CN110082011B - Multi-stage force and displacement measuring sensor - Google Patents

Multi-stage force and displacement measuring sensor Download PDF

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Publication number
CN110082011B
CN110082011B CN201910277419.4A CN201910277419A CN110082011B CN 110082011 B CN110082011 B CN 110082011B CN 201910277419 A CN201910277419 A CN 201910277419A CN 110082011 B CN110082011 B CN 110082011B
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strain
cantilever beam
stage
force
cantilever
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CN110082011A (en
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张祺
张晨
梁钊滨
王杰
李慧文
郭强
张志俊
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Taiyuan University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2218—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being of the column type, e.g. cylindric, adapted for measuring a force along a single direction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • G01L1/2262—Measuring circuits therefor involving simple electrical bridges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations

Abstract

The invention discloses a multistage force and displacement measuring sensor, which adopts multistage elastomers for sensing and expands the measuring range by dispersing force in each elastomer; the multi-stage force-measuring displacement sensor is simple in structure, convenient to machine and high in sensitivity, the cantilever beam is selected to improve the sensitivity, the measurement of various accuracies can be adapted by changing the geometric shape and the material of the cantilever beam, and compared with a common force-measuring sensor which is limited by a proportion limit, the accuracy is improved by using a special material, and the accuracy is improved by changing the structure, so that the multi-stage force-measuring displacement sensor is simpler and more convenient. The invention can expand the measuring range, improve the precision, reduce the error from the structural change, can simultaneously ensure the precision under the condition of large-range measurement, and has simple structure, convenient operation and low requirement on materials.

