CN102234756A - Novel glow ion nitriding equipment - Google Patents
Novel glow ion nitriding equipment Download PDFInfo
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- CN102234756A CN102234756A CN 201110167201 CN201110167201A CN102234756A CN 102234756 A CN102234756 A CN 102234756A CN 201110167201 CN201110167201 CN 201110167201 CN 201110167201 A CN201110167201 A CN 201110167201A CN 102234756 A CN102234756 A CN 102234756A
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Abstract
The invention discloses novel glow ion nitriding equipment which comprises a furnace body, a power supply, a control circuit and a gas conveying device, wherein the furnace body comprises a movable cover, a furnace base and a cathode disc connected to the furnace base; the furnace base is connected with a gas inlet pipe positioned below the cathode disc; the gas inlet pipe is communicated with the gas conveying device; the cathode disc is provided with a through hole; the gas inlet pipe is in threaded connection with an auxiliary anode; the upper end of the auxiliary anode is positioned above the cathode disc after passing through the through hole; a cavity is formed in the auxiliary anode; the upper end of the cavity is enclosed; the lower end of the cavity is communicated with the gas inlet pipe; the cavity wall of the cavity is provided with a gas outlet hole; and the auxiliary anode is electrically connected with the anode of the power supply through the control circuit. The equipment has a simple structure; and by adopting the equipment, nitriding treatment can be performed on deep-hole-free parts, and nitriding treatment with a good effect can be performed on the inner surfaces of deep blind holes or deep through holes of deep-blind-hole or deep-through-hole parts.
Description
Technical field
The present invention relates to nitriding equipment, be specifically related to a kind of glow ion nitridation equipment.
Background technology
The nitriding of mechanical component is that (generally below Ac1) makes activated nitrogen atom infiltrate the chemical heat treatment process of workpiece surface at a certain temperature.Nitriding method commonly used has: gas nitriding, liquid nitriding and ionitriding etc.Liquid nitriding is used less in production practice because of there being the loose problem such as serious of disposal of pollutants and nitrided case.Gas nitriding is that processed part is heated to certain temperature (generally being: 450 ℃～600 ℃), feed nitrogenous decomposition gas, through insulation for a long time, make piece surface obtain the chemical heat treatment method of high surface hardness then, this processing method is finished by gas nitriding equipment.
The advantage of this processing method is: 1. device structure is simple; 2. the structure of part there is not particular requirement, especially also can nitriding to dark endoporus, blind hole.Therefore in the certain period, this processing method has obtained widespread use.But along with improving constantly of Chinese national economy developmental level, with save energy, to reduce discharging be that green, the strategy of sustainable development policy of representative established.Under this social background, the energy consumption height of gas nitriding equipment, the obnoxious flavour discharge capacity is big, production efficiency is low, quality is wayward etc., and shortcoming progressively reveals, and in production practice, gas nitriding equipment progressively becomes superseded tooling.
