CN115183919A - Force sensor - Google Patents
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- CN115183919A CN115183919A CN202210694269.9A CN202210694269A CN115183919A CN 115183919 A CN115183919 A CN 115183919A CN 202210694269 A CN202210694269 A CN 202210694269A CN 115183919 A CN115183919 A CN 115183919A
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
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- 238000011326 mechanical measurement Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000010008 shearing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
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- 239000007769 metal material Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention relates to a force sensor, in particular to the technical field of mechanical measurement. The force sensor includes: bearing structure, flexible hinge structure, probe and laser range finder, bearing structure is used for supporting flexible hinge structure, the probe sets up flexible hinge structure is last, the probe sets up with the sample contact of awaiting measuring, the probe sets up laser range finder's laser output light path, laser range finder is used for measuring the lateral displacement of probe. The invention can make the sensitivity of the sensor reach or be better than the level of a micro-cow.
Description
Technical Field
The invention relates to the technical field of mechanical measurement, in particular to a force sensor.
Background
Existing force sensors rarely have the variety of sensitivities up to micro newtons, but many areas require force sensors with high sensitivity, with measurement ranges covering at least micro newtons to millinewtons. Moreover, the location of the force to be measured may need to be at a high temperature; in order to avoid interference and damage to the force sensor by high temperatures, the force sensor requires a long connecting portion to maintain a sufficient distance from the sample, which further reduces sensitivity. Thus, there is a need for a mechanical sensor with sensitivity that can be as high as or better than micro newtons to facilitate micro-mechanical measurements at controlled temperatures.
Disclosure of Invention
The invention aims to provide a force sensor, the sensitivity of which can reach or be better than the level of a micro-cow.
In order to achieve the purpose, the invention provides the following scheme:
a force sensor, comprising: bearing structure, flexible hinge structure, probe and laser range finder, bearing structure is used for supporting flexible hinge structure, the probe sets up flexible hinge structure is last, the probe sets up with the sample contact of awaiting measuring, the probe sets up laser range finder's laser output light path, laser range finder is used for measuring the lateral displacement of probe.
Optionally, the laser range finder is a laser interferometer.
Optionally, the support structure is a flat plate with an opening at one side; the flexible hinge structure is arranged in the opening and is fixedly connected with the supporting structure.
Optionally, the flexible hinge structure includes a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge which are sequentially arranged side by side, and one end of the first flexible hinge is connected with one end of the second flexible hinge; one end of the second flexible hinge is connected with one end of the third flexible hinge; one end of the third flexible hinge is connected with one end of the fourth flexible hinge, and the probe is respectively connected with the other end of the second flexible hinge and the other end of the third flexible hinge; the other end of the first flexible hinge and the other end of the fourth flexible hinge are fixedly connected with the opening side of the supporting structure respectively.
Optionally, the first flexible hinge, the second flexible hinge, the third flexible hinge and the fourth flexible hinge each include a flexible hinge body and perforations disposed on two parallel sides of the flexible hinge body; a plurality of through holes are formed in one side face, and the side faces of the through holes are inwards concave.
Optionally, the flexible hinge structure includes a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge, which are sequentially arranged side by side, and one end of the first flexible hinge and one end of the fourth flexible hinge are connected to the support structure; one end of the second flexible hinge is connected with one end of the third flexible hinge; one end of the second flexible hinge is connected with the middle point of the first flexible hinge; one end of the third flexible hinge is connected with the midpoint of the fourth flexible hinge; the probe is respectively connected with the other end of the second flexible hinge and the other end of the third flexible hinge; the other end of the first flexible hinge and the other end of the fourth flexible hinge are fixedly connected with the opening side of the supporting structure respectively.
Optionally, the support structure comprises a first plate and a second plate; the first flat plate and the second flat plate are both flat plates with one sides opened; the flexible hinge structure comprises a first flexible hinge unit and a second flexible hinge unit which are connected through a cross rod; the probe is arranged on the cross rod; the first flexible hinge unit is fixedly connected with the opening side of the first flat plate, and the second flexible hinge unit is fixedly connected with the opening side of the second flat plate.
Optionally, the support structure comprises a first plate and a second plate; the first flat plate and the second flat plate are both flat plates with one sides opened; the flexible hinge structure comprises a first flexible hinge unit and a second flexible hinge unit which are connected through a cross rod; the probe is arranged on the cross rod; one end of the first flexible hinge unit is fixedly connected with the first flat plate, and the other end of the first flexible hinge unit is fixedly connected with the second flat plate; one end of the second flexible hinge unit is fixedly connected with the first flat plate, and the other end of the second flexible hinge unit is fixedly connected with the second flat plate.
