Novel glow ion nitridation equipment
Technical field
The utility model relates to nitriding equipment, is specifically related to a kind of glow ion nitridation equipment.
Background technology
The nitriding of mechanical component is that (generally below Ac1) makes activated nitrogen atom infiltrate the chemical heat treatment process of workpiece surface at a certain temperature.Nitriding method commonly used has: gas nitriding, liquid nitriding and ionitriding etc.Liquid nitriding is used less in production practice because of there being the loose problem such as serious of disposal of pollutants and nitrided case.Gas nitriding is that the part that is processed is heated to certain temperature (generally being: 450 ℃~600 ℃); Feed nitrogenous dissolving gas; Through insulation for a long time; Make piece surface obtain the chemical heat treatment method of high surface hardness then, this process method is accomplished by gas nitriding equipment.
The advantage of this process method is: 1. device structure is simple; 2. the structure of part there is not particular requirement, especially also can nitriding to dark endoporus, blind hole.Therefore in the certain period, this process method has obtained widespread use.But along with improving constantly of Chinese national economy developmental level, with save energy, to reduce discharging be that green, the strategy of sustainable development policy of representative is able to establish.Under this social background, the energy consumption of gas nitriding equipment is high, the obnoxious flavour discharge capacity is big, production efficiency is low, quality is wayward etc., and shortcoming progressively reveals, and in production practice, gas nitriding equipment progressively becomes superseded tooling.
Glow ion nitridation equipment is to rely on the method for gas glow discharge ion bombardment to come heated parts and obtain active ion; Make activated nitrogen atom infiltrate the chemical heat treatment process equipment of workpiece surface; As shown in Figure 1, existing glow ion nitridation equipment comprises body of heater, power supply 1, pilot circuit 2, temperature measuring equipment, vacuum extractor and air delivery device; Body of heater comprises movable guard 3, stove seat 4 and is connected the cathode disc 5 on the stove seat, and cathode disc 5 is connected with power supply 1 negative electricity through pilot circuit 2, and the carburizing anode 17 on connection movable guard 3 inwalls passes through pilot circuit 2 and is connected with power supply 1 positive electrical; Air delivery device comprises and is connected on the movable guard and the pneumatic tube 7 that is communicated with the body of heater inner chamber; From the close-by examples to those far off be serially connected with under meter 8, decomposing furnace 9 and valve 11 successively from body of heater on the pneumatic tube; The inlet end of pneumatic tube is communicated with gas cylinder 12; Vacuum extractor comprises that temperature measuring equipment is to be connected on the cathode disc and the thermopair 21 that is electrically connected with the pilot circuit circuit by the vacuum pump 18 and pressure transmitter 19 of pilot circuit control.Compare with traditional gas nitriding, it is fast that existing glow ion nitridation equipment has permeating speed, and infiltration layer nitride structure form is controlled easily, and part deformation is little, save energy, less, advantage such as non-pollution discharge.But this equipment is higher to the structural requirement that is processed part, and especially the internal surface to dark endoporus, blind hole class part can't carry out the nitriding processing.This be because, part is in the ionitriding process, the furnace wall is an anode, part is a negative electrode; The logical high voltage direct current of going up produces photoglow, in the cathode drop district between anode and cathode; Ionization of gas becomes negative ions (plasma body), under electric field action, and the positive ion bombardment piece surface; Make the workpiece heating and produce reaction with it, the generation active atomic infiltrates interior and forms infiltration layer, the electric field action that the ion kinetic energy of bombardment piece surface forms from positive and negative electrode; Therefore movement locus is linear, and dark blind hole or deep via are owing to the singularity of its structure, and positive ion is difficult to intactly bombard the internal surface of whole deep hole part; Hole type parts certainly exists the nitriding blind area, thereby has a strong impact on the nitriding effect of part when adopting traditional ion bombardment method to carry out the nitriding processing in promptly dark.In addition, dark interior hole type parts structurally is similar to hollow cathode, and ionic fluid converges each other in the hollow cathode; The aura district is pooled together; Current density constantly increases, and dark interior hole type parts internal surface temperature is raise rapidly, causes " hollow cathode " effect; In case " hollow cathode " effect occurs, the ionitriding meeting can't be carried out because of temperature is too high.
