CN202067794U - Conductive glass with single-sided antireflective film for film solar battery - Google Patents

Conductive glass with single-sided antireflective film for film solar battery Download PDF

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Publication number
CN202067794U
CN202067794U CN 201120058759 CN201120058759U CN202067794U CN 202067794 U CN202067794 U CN 202067794U CN 201120058759 CN201120058759 CN 201120058759 CN 201120058759 U CN201120058759 U CN 201120058759U CN 202067794 U CN202067794 U CN 202067794U
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glass
oxide layer
conductive oxide
film
antireflective coating
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林金锡
林金汉
林于庭
林鹏
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CHANGZHOU ALMADEN STOCK Co Ltd
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CHANGZHOU ALMADEN STOCK Co Ltd
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Abstract

The utility model relates to novel high-performance conductive glass, in particular to conductive glass for a film solar battery, wherein the conductive glass is provided with a single-sided antireflective film at the same side, belongs to the field of new photoelectric materials and is particularly suitable for the field of solar energy materials. The conductive glass comprises a glass substrate (1), a transparent conductive film (5) and an antireflective film (6), wherein the transparent conductive film (5) comprises a metal oxide conductive layer (2) and a second metal oxide conductive layer (4); a metal layer (3) is interlaid between the metal oxide conductive layer (2) and the second metal oxide conductive layer (4); and the antireflective film (6), the metal oxide conductive layer (2), the metal layer (3) and the second metal oxide conductive layer (4) are sequentially arranged on the surface of one side of the glass substrate (1). The conductive glass has the advantages that (1) the conductive glass has excellent conductivity, scattering amplitude and visible light transmittance, and the transparent conductive film has good stability; and (2) the conductive glass has high cost performance and low use cost.

