CN110082011A - A kind of multistage dynamometry location displacement sensor - Google Patents

A kind of multistage dynamometry location displacement sensor Download PDF

Info

Publication number
CN110082011A
CN110082011A CN201910277419.4A CN201910277419A CN110082011A CN 110082011 A CN110082011 A CN 110082011A CN 201910277419 A CN201910277419 A CN 201910277419A CN 110082011 A CN110082011 A CN 110082011A
Authority
CN
China
Prior art keywords
cantilever beam
dynamometry
multistage
level
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910277419.4A
Other languages
Chinese (zh)
Other versions
CN110082011B (en
Inventor
张祺
张晨
梁钊滨
王杰
李慧文
郭强
张志俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyuan University of Technology
Original Assignee
Taiyuan University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyuan University of Technology filed Critical Taiyuan University of Technology
Priority to CN201910277419.4A priority Critical patent/CN110082011B/en
Publication of CN110082011A publication Critical patent/CN110082011A/en
Application granted granted Critical
Publication of CN110082011B publication Critical patent/CN110082011B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2218Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being of the column type, e.g. cylindric, adapted for measuring a force along a single direction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225Measuring circuits therefor
    • G01L1/2262Measuring circuits therefor involving simple electrical bridges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281Arrangements for correcting or for compensating unwanted effects for temperature variations

Abstract

The invention discloses a kind of multistage dynamometry location displacement sensors, are incuded using multi stage resilient body, by the way that power is dispersed in each elastomer come range extension;And select structure simple, it is easy to process, with higher sensitivity cantilever beam improves sensitivity, the measurement of various precision can be adapted to by changing geometry and the material of cantilever beam, it is limited compared to general load cell by proportional limit, precision is improved by using special material, this multistage dynamometry location displacement sensor improves precision by changing structure can be easier.By means of the invention it is possible to accomplish range extension from the change of structure, improve precision, reduce error, additionally it is possible to guarantee precision simultaneously in the case where large range measuring, be not only simple in structure, easy to operate and requirement to material is not also high.

