of support 2 are coaxial with 107 maintenances of F threaded hole with the E threaded hole 106 on the sensitive body 1; And through cooperating of B screw 106A and E threaded hole 106 and cooperating of C screw 107A and F threaded hole 107, thereby realization is fixedly mounted on support 2 on the 3rd platform 14.
In the present invention, support 2 adopts the mode of holding tightly that eddy current displacement sensor 4 is installed, and can regulate the sensitivity end of eddy current displacement sensor 4 and the distance between the check-out console 31 easily, demarcates and surveying work thereby be very easy to.
In the present invention, support 2 adopts aluminium alloy 5052 materials processings.
(3) the displacement detecting part 3
Shown in Fig. 1, Figure 1A, Figure 1B, displacement detecting part 3 is installed on first platform 12, promptly cooperates with G threaded hole 108 and E screw 109A cooperates with H threaded hole 109 through D screw 108A, and realization is installed in displacement detecting part 3 on first platform 12.The check-out console 31 of displacement detecting part 3 is relative with eddy current displacement sensor 4, and the check-out console 31 of the sensitivity end of eddy current displacement sensor 4 and displacement detecting part 3 has spacing d, d=1.3～1.5mm.
In the present invention, displacement detecting part 3 adopts aluminium alloy 5052 materials processings.
(4) eddy current displacement sensor 4
Shown in Fig. 1, Figure 1A, Figure 1B, eddy current displacement sensor 4 is installed on the support 2, and the sensitivity end of eddy current displacement sensor 4 and the check-out console 31 of displacement detecting part 3 have spacing d, d=1.3～1.5mm.
In the present invention, eddy current displacement sensor 4 is used to detect the moving displacement amount of the belly board of sensitive body 1.
In the present invention, the YD9800 series eddy current displacement sensor that eddy current displacement sensor 4 employing Shanghai vibration measuring self-reacting device company limiteds produce, its displacement resolution can reach 100nm.
(5) probe 5
Referring to Fig. 1, Figure 1A, Figure 1B, Fig. 2 C, shown in Figure 4, an end of probe 5 is a nose cone 51, and the other end of probe 5 is a threaded connector 52; A through hole 101, B through hole 110 rear threads that the threaded connector 52 of probe 5 passes sensitive body 1 in order are connected in the J threaded hole 111.
In the present invention, probe 5 adopts aluminium alloy 5052 materials processings.
Referring to shown in Figure 5, the present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and this force transducer in the principle of work that realizes two-stage power resolution is:
The flexible Luo Baici 1A of mechanism of A on the sensitive body 1, the flexible Luo Baici 1D of mechanism of D, the flexible Luo Baici 1H of mechanism of H and the flexible Luo Baici 1E of mechanism of E constitute one group, form the similar rigidity value k that has aFirst spring.Said first spring drives 13 motions of second platform under stress condition.
The flexible Luo Baici 1B of mechanism of B on the sensitive body 1, the flexible Luo Baici 1C of mechanism of C, the flexible Luo Baici 1G of mechanism of G and the flexible Luo Baici 1F of mechanism of F constitute other one group, form the similar rigidity value k that has bSecond spring.Said second spring drives 12 motions of first platform under stress condition.
When by dynamometry when less, first spring and second spring are series relationship, and the rigidity value of this moment is k 1=k ak b/ (k a+ k b); When tested external force is big; The motion of second platform 13 is regulated nail 6 and second by first and is regulated nail 7 (when receiving tension) or the 3rd and regulate nail the 8 and the 4th adjusting and follow closely 9 (are stressed and do the time spent) and limit; This moment, first spring failure had only second springs, and the rigidity of this moment is k 2=k bOwing on a sensitive body 1, realized the variation of two stage stiffness, therefore when carrying out same displacement detecting, sensor of the present invention can realize having the measurement requirement of two-stage power resolution and two-stage power measurement range.
The present invention is a kind of force transducer of the two-stage power resolution based on flexible Roberts mechanism, and the principle of work of this force transducer is:
(A) 5 receiving under the condition of external pressure when probe, second platform 13 and first platform 12 simultaneously to the right direction move;
(B) check-out console 31 of displacement detecting part 3 to the sensitivity end of eddy current displacement sensor 4 near;
(C) eddy current displacement sensor 4 detects the amount of exercise of first platform 12;
(D) after second platform 13 and the 3rd adjusting nail 8 and the 4th adjusting nail 9 contacts, 13 stop motions of second platform, first platform 12 continues to move;
(E) moving first platform 12 with the check-out console of displacement detecting part 331 continue to the sensitivity end of eddy current displacement sensor 4 near;
(F) eddy current displacement sensor 4 detects the amount of exercise of first platform 12 once more.