Glow ion nitridation equipment is to rely on the method for gas glow discharge ion bombardment to come heated parts and obtain active ion, make activated nitrogen atom infiltrate the chemical heat treatment process equipment of workpiece surface, as shown in Figure 1, existing glow ion nitridation equipment comprises body of heater, power supply 1, pilot circuit 2, temperature measuring equipment, vacuum extractor and air delivery device; Body of heater comprises movable guard 3, stove seat 4 and is connected cathode disc 5 on the stove seat, and cathode disc 5 is connected with power supply 1 negative electricity by pilot circuit 2, connects that carburizing anode 17 on movable guard 3 inwalls passes through pilot circuit 2 and power supply 1 positive pole is electrically connected; Air delivery device comprises and is connected on the movable guard and the pneumatic tube 7 that is communicated with the body of heater inner chamber, from the close-by examples to those far off be serially connected with under meter 8, decomposing furnace 9 and valve 11 successively from body of heater on the pneumatic tube, the inlet end of pneumatic tube is communicated with gas cylinder 12, vacuum extractor comprises that temperature measuring equipment is to be connected on the cathode disc and the thermopair 21 that is electrically connected with the pilot circuit circuit by the vacuum pump 18 and the pressure transmitter 19 of pilot circuit control.Compare with traditional gas nitriding, it is fast that existing glow ion nitridation equipment has permeating speed, and infiltration layer nitride structure form is controlled easily, and part deformation is little, save energy, less, advantage such as non-pollution discharge.But this equipment is higher to the structural requirement of processed part, and especially the internal surface to dark endoporus, blind hole class part can't carry out the nitriding processing.This be because, part is in the ionitriding process, the furnace wall is an anode, part is a negative electrode, the logical high voltage direct current of going up between anode and cathode, produce glow discharge, in the cathode drop district, ionization of gas becomes negative ions (plasma body), under electric field action, the positive ion bombardment piece surface, make the workpiece heating and produce reaction with it, produce active atomic and infiltrate the inner infiltration layer that forms of workpiece, the electric field action that the ion kinetic energy of bombardment piece surface forms from positive and negative electrode, therefore movement locus is linear, dark blind hole or deep via are owing to the singularity of its structure, and positive ion is difficult to intactly bombard the internal surface of whole deep hole part, and promptly dark interior hole type parts is when adopting traditional ion bombardment method to carry out the nitriding processing, certainly exist the nitriding blind area, thereby have a strong impact on the nitriding effect of part.In addition, hole type parts structurally is similar to hollow cathode in dark, ionic fluid converges each other in the hollow cathode, the aura district is pooled together, current density constantly increases, and dark interior hole type parts internal surface temperature is raise rapidly, causes " hollow cathode " effect, in case " hollow cathode " effect occurs, the ionitriding meeting can't be carried out because of temperature is too high.
Enter the nineties in last century, the appearance of pulse ion nitriding power supply, for condition has been created in the internal surface nitriding problem ground solution of hole type parts in dark, but through facts have proved, the pulse ion nitriding less than 10 part, can access preferably nitriding effect by reasonable control process parameters to length-to-diameter ratio.When the length-to-diameter ratio of hole type parts greater than 10 the time, the internal surface of hole type parts is because of the existence of " nitriding blind area " and " hollow cathode " effect in dark, the nitriding effect is still undesirable, and the price of pulse ion nitriding power supply will exceed about 50% than common direct supply, heat-up rate will descend about 30-50% than conventional DC power supply, has reduced production efficiency.
Therefore, design a kind of novel ionitriding equipment, the nitriding problem that systematically solves the deep-hole type parts internal surface seems very urgent.
Summary of the invention
Hole type parts is the revolution build part of symmetrical configuration in general dark, requiring after ionitriding is handled, should have the performance symmetry on the mechanical property, for obtaining symmetric nitriding effect, part is placed on nitriding regional center axial location studies, to carry out the nitriding blind area derivation of equation, referring to Fig. 2, Reference numeral 25 is represented body of heater among the figure, hole type parts in Reference numeral 26 representatives deeply, m are dark interior hole type parts ionitriding gap height, and l is the hole depth of dark interior hole type parts; L is a nitriding anodic virtual height, and D is the body of heater effective diameter, and d is dark interior hole type parts diameter of bore.
Among Fig. 2: because △ ABC and △ EFC are similar triangles, so have:
(1)
Because △ ABC and △ AGF are similar triangles, so have:
So have:
Formula (2) substitution formula (1) can be got:
As can be seen from Figure 2:
(4)
Formula (3) substitution formula (4) can be got:
According to the dark interior hole type parts ionitriding gap height formula of deriving (5), can draw as drawing a conclusion: the nitriding of part internal surface can only be leaned on from bombarding and realize through the plasma body of secondary or multiple reflection more than the m district in height m scope, because plasma body energy behind multiple reflection weakens greatly, thereby the nitriding effect can decline to a great extent; To form the nitriding blind area in the hole type parts m altitude range in promptly dark, the scope of blind area is relevant with the body of heater effective diameter with the hole depth of interior hole type parts, diameter of bore and nitriding anode virtual height.