Description

Multi-stage force and displacement measuring sensor
Technical Field
The invention relates to the field of mechanical sensors, in particular to a multistage force and displacement measuring sensor.
Background
The force transducer is composed of three major parts, namely an elastic body which generates deformation after being stressed, a bridge circuit (such as a Wheatstone bridge) which is composed of a resistance strain gage capable of sensing the deformation, an adhesive which can fixedly adhere the resistance strain gage to the elastic body and can conduct the strain, a sealant for protecting the electronic circuit, and the like.
The most common force sensor at present is a piezoresistive pressure sensor, a resistance strain gauge is one of the main components of the piezoresistive strain sensor, and the working principle of the metal resistance strain gauge is the phenomenon that a strain resistor adsorbed on a substrate material generates resistance value change along with mechanical deformation, which is commonly called resistance strain effect. Further, conventional load cells, such as ceramic pressure sensors, diffused silicon pressure sensors, and diffused silicon pressure sensors, are also manufactured based on the resistive strain effect.
The comprehensive accuracy of the force sensor is influenced by four factors of offset error, sensitivity error, linear error and hysteresis error. The offset error is caused by the vertical offset of the pressure sensor in the whole pressure range, and the common sensor cannot ensure that the force vertically acts on the center of the pressure sensor when measuring the force, so that the offset error is caused. In order to reduce sensitivity error and linearity error, a high-precision sensor usually adopts a special conductor sensitive element or substrate, which has high requirements on materials and high price, and also has high requirements on the overall processing precision of the sensor. In addition, most of the existing load cells cannot perform wide-range measurement, and even if the existing load cells cannot perform the wide-range measurement, the existing load cells have high accuracy under the condition that the wide range is ensured.
Disclosure of Invention
The invention aims to solve the defects of the prior art and provide a multi-stage force and displacement measuring sensor.
In order to solve the technical problems, the invention adopts a technical scheme that: there is provided a multi-stage force and displacement measuring sensor comprising: the multi-stage cantilever beams are symmetrically arranged in parallel at equal intervals, and every two cantilever beams are arranged on the same horizontal plane and are set as the same-stage cantilever beams; the first ends of the two cantilever beams at each stage are fixed ends fixed on the inner side wall of the frame-shaped rack, the positions of the cantilever beams close to the first ends are respectively provided with a strain gauge, the second ends are free ends, and the upright column is arranged at the central position of the frame-shaped rack and is contacted with the free ends of the two cantilever beams at each stage; a force transmission nut is respectively arranged at the contact position of the upright column and the two free ends of each level of cantilever beam so as to keep the relative position of the upright column and each level of cantilever beam fixed; a strain bottom pillar is arranged at the center of the bottom of the frame-shaped frame, and two groups of strain sheets which are vertically and symmetrically distributed are arranged on the side wall of the strain bottom pillar; the top of the strain bottom pillar is arranged opposite to one end of the upright post, the other end of the upright post is fixedly provided with a force transmission platform for applying force, the upright post is driven to move by applying force to the force transmission platform, each level of cantilever beam is deformed, the upright post is contacted with the strain bottom pillar, and pressure measurement is carried out through data generated by the cantilever beams and strain gauges arranged on the strain bottom pillar;
wherein the step of pressure measurement comprises:
the number of the cantilever beams is set to be 3, and the number of the strain gauges arranged on the cantilever beams is 6, and the strain gauges are numbered from 1 to 6 respectively; the number of the strain gauges arranged on the strain bottom column is 2, and the strain gauges are numbered as 7 and 8; by taking a strain reading for each strain gage, expressed as ε respectively1-ε8The relation between the strain value and the load of each strain gage on the cantilever beam is shown as the formula (1):
Figure GDA0002782386140000021
wherein epsilondFor reading strain readings, epsilon, by setting a resistance strain gaugemThe strain value of the strain gauge, b is the width of the section of the cantilever beam, h is the height of the section of the cantilever beam, F is the load, a is the distance from the tail end of the cantilever beam to the strain gauge, and E is the elastic modulus of the material used by the cantilever beam;
the relation between the strain value and the load of the strain gauge on the strain bottom column is shown in the formula (2):
Figure GDA0002782386140000022
wherein A is the cross-sectional area of the strain bottom column, and d is the diameter of the cross-sectional area of the strain bottom column;
then in the three-level cantilever beam, the pressure on each level of cantilever beam is respectively:
Figure GDA0002782386140000023
Figure GDA0002782386140000024
Figure GDA0002782386140000025
the pressure value on the cylindrical strain bottom pillar 8 is
Figure GDA0002782386140000026
Ultimate obtainable load FGeneral assembly＝F1+F2+F3+F4。
Each strain gauge is connected to the circuit through a quarter bridge method to read data.
The first end of each cantilever beam is fixed on the inner side wall of the frame-shaped rack in a welding or splicing mode, and the strain gauge is fixed on the cantilever beams and the strain bottom columns in a welding or bonding mode.
Wherein, a temperature compensation strain gauge is arranged on the frame-shaped frame base, and forms a quarter bridge circuit with the strain gauge fixed on the cantilever beam.
The stress value of each cantilever beam obtained by calculation is added to the pressure value of the strain bottom column to obtain the pressure value applied to the force transmission platform.
The temperature compensation strain gauge is connected into the 1/4 bridge circuit and used for correcting the readings of each level of cantilever beam and strain bottom pillar strain gauge.
The multi-stage force and displacement measuring sensor is different from the prior art, adopts multi-stage elastic bodies for sensing, and expands the measuring range by dispersing force in each elastic body; the multi-stage force-measuring displacement sensor is simple in structure, convenient to machine and high in sensitivity, the cantilever beam is selected to improve the sensitivity, the measurement of various accuracies can be adapted by changing the geometric shape and the material of the cantilever beam, and compared with a common force-measuring sensor which is limited by a proportion limit, the accuracy is improved by using a special material, and the accuracy is improved by changing the structure, so that the multi-stage force-measuring displacement sensor is simpler and more convenient. The invention can expand the measuring range, improve the precision, reduce the error from the structural change, can simultaneously ensure the precision under the condition of large-range measurement, and has simple structure, convenient operation and low requirement on materials.
