CN202127021U - Conductive glass for thin film solar cell - Google Patents

Conductive glass for thin film solar cell Download PDF

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Publication number
CN202127021U
CN202127021U CN 201120058768 CN201120058768U CN202127021U CN 202127021 U CN202127021 U CN 202127021U CN 201120058768 CN201120058768 CN 201120058768 CN 201120058768 U CN201120058768 U CN 201120058768U CN 202127021 U CN202127021 U CN 202127021U
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glass
oxide layer
conductive oxide
film
metal
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Expired - Lifetime
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CN 201120058768
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林金锡
林金汉
林于庭
林鹏
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CHANGZHOU ALMADEN STOCK Co Ltd
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CHANGZHOU ALMADEN STOCK Co Ltd
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Abstract

The utility model relates to conductive glass with high performance, in particular to a piece of conductive glass for a thin film solar cell, which belongs to the filed of photoelectric new materials and is especially suitable for the field of solar materials. The conductive glass comprises a glass base material (1) and a transparent conducive film (5). The transparent conductive film (5) comprises a metal oxide conductive layer (2) and a second metal oxide conductive layer (4). A metal layer (3) is clamped between the metal oxide conductive layer (2) and the second metal oxide conductive layer (4). The metal oxide conductive layer (2), the metal layer (3) and the second metal oxide conductive layer (4) are sequentially arranged on the surface of one side of the glass base material (1). The conductive glass has the advantages of (1) being good in conductivity, scattering degree, visible light transmissivity and film stability of the transparent conductive film and achieving optimization of multi-layer composite films by innovating the film structure of the transparent conductive film and (2) being high in cost performance and low in using cost.