Optionally, the first flexible hinge unit includes a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge; one end of the first flexible hinge is connected with one end of the opening side of the first flat plate, the other end of the first flexible hinge is respectively connected with one end of the second flexible hinge and one end of the third flexible hinge, the other end of the second flexible hinge and the other end of the third flexible hinge are both connected with one end of the fourth flexible hinge, and the other end of the fourth flexible hinge is connected with the other end of the opening side of the first flat plate;
the second flexible hinge unit comprises a fifth flexible hinge, a sixth flexible hinge, a seventh flexible hinge and an eighth flexible hinge; one end of the fifth flexible hinge is connected with one end of the opening side of the second flat plate, the other end of the fifth flexible hinge is respectively connected with one end of the sixth flexible hinge and one end of the seventh flexible hinge, the other end of the sixth flexible hinge and the other end of the seventh flexible hinge are both connected with one end of the eighth flexible hinge, and the other end of the eighth flexible hinge is connected with the other end of the opening side of the second flat plate;
the third flexible hinge and the sixth flexible hinge are connected by the cross bar.
Optionally, the first flexible hinge unit includes a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge;
one end of the first flexible hinge is connected with one end of the opening side of the first flat plate; the other end of the first flexible hinge is connected with one end of the second flexible hinge, the other end of the second flexible hinge is connected with one end of the fourth flexible hinge, the other end of the fourth flexible hinge is connected with one end of the third flexible hinge, and the other end of the third flexible hinge is connected with one end of the opening side of the second flat plate;
the second flexible hinge unit comprises a fifth flexible hinge, a sixth flexible hinge, a seventh flexible hinge and an eighth flexible hinge;
one end of the sixth flexible hinge is connected with one end of the opening side of the first flat plate; the other end of the sixth flexible hinge is connected with one end of the fifth flexible hinge, the other end of the fifth flexible hinge is connected with one end of the seventh flexible hinge, the other end of the seventh flexible hinge is connected with one end of the eighth flexible hinge, and the other end of the eighth flexible hinge is connected with the other end of the opening side of the second flat plate;
one end of the second flexible hinge is connected with one end of the fifth flexible hinge, and the other end of the fourth flexible hinge is connected with the other end of the seventh flexible hinge; the other end of the second flexible hinge is connected with one end of the fourth flexible hinge through the cross rod, the other end of the fifth flexible hinge and one end of the seventh flexible hinge.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects: the invention relates to a force sensor, comprising: bearing structure, flexible hinge structure, probe and laser range finder, bearing structure is used for supporting flexible hinge structure, the probe sets up flexible hinge structure is last, the probe sets up with the sample contact of awaiting measuring, the probe sets up laser range finder's laser output light path, laser range finder is used for measuring the lateral displacement of probe, because flexible hinge has high displacement sensitivity and the repeatability that general mechanism can not realize, so adopt flexible hinge structure to combine the laser range finder of high measurement accuracy, can make the sensitivity of sensor reach or be superior to the little ox level.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a force sensor according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a force sensor mounted on a mounting bracket according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a structure for sensing the stress on a sample on the side B using a probe in a flexible hinge structure provided in example 1 of the present invention;
fig. 4 is a structural diagram illustrating a C-plane sensing sample using a probe in a flexible hinge structure according to embodiment 1 of the present invention.
Fig. 5 is a schematic structural view of a flexible hinge structure provided in embodiment 1 of the present invention;
fig. 6 is a schematic structural view of a flexible hinge structure provided in embodiment 2 of the present invention;
fig. 7 is a schematic structural view of a flexible hinge structure provided in embodiment 3 of the present invention;
fig. 8 is a schematic structural diagram of a flexible hinge structure provided in embodiment 4 of the present invention.
Description of the symbols:
1-laser range finder, 2-flexible hinge structure, 3-fixed bolster.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description thereof.