The force transducer based on the two-stage power resolution of flexible Roberts mechanism of the present invention design; It is eddy current displacement sensor 4; When external force through pop one's head in 5 act on sensitive body 1 12 last times of first platform; The sensitivity end of eddy current displacement sensor 4 is through variable in distance between the check-out console 31 that detects eddy current displacement sensor 4 and displacement detecting part 3, and detected displacement signal is converted into by the size of dynamometry.This metering system is through detecting the displacement of moving component, rather than the distortion of leaf spring self comes the perception measured signal, thereby has greatly reduced the interference of outside noise signal, has improved the measuring accuracy of force transducer.

Claims (9)

1.一种基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：该力传感器包括有敏感体(1)、支架(2)、位移检测件(3)、电涡流位移传感器(4)和探头(5)； 1. a kind of force sensor based on the two-stage force resolution of flexible Roberts mechanism, it is characterized in that: this force sensor includes sensitive body (1), support (2), displacement detection part (3), eddy current displacement sensor ( 4) and probe (5); 敏感体(1)采用电火花线切割技术一方面切割有A柔性罗伯茨机构(1A)、B柔性罗伯茨机构(1B)、C柔性罗伯茨机构(1C)、D柔性罗伯茨机构(1D)、E柔性罗伯茨机构(1E)、F柔性罗伯茨机构(1F)、G柔性罗伯茨机构(1G)、H柔性罗伯茨机构(1H)； Sensitive body (1) adopts wire electric discharge cutting technology to cut A flexible Roberts mechanism (1A), B flexible Roberts mechanism (1B), C flexible Roberts mechanism (1C), D flexible Roberts mechanism (1D), E flexible Roberts mechanism Mechanism (1E), F Flexible Roberts Mechanism (1F), G Flexible Roberts Mechanism (1G), H Flexible Roberts Mechanism (1H); 敏感体(1)采用电火花线切割技术另一方面切割有第一切割槽(151)、第二切割槽(152)、第三切割槽(153)、第四切割槽(154)、第五切割槽(161)、第六切割槽(162)、第七切割槽(163)、第八切割槽(164)； The sensitive body (1) is cut with electric discharge wire cutting technology and has a first cutting groove (151), a second cutting groove (152), a third cutting groove (153), a fourth cutting groove (154), a fifth cutting groove Cutting groove (161), the sixth cutting groove (162), the seventh cutting groove (163), the eighth cutting groove (164); 第一切割槽(151)的一端与第二切割槽(152)的另一端之间是H缺口形柔性铰链(1P)；第二切割槽(152)的一端与第三切割槽(153)的另一端之间是E缺口形柔性铰链(1M)；第三切割槽(153)的一端与第四切割槽(154)的另一端之间是A缺口形柔性铰链(1I)；第四切割槽(154)的一端与第一切割槽(151)的另一端之间是D缺口形柔性铰链(1L)；第五切割槽(161)的一端与第六切割槽(162)的另一端之间是G缺口形柔性铰链(1O)；第六切割槽(162)的一端与第七切割槽(163)的另一端之间是F缺口形柔性铰链(1N)；第七切割槽(163)的一端与第八切割槽(164)的另一端之间是B缺口形柔性铰链(1J)；第八切割槽(164)的一端与第五切割槽(161)的另一端之间是C缺口形柔性铰链(1K)；所述切割槽将敏感体(1)分割成第一平台(12)、第二平台(13)和第三平台(14)； Between one end of the first cutting groove (151) and the other end of the second cutting groove (152) is an H notch shape flexible hinge (1P); one end of the second cutting groove (152) and the third cutting groove (153) Between the other end is the E gap shape flexible hinge (1M); Between one end of the 3rd cutting groove (153) and the other end of the 4th cutting groove (154) is the A gap shape flexible hinge (1I); The 4th cutting groove Between one end of (154) and the other end of the first cutting groove (151) is a D gap shape flexible hinge (1L); between one end of the fifth cutting groove (161) and the other end of the sixth cutting groove (162) It is a G notch-shaped flexible hinge (10); an F notch-shaped flexible hinge (1N) is between one end of the sixth cutting groove (162) and the other end of the seventh cutting groove (163); the seventh cutting groove (163) Between one end and the other end of the eighth cutting groove (164) is a B notch-shaped flexible hinge (1J); between one end of the eighth cutting groove (164) and the other end of the fifth