Description

Thin-film solar cells is used electro-conductive glass
Technical field
The utility model relates to a kind of novel high-performance electro-conductive glass, and particularly a kind of thin-film solar cells is used electro-conductive glass, belongs to the photoelectricity field of new, is particularly useful for the solar energy materials field.
Background technology
Along with the utilization to the novel energy solar energy of environment protecting and power-saving, the exploitation of novel solar battery and development more and more become the important topic in Application of Solar Energy field.Thin-film solar cell applications in the solar cell very extensively at present; Be directly connected to the quality of thin-film solar cells quality as the quality of the electro-conductive glass of thin-film solar cells important component part, it is crucial therefore thin-film solar cells being innovated with the improvement of electro-conductive glass always.Existing thin-film solar cells generally comprises glass baseplate and is arranged on the nesa coating on the glass baseplate with electro-conductive glass, and nesa coating is made up of the metal conductive oxide layer.Adopt conventional preparation method when thin-film solar cells prepares with electro-conductive glass, prepare the metal conductive oxide layer as adopting low-pressure chemical vapor deposition (being called for short LPCVD), PCVD (being called for short PECVD), magnetron sputtering (being called for short SPUTTER) or thermal spraying methods such as (being called for short SPRAY).Existing thin-film solar cells is with general common float glass process white glass or the ultra-white float glass of adopting of electro-conductive glass glass baseplate wherein.Nesa coating wherein possesses electric conductivity preferably; Simultaneously visible light there is very high transmitance; Nesa coating is widely used in electronic industry as a kind of functional material, such as industrial circles such as flat panel display, solar cell, touch-screen, instrument and instrument demonstration, optical coating and building energy conservation glass.Especially in field of solar energy,, the conversion efficiency of thin-film solar cells is played crucial effects as the preceding electrode of thin-film solar cells.Because nesa coating has important effect, therefore different according to the material that nesa coating adopted, electro-conductive glass mainly is divided into three kinds: first kind is ito glass; Be indium tin metal oxide; Transmitance is high, and conductivity is excellent, but exists costing an arm and a leg of raw material indium; Be mainly used in industrial circles such as liquid crystal display, touch-screen, seldom use in field of thin film solar cells; Characteristics such as second kind is FTO glass, is the tin ash that fluorine mixes, and it is relatively low to have a cost, and laser ablation is easier to, and optical property is suitable are mainly used in field of thin film solar cells; The third is an AZO glass, is the zinc oxide that aluminium mixes, and optical property and conductance are good; Raw material is easy to get, and is cheap for manufacturing cost, nontoxic; Be easy to realize mixing, existing when still being applied to thin film solar battery module can be by the defective of process for etching and interface problem restriction.Existing thin-film solar cells has reflex with two surfaces of electro-conductive glass for light; Make the light transmittance of sunlight generally be no more than 91.5%; Cause this sunlight of about 8.5% not obtain yet utilizing, this sunlight of about 8.5% also is the very huge energy.Therefore people constantly improve the nesa coating film layer structure that influences electro-conductive glass light transmission, conductivity and nephelometric turbidity unit in order to improve light transmittance etc.; Increase the number of plies of metal conductive oxide layer; Change layer of metal oxide conducting layer into multilayer; But still be the physics stack between the multiple layer metal oxide conducting layer, the nesa coating film layer structure is single, poor stability; From changing the performance of electro-conductive glass in essence, the light transmission of electro-conductive glass, conductivity and nephelometric turbidity unit do not obtain too big raising to these improved nesa coating film layer structures.Cause very huge solar energy still can't to be fully used and to transform, this causes the reduction of solar conversion efficiency, and use cost increases.Therefore light transmission, conductivity and the nephelometric turbidity unit of being badly in need of a kind of electro-conductive glass are better; The stability of nesa coating film layer structure is better; Can use electro-conductive glass from the novel thin film solar cell of the film layer structure that changes nesa coating in essence, but this is an insurmountable technical barrier always.
The utility model content
The purpose of the utility model is the deficiency to prior art, provide a kind of and have good electric conductivity, nephelometric turbidity unit and visible light transmissivity and nesa coating membranous layer stability, and the high thin-film solar cells of cost performance is used electro-conductive glass.
The technical scheme that realizes above-mentioned purpose is: a kind of thin-film solar cells is used electro-conductive glass; Include glass baseplate and nesa coating; Nesa coating includes the metal conductive oxide layer and the second metal conductive oxide layer; Between the metal conductive oxide layer and the second metal conductive oxide layer, be gripped with metal level, metal conductive oxide layer, metal level and the second metal conductive oxide layer are successively set on the side surface of glass baseplate.
Further, described glass baseplate is common float glass process white glass or ultra-white float glass.
Further, described metal conductive oxide layer thickness is 100~500nm, and metal layer thickness is 10~100nm, and the second metal conductive oxide layer thickness is 100~500nm.
Further, described metal conductive oxide layer is AZO, GZO, ZnO, SnO 2Or among the ITO any.
Further, described metal level is any in silver-colored film, aluminium film, the molybdenum film, perhaps is the alloy firm of any the two composition in the silver-colored aluminium molybdenum.
Further, the described second metal conductive oxide layer is AZO, SnO 2: any among F or the ITO.