Example 1:
different from the traditional supporting structure, the flexible hinge is an integral structure, and the defects of discontinuous rigidity and friction of the traditional support are overcome. The flexible hinge has the characteristics of small volume, high motion sensitivity, no mechanical friction and the like from birth. Flexible hinges are also ideal candidates as displacement amplifiers, often used in nano-displacement stages. In combination with these advantages, the flexible hinge can also be used to act as a displacement measuring device with a high degree of precision. The integrated structure of the flexible hinge and the laser range finder are combined for use, so that very small displacement can be transmitted, and the small force can be measured by combining the elastic coefficient of the flexible hinge. In summary, the flexible hinge has excellent performance, is used in precision mechanical measurement and displacement amplifiers, and has high precision and stability which cannot be realized by common mechanisms, so the flexible hinge structure is adopted as an instrument core, and a laser range finder is combined to obtain a sensitive force sensor, reveal basic scientific problems in material mechanics and rheological properties, and guide material development. As shown in fig. 1 and 2, the mechanical sensor includes: the flexible hinge structure 2 that receives the force deformation part (having definite elastic coefficient and probe), deformation measurement part (laser range finder 1) and bearing structure, bearing structure is used for supporting flexible hinge structure 2, the probe sets up on the flexible hinge structure 2, the probe sets up with the sample contact of awaiting measuring, the probe sets up laser range finder 1's laser output light path, laser range finder 1 is used for measuring the lateral displacement of probe.
In practical application, the laser range finder 1 is a laser interferometer, the measurement precision of the laser interferometer reaches nano meter or even pico meter, the sampling rate is high, and the displacement of the flexible hinge probe part can be measured continuously and accurately. The laser interferometer can be based on the Fabry-Perot principle or the Michelson principle and the like, the sampling rate is higher than the resonant frequency of the flexible hinge mechanism, in order to ensure that the displacement of the flexible hinge is accurately measured, the measuring head of the laser interferometer is opposite to the position of the probe of the flexible hinge, and the laser beam is along the X-axis direction of the acting force.
In practical application, the support structure is a flat plate with one side opened; the flexible hinge structure 2 is arranged in the opening and is fixedly connected with the supporting structure.
In practical application, flexible hinge structure 2 comprises 2, totally 2 or more than flexible hinge of group by every group, and flexible hinge can adopt multiple design to obtain different structures, and quantity not only is limited to 4, can be multiunit flexible hinge structure to satisfy different measurement demands.
In practical application, the flexible hinge structure 2 comprises a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge which are sequentially arranged side by side, wherein one end of the first flexible hinge is connected with one end of the second flexible hinge; one end of the second flexible hinge is connected with one end of the third flexible hinge; one end of the third flexible hinge is connected with one end of the fourth flexible hinge, and the probe is respectively connected with the other end of the second flexible hinge and the other end of the third flexible hinge; the other end of the first flexible hinge and the other end of the fourth flexible hinge are fixedly connected with the opening side of the supporting structure respectively.
In practical application, each of the first flexible hinge, the second flexible hinge, the third flexible hinge and the fourth flexible hinge comprises a flexible hinge main body and through holes arranged on two parallel side surfaces of the flexible hinge main body; the side face of the through hole arranged on the flexible hinge is inwards concave, so that the bending deformation fixed point is generated at the position of the through hole, the elastic coefficient mainly depends on the thickness of the through hole and the height and the length of the flexible hinge, and the elastic coefficient is in the range of 100-1000000N/m.
In practical application, the supporting structure is provided with a fixing hole for installing the supporting structure on the fixing support 3, the laser range finder 1 is also installed on the fixing support 3, and the laser of the laser range finder 1 and the probe are in the same horizontal direction.
In practical application, the force sensor further comprises: the clamping device is arranged on the probe and used for clamping the sample to be measured.
In practical applications, the perforations are oval or circular in shape.
In practical application, the manufacturing materials of the stressed deformation part are selected in various ways, and metal materials such as aluminum alloy, stainless steel and invar steel are preferably selected to meet the requirements of temperature, modulus, sensitivity, service life and the like in the measurement process. But may also be a polymer or composite material.
In practical applications, the force sensor further comprises: and the data processing unit is connected with the laser range finder, acquires the displacement measured by the laser range finder, and calculates the force applied to the sample according to the displacement and the elastic coefficient of the flexible hinge.