cutting groove (161) is a C-notch shape A flexible hinge (1K); the cutting groove divides the sensitive body (1) into a first platform (12), a second platform (13) and a third platform (14); 第一平台(12)上安装有位移检测件(3)； A displacement detection part (3) is installed on the first platform (12); 第三平台(14)上安装有支架(2)； A bracket (2) is installed on the third platform (14); 第一切割槽(15)上设有第一限位凸起(15A)、第二限位凸起(15B)、第三限位凸起(15C)和第四限位凸起(15D)；第一限位凸起(15A)、第二限位凸起(15B)与第一调节钉(6)、第二调节钉(7)构成一组用于测量拉力时进行调节；第三限位凸起(15C)、第四限位凸起(15D)与第三调节钉(8)、第四调节钉(9)构成另一组用于测量压力时进行调节； The first cutting groove (15) is provided with a first limiting protrusion (15A), a second limiting protrusion (15B), a third limiting protrusion (15C) and a fourth limiting protrusion (15D); The first limit protrusion (15A), the second limit protrusion (15B) and the first adjustment nail (6), the second adjustment nail (7) form a group for adjustment when measuring the tension; the third limit The protrusion (15C), the fourth limit protrusion (15D), the third adjustment nail (8), and the fourth adjustment nail (9) form another group for adjustment when measuring pressure; 敏感体(1)的A板面(11A)上设有A通孔(101)、A螺纹孔(102)、B螺纹孔(103)；A通孔(101)用于探头(5)穿过；A螺纹孔(102)用于安装第一调节钉(6)；B螺纹孔(103)用于安装第二调节钉(7)；  A through hole (101), A threaded hole (102) and B threaded hole (103) are arranged on the A plate surface (11A) of the sensitive body (1); the A through hole (101) is used for the probe (5) to pass through ; A threaded hole (102) is used to install the first adjusting nail (6); B threaded hole (103) is used to install the second adjusting nail (7); 敏感体(1)的B板面(11B)上设有C螺纹孔(104)、D螺纹孔(105)；C螺纹孔(104)用于安装第三调节钉(8)；D螺纹孔(105)用于安装第四调节钉(9)； The B plate surface (11B) of the sensitive body (1) is provided with a C threaded hole (104), a D threaded hole (105); the C threaded hole (104) is used to install the third adjusting nail (8); the D threaded hole ( 105) for installing the fourth adjusting nail (9); A柔性罗伯茨机构(1A)通过A缺口形柔性铰链(1I)与第二平台(13)连接；B柔性罗伯茨机构(1B)通过B缺口形柔性铰链(1J)与第一平台(12)连接；C柔性罗伯茨机构(1C)通过C缺口形柔性铰链(1K)与第一平台(12)连接；D柔性罗伯茨机构(1D)通过D缺口形柔性铰链(1L)与第二平台(13)连接；E柔性罗伯茨机构(1E)通过E缺口形柔性铰链(1M)与第二平台(13)连接；F柔性罗伯茨机构(1F)通过F缺口形柔性铰链(1N)与第一平台(12)连接；G柔性罗伯茨机构(1G)通过G缺口形柔性铰链(1O)与第一平台(12)连接；H柔性罗伯茨机构(1H)通过H缺口形柔性铰链(1P)与第二平台(13)连接； The A flexible Roberts mechanism (1A) is connected to the second platform (13) through the A notch-shaped flexible hinge (1I); the B flexible Roberts mechanism (1B) is connected to the first platform (12) through the B notch-shaped flexible hinge (1J); The C flexible Roberts mechanism (1C) is connected to the first platform (12) through the C notch-shaped flexible hinge (1K); the D flexible Roberts mechanism (1D) is connected to the second platform (13) through the D notch-shaped flexible hinge (1L); The E flexible Roberts mechanism (1E) is connected to the second platform (13) through the E notch-shaped flexible hinge (1M); the F flexible Roberts mechanism (1F) is connected to the first platform (12) through the F notch-shaped flexible hinge (1N); The G flexible Roberts mechanism (1G) is connected to the first platform (12) through the G notch-shaped flexible hinge (10); the H flexible Roberts mechanism (1H) is connected to the second platform (13) through the H notch-shaped flexible hinge (1P); 支架(2)的立板(22)上设有中心通孔(23)，该中心通孔(23)的上方设有缝隙(24)，该缝隙(24)将立板(22)的上端分为A支臂(25)和B支臂(26)，A支臂(25)上设有通孔，B支臂(26)上设有C通孔(27)； The vertical plate (22) of support (2) is provided with central through hole (23), and the top of this central through hole (23) is provided with slit (24), and this slit (24) divides the upper end of vertical plate (22). It is the A support arm (25) and the B support arm (26), and the A support arm (25) is