Get into the nineties in last century; The appearance of pulse ion nitriding power supply; For condition has been created in the internal surface nitriding problem ground solution of hole type parts in dark; But through facts have proved, the pulse ion nitriding less than 10 part, can access preferably nitriding effect through reasonable control process parameters to length-to-diameter ratio.When the length-to-diameter ratio of hole type parts greater than 10 the time; The internal surface of hole type parts is because of the existence of " nitriding blind area " and " hollow cathode " effect in dark; The nitriding effect is still undesirable; And the price of pulse ion nitriding power supply will exceed about 50% than common direct supply, and heat-up rate will descend about 30-50% than conventional dc power supply, has reduced production efficiency.
Therefore, design a kind of novel ionitriding equipment, the nitriding problem that systematically solves the deep-hole type parts internal surface seems very urgent.
Summary of the invention
Hole type parts is the revolution build part of symmetrical configuration in general dark, requiring after ionitriding is handled, should have the performance symmetry on the mechanical property, for obtaining symmetric nitriding effect; Part is placed on nitriding regional center axial location studies, to carry out the nitriding blind area derivation of equation, referring to Fig. 2; Reference numeral 25 is represented body of heater among the figure; Hole type parts in Reference numeral 26 representatives deeply, m are dark interior hole type parts ionitriding gap height, and l is the hole depth of dark interior hole type parts; L is a nitriding anodic virtual height, and D is the body of heater effective diameter, and d is dark interior hole type parts diameter of bore.
Among Fig. 2: because △ ABC and △ EFC are similar triangles, so have:
Because △ ABC and △ AGF are similar triangles, so have:
So have:
Formula (2) substitution formula (1) can be got:
As can beappreciated from fig. 2:
(4)
Formula (3) substitution formula (4) can be got:
According to the dark interior hole type parts ionitriding gap height formula of deriving (5); Can draw as drawing a conclusion: the nitriding of part internal surface can only be leaned on from bombarding and realize through the plasma body of secondary or multiple reflection more than the m district in height m scope; Because plasma body energy behind multiple reflection weakens greatly, thereby the nitriding effect can decline to a great extent; To form the nitriding blind area in the hole type parts m altitude range in promptly dark, the scope of blind area is relevant with the body of heater effective diameter with the hole depth of interior hole type parts, diameter of bore and nitriding anode virtual height.
The purpose of the utility model is a kind of novel glow ion nitridation equipment of design.This equipment not only can carry out ionitriding to general part; And can overcome the influence of ionitriding " nitriding blind area " and " hollow cathode " effect; Realization needs the part of surface strengthening to carry out glow ion nitriding to dark blind hole or deep via internal surface; Thereby solve the problem of dark blind hole or deep via internal surface ion nitriding weak effect, promote the ionitriding quality significantly.
Based on the above-mentioned theory analysis, in order to realize above-mentioned utility model purpose, on the basis of existing glow ion nitridation equipment, improve, formed the following technical proposals of the utility model.
Novel glow ion nitridation equipment comprises body of heater, power supply, pilot circuit and air delivery device; Body of heater comprises movable guard, stove seat and is connected the cathode disc on the stove seat, it is characterized in that being connected with on the stove seat inlet pipe that is positioned at the cathode disc below, and inlet pipe is communicated with air delivery device; Cathode disc is provided with through hole; Be bolted with supplementary anode on the inlet pipe, the upper end of supplementary anode is positioned at the cathode disc top after passing through hole, is provided with inner chamber in the supplementary anode; The upper end closed of inner chamber; The lower end of inner chamber is communicated with inlet pipe, and the chamber wall of inner chamber is provided with production well, and supplementary anode is connected with the positive electrical of power supply through pilot circuit.
Be connected with the thermometric negative electrode on the said cathode disc, be provided with the thermopair that is provided with and is electrically connected near the thermometric cathode outer surface in the thermometric negative electrode with pilot circuit.
Said thermometric negative electrode is consistent with nitriding part shape and structure, material is identical.
Said supplementary anode comprises the Low Carbon Steel Pipe matrix in a tubular form, is equipped with on the periphery of Low Carbon Steel Pipe matrix to urge to ooze material layer, urges the periphery that oozes material layer to be provided with and is communicated with production well outside and Low Carbon Steel Pipe matrix inner chamber.