As shown in fig. 3 and 4, the force sensor provided in the embodiment of the present invention has the following usage and operating principles:
the using mode of the flexible hinge type shearing force measuring device can be that the optical path of the laser interferometer is opposite to the A surface of the probe, the displacement X of the probe is measured, the B surface of the probe is in contact with a sample, when the sample is under the action of shearing force of a lower shearing surface, the flexible hinge deforms, the translational displacement of the probe is restrained, the stress (shearing force) size F = kx in the X-axis direction is calculated by combining the displacement X of the probe under the condition that the elastic coefficient k is known, at the moment, the B surface of the probe can be designed to protrude out of the bottom surface of the flexible hinge, so that the contact area with the sample can be better controlled, and the shearing force borne by the sample can be measured. As shown in FIG. 4, the application method can also be that the C surface of the probe contacts the sample to detect the stress in the X direction. The C surface or the probe can be additionally provided with various probes, such as a tungsten needle point, a diamond needle point, a spherical needle point, a hemispherical needle point and the like, or a clamping device which can be used for switching samples in the forms of fibers, splines and the like.
As shown in fig. 5, the number of the perforations provided on the flexible hinge is not limited to 2, and may be multiple, so as to meet the requirement of the sensitivity of the force sensor under different measurement conditions. As shown in fig. 6-8, the number of the flexible hinges of the force-deformed portion is not limited to two sets of 4, and flexible hinges of different structures can be designed for a plurality of sets of flexible hinge structures or by adopting a plurality of design modes to meet specific measurement requirements.
The principle is as follows: after a sample to be measured is stressed, the sample to be measured is displaced in the direction of the measured force (the direction of the X axis), the measuring head of the laser range finder 1 can keep a certain distance from a measured surface A, the laser interferometer can measure the displacement in a high-speed, sensitive and accurate mode, and the stress magnitude of the flexible hinge structure 2 can be calculated according to the displacement and the elastic coefficient of the flexible hinge structure 2.
Example 2:
as shown in fig. 6, the present embodiment is different from the above embodiments in that the flexible hinge structure includes a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge, which are sequentially arranged side by side, and one end of the first flexible hinge and one end of the fourth flexible hinge are connected to the support structure; one end of the second flexible hinge is connected with one end of the third flexible hinge; one end of the second flexible hinge is connected with the midpoint of the first flexible hinge; one end of the third flexible hinge is connected with the midpoint of the fourth flexible hinge; the probe is respectively connected with the other end of the second flexible hinge and the other end of the third flexible hinge; the other end of the first flexible hinge and the other end of the fourth flexible hinge are fixedly connected with the opening side of the supporting structure respectively.
Example 3:
as shown in fig. 7, the present embodiment is different from the above embodiments in that the support structure includes a first flat plate and a second flat plate; the first flat plate and the second flat plate are both flat plates with one sides opened; the flexible hinge structure comprises a first flexible hinge unit and a second flexible hinge unit which are connected through a cross rod; the probe is arranged on the cross rod; the first flexible hinge unit is fixedly connected with the opening side of the first flat plate, and the second flexible hinge unit is fixedly connected with the opening side of the second flat plate. The first flexible hinge unit comprises a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge; one end of the first flexible hinge is connected with one end of the opening side of the first flat plate, the other end of the first flexible hinge is respectively connected with one end of the second flexible hinge and one end of the third flexible hinge, the second flexible hinge and the third flexible hinge are arranged side by side, the other end of the second flexible hinge and the other end of the third flexible hinge are both connected with one end of the fourth flexible hinge, and the other end of the fourth flexible hinge is connected with the other end of the opening side of the first flat plate; the second flexible hinge unit comprises a fifth flexible hinge, a sixth flexible hinge, a seventh flexible hinge and an eighth flexible hinge; one end of the fifth flexible hinge is connected with one end of the opening side of the second flat plate, the other end of the fifth flexible hinge is respectively connected with one end of the sixth flexible hinge and one end of the seventh flexible hinge, the sixth flexible hinge and the seventh flexible hinge are arranged side by side, the other end of the sixth flexible hinge and the other end of the seventh flexible hinge are both connected with one end of the eighth flexible hinge, and the other end of the eighth flexible hinge is connected with the other end of the opening side of the second flat plate; the third flexible hinge and the sixth flexible hinge are connected by the cross bar.