Description

The thin-film solar cells electro-conductive glass that has the single face antireflective coating
Technical field
The utility model relates to a kind of novel high-performance electro-conductive glass, and particularly a kind of homonymy has the thin-film solar cells electro-conductive glass of single face antireflective coating, belongs to the photoelectricity field of new, is particularly useful for the solar energy materials field.
Background technology
Along with the utilization to the novel energy solar energy of environment protecting and power-saving, the exploitation of novel solar battery and development more and more become the important topic in Application of Solar Energy field.Thin-film solar cell applications in the solar cell is very extensive at present, be directly connected to the quality of thin-film solar cells quality as the quality of the electro-conductive glass of thin-film solar cells important component part, it is crucial therefore thin-film solar cells being innovated with the improvement of electro-conductive glass always.Existing thin-film solar cells generally comprises glass baseplate and the nesa coating that is arranged on the glass baseplate with electro-conductive glass, also includes antireflective coating, and nesa coating is made up of the metal conductive oxide layer.When preparing with electro-conductive glass, thin-film solar cells adopts conventional preparation method, as adopt low-pressure chemical vapor deposition (being called for short LPCVD), PCVD (being called for short PECVD), magnetron sputtering (being called for short SPUTTER) or thermal spraying methods such as (being called for short SPRAY) to prepare the metal conductive oxide layer, adopt methods such as chemical corrosion method, magnetron sputtering or collosol and gel to prepare antireflective coating.Existing thin-film solar cells generally adopts common float glass process white glass or ultra-white float glass with electro-conductive glass glass baseplate wherein.Nesa coating wherein possesses electric conductivity preferably, simultaneously visible light there is very high transmitance, nesa coating is widely used in electronic industry as a kind of functional material, such as industrial circles such as flat panel display, solar cell, touch-screen, instrument and instrument demonstration, optical coating and building energy conservation glass.Especially in field of solar energy,, the conversion efficiency of thin-film solar cells is played crucial effects as the preceding electrode of thin-film solar cells.Because nesa coating has important effect, therefore according to material difference that nesa coating adopted, electro-conductive glass mainly is divided into three kinds: first kind is ito glass, be indium tin metal oxide, the transmitance height, conductivity is excellent, but exists costing an arm and a leg of raw material indium, be mainly used in industrial circles such as liquid crystal display, touch-screen, seldom use in field of thin film solar cells; Characteristics such as second kind is FTO glass, is the tin ash that fluorine mixes, and it is relatively low to have a cost, and laser ablation is easier to, and optical property is suitable are mainly used in field of thin film solar cells; The third is an AZO glass, is the zinc oxide that aluminium mixes, and optical property and conductance are good, raw material is easy to get, and is cheap for manufacturing cost, nontoxic, be easy to realize mixing, existing when still being applied to thin film solar battery module can be by the defective of process for etching and interface problem restriction.Existing thin-film solar cells has reflex with two surfaces of electro-conductive glass for light, make the light transmittance of sunlight generally be no more than 91.5%, cause this sunlight of about 8.5% not obtain yet utilizing, this sunlight of about 8.5% also is the very huge energy.Therefore people are in order to improve light transmittance etc. constantly to influencing the electro-conductive glass light transmission, the nesa coating film layer structure of conductivity and nephelometric turbidity unit improves and increases antireflective coating, the performance that is provided with improving electro-conductive glass that anti-reflection layer is penetrated layer has certain effect, increase the number of plies of metal conductive oxide layer, change layer of metal oxide conducting layer into multilayer, but still be the physics stack between the multiple layer metal oxide conducting layer, the nesa coating film layer structure is single, poor stability, these improved nesa coating film layer structures are not from changing the performance of electro-conductive glass in essence, the light transmission of electro-conductive glass, conductivity and nephelometric turbidity unit do not obtain too big raising.Cause very huge solar energy still can't to be fully used and to transform, this causes the reduction of solar conversion efficiency, and use cost increases.Therefore light transmission, conductivity and the nephelometric turbidity unit of being badly in need of a kind of electro-conductive glass are better, the stability of nesa coating film layer structure is better, can be from the novel thin film solar cell electro-conductive glass of the film layer structure that changes nesa coating in essence, but this is an insurmountable technical barrier always.
The utility model content
The purpose of this utility model is at the deficiencies in the prior art, provide a kind of and have good electric conductivity, nephelometric turbidity unit and visible light transmissivity and nesa coating membranous layer stability, and the high homonymy of cost performance has the thin-film solar cells electro-conductive glass of single face antireflective coating.
The technical scheme that realizes above-mentioned purpose is: a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, include glass baseplate and nesa coating, also include antireflective coating, nesa coating includes the metal conductive oxide layer and the second metal conductive oxide layer, be gripped with metal level between the metal conductive oxide layer and the second metal conductive oxide layer, antireflective coating, metal conductive oxide layer, metal level and the second metal conductive oxide layer are successively set on the side surface of glass baseplate.
Further, described glass baseplate is common float glass process white glass or ultra-white float glass.
Further, described metal conductive oxide layer thickness is 100~500nm, and metal layer thickness is 10~100nm, and the second metal conductive oxide layer thickness is 100~500nm, the thicknesses of layers of antireflective coating is 65~200nm, and the refractive index value of antireflective coating is 1.55~1.8.
Further, described metal conductive oxide layer is AZO, GZO, ZnO, SnO 2Or among the ITO any.
Further, described metal level is any in silver-colored film, aluminium film, the molybdenum film, perhaps is the alloy firm of any the two composition in the silver-colored aluminium molybdenum.
Further, the described second metal conductive oxide layer is AZO, SnO 2: any among F or the ITO.