The objective of the invention is to design a kind of novel glow ion nitridation equipment.This equipment not only can carry out ionitriding to general part, and can overcome the influence of ionitriding " nitriding blind area " and " hollow cathode " effect, realization needs the part of surface strengthening to carry out glow ion nitriding to dark blind hole or deep via internal surface, thereby solve the problem of dark blind hole or deep via internal surface ion nitriding weak effect, promote the ionitriding quality significantly.
Based on the above-mentioned theory analysis, in order to realize the foregoing invention purpose, on the basis of existing glow ion nitridation equipment, improved, formed following technical proposals of the present invention.
Novel glow ion nitridation equipment comprises body of heater, power supply, pilot circuit and air delivery device; Body of heater comprises movable guard, stove seat and is connected cathode disc on the stove seat that it is characterized in that being connected with on the stove seat inlet pipe that is positioned at the cathode disc below, inlet pipe is communicated with air delivery device; Cathode disc is provided with through hole, be bolted with supplementary anode on the inlet pipe, the upper end of supplementary anode is positioned at the cathode disc top after passing through hole, be provided with inner chamber in the supplementary anode, the upper end closed of inner chamber, the lower end of inner chamber is communicated with inlet pipe, and the chamber wall of inner chamber is provided with production well, and supplementary anode is electrically connected with the positive pole of power supply by pilot circuit.
Be connected with the thermometric negative electrode on the described cathode disc, be provided with the thermopair that is provided with and is electrically connected near the thermometric cathode outer surface in the thermometric negative electrode with pilot circuit.
Described thermometric negative electrode and nitriding part shape and structure unanimity, material are identical.
Described supplementary anode comprises the Low Carbon Steel Pipe matrix in a tubular form, is equipped with on the periphery of Low Carbon Steel Pipe matrix to urge to ooze material layer, urges the periphery that oozes material layer to be provided with and is communicated with production well outside and Low Carbon Steel Pipe matrix inner chamber.
Describedly urge that to ooze material layer be aluminium lamination or titanium layer.
Described air delivery device comprises the pneumatic tube that is communicated with inlet pipe, from the close-by examples to those far off is serially connected with under meter, decomposing furnace, loft drier and valve successively from body of heater on the pneumatic tube.
The present invention and existing glow ion nitridation equipment operating method are basic identical, different is dark in hole type parts when being placed on the cathode disc, make supplementary anode be deep into dark blind hole or deep via inside.
In novel ionitriding equipment, nitriding gas enters in the inner chamber of supplementary anode by air delivery device, inlet pipe, nitriding gas enters into part inside through production well again, because supplementary anode is deep into dark blind hole or deep via inside, therefore provides competent source of the gas for the nitriding reaction.During equipment work, supplementary anode and part internal surface have formed high-voltage dc, nitriding gas ionization under the effect of high-voltage dc generates and contains the positive ion that infiltrates element, bombardment is as the part internal surface of negative electrode, produce active atomic and penetrate into the inner formation of part infiltration layer, thereby reach purpose dark blind hole or the nitriding of deep via internal surface.When common parts being carried out the nitriding processing, only need unload supplementary anode and get final product.
Air delivery device of the present invention is to have added loft drier on the basis of existing technology, and neutrality or meta-alkalescence siccative are housed in the loft drier, as silica gel, Calcium Chloride Powder Anhydrous or unslaked lime, can avoid the nitriding gas water content high and influence the nitriding quality.
The conclusion that draws according to formula (5), when hole type parts in different heights dark was carried out nitriding, the height value h of its supplementary anode should be greater than the m value.Patent of the present invention provides the ratio parameter J that influences part nitriding quality simultaneously, sees formula (6).Show through test of many times: the optimum valuing range of ratio parameter J is 3.0-4.0.
（6）
In the formula: J is a ratio parameter; D is dark interior hole type parts diameter of bore; d
0Be hollow supplementary anode outside diameter.