Description

A kind of multistage dynamometry location displacement sensor
Technical field
The present invention relates to mechanics sensor fields, more particularly to a kind of multistage dynamometry location displacement sensor.
Background technique
Load cell is the elastomer by generating deformation after stress, and can incude the resistance strain gage of this deformation quantity The bridge circuit (such as Wheatstone bridge) of composition, and fixed be pasted on elastomer of resistance strain gage can simultaneously be conducted strain The three parts composition such as the adhesive of amount and the sealant for protecting electronic circuit.
Most common load cell is piezoresistive pressure sensor, and resistance strain gage is pressure resistance type strain transducer One of chief component, the working principle of metal resistance strain gauge is to be adsorbed on basis material strain resistor with mechanical shape The phenomenon that becoming and generating change in resistance is commonly called as resistance strain effect.In addition, either ceramic pressure sensor, spreads silicon pressure The common load cell such as force snesor or diffusion silicon pressure sensor is also all based on resistance strain effect manufacture.
The synthesis precision of load cell is by displacement errors, sensitivity error, linearity error and hysteresis error four The influence of factor.Displacement errors are the common biographies as caused by pressure sensor vertical shift in entire pressure limit Sensor cannot be guaranteed power perpendicular acting in dynamometry at its center, so as to cause displacement errors.High-precision sensor in order to Reduce sensitivity error and linearity error, frequently with special conductor sensitivity original part or substrate, it is not only higher to material requirements and It is expensive, it is also very high to the requirement on machining accuracy of sensor entirety.In addition, existing load cell not can be carried out greatly mostly Range measurement, that is, allow to can not have very high precision in the case where guaranteeing wide range.
Summary of the invention
The purpose of the present invention is provide a kind of multistage dynamometry displacement biography to solve above-mentioned the deficiencies in the prior art place Sensor.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of multistage dynamometry displacement is provided Sensor, comprising: multistage cantilever beam, parallel equidistant arranged symmetrically, every two cantilever beam is set in same level, setting For same level-one cantilever beam;The first end of every two cantilever beams of level-one is to be fixed on the fixing end of frame-type rack inner sidewall, cantilever beam A foil gauge is respectively set in position close to first end, and second end is free end, and column is set to frame-type carriage center position, and With the free end in contact of two cantilever beams of every level-one;Column and the position of every two free end in contact of level-one cantilever beam are set respectively A power transmission nut is set, to keep column and the relative position of every level-one cantilever beam to fix;One strain bottom of bottom of the frame center setting The foil gauge that two groups of vertical symmetries are distributed is arranged in column, strain foundation side wall;It is opposite with column one end at the top of the strain foundation to set It sets, the effect platform of an applied force is fixedly installed in the column other end, by driving column mobile, making to effect platform applied force Every level-one cantilever beam generates deformation, and contacts column with strain foundation, passes through the strain being arranged on cantilever beam and strain foundation The data that piece generates carry out pressure measurement.
Wherein, each foil gauge accesses circuit by a quarter ridge method, to carry out reading data.
Wherein, the first end of each cantilever beam is fixed on rack inner sidewall by way of welding or grafting, and foil gauge is logical The mode for crossing welding or bonding is fixed on cantilever beam and strain foundation.
Wherein, a graduated scale is fixed on power transmission platform, and one reference line is set on rack top to measure power transmission platform i.e. The displacement generated by dynamometry.
Wherein, a temperature-compensating foil gauge is set in gantry base, with the foil gauge composition four being fixed on cantilever beam / mono- bridge.
Wherein, the reading strain for reading two foil gauges on every level-one cantilever beam calculates the pressure on every level-one cantilever beam Power reads the reading of foil gauge on strain foundation, calculates the pressure on strain foundation, the every level-one that will be calculated by formula The pressure value of cantilever beam is added with the pressure value of strain foundation, obtains the pressure value for being applied to effect platform.
Wherein, temperature-compensating foil gauge accesses 1/4 bridge, for every level-one cantilever beam and strain foundation foil gauge registration It is modified.
It is different from the prior art, multistage dynamometry location displacement sensor of the invention is incuded using multi stage resilient body, is passed through Power is dispersed in each elastomer and carrys out range extension;And select structure simple, easy to process, with higher sensitivity cantilever beam comes Sensitivity is improved, the measurement of various precision can be adapted to by changing geometry and the material of cantilever beam, be surveyed compared to general Force snesor is limited by proportional limit, and precision, this multistage dynamometry location displacement sensor are improved by using special material Improving precision by changing structure can be easier.By means of the invention it is possible to accomplish range extension from the change of structure, mention In high precision, reduce error, additionally it is possible to guarantee precision simultaneously in the case where large range measuring, is not only simple in structure, it is easy to operate And the requirement to material is not also high.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of multistage dynamometry location displacement sensor provided by the invention.
Fig. 2 is a kind of structural schematic diagram of 1/4 bridge of multistage dynamometry location displacement sensor provided by the invention.
Specific embodiment
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention.But the present invention can be with Much it is different from other way described herein to implement, those skilled in the art can be without prejudice to intension of the present invention the case where Under do similar popularization, therefore the present invention is not limited to the specific embodiments disclosed below.