Saidly urge that to ooze material layer be aluminium lamination or titanium layer.
Said air delivery device comprises the pneumatic tube that is communicated with inlet pipe, from the close-by examples to those far off is serially connected with under meter, decomposing furnace, loft drier and valve successively from body of heater on the pneumatic tube.
The utility model and existing glow ion nitridation equipment operating method are basic identical, different is dark in hole type parts when being placed on the cathode disc, make supplementary anode be deep into dark blind hole or deep via is inner.
In novel ionitriding equipment; Nitriding gas gets in the inner chamber of supplementary anode through air delivery device, inlet pipe; Nitriding gas enters into part inside through production well again, because supplementary anode is deep into dark blind hole or deep via is inner, therefore for the nitriding reaction competent source of the gas is provided.During equipment work; Supplementary anode and part internal surface have formed high-voltage dc; Nitriding gas ionization under the effect of high-voltage dc generates and contains the positive ion that infiltrates element; Bombardment produces active atomic and penetrates into the inner formation of part infiltration layer, thereby reach the purpose to dark blind hole or the nitriding of deep via internal surface as the part internal surface of negative electrode.When common parts being carried out the nitriding processing, only need unload supplementary anode and get final product.
The air delivery device of the utility model is to have added loft drier on the basis of existing technology, and neutrality or meta-alkalescence siccative are housed in the loft drier, like silica gel, Calcium Chloride Powder Anhydrous or unslaked lime, can avoid the nitriding gas water cut high and influence the nitriding quality.
The conclusion that draws according to formula (5), when hole type parts in different heights dark was carried out nitriding, the height value h of its supplementary anode should be greater than the m value.The utility model patent provides the ratio parameter J that influences part nitriding quality simultaneously, sees formula (6).Show through test of many times: the optimum valuing range of ratio parameter J is 3.0-4.0.
In the formula: J is a ratio parameter; D is dark interior hole type parts diameter of bore; d
0Be hollow supplementary anode outside diameter.
Can know that by formula (5) and formula (6) design of supplementary anode should meet the following conditions simultaneously:
The advantage of the utility model is: simple in structure, and not only can carry out nitriding and handle, and can carry out the nitriding processing of good ground of effect the dark blind hole of dark blind hole or deep via part or the internal surface of deep via to non-deep-hole type parts.
Description of drawings
Below in conjunction with accompanying drawing the embodiment of the utility model is done further to specify:
Fig. 1 is the structure principle chart of existing glow ion nitridation equipment;
Fig. 2 is that the nitriding blind area forms schematic diagram;
Fig. 3 is the structure principle chart of the utility model;
Fig. 4 is the structural representation of supplementary anode 14;
Fig. 5 is the metallograph of the existing handled common parts of glow ion nitridation equipment;
Fig. 6 is the metallograph of the handled deep-hole type parts of novel glow ion nitridation equipment that provides of the utility model.
Embodiment
As shown in Figure 3, novel glow ion nitridation equipment comprises body of heater, power supply 1, pilot circuit 2, vacuum extractor and air delivery device; Body of heater comprises movable guard 3, stove seat 4 and is connected the cathode disc 5 on the stove seat, is connected with the inlet pipe 6 that is positioned at the cathode disc below on the stove seat 4, and inlet pipe 6 is communicated with air delivery device; Air delivery device comprises the pneumatic tube 7 that is communicated with inlet pipe 6; From the close-by examples to those far off be serially connected with under meter 8, decomposing furnace 9, loft drier 10 and valve 11 successively from body of heater on the pneumatic tube 7; The inlet end of pneumatic tube 7 is communicated with gas cylinder 12, and each parts of above-mentioned air delivery device are currently available products; Cathode disc 5 is provided with through hole 13; Be bolted with supplementary anode 14 on the inlet pipe 6, the upper end of supplementary anode 14 is positioned at cathode disc 5 tops after passing through hole 13, will leave the gap between supplementary anode 14 and through hole 13 hole walls; Be provided with inner chamber 15 in the supplementary anode 14; The upper end closed of inner chamber 15, the lower end of inner chamber 15 is communicated with inlet pipe 6, and the chamber wall of inner chamber 15 is provided with the production well 16 of inner chamber 15 with supplementary anode 14 external communications; Supplementary anode 14 is connected through the positive electrical of pilot circuit 2 with power supply 1 with carburizing anode 17 on movable guard 3 inwalls; Shown in the figure is that supplementary anode 14 constitutes electrical connection with inlet pipe 6, and inlet pipe 6 is connected with the positive electrical of power supply 1 through pilot circuit 2, and cathode disc 5 is connected with the negative electricity of power supply 1 through pilot circuit 2.Vacuum extractor comprises the vacuum pump 18 that is communicated with the body of heater inner chamber through stove seat 4 and is installed in the pressure transmitter 19 on the stove seat 4 that vacuum pump 18 is electrically connected with pilot circuit 2 with pressure transmitter 19.