By formula (5) and formula (6) as can be known, the design of supplementary anode should meet the following conditions simultaneously:
The invention has the advantages that: simple in structure, not only can carry out nitriding and handle, and can carry out the nitriding processing of good ground of effect the dark blind hole of dark blind hole or deep via part or the internal surface of deep via to non-deep-hole type parts.
Description of drawings
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail:
Fig. 1 is the structure principle chart of existing glow ion nitridation equipment;
Fig. 2 is that the nitriding blind area forms schematic diagram;
Fig. 3 is a structure principle chart of the present invention;
Fig. 4 is the structural representation of supplementary anode 14;
Fig. 5 is the metallograph of the existing handled common parts of glow ion nitridation equipment;
Fig. 6 is the metallograph of the handled deep-hole type parts of novel glow ion nitridation equipment provided by the present invention.
Embodiment
As shown in Figure 3, novel glow ion nitridation equipment comprises body of heater, power supply 1, pilot circuit 2, vacuum extractor and air delivery device; Body of heater comprises movable guard 3, stove seat 4 and is connected cathode disc 5 on the stove seat that be connected with the inlet pipe 6 that is positioned at the cathode disc below on the stove seat 4, inlet pipe 6 is communicated with air delivery device; Air delivery device comprises the pneumatic tube 7 that is communicated with inlet pipe 6, from the close-by examples to those far off be serially connected with under meter 8, decomposing furnace 9, loft drier 10 and valve 11 successively from body of heater on the pneumatic tube 7, the inlet end of pneumatic tube 7 is communicated with gas cylinder 12, and each parts of above-mentioned air delivery device are currently available products; Cathode disc 5 is provided with through hole 13, be bolted with supplementary anode 14 on the inlet pipe 6, the upper end of supplementary anode 14 is positioned at cathode disc 5 tops after passing through hole 13, to leave the gap between supplementary anode 14 and through hole 13 hole walls, be provided with inner chamber 15 in the supplementary anode 14, the upper end closed of inner chamber 15, the lower end of inner chamber 15 is communicated with inlet pipe 6, the chamber wall of inner chamber 15 is provided with the production well 16 of inner chamber 15 with supplementary anode 14 external communications, carburizing anode 17 on supplementary anode 14 and movable guard 3 inwalls is electrically connected with the positive pole of power supply 1 by pilot circuit 2, shown in the figure is that supplementary anode 14 constitutes electrical connection with inlet pipe 6, inlet pipe 6 is electrically connected with the positive pole of power supply 1 by pilot circuit 2, and cathode disc 5 is connected with the negative electricity of power supply 1 by pilot circuit 2.Vacuum extractor comprises vacuum pump 18 that is communicated with the body of heater inner chamber by stove seat 4 and the pressure transmitter 19 that is installed on the stove seat 4, and vacuum pump 18 and pressure transmitter 19 are electrically connected with pilot circuit 2.
Be connected with thermometric negative electrode 20 on the cathode disc 5, thermometric negative electrode 20 constitutes electrical connection with cathode disc 5, is provided with the thermopair 21 that is provided with and is electrically connected with pilot circuit 2 near the thermometric cathode outer surface in the thermometric negative electrode 20.Part is under a difficult problem, especially a part shape, the baroque situation in the control of the temperature of ion bombardment heat treatment process always, and the temperature of part in stove usually is to determine by range estimation and the comparison of instrument and operator's experience.And the heat treated heating principle of ion bombardment is: charged positive ion bombards piece surface under the high voltage direct current field action, the kinetic energy of charged ion is transformed into heat energy makes piece surface absorb energy and heat up.So the ion bombardment heated components is piece surface heating itself, at this heating principle, the thermometric negative electrode is preferably consistent with shape, the structure of nitriding part, material composition is identical, and it is consistent that thermometric negative electrode and the size of nitriding part do not require, certainly also can unanimity.Thermopair extend into the inside of thermometric negative electrode and near its outside surface setting, the temperature that records like this is more accurate, determines the temperature of part in nitriding process by the temperature that records the thermometric negative electrode.Nitriding part shown in Fig. 3 is long cover 22, thermometric negative electrode 20 is also used with long cover 22 identical materials and is done the growth shell-like so, thermopair 21 is installed in the chamber wall of thermometric negative electrode 20 of long shell-like and near the outside surface of thermometric negative electrode, the present invention is that example comes the thermometric negative electrode is described with the shell-like part only, deep-hole type parts as for other shape, the making reason of thermometric negative electrode is identical, repeats no more as space is limited.