Drawings
Fig. 1 is a schematic structural diagram of a multi-stage load-measuring displacement sensor according to the present invention.
Fig. 2 is a schematic structural diagram of an 1/4 bridge circuit of the multi-stage load displacement transducer according to the present invention.
Detailed Description
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, but rather construed as limited to the embodiments set forth herein.
The present invention will be described in detail with reference to the drawings, and the drawings are only examples for convenience of illustration when describing the embodiments of the present invention, and should not be construed as limiting the scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a multi-stage force-measuring displacement sensor according to the present invention. The method comprises the following steps:
the multi-stage cantilever beams 3 are symmetrically arranged in parallel at equal intervals, and every two cantilever beams 3 are arranged on the same horizontal plane and are set as the same-stage cantilever beams; the first ends of the two cantilever beams 3 at each stage are fixed ends fixed on the inner side walls of the frame-shaped rack 9, the positions of the cantilever beams 3 close to the first ends are respectively provided with a strain gauge 7, the second ends are free ends, and the upright post 6 is arranged at the central position of the frame-shaped rack 9 and is contacted with the free ends of the two cantilever beams 3 at each stage; the positions of the upright post 6, which are contacted with the two free ends of each level of cantilever beam 3, are respectively provided with a force transmission nut 4 so as to keep the relative positions of the upright post 6 and each level of cantilever beam 3 fixed; a strain bottom pillar 8 is arranged at the center of the bottom 9 of the frame-shaped frame, and two groups of strain sheets 7 which are vertically and symmetrically distributed are arranged on the side wall of the strain bottom pillar 8; the top of the strain bottom pillar 8 is arranged opposite to one end of the upright post 6, the other end of the upright post 6 is fixedly provided with a force transmission platform 5 for applying force, the upright post 6 is driven to move by applying force to the force transmission platform 5, each level of cantilever beam 3 is deformed, the upright post 6 is contacted with the strain bottom pillar 8, and pressure measurement is carried out through data generated by the cantilever beam 3 and a strain gauge 7 arranged on the strain bottom pillar 8.
Each strain gauge 7 is connected to the circuit through a quarter bridge method to read data.
The first end of each cantilever beam 3 is fixed on the inner side wall of the frame-shaped frame 9 in a welding or splicing mode, and the strain gauge 7 is fixed on the cantilever beams 3 and the strain bottom column 8 in a welding or bonding mode.
Wherein, a temperature compensation strain gauge 10 is arranged on the frame type frame base 9, and forms a quarter bridge circuit with the strain gauge 7 fixed on the cantilever beam 3.
The pressure on the strain bottom column 8 is read, the pressure on the strain bottom column 7 is calculated through a formula, the calculated pressure value of each level of cantilever beam 3 is added to the pressure value of the strain bottom column 8, and the pressure value applied to the force transmission platform 5 is obtained.
Wherein the temperature compensation strain gauge 10 is connected to 1/4 bridge circuit for correcting the readings of the strain gauge 7 of each stage of cantilever beam 3 and strain bottom pillar 8. The connection relationship between the temperature compensation strain gage 10 and the strain gage 7 disposed on the cantilever beam 3 and the strain stud 8 is shown in fig. 2.
Specifically, the strain gauge 7 is fixed on the cantilever beam 3 and the strain bottom pillar 8 in an adhesive manner through hot melt adhesive. In the invention, the number of the cantilever beams 3 is set to be 3, and the number of the strain gauges arranged on the cantilever beams 3 is 6, and the strain gauges are numbered from 1 to 6 respectively; the number of strain gauges arranged on the strain bottom pillar 8 is 2, and the strain gauges are numbered 7 and 8. By taking a strain reading for each strain gage, expressed as ε respectively1-ε8. The relation between the strain value and the load of each strain gage on the cantilever beam 3 is shown as the formula (1):
Figure GDA0002782386140000051
wherein b is the width of the section of the cantilever beam, h is the height of the section of the cantilever beam, F is the load, a is the distance from the tail end of the cantilever beam to the strain gauge, and E is 210 GPa.
The relation between the strain value and the load of the strain sheet on the strain bottom column 8 is shown as the formula (2):
Figure GDA0002782386140000052
then in the three-level cantilever beam, the pressure on each level of cantilever beam is respectively:
Figure GDA0002782386140000053
Figure GDA0002782386140000054
Figure GDA0002782386140000055
the pressure value on the cylindrical strain bottom pillar 8 is
Figure GDA0002782386140000056
Ultimate obtainable load FGeneral assembly＝F1+F2+F3+F4。
By applying different pressures on the force transmission platform 5 and by the relationship between the strain value and the pressure value, the calibration is carried out on the part of the upright post 6 extending out of the top cover 10. When not exerting pressure, the relative position in stand 6 and top cap 10 outside surface is as zero scale mark to zero scale mark sets up the scale on stand 6 as the starting point, through exerting the pressure of equidimension not to force platform 5, when the scale on stand 6 aligns with top cap 10, calculates and obtains current pressure value size, marks the pressure value on stand 6 to accomplish the scale and marks.
The multi-stage force and displacement measuring sensor is different from the prior art, adopts multi-stage elastic bodies for sensing, and expands the measuring range by dispersing force in each elastic body; the multi-stage force-measuring displacement sensor is simple in structure, convenient to machine and high in sensitivity, the cantilever beam is selected to improve the sensitivity, the measurement of various accuracies can be adapted by changing the geometric shape and the material of the cantilever beam, and compared with a common force-measuring sensor which is limited by a proportion limit, the accuracy is improved by using a special material, and the accuracy is improved by changing the structure, so that the multi-stage force-measuring displacement sensor is simpler and more convenient. The invention can expand the measuring range, improve the precision, reduce the error from the structural change, can simultaneously ensure the precision under the condition of large-range measurement, and has simple structure, convenient operation and low requirement on materials.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.