Be connected with thermometric negative electrode 20 on the cathode disc 5, thermometric negative electrode 20 constitutes electrical connection with cathode disc 5, is provided with the thermopair 21 that is provided with and is electrically connected with pilot circuit 2 near the thermometric cathode outer surface in the thermometric negative electrode 20.Part is under a difficult problem, especially a part shape, the baroque situation in the control of the temperature of ion bombardment heat treatment process always, and the temperature of part in stove usually is to confirm through range estimation and the comparison of instrument and operator's experience.And the heat treated heating principle of ion bombardment is: charged positive ion bombards piece surface under the high voltage direct current field action, the kinetic energy of charged ion is transformed into heat energy makes piece surface absorb energy and heat up.So the ion bombardment heated components is piece surface heating itself; To this heating principle; The thermometric negative electrode is preferably consistent with shape, the structure of nitriding part, material composition is identical, and it is consistent that thermometric negative electrode and the size of nitriding part do not require, certainly also can unanimity.Thermopair extend into the inside of thermometric negative electrode and near its outside surface setting, the temperature that records like this is more accurate, confirms the temperature of part in nitriding process through the temperature that records the thermometric negative electrode.Nitriding part shown in Fig. 3 is long cover 22; Thermometric negative electrode 20 is also used with long cover 22 identical materials and is done the growth shell-like so; Thermopair 21 is installed in the chamber wall of thermometric negative electrode 20 of long shell-like and near the outside surface of thermometric negative electrode, the utility model is that example comes the thermometric negative electrode is described with the shell-like part only, as for the deep-hole type parts of other shape; The making reason of thermometric negative electrode is identical, repeats no more as space is limited.
As shown in Figure 4; Above-mentioned supplementary anode 14 preferably in a tubular form; Comprise Low Carbon Steel Pipe matrix 141, be equipped with on the periphery of Low Carbon Steel Pipe matrix 141 to urge and ooze material layer 142, urge the periphery that oozes material layer to be provided with and be communicated with production well 16 outside and Low Carbon Steel Pipe matrix inner chamber.Above-mentionedly urge that to ooze material layer be aluminium lamination or titanium layer, can form through overcoat aluminum pipe on the Low Carbon Steel Pipe matrix 141 or titanium pipe, the upper end closed of steel pipe matrix 141, the lower end of steel pipe matrix 141 is connected with and is used for the hollow thread joint 143 that is connected with inlet pipe 6.Selecting for use soft steel to make electrode body is that fusing point higher (1400 ℃-1500 ℃) is difficult for nitriding, long service life because this material price is low; Urge the effect that material layer has been used for strengthening the nitriding effect of oozing; Under the effect of the DC electric field that forms between anode and cathode; Urge and ooze material and sputtered plasma active; Plasma active has improved the concentration of high hardness compound in the infiltration layer to the bombardment of piece surface, thereby reaches the purpose that improves quality layer.
Above-mentioned power supply and pilot circuit are prior art, repeat no more at this.
One common parts (non-deep-hole type parts) is carried out nitriding with existing glow ion nitridation equipment to be handled; One long cover (deep-hole type parts) is carried out nitriding with the novel glow ion nitridation equipment that the utility model provided to be handled; Its result such as Fig. 5 and shown in Figure 6; Fig. 5 is the metallograph of the existing handled common parts of glow ion nitridation equipment (non-deep-hole type parts), and the nitriding depth among the figure is 0.5mm; Fig. 6 is the metallograph of the handled deep-hole type parts of novel glow ion nitridation equipment that provides of the utility model, and the nitriding depth among the figure is 0.7mm, and visible nitriding effect obviously is superior to existing installation.