As shown in Figure 4, above-mentioned supplementary anode 14 preferably in a tubular form, comprise Low Carbon Steel Pipe matrix 141, be equipped with on the periphery of Low Carbon Steel Pipe matrix 141 to urge and ooze material layer 142, urge the periphery that oozes material layer to be provided with and be communicated with production well 16 outside and Low Carbon Steel Pipe matrix inner chamber.Above-mentionedly urge that to ooze material layer be aluminium lamination or titanium layer, can form by overcoat aluminum pipe on the Low Carbon Steel Pipe matrix 141 or titanium pipe, the upper end closed of steel pipe matrix 141, the lower end of steel pipe matrix 141 is connected with and is used for the hollow thread joint 143 that is connected with inlet pipe 6.Selecting for use soft steel to make electrode body is that fusing point higher (1400 ℃-1500 ℃) is difficult for nitriding, long service life because this material price is low; Urge the effect that material layer has been used for strengthening the nitriding effect of oozing, under the effect of the DC electric field that forms between anode and cathode, urge and ooze material and sputtered plasma active, plasma active has improved the concentration of high hardness compound in the infiltration layer to the bombardment of piece surface, thereby reaches the purpose that improves quality layer.
Above-mentioned power supply and pilot circuit are prior art, do not repeat them here.
One common parts (non-deep-hole type parts) is carried out nitriding with existing glow ion nitridation equipment to be handled, one long cover (deep-hole type parts) is carried out nitriding with novel glow ion nitridation equipment provided by the present invention to be handled, its result as shown in Figure 5 and Figure 6, Fig. 5 is the metallograph of the existing handled common parts of glow ion nitridation equipment (non-deep-hole type parts), and the nitriding depth among the figure is 0.5mm; Fig. 6 is the metallograph of the handled deep-hole type parts of novel glow ion nitridation equipment provided by the present invention, and the nitriding depth among the figure is 0.7mm, and visible nitriding effect obviously is better than existing installation.
Claims (6)
1. a novel glow ion nitridation equipment comprises body of heater, power supply, pilot circuit and air delivery device; Body of heater comprises movable guard, stove seat and is connected cathode disc on the stove seat that it is characterized in that being connected with on the stove seat inlet pipe that is positioned at the cathode disc below, inlet pipe is communicated with air delivery device; Cathode disc is provided with through hole, be bolted with supplementary anode on the inlet pipe, the upper end of supplementary anode is positioned at the cathode disc top after passing through hole, be provided with inner chamber in the supplementary anode, the upper end closed of inner chamber, the lower end of inner chamber is communicated with inlet pipe, and the chamber wall of inner chamber is provided with production well, and supplementary anode is electrically connected with the positive pole of power supply by pilot circuit.
2. novel glow ion nitridation equipment as claimed in claim 1 is characterized in that being connected with the thermometric negative electrode on the described cathode disc, is provided with the thermopair that is provided with and is electrically connected with pilot circuit near the thermometric cathode outer surface in the thermometric negative electrode.
3. novel glow ion nitridation equipment as claimed in claim 2 is characterized in that described thermometric negative electrode and nitriding part shape and structure unanimity, material are identical.
4. novel glow ion nitridation equipment as claimed in claim 1, it is characterized in that described supplementary anode in a tubular form, comprise the Low Carbon Steel Pipe matrix, be equipped with on the periphery of Low Carbon Steel Pipe matrix to urge and ooze material layer, urge the periphery that oozes material layer to be provided with and be communicated with production well outside and Low Carbon Steel Pipe matrix inner chamber.