Secondly, the present invention is described in detail using schematic diagram, when describing the embodiments of the present invention, for purposes of illustration only, showing It is intended to be example, the scope of protection of the invention should not be limited herein.
Refering to fig. 1, Fig. 1 is a kind of structural schematic diagram of multistage dynamometry location displacement sensor provided by the invention.Include:
Multistage cantilever beam 3, parallel equidistant arranged symmetrically, every two cantilever beam 3 is set in same level, is set as same Grade cantilever beam;The first end of every two cantilever beams 3 of level-one is to be fixed on the fixing end of 9 inner sidewall of frame-type rack, and cantilever beam 3 is close A foil gauge 7 is respectively set in the position of first end, and second end is free end, and column 6 is set to 9 center of frame-type bracket, and With the free end in contact of two cantilever beams 3 of every level-one;The position of column 6 and every 3 two free end in contact of level-one cantilever beam point One power transmission nut 4 is not set, to keep column 6 and the relative position of every level-one cantilever beam 3 to fix;The setting of 9 center of bottom of the frame The foil gauge 7 that two groups of vertical symmetries are distributed is arranged in one strain foundation 8, strain 8 side wall of foundation;Strain 8 top of foundation and column 6 one End is oppositely arranged, and the effect platform 5 of an applied force is fixedly installed in 6 other end of column, by driving to effect 5 applied force of platform Column 6 is mobile, and every level-one cantilever beam 3 is made to generate deformation, and contacts column 6 with strain foundation 8, passes through cantilever beam 3 and strain The data that the foil gauge 7 being arranged on foundation 8 generates carry out pressure measurement.
Wherein, each foil gauge 7 accesses circuit by a quarter ridge method, to carry out reading data.
Wherein, the first end of each cantilever beam 3 is fixed on 9 inner sidewall of frame-type rack by way of welding or grafting, answers Become piece 7 to be fixed on by way of welding or being bonded on cantilever beam 3 and strain foundation 8.
Wherein, a graduated scale 2 is fixed on power transmission platform 5, and one reference line 1 is set on 9 top of frame-type rack to measure quilt The displacement that dynamometry generates.
Wherein, a temperature-compensating foil gauge 10 is set in gantry base 9, be fixed on cantilever beam 37 groups of foil gauge At a quarter bridge.
Wherein, the reading strain for reading two foil gauges on every level-one cantilever beam 3 calculates on every level-one cantilever beam 3 Pressure reads the reading of foil gauge 7 on strain foundation 8, the pressure on strain foundation 7 is calculated by formula, by what is be calculated The pressure value of every level-one cantilever beam 3 is added with the pressure value of strain foundation 8, obtains the pressure value for being applied to effect platform 5.
Wherein, temperature-compensating foil gauge 10 accesses 1/4 bridge, for the strain to every level-one cantilever beam 3 and strain foundation 8 7 registration of piece is modified.Company between temperature-compensating foil gauge 10 and the foil gauge 7 being set on cantilever beam 3 and strain foundation 8 It is as shown in Figure 2 to connect relationship.
Specifically, foil gauge 7 is fixed on cantilever beam 3 and strain foundation 8 hot melt adhesive in a manner of being bonded.In this hair In bright, the quantity of cantilever beam 3 is set as 3, then the foil gauge being set on cantilever beam 3 is 6, and number is 1-6 respectively;Strain The foil gauge quantity being arranged on foundation 8 is 2, and number is 7 and 8.By reading the reading strain of each foil gauge, respectively indicate For ε18.Relationship existing for the strain value and load of each foil gauge on cantilever beam 3 is as shown in Equation (1):
(1)
Wherein, b is the width of cantilever beam section, and h is the height of cantilever beam section, and F is load, and a is girder cantilever beam end to answering Become the distance of piece, it is 210GPa that E is taken in the present invention.
Straining strain value and the load of the foil gauge on foundation 8, that there are relationships is as shown in Equation (2):
(2)
Then in three-level cantilever beam, the pressure on every level-one cantilever beam is respectively as follows:
Straining the pressure value on foundation 8 in cylinder is
Load can finally be obtained
By applying different size of pressure on effect platform 5, by the relationship of strain value and pressure value, in column 6 The part stretched out outside top cover 10 carries out scale.When no pressure is applied, the position opposite with 10 outer surface of top cover of column 6 It sets as zero graduation line, using zero graduation line as starting point, scale is set on column 6, by applying different size to effect platform 5 Pressure current pressure values size is calculated when the scale on column 6 is aligned with top cover 10, by pressure value mark in vertical On column 6, to complete scale.
It is different from the prior art, multistage dynamometry location displacement sensor of the invention is incuded using multi stage resilient body, is passed through Power is dispersed in each elastomer and carrys out range extension;And select structure simple, easy to process, with higher sensitivity cantilever beam comes Sensitivity is improved, the measurement of various precision can be adapted to by changing geometry and the material of cantilever beam, be surveyed compared to general Force snesor is limited by proportional limit, and precision, this multistage dynamometry location displacement sensor are improved by using special material Improving precision by changing structure can be easier.By means of the invention it is possible to accomplish range extension from the change of structure, mention In high precision, reduce error, additionally it is possible to guarantee precision simultaneously in the case where large range measuring, is not only simple in structure, it is easy to operate And the requirement to material is not also high.
Although the invention has been described by way of example and in terms of the preferred embodiments, but it is not for limiting the present invention, any this field Technical staff without departing from the spirit and scope of the present invention, may be by the methods and technical content of the disclosure above to this hair Bright technical solution makes possible variation and modification, therefore, anything that does not depart from the technical scheme of the invention, and according to the present invention Technical spirit any simple modifications, equivalents, and modifications to the above embodiments, belong to technical solution of the present invention Protection scope.