Claims (6)

1. A multi-stage force and displacement measuring sensor, comprising:
the multi-stage cantilever beams are symmetrically arranged in parallel at equal intervals, and every two cantilever beams are arranged on the same horizontal plane and are set as the same-stage cantilever beams; the first ends of the two cantilever beams at each stage are fixed ends fixed on the inner side wall of the frame-shaped rack, the positions of the cantilever beams close to the first ends are respectively provided with a strain gauge, the second ends are free ends, and the upright column is arranged at the central position of the frame-shaped rack and is contacted with the free ends of the two cantilever beams at each stage; a force transmission nut is respectively arranged at the contact position of the upright column and the two free ends of each level of cantilever beam so as to keep the relative position of the upright column and each level of cantilever beam fixed; a strain bottom pillar is arranged at the center of the bottom of the frame-shaped frame, and two groups of strain sheets which are vertically and symmetrically distributed are arranged on the side wall of the strain bottom pillar; the top of the strain bottom pillar is arranged opposite to one end of the upright post, the other end of the upright post is fixedly provided with a force transmission platform for applying force, the upright post is driven to move by applying force to the force transmission platform, each level of cantilever beam is deformed, the upright post is contacted with the strain bottom pillar, and pressure measurement is carried out through data generated by the cantilever beams and strain gauges arranged on the strain bottom pillar;
wherein the step of pressure measurement comprises:
the number of the cantilever beams is set to be 3, and the number of the strain gauges arranged on the cantilever beams is 6, and the strain gauges are numbered from 1 to 6 respectively; the number of the strain gauges arranged on the strain bottom column is 2, and the strain gauges are numbered as 7 and 8; by taking a strain reading for each strain gage, expressed as ε respectively1-ε8The relation between the strain value and the load of each strain gage on the cantilever beam is shown as the formula (1):
Figure FDA0002750086380000011
wherein epsilondFor reading strain readings, epsilon, by setting a resistance strain gaugemThe strain value of the strain gauge, b is the width of the section of the cantilever beam, h is the height of the section of the cantilever beam, F is the load, a is the distance from the tail end of the cantilever beam to the strain gauge, and E is the elastic modulus of the material used by the cantilever beam;
the relation between the strain value and the load of the strain gauge on the strain bottom column is shown in the formula (2):
Figure FDA0002750086380000012
wherein A is the cross-sectional area of the strain bottom column, and d is the diameter of the cross-sectional area of the strain bottom column;
then in the three-level cantilever beam, the pressure on each level of cantilever beam is respectively:
Figure FDA0002750086380000013
Figure FDA0002750086380000021
Figure FDA0002750086380000022
the pressure value on the cylindrical strain bottom pillar 8 is
Figure FDA0002750086380000023
Ultimate obtainable load FGeneral assembly＝F1+F2+F3+F4。
2. The multi-stage force and displacement transducer of claim 1 wherein each strain gage is connected to the circuit by a quarter-bridge connection for data reading.
3. The multi-stage force and displacement measuring transducer of claim 1, wherein the first end of each cantilever beam is fixed to an inner sidewall of the frame-type frame by welding or splicing, and the strain gauge is fixed to the cantilever beam and the strain bottom pillar by welding or bonding.
4. The multi-stage force and displacement transducer of claim 2 wherein a temperature compensating strain gage is mounted on the base of the frame-type mount to form a quarter-bridge with the strain gage mounted on the cantilever beam.
5. The multi-stage force and displacement measuring sensor of claim 1, wherein the pressure on each stage of cantilever beam is calculated by reading strain readings from two strain gages on each stage of cantilever beam, the pressure on the strain bottom column is calculated by reading strain readings from strain gages on the strain bottom column, and the pressure on the strain bottom column is calculated by a formula, and the calculated pressure value of each stage of cantilever beam is added to the pressure value of the strain bottom column to obtain the pressure value applied to the force transfer platform.
6. The multi-stage force measuring displacement sensor of claim 5 wherein the temperature compensating strain gage is connected to an 1/4 bridge for correcting readings of the cantilever beam and strain foot strain gage at each stage.
CN201910277419.4A 2019-04-08 2019-04-08 Multi-stage force and displacement measuring sensor Expired - Fee Related CN110082011B (en)

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