provided with a through hole, and the B support arm (26) is provided with a C through hole (27); 中心通孔(23)用于放置电涡流位移传感器(4)；电涡流位移传感器(4)在支架(2)上的夹紧安装通过A螺钉(2A)穿过B支臂(26)上的C通孔(27)、A支臂(25)上的通孔后连接上螺母(2B)实现； The central through hole (23) is used to place the eddy current displacement sensor (4); the clamping installation of the eddy current displacement sensor (4) on the support (2) passes through the A screw (2A) on the B support arm (26) C through hole (27), the through hole on the A support arm (25) are connected with nut (2B) to realize; 支架(2)的底座(21)上的两个通孔与敏感体(1)上的E螺纹孔(106)和F螺纹孔(107)保持同轴，且通过B螺钉(106A)与E螺纹孔(106)的配合、以及C螺钉(107A)与F螺纹孔(107)的配合，从而实现将支架(2)固定安装在第三平台(14)上； The two through holes on the base (21) of the bracket (2) are coaxial with the E threaded hole (106) and the F threaded hole (107) on the sensitive body (1), and are connected to the E threaded hole through the B screw (106A) The cooperation of the hole (106) and the cooperation of the C screw (107A) and the F threaded hole (107), thereby realizing that the bracket (2) is fixedly installed on the third platform (14); 位移检测件(3)安装在第一平台(12)上，即通过D螺钉(108A)与G螺纹孔(108)配合、以及E螺钉(109A)与H螺纹孔(109)配合，实现将位移检测件(3)安装在第一平台(12)上；位移检测件(3)的检测板(31)与电涡流位移传感器(4)相对，且电涡流位移传感器(4)的敏感端与位移检测件(3)的检测板(31)存在有间距d，d＝1.3～1.5mm； The displacement detection part (3) is installed on the first platform (12), that is, through the cooperation of the D screw (108A) and the G threaded hole (108), and the cooperation of the E screw (109A) and the H threaded hole (109), the displacement The detection part (3) is installed on the first platform (12); the detection plate (31) of the displacement detection part (3) is opposite to the eddy current displacement sensor (4), and the sensitive end of the eddy current displacement sensor (4) is in contact with the displacement The detection plate (31) of the detection piece (3) has a distance d, where d=1.3-1.5 mm; 电涡流位移传感器(4)安装在支架(2)上，电涡流位移传感器(4)的敏感端与位移检测件(3)的检测板(31)存在有间距d，d＝1.3～1.5mm； The eddy current displacement sensor (4) is installed on the bracket (2), and there is a distance d between the sensitive end of the eddy current displacement sensor (4) and the detection plate (31) of the displacement detection part (3), where d=1.3～1.5mm; 探头(5)的一端为圆锥头(51)，探头(5)的另一端为螺纹接头(52)；探头(5)的螺纹接头(52)顺次穿过敏感体(1)的A通孔(101)、B通孔(110)后螺纹连接在J螺纹孔(111)内。 One end of the probe (5) is a conical head (51), and the other end of the probe (5) is a threaded joint (52); the threaded joint (52) of the probe (5) passes through the A through hole of the sensitive body (1) in sequence (101), B through hole (110) back threaded connection in J threaded hole (111). 2.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：第一限位凸起(15A)、第二限位凸起(15B)、第一调节钉(6)、第二 调节钉(7)为第一组限位器，该第一组限位器用于调节第二平台(13)与第三平台(14)之间的间距。 2. The force sensor based on the two-stage force resolution of the flexible Roberts mechanism according to claim 1, characterized in that: the first stop projection (15A), the second stop projection (15B), the first adjustment Nail (6), the second adjustment nail (7) are the first group of stoppers, and the first group of stoppers are used to regulate the spacing between the second platform (13) and the third platform (14). 3.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：第三限位凸起(15C)、第四限位凸起(15D)、第三调节钉(8)、第四调节钉(9)为第二组限位器，该第二组限位器用于调节第二平台(13)与第三平台(14)之间的间距。 3. The force sensor based on the two-stage force resolution of the flexible Roberts mechanism according to claim 1, characterized in that: the third stop projection (15C), the fourth stop projection (15D), the third adjustment The nails (8) and the fourth adjusting nails (9) are the second group of stoppers, and the second group of stoppers are used to adjust the distance between the second platform (13) and the third platform (14). 