Example 4:
as shown in fig. 8, the present embodiment is different from the above embodiments in that the support structure includes a first flat plate and a second flat plate; the first flat plate and the second flat plate are both flat plates with one sides opened; the flexible hinge structure comprises a first flexible hinge unit and a second flexible hinge unit which are connected through a cross rod; the probe is arranged on the cross rod; one end of the first flexible hinge unit is fixedly connected with the first flat plate, and the other end of the first flexible hinge unit is fixedly connected with the second flat plate; one end of the second flexible hinge unit is fixedly connected with the first flat plate, and the other end of the second flexible hinge unit is fixedly connected with the second flat plate. The first flexible hinge unit comprises a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge; one end of the first flexible hinge is connected with one end of the opening side of the first flat plate; the other end of the first flexible hinge is connected with one end of the second flexible hinge, the first flexible hinge and the second flexible hinge are arranged side by side, the other end of the second flexible hinge is connected with one end of the fourth flexible hinge, the other end of the fourth flexible hinge is connected with one end of the third flexible hinge, the third flexible hinge and the fourth flexible hinge are arranged side by side, and the other end of the third flexible hinge is connected with one end of the opening side of the second flat plate; the second flexible hinge unit comprises a fifth flexible hinge, a sixth flexible hinge, a seventh flexible hinge and an eighth flexible hinge; one end of the sixth flexible hinge is connected with one end of the opening side of the first flat plate; the other end of the sixth flexible hinge is connected with one end of the fifth flexible hinge, the fifth flexible hinge and the sixth flexible hinge are arranged side by side, the other end of the fifth flexible hinge is connected with one end of the seventh flexible hinge, the other end of the seventh flexible hinge is connected with one end of the eighth flexible hinge, the seventh flexible hinge and the eighth flexible hinge are arranged side by side, and the other end of the eighth flexible hinge is connected with the other end of the opening side of the second flat plate; one end of the second flexible hinge is connected with one end of the fifth flexible hinge, and the other end of the fourth flexible hinge is connected with the other end of the seventh flexible hinge; the other end of the second flexible hinge is connected with one end of the fourth flexible hinge through the cross rod, the other end of the fifth flexible hinge and one end of the seventh flexible hinge.
The force sensor provided by the embodiment of the invention has the following technical effects:
1. the flexible hinge elastic coefficient is depended on, the force in the range from micro Newton to Newton or from nano Newton to milliNewton can be detected, the measurement precision of the laser range finder reaches or is superior to 1 nanometer size, the displacement of the flexible hinge probe can be continuously and accurately measured, and the flexible hinge elastic coefficient detection device can be used for instrument devices such as a tensile machine, a rheometer and a nano indentor.
2. By adopting two groups of four flexible hinges or other combination modes as shown in figures 6 to 8, the displacement in the non-stressed direction can be limited within 2 percent of the displacement in the stressed direction. Each flexible hinge comprises two or more oval or round notches, so that bending deformation fixed points are formed at the notches of the flexible hinges, the elastic coefficient of the flexible hinges is reduced, and the sensitivity of the force sensor is improved. The material is metal material such as aluminum alloy, stainless steel, invar steel and the like, has stable elastic coefficient and larger yield stress, and is easy to process.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the foregoing, the description is not to be taken in a limiting sense.
Claims (10)
1. A force sensor, comprising: bearing structure, flexible hinge structure, probe and laser range finder, bearing structure is used for supporting flexible hinge structure, the probe sets up flexible hinge structure is last, the probe sets up with the sample contact of awaiting measuring, the probe sets up laser range finder's laser output light path, laser range finder is used for measuring the lateral displacement of probe.
2. The force sensor of claim 1, wherein the laser range finder is a laser interferometer.
3. The force sensor of claim 1, wherein the support structure is a flat plate with one side open; the flexible hinge structure is arranged in the opening and is fixedly connected with the supporting structure.
4. The force sensor according to claim 3, wherein the flexible hinge structure comprises a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge which are arranged side by side in sequence, and one end of the first flexible hinge is connected with one end of the second flexible hinge; one end of the second flexible hinge is connected with one end of the third flexible hinge; one end of the third flexible hinge is connected with one end of the fourth flexible hinge, and the probe is respectively connected with the other end of the second flexible hinge and the other end of the third flexible hinge; the other end of the first flexible hinge and the other end of the fourth flexible hinge are fixedly connected with the opening side of the supporting structure respectively.
5. The force sensor of claim 4, wherein the first, second, third and fourth flexible hinges each comprise a flexible hinge body and perforations disposed on two parallel sides of the flexible hinge body; a plurality of through holes are formed in one side face, and the side faces of the through holes are inwards concave.