Adopt the technical solution of the utility model, have the following advantages: (1) has good electric conductivity, nephelometric turbidity unit and visible light transmissivity and nesa coating membranous layer stability, and anti-reflective effect is good.The utility model is changed conducting film rete single structure when existing, the utility model is gripped with metal level between the metal conductive oxide layer and the second metal conductive oxide layer, antireflective coating, metal conductive oxide layer, metal level and the second metal conductive oxide layer deposit on the side surface that is arranged on glass baseplate successively.The utility model antireflective coating is deposited on the glass substrate earlier, deposition is provided with the metal conductive oxide layer on antireflective coating again, then layer metal deposition is arranged on the metal conductive oxide layer, the metal level and the second metal conductive oxide layer deposit and are arranged on the metal level, the increase of metal level makes that chemical reaction has taken place between the metal level and the second metal conductive oxide layer forms polymer, produces the ball structure.Essential change has taken place in the film layer structure of the utility model nesa coating, is different from the simple physical stack of nesa coating film layer structure in the prior art fully.The utility model is by the innovation to the nesa coating film layer structure, realized the optimum organization of multilayer complex films, improved the performance of nesa coating greatly, made thin-film solar cells better with the light transmission of electro-conductive glass, conductivity is stronger, nephelometric turbidity unit is higher, the nesa coating film layer structure is evenly fine and close, and stability is very good, and wherein sheet resistance can be controlled in 5.9 Ω/~28.5 Ω/ scope, visible light transmissivity reaches more than 75%, and nephelometric turbidity unit can promote more than 5%; And the utility model has the single face antireflective coating, makes the utility model membrane structure very abundant, makes the utility model anti-reflection effect very good; (2) cost performance height, use cost is low.The utility model has remedied the unification of the deficiencies in the prior art and nesa coating film layer structure, enriched the nesa coating film layer structure, design very ingenious, the utility model solves this insoluble always technical problem with simple structure, because performance of the present utility model improves greatly, the photoelectric conversion efficiency that makes the utility model be applied on the thin-film solar cells is very high, makes huge solar energy be fully used and transform, loss is little, and use cost reduces greatly; (3) the utility model method technology of preparation the utility model electro-conductive glass is simple, realizes that easily preparation cost is low.
Description of drawings
Accompanying drawing is a structural representation of the present utility model.
Embodiment
Below by embodiment the utility model is described in further detail.
Embodiment one
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating includes glass baseplate 1 and nesa coating 5, also includes antireflective coating 6.Nesa coating 5 includes the metal conductive oxide layer 2 and the second metal conductive oxide layer 4, be gripped with metal level 3 between the metal conductive oxide layer 2 and the second metal conductive oxide layer 4, antireflective coating 6, metal conductive oxide layer 2, metal level 3 and the second metal conductive oxide layer 4 deposit on the side surface that is arranged on glass baseplate 1 successively.Described glass baseplate 1 is the common float glass process white glass of thickness 3.2mm.Described metal conductive oxide layer 2 thickness are 250nm, and metal level 3 thickness are 50nm, and the second metal conductive oxide layer, 4 thickness are 250nm, and the thicknesses of layers of antireflective coating 6 is 100nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.
The thin-film solar cells that has the single face antireflective coating that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 8.8 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment two
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal conductive oxide layer 2 is AZO, metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 150nm, and metal level 3 thickness are 30nm, and the second metal conductive oxide layer, 4 thickness are 250nm, and the thicknesses of layers of antireflective coating 6 is 80nm, and the refractive index value of antireflective coating is 1.55~1.8.
The thin-film solar cells that has the single face antireflective coating that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 12 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment three
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 200nm, metal level 3 thickness are 50nm, the second metal conductive oxide layer, 4 thickness are 300nm, and the thicknesses of layers of antireflective coating 6 is 120nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is GZO.
The thin-film solar cells that has the single face antireflective coating that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 9.4 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment four
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical, and the described second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 150nm, metal level 3 thickness are 50nm, the second metal conductive oxide layer, 4 thickness are 280nm, and the thicknesses of layers of antireflective coating 6 is 70nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is GZO, and metal level 3 is the aluminium film.
The thin-film solar cells that has the single face antireflective coating that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 11 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment five
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 100nm, and metal level 3 thickness are 10nm, and the second metal conductive oxide layer, 4 thickness are 230nm, and the thicknesses of layers of antireflective coating 6 is 65nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is ZnO, and metal level 3 is a molybdenum film, and the second metal conductive oxide layer 4 is AZO.
Embodiment six
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 400nm, metal level 3 thickness are 80nm, the second metal conductive oxide layer, 4 thickness are 500nm, and the thicknesses of layers of antireflective coating 6 is 150nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is SnO 2, metal level 3 is the aerdentalloy film, the second metal conductive oxide layer 4 is AZO.
Embodiment seven
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 500nm, metal level 3 thickness are 100nm, the second metal conductive oxide layer, 4 thickness are 450nm, and the thicknesses of layers of antireflective coating 6 is 180nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is ITO, and metal level 3 is the silver-molybdenbum film, and the second metal conductive oxide layer 4 is ITO.
Embodiment eight
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: different with embodiment one is that described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 120nm, and metal level 3 thickness are 20nm, and the second metal conductive oxide layer, 4 thickness are 200nm, and the thicknesses of layers of antireflective coating 6 is 90nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is ITO, and metal level 3 is an aluminium molybdenum alloy film, and the second metal conductive oxide layer 4 is SnO 2: F.
Embodiment nine
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 300nm, metal level 3 thickness are 60nm, the second metal conductive oxide layer, 4 thickness are 100nm, and the thicknesses of layers of antireflective coating 6 is 130nm, and the refractive index value of antireflective coating is 1.55~1.8.The described second metal conductive oxide layer 4 is AZO.
Embodiment ten
As shown in drawings, a kind of thin-film solar cells electro-conductive glass that has the single face antireflective coating, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 480nm, metal level 3 thickness are 90nm, the second metal conductive oxide layer, 4 thickness are 480nm, and the thicknesses of layers of antireflective coating 6 is 200nm, and the refractive index value of antireflective coating is 1.55~1.8.Described metal conductive oxide layer 2 is AZO, and metal level 3 is the aluminium film, and the second metal conductive oxide layer 4 is ITO.
The utility model in addition to the implementation, parameters can be adjusted according to specific requirement, chooses in each regulation parameter area.
Embodiment of the present utility model is a lot, can't be exhaustive, and the technical scheme that all employings are equal to replacement or equivalence replacement formation all belongs to the claimed scope of utility model.