Adopt the technical scheme of the utility model, have the following advantages: (1) has good electric conductivity, nephelometric turbidity unit and visible light transmissivity and nesa coating membranous layer stability.The utility model is changed conducting film film layer structure when existing; The utility model is gripped with metal level between the metal conductive oxide layer and the second metal conductive oxide layer, metal conductive oxide layer, metal level and the second metal conductive oxide layer deposit on the side surface that is arranged on glass baseplate successively.The layer metal deposition of the utility model is arranged on the metal conductive oxide layer; The metal level and the second metal conductive oxide layer deposit and are arranged on the metal level; The increase of metal level makes that chemical reaction has taken place between the metal level and the second metal conductive oxide layer forms polymer, produces the ball structure.Essential change has taken place in the film layer structure of the utility model nesa coating, is different from the simple physical stack of nesa coating film layer structure in the prior art fully.The utility model has been realized the optimum organization of multilayer complex films through the innovation to the nesa coating film layer structure, has improved the performance of nesa coating greatly; Make thin-film solar cells better with the light transmission of electro-conductive glass, conductivity is stronger, and nephelometric turbidity unit is higher; The nesa coating film layer structure is evenly fine and close, and stability is very good, and wherein sheet resistance can be controlled in 5.9 Ω/~28.5 Ω/ scope; Visible light transmissivity reaches more than 75%, and nephelometric turbidity unit can promote more than 5%; (2) cost performance is high, and use cost is low.The utility model has remedied the deficiency of prior art and the unification of nesa coating film layer structure, has enriched the nesa coating film layer structure, and design is very ingenious; The utility model solves this insoluble always technical problem with simple structure; Because the performance of the utility model improves greatly, the photoelectric conversion efficiency that makes the utility model be applied on the thin-film solar cells is very high, makes huge solar energy be fully used and transform; Loss is little, and use cost reduces greatly.
Description of drawings
Accompanying drawing is the structural representation of the utility model.
Embodiment
Through embodiment the utility model is done further detailed explanation below.
Embodiment one
Shown in accompanying drawing; A kind of thin-film solar cells is used electro-conductive glass; Include glass baseplate 1 and nesa coating 5; Nesa coating 5 includes the metal conductive oxide layer 2 and the second metal conductive oxide layer 4, between the metal conductive oxide layer 2 and the second metal conductive oxide layer 4, is gripped with metal level 3, and metal conductive oxide layer 2, metal level 3 and the second metal conductive oxide layer 4 deposit on the side surface that is arranged on glass baseplate 1 successively.Described glass baseplate 1 is the common float glass process white glass of thickness 3.2mm.Described metal conductive oxide layer 2 thickness are 250nm, and metal level 3 thickness are 50nm, and the second metal conductive oxide layer, 4 thickness are 250nm.Described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 8.8 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment two
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 150nm, and metal level 3 thickness are 30nm, and the second metal conductive oxide layer, 4 thickness are 250nm.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 12 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment three
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 200nm, and metal level 3 thickness are 50nm, and the second metal conductive oxide layer, 4 thickness are 300nm.Described metal conductive oxide layer 2 is GZO.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 9.4 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment four
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical, and the described second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 150nm, and metal level 3 thickness are 50nm, and the second metal conductive oxide layer, 4 thickness are 280nm.Described metal conductive oxide layer 2 is GZO, and metal level 3 is the aluminium film.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 11 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment five
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 100nm, and metal level 3 thickness are 10nm, and the second metal conductive oxide layer, 4 thickness are 230nm.Described metal conductive oxide layer 2 is ZnO, and metal level 3 is a molybdenum film, and the second metal conductive oxide layer 4 is AZO.
Embodiment six
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 400nm, and metal level 3 thickness are 80nm, and the second metal conductive oxide layer, 4 thickness are 500nm.Described metal conductive oxide layer 2 is SnO 2, metal level 3 is the aerdentalloy film, the second metal conductive oxide layer 4 is AZO.
Embodiment seven
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 500nm, and metal level 3 thickness are 100nm, and the second metal conductive oxide layer, 4 thickness are 450nm.Described metal conductive oxide layer 2 is ITO, and metal level 3 is the silver-molybdenbum film, and the second metal conductive oxide layer 4 is ITO.
Embodiment eight
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: different with embodiment one is that described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 120nm, and metal level 3 thickness are 20nm, and the second metal conductive oxide layer, 4 thickness are 200nm.Described metal conductive oxide layer 2 is ITO, and metal level 3 is an aluminium molybdenum alloy film, and the second metal conductive oxide layer 4 is SnO 2: F.
Embodiment nine
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical, and identical with embodiment one is that described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 300nm, and metal level 3 thickness are 60nm, and the second metal conductive oxide layer, 4 thickness are 100nm.The described second metal conductive oxide layer 4 is AZO.
Embodiment ten
Shown in accompanying drawing, a kind of thin-film solar cells is used electro-conductive glass, and this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 480nm, and metal level 3 thickness are 90nm, and the second metal conductive oxide layer, 4 thickness are 480nm.Described metal conductive oxide layer 2 is AZO, and metal level 3 is the aluminium film, and the second metal conductive oxide layer 4 is ITO.
The utility model is except that the foregoing description, and parameters can be adjusted according to specific requirement, in each regulation parameter area, chooses.
The embodiment of the utility model is a lot, can't be exhaustive, and the technical scheme that all employings are equal to replacement or equivalence replacement formation all belongs to the scope that utility model requires protection.