5. novel glow ion nitridation equipment as claimed in claim 4 is characterized in that describedly urging that to ooze material layer be aluminium lamination or titanium layer.
6. as the described novel glow ion nitridation equipment of arbitrary claim in the claim 1 to 5, it is characterized in that described air delivery device comprises the pneumatic tube that is communicated with inlet pipe, from the close-by examples to those far off be serially connected with under meter, decomposing furnace, loft drier and valve successively from body of heater on the pneumatic tube.
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| CN 201110167201 CN102234756A (en) | 2011-06-21 | 2011-06-21 | Novel glow ion nitriding equipment |
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| CN 201110167201 CN102234756A (en) | 2011-06-21 | 2011-06-21 | Novel glow ion nitriding equipment |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104846398A (en) * | 2015-05-29 | 2015-08-19 | 华北水利水电大学 | Titanium-based TiNx/IrO2-Ta2O5 coating anode |
| CN106702313A (en) * | 2016-12-29 | 2017-05-24 | 青岛丰东热处理有限公司 | Low temperature ion hardening treatment device of austenitic stainless steel long and thin tube |
| CN111850457A (en) * | 2020-07-29 | 2020-10-30 | 扬州大学 | Controllable surface nitriding device and using method thereof |
| CN115181930A (en) * | 2022-07-26 | 2022-10-14 | 扬州大学 | Nitridation device for 304 stainless steel sewage pump pipeline |
| RU2799184C1 (en) * | 2022-09-19 | 2023-07-04 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Томский государственный университет систем управления и радиоэлектроники" | Method for generating low-temperature plasma in narrow extended metal tubes |
| CN117144286A (en) * | 2023-06-01 | 2023-12-01 | 南京华尔泰传动科技有限公司 | Gear tooth surface nitriding treatment equipment |
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| CN85101602A (en) * | 1985-04-01 | 1986-08-20 | 中国科学院长春光学精密机械研究所 | Equipment for ionic ritridation of inside surface of long pipe |
| CN202131357U (en) * | 2011-06-21 | 2012-02-01 | 山东潍坊生建机械厂（集团） | Novel glow ion nitriding equipment |
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| CN85101602A (en) * | 1985-04-01 | 1986-08-20 | 中国科学院长春光学精密机械研究所 | Equipment for ionic ritridation of inside surface of long pipe |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104846398A (en) * | 2015-05-29 | 2015-08-19 | 华北水利水电大学 | Titanium-based TiNx/IrO2-Ta2O5 coating anode |
| CN106702313A (en) * | 2016-12-29 | 2017-05-24 | 青岛丰东热处理有限公司 | Low temperature ion hardening treatment device of austenitic stainless steel long and thin tube |
| CN106702313B (en) * | 2016-12-29 | 2019-04-19 | 青岛丰东热处理有限公司 | A kind of low-temperature ion cure process device of austenitic stainless steel elongated tubular |
| CN111850457A (en) * | 2020-07-29 | 2020-10-30 | 扬州大学 | Controllable surface nitriding device and using method thereof |
| CN115181930A (en) * | 2022-07-26 | 2022-10-14 | 扬州大学 | Nitridation device for 304 stainless steel sewage pump pipeline |
| CN115181930B (en) * | 2022-07-26 | 2023-09-05 | 扬州大学 | Nitriding device of 304 stainless steel sewage pump pipeline |
| RU2799184C1 (en) * | 2022-09-19 | 2023-07-04 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Томский государственный университет систем управления и радиоэлектроники" | Method for generating low-temperature plasma in narrow extended metal tubes |
| CN117144286A (en) * | 2023-06-01 | 2023-12-01 | 南京华尔泰传动科技有限公司 | Gear tooth surface nitriding treatment equipment |
| CN117144286B (en) * | 2023-06-01 | 2024-03-26 | 南京华尔泰传动科技有限公司 | Gear tooth surface nitriding treatment equipment |
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Application publication date: 20111109 |