Claims (6)

1. thin-film solar cells electro-conductive glass that has the single face antireflective coating, include glass baseplate (1) and nesa coating (5), also include antireflective coating (6), nesa coating (5) includes the metal conductive oxide layer (2) and the second metal conductive oxide layer (4), it is characterized in that: between the metal conductive oxide layer (2) and the second metal conductive oxide layer (4), be gripped with metal level (3), antireflective coating (6), metal conductive oxide layer (2), the metal level (3) and the second metal conductive oxide layer (4) are successively set on the side surface of glass baseplate (1).
2. according to the described thin-film solar cells electro-conductive glass that has the single face antireflective coating of claim 1, it is characterized in that: described glass baseplate (1) is common float glass process white glass or ultra-white float glass.
3. according to the described thin-film solar cells electro-conductive glass that has the single face antireflective coating of ` claim 1, it is characterized in that: described metal conductive oxide layer (2) thickness is 100~500nm, metal level (3) thickness is 10~100nm, second metal conductive oxide layer (4) thickness is 100~500nm, the thicknesses of layers of antireflective coating (6) is 65~200nm, and the refractive index value of antireflective coating is 1.55~1.8.
4. according to the described thin-film solar cells electro-conductive glass that has the single face antireflective coating of claim 1, it is characterized in that: described metal conductive oxide layer (2) is AZO, GZO, ZnO, SnO 2Or among the ITO any.
5. according to the described thin-film solar cells electro-conductive glass that has the single face antireflective coating of claim 1, it is characterized in that: described metal level (3) is any in silver-colored film, aluminium film, the molybdenum film.
6. according to the described thin-film solar cells electro-conductive glass that has the single face antireflective coating of claim 1, it is characterized in that: the described second metal conductive oxide layer (4) is AZO, SnO 2: any among F or the ITO.
CN 201120058759 2011-03-09 2011-03-09 Conductive glass with single-sided antireflective film for film solar battery Expired - Lifetime CN202067794U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683434A (en) * 2011-03-09 2012-09-19 常州亚玛顿股份有限公司 Conducting glass with single-face antireflective film for thin-film solar cell and method for preparing conducting glass
CN103448323A (en) * 2012-05-28 2013-12-18 中国南玻集团股份有限公司 Transparent conducting oxide film-plated glass and preparation method thereof
CN105845752A (en) * 2016-04-04 2016-08-10 广州新视界光电科技有限公司 Transparent conductive film applied to flexible photoelectric device and preparation method thereof
CN106756789A (en) * 2016-11-28 2017-05-31 陕西师范大学 A kind of compound transparent electricity conductive film and preparation method thereof
CN108767020A (en) * 2018-06-04 2018-11-06 中建材蚌埠玻璃工业设计研究院有限公司 A kind of sunken light transparent conducting glass of silicon-based film solar cells

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683434A (en) * 2011-03-09 2012-09-19 常州亚玛顿股份有限公司 Conducting glass with single-face antireflective film for thin-film solar cell and method for preparing conducting glass
CN102683434B (en) * 2011-03-09 2015-11-25 常州亚玛顿股份有限公司 With the thin-film solar cells electro-conductive glass and preparation method thereof of one side antireflective coating
CN103448323A (en) * 2012-05-28 2013-12-18 中国南玻集团股份有限公司 Transparent conducting oxide film-plated glass and preparation method thereof
CN103448323B (en) * 2012-05-28 2015-05-20 中国南玻集团股份有限公司 Transparent conducting oxide film-plated glass and preparation method thereof
CN105845752A (en) * 2016-04-04 2016-08-10 广州新视界光电科技有限公司 Transparent conductive film applied to flexible photoelectric device and preparation method thereof
CN106756789A (en) * 2016-11-28 2017-05-31 陕西师范大学 A kind of compound transparent electricity conductive film and preparation method thereof
CN108767020A (en) * 2018-06-04 2018-11-06 中建材蚌埠玻璃工业设计研究院有限公司 A kind of sunken light transparent conducting glass of silicon-based film solar cells

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