6. The force sensor according to claim 3, wherein the flexible hinge structure comprises a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge which are arranged side by side in sequence, and one end of the first flexible hinge and one end of the fourth flexible hinge are connected with the support structure; one end of the second flexible hinge is connected with one end of the third flexible hinge; one end of the second flexible hinge is connected with the middle point of the first flexible hinge; one end of the third flexible hinge is connected with the midpoint of the fourth flexible hinge; the probe is respectively connected with the other end of the second flexible hinge and the other end of the third flexible hinge; the other end of the first flexible hinge and the other end of the fourth flexible hinge are fixedly connected with the opening side of the supporting structure respectively.
7. The force sensor of claim 1, wherein the support structure comprises a first plate and a second plate; the first flat plate and the second flat plate are both flat plates with one sides opened; the flexible hinge structure comprises a first flexible hinge unit and a second flexible hinge unit which are connected through a cross rod; the probe is arranged on the cross rod; the first flexible hinge unit is fixedly connected with the opening side of the first flat plate, and the second flexible hinge unit is fixedly connected with the opening side of the second flat plate.
8. The force sensor of claim 1, wherein the support structure comprises a first plate and a second plate; the first flat plate and the second flat plate are both flat plates with one sides opened; the flexible hinge structure comprises a first flexible hinge unit and a second flexible hinge unit which are connected through a cross rod; the probe is arranged on the cross rod; one end of the first flexible hinge unit is fixedly connected with the first flat plate, and the other end of the first flexible hinge unit is fixedly connected with the second flat plate; one end of the second flexible hinge unit is fixedly connected with the first flat plate, and the other end of the second flexible hinge unit is fixedly connected with the second flat plate.
9. The force sensor of claim 7, wherein the first flexible hinge unit comprises a first flexible hinge, a second flexible hinge, a third flexible hinge, and a fourth flexible hinge; one end of the first flexible hinge is connected with one end of the opening side of the first flat plate, the other end of the first flexible hinge is respectively connected with one end of the second flexible hinge and one end of the third flexible hinge, the other end of the second flexible hinge and the other end of the third flexible hinge are both connected with one end of the fourth flexible hinge, and the other end of the fourth flexible hinge is connected with the other end of the opening side of the first flat plate;
the second flexible hinge unit comprises a fifth flexible hinge, a sixth flexible hinge, a seventh flexible hinge and an eighth flexible hinge; one end of the fifth flexible hinge is connected with one end of the opening side of the second flat plate, the other end of the fifth flexible hinge is respectively connected with one end of the sixth flexible hinge and one end of the seventh flexible hinge, the other end of the sixth flexible hinge and the other end of the seventh flexible hinge are both connected with one end of the eighth flexible hinge, and the other end of the eighth flexible hinge is connected with the other end of the opening side of the second flat plate;
the third flexible hinge and the sixth flexible hinge are connected by the cross bar.
10. The force sensor of claim 8, wherein the first flexible hinge unit comprises a first flexible hinge, a second flexible hinge, a third flexible hinge, and a fourth flexible hinge;
one end of the first flexible hinge is connected with one end of the opening side of the first flat plate; the other end of the first flexible hinge is connected with one end of the second flexible hinge, the other end of the second flexible hinge is connected with one end of the fourth flexible hinge, the other end of the fourth flexible hinge is connected with one end of the third flexible hinge, and the other end of the third flexible hinge is connected with one end of the opening side of the second flat plate;
the second flexible hinge unit comprises a fifth flexible hinge, a sixth flexible hinge, a seventh flexible hinge and an eighth flexible hinge;
one end of the sixth flexible hinge is connected with one end of the opening side of the first flat plate; the other end of the sixth flexible hinge is connected with one end of the fifth flexible hinge, the other end of the fifth flexible hinge is connected with one end of the seventh flexible hinge, the other end of the seventh flexible hinge is connected with one end of the eighth flexible hinge, and the other end of the eighth flexible hinge is connected with the other end of the opening side of the second flat plate;
one end of the second flexible hinge is connected with one end of the fifth flexible hinge, and the other end of the fourth flexible hinge is connected with the other end of the seventh flexible hinge; the other end of the second flexible hinge is connected with one end of the fourth flexible hinge through the cross rod, the other end of the fifth flexible hinge and one end of the seventh flexible hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210694269.9A CN115183919A (en) | 2022-06-20 | 2022-06-20 | Force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210694269.9A CN115183919A (en) | 2022-06-20 | 2022-06-20 | Force sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115183919A true CN115183919A (en) | 2022-10-14 |
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