Claims (7)

1. a kind of multistage dynamometry location displacement sensor characterized by comprising
Multistage cantilever beam, parallel equidistant arranged symmetrically, every two cantilever beam is set in same level, is set as same level-one Cantilever beam;The first end of every two cantilever beams of level-one is to be fixed on the fixing end of frame-type rack inner sidewall, and cantilever beam is close to first The position at end is respectively set a foil gauge, and second end is free end, and column is set to frame-type carriage center position, and with every level-one Two cantilever beams free end in contact;A power transmission is respectively set in the position of column and every two free end in contact of level-one cantilever beam Nut, to keep column and the relative position of every level-one cantilever beam to fix;One strain foundation of bottom of the frame center setting, strains bottom The foil gauge that two groups of vertical symmetries are distributed is arranged in column side wall;It is oppositely arranged at the top of the strain foundation with column one end, column is another The effect platform of an applied force is fixedly installed in one end, by driving column mobile, making every level-one cantilever to effect platform applied force Beam generates deformation, and contacts column with strain foundation, the number generated by the foil gauge being arranged on cantilever beam and strain foundation According to progress pressure measurement;
Meanwhile a graduated scale is fixed on power transmission platform, it is i.e. tested to measure power transmission platform that a reference line is arranged on rack top The displacement that power generates.
2. multistage dynamometry location displacement sensor according to claim 1, which is characterized in that each foil gauge by four/ One ridge method accesses circuit, to carry out reading data.
3. multistage dynamometry location displacement sensor according to claim 1, which is characterized in that the first end of each cantilever beam is logical The mode for crossing welding or grafting is fixed on frame-type rack inner sidewall, and foil gauge is fixed on cantilever beam and strain by way of bonding On foundation.
4. multistage dynamometry location displacement sensor according to claim 1, which is characterized in that fix a moment on power transmission platform Ruler is spent, one reference line is set on frame-type rack top to measure the displacement generated by dynamometry.
5. multistage dynamometry location displacement sensor according to claim 2, which is characterized in that a temperature is arranged in gantry base Dummy gauge is spent, forms a quarter bridge with the foil gauge for being fixed on cantilever beam and strain foundation.
6. multistage dynamometry location displacement sensor according to claim 5, which is characterized in that read on every level-one cantilever beam The reading strain of two foil gauges calculates the pressure on every level-one cantilever beam, reads the reading of foil gauge on strain foundation, passes through Formula calculates the pressure on strain foundation, by the pressure value phase of the pressure value for the every level-one cantilever beam being calculated and strain foundation Add, obtains the pressure value for being applied to effect platform.
7. multistage dynamometry location displacement sensor according to claim 6, which is characterized in that temperature-compensating foil gauge access 1/ 4 bridges, for being modified to every level-one cantilever beam and strain foundation foil gauge registration.
CN201910277419.4A 2019-04-08 2019-04-08 Multi-stage force and displacement measuring sensor Active CN110082011B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910277419.4A CN110082011B (en) 2019-04-08 2019-04-08 Multi-stage force and displacement measuring sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910277419.4A CN110082011B (en) 2019-04-08 2019-04-08 Multi-stage force and displacement measuring sensor

Publications (2)

Publication Number Publication Date
CN110082011A true CN110082011A (en) 2019-08-02
CN110082011B CN110082011B (en) 2021-03-05

Family

ID=67414502

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910277419.4A Active CN110082011B (en) 2019-04-08 2019-04-08 Multi-stage force and displacement measuring sensor

Country Status (1)

Country Link
CN (1) CN110082011B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114046722A (en) * 2021-10-12 2022-02-15 中车唐山机车车辆有限公司 Displacement meter

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864966A (en) * 1973-03-14 1975-02-11 William K Seitz Load transducer
CN87207413U (en) * 1987-08-15 1988-04-20 浙江大学 Electromechanical displacement sensor with large range
CN2439671Y (en) * 2000-09-20 2001-07-18 中国科学院合肥智能机械研究所 Force-measuring platform
US20060144153A1 (en) * 2004-12-28 2006-07-06 Amnon Brosh Composite MEMS pressure sensor configuration
CN102435353A (en) * 2011-09-15 2012-05-02 北京航空航天大学 Flexible Roberts mechanism based force sensor realizing two-stage force resolutions
CN202281665U (en) * 2011-10-29 2012-06-20 北京理工大学 Cantilever beam type two-dimensional force transducer
CN103090778A (en) * 2012-12-20 2013-05-08 太原理工大学 Strain type linear bidirectional large displacement sensor and detection method thereof
CN105486273A (en) * 2015-11-27 2016-04-13 西安交通大学 Circular-ring-type biaxial radial extensometer in hydrostatic pressure multi-axis loading test
CN105628269A (en) * 2015-12-25 2016-06-01 湖南师范大学 Micro force and micro displacement amplification sensor
CN107402100A (en) * 2017-07-20 2017-11-28 沈阳农业大学 A kind of force cell
CN107421676A (en) * 2017-07-20 2017-12-01 沈阳农业大学 A kind of suspension type space dynamometric system
CN107543638A (en) * 2016-06-28 2018-01-05 深圳长城开发科技股份有限公司 Stannum plaster scribing knife pressure test device and its detection method based on foil gauge
CN108593160A (en) * 2018-05-23 2018-09-28 太原理工大学 A kind of manufacturing method of diaphragm type cantilever beam surface stress biosensor