Claims (6)

1. a thin-film solar cells is used electro-conductive glass; Include glass baseplate (1) and nesa coating (5); Nesa coating (5) includes the metal conductive oxide layer (2) and the second metal conductive oxide layer (4); It is characterized in that: between the metal conductive oxide layer (2) and the second metal conductive oxide layer (4), be gripped with metal level (3), metal conductive oxide layer (2), metal level (3) and the second metal conductive oxide layer (4) are successively set on the side surface of glass baseplate (1).
2. thin-film solar cells according to claim 1 is used electro-conductive glass, it is characterized in that: described glass baseplate (1) is common float glass process white glass or ultra-white float glass.
3. thin-film solar cells according to claim 1 is used electro-conductive glass; It is characterized in that: described metal conductive oxide layer (2) thickness is 100~500nm; Metal level (3) thickness is 10~100nm, and second metal conductive oxide layer (4) thickness is 100~500nm.
4. thin-film solar cells according to claim 1 is used electro-conductive glass, it is characterized in that: described metal conductive oxide layer (2) is AZO, GZO, ZnO, SnO 2Or among the ITO any.
5. thin-film solar cells according to claim 1 is used electro-conductive glass, it is characterized in that: described metal level (3) is any in silver-colored film, aluminium film, the molybdenum film.
6. thin-film solar cells according to claim 1 is used electro-conductive glass, it is characterized in that: the described second metal conductive oxide layer (4) is AZO, SnO 2: any among F or the ITO.
CN 201120058768 2011-03-09 2011-03-09 Conductive glass for thin film solar cell Expired - Lifetime CN202127021U (en)

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Application Number Priority Date Filing Date Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102593200A (en) * 2012-03-12 2012-07-18 谢振华 Electrode structure of novel solar-cell panel
CN102683435A (en) * 2011-03-09 2012-09-19 常州亚玛顿股份有限公司 Conductive glass for thin film solar battery and preparation method thereof
CN113130674A (en) * 2021-03-18 2021-07-16 上海交通大学 Vertical germanium-silicon photoelectric detector with ITO electrode and preparation method thereof
CN116669448A (en) * 2023-07-28 2023-08-29 淄博金晶新能源有限公司 TCO conductive film glass for perovskite solar cell and preparation process thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683435A (en) * 2011-03-09 2012-09-19 常州亚玛顿股份有限公司 Conductive glass for thin film solar battery and preparation method thereof
CN102683435B (en) * 2011-03-09 2015-09-02 常州亚玛顿股份有限公司 Thin-film solar cells electro-conductive glass and preparation method thereof
CN102593200A (en) * 2012-03-12 2012-07-18 谢振华 Electrode structure of novel solar-cell panel
CN113130674A (en) * 2021-03-18 2021-07-16 上海交通大学 Vertical germanium-silicon photoelectric detector with ITO electrode and preparation method thereof
CN116669448A (en) * 2023-07-28 2023-08-29 淄博金晶新能源有限公司 TCO conductive film glass for perovskite solar cell and preparation process thereof
CN116669448B (en) * 2023-07-28 2024-02-13 淄博金晶新能源有限公司 TCO conductive film glass for perovskite solar cell and preparation process thereof

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Granted publication date: 20120125