4.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：该力传感器在实现两级力分辨率的工作原理为： 4. the force sensor based on the two-stage force resolution of flexible Roberts mechanism according to claim 1, is characterized in that: the working principle of the force sensor in realizing two-stage force resolution is: 敏感体(1)上的A柔性罗伯茨机构(1A)、D柔性罗伯茨机构(1D)、H柔性罗伯茨机构(1H)和E柔性罗伯茨机构(1E)构成一组，形成类似具有刚度值ka的第一弹簧；所述第一弹簧在受力条件下，带动第二平台(13)运动； A flexible Roberts mechanism (1A), D flexible Roberts mechanism (1D), H flexible Roberts mechanism (1H) and E flexible Roberts mechanism (1E) on the sensitive body (1) constitute a group, forming a similar a first spring; the first spring drives the second platform (13) to move under a stressed condition; 敏感体(1)上的B柔性罗伯茨机构(1B)、C柔性罗伯茨机构(1C)、G柔性罗伯茨机构(1G)和F柔性罗伯茨机构(1F)构成另外一组，形成类似具有刚度值kb的第二弹簧；所述第二弹簧在受力条件下，带动第一平台(12)运动； B flexible Roberts mechanism (1B), C flexible Roberts mechanism (1C), G flexible Roberts mechanism (1G) and F flexible Roberts mechanism (1F) on the sensitive body (1) constitute another group, forming a similar The second spring; the second spring drives the first platform (12) to move under a stressed condition; 当被测力较小时，第一弹簧与第二弹簧是串联关系，此时的刚度值为k1＝kakb/(ka+kb)；当被测外力较大时，第二平台(13)的运动被第一调节钉(6)和第二调节钉(7)或第三调节钉(8)和第四调节钉(9)限制住，此时第一弹簧失效，只有第二弹簧起作用，此时的刚度为k2＝kb。 When the measured force is small, the first spring and the second spring are connected in series, and the stiffness value at this time is k 1 =k a k b /(k a +k b ); when the measured external force is large, the second spring The movement of the platform (13) is limited by the first adjustment nail (6) and the second adjustment nail (7) or the third adjustment nail (8) and the fourth adjustment nail (9). The second spring works, and the stiffness at this time is k 2 =k b . 5.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：敏感体(1)采用铝合金7075材料加工。 5. The force sensor with two-stage force resolution based on flexible Roberts mechanism according to claim 1, characterized in that: the sensitive body (1) is processed by aluminum alloy 7075. 6.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：支架(2)采用铝合金5052材料加工。 6. The force sensor with two-stage force resolution based on a flexible Roberts mechanism according to claim 1, characterized in that: the bracket (2) is processed by aluminum alloy 5052. 7.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：位移检测件(3)采用铝合金5052材料加工。 7. The force sensor with two-stage force resolution based on a flexible Roberts mechanism according to claim 1, characterized in that: the displacement detection part (3) is processed by aluminum alloy 5052. 8.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：电涡流位移传感器(4)的位移分辨率可以达到100nm。 8. The force sensor with two-stage force resolution based on flexible Roberts mechanism according to claim 1, characterized in that: the displacement resolution of the eddy current displacement sensor (4) can reach 100 nm. 9.根据权利要求1所述的基于柔性Roberts机构的两级力分辨率的力传感器，其特征在于：电涡流位移传感器(4)用于检测敏感体(1)的中间平台的运动位移量。  9. The force sensor with two-stage force resolution based on flexible Roberts mechanism according to claim 1, characterized in that: the eddy current displacement sensor (4) is used to detect the movement displacement of the intermediate platform of the sensitive body (1). the
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RU2658089C1 (en) * 2016-12-16 2018-06-19 Общество С Ограниченной Ответственностью "Тонкопленочные Технологии" Deformation sensor
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Inventor after: Liu Jingmeng

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