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864966A (en) * 1973-03-14 1975-02-11 William K Seitz Load transducer
CN87207413U (en) * 1987-08-15 1988-04-20 浙江大学 Electromechanical displacement sensor with large range
CN2439671Y (en) * 2000-09-20 2001-07-18 中国科学院合肥智能机械研究所 Force-measuring platform
US20060144153A1 (en) * 2004-12-28 2006-07-06 Amnon Brosh Composite MEMS pressure sensor configuration
CN102435353A (en) * 2011-09-15 2012-05-02 北京航空航天大学 Flexible Roberts mechanism based force sensor realizing two-stage force resolutions
CN202281665U (en) * 2011-10-29 2012-06-20 北京理工大学 Cantilever beam type two-dimensional force transducer
CN103090778A (en) * 2012-12-20 2013-05-08 太原理工大学 Strain type linear bidirectional large displacement sensor and detection method thereof
CN105486273A (en) * 2015-11-27 2016-04-13 西安交通大学 Circular-ring-type biaxial radial extensometer in hydrostatic pressure multi-axis loading test
CN105628269A (en) * 2015-12-25 2016-06-01 湖南师范大学 Micro force and micro displacement amplification sensor
CN107543638A (en) * 2016-06-28 2018-01-05 深圳长城开发科技股份有限公司 Stannum plaster scribing knife pressure test device and its detection method based on foil gauge
CN107402100A (en) * 2017-07-20 2017-11-28 沈阳农业大学 A kind of force cell
CN107421676A (en) * 2017-07-20 2017-12-01 沈阳农业大学 A kind of suspension type space dynamometric system
CN108593160A (en) * 2018-05-23 2018-09-28 太原理工大学 A kind of manufacturing method of diaphragm type cantilever beam surface stress biosensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114046722A (en) * 2021-10-12 2022-02-15 中车唐山机车车辆有限公司 Displacement meter

Also Published As

Publication number Publication date
CN110082011B (en) 2021-03-05

Similar Documents

Publication Publication Date Title
CN100547346C (en) Little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head
US4979580A (en) Force measuring device with sensitivity equalization
US3949603A (en) Strain gage transducer
CN106500902B (en) A kind of strain-type multidimensional force sensor with from decoupling function
KR20170120040A (en) Method of manufacturing a pressure sensor
US20050211003A1 (en) Foil strain gage
CN108981983A (en) Tire-road three-dimensional force measuring sensors
CN102778583A (en) Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure
CN103196526B (en) Dynamometry weighing sensor with unbalance loading isolating function and isolating measuring method thereof
CN104568279B (en) A kind of multi-axis force transducer
CN105698664A (en) Detecting device and detecting method suitable for strain of concrete
CN110082011A (en) A kind of multistage dynamometry location displacement sensor
CN102928132B (en) Tunnel reluctance pressure transducer
JPS63273028A (en) Weight detector
CN208443332U (en) Measure the resistance-strain type bilateral displacement sensor of reinforced concrete member deformation
JP2514067Y2 (en) Ceramic transformer
CN210166233U (en) Rigid material Young modulus measuring device based on fiber grating sensor
CN203672371U (en) Quartz flexure accelerometer based dipmeter
CN214040441U (en) Full-bridge strain gauge capable of measuring shear stress
RU2601613C1 (en) Thermally stable pressure sensor based on nano-and micro-electromechanical system with membrane having rigid centre
JP5990390B2 (en) Load cell
CN115112274B (en) Pressure sensor based on serpentine graphene piezoresistor and design method thereof
CN213397457U (en) Small-range double-bridge differential type two-dimensional sensor
CN205333677U (en) Quartzy resonant transducer of four girder constructions
CN209177990U (en) The pressure and displacement integrated form MEMS sensor structure of four beam diaphragms and concentric cylinder

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant