CN202013890U - Conductive glass for thin film solar cells - Google Patents

Conductive glass for thin film solar cells Download PDF

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Publication number
CN202013890U
CN202013890U CN 201120058770 CN201120058770U CN202013890U CN 202013890 U CN202013890 U CN 202013890U CN 201120058770 CN201120058770 CN 201120058770 CN 201120058770 U CN201120058770 U CN 201120058770U CN 202013890 U CN202013890 U CN 202013890U
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oxide layer
glass
conductive oxide
solar cells
metal conductive
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林金锡
林金汉
林于庭
林鹏
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CHANGZHOU ALMADEN STOCK Co Ltd
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CHANGZHOU ALMADEN STOCK Co Ltd
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Abstract

The utility model relates to novel high-performance conductive glass, in particular to conductive glass with a single face anti-reflection film on one side for thin film cells, which comprises a glass base material (1), a transparent conductive film (5) and an anti-reflection film (6). The transparent conductive film (5) comprises a metallic oxide conductive layer (2) and a second metallic oxide conductive layer (4), and a metal layer (3) is sandwiched between the metallic oxide conductive layer (2) and the second metallic oxide conductive layer (4). The metallic oxide conductive layer (2), the metal layer (3) and the second metallic oxide conductive layer (4) are sequentially arranged on one lateral surface of the glass base material (1), and the anti-reflection film (6) is arranged on the other lateral surface of the glass base material (1). The conductive glass for thin film solar cells has the advantages of (1) having good conductivity, scattering ratio, visible light transmittance and transparent conductive layer stability and (2) being high in cost performance and low in use cost.

Description

A kind of thin-film solar cells electro-conductive glass
Technical field
The utility model relates to a kind of novel high-performance electro-conductive glass, and particularly heteropleural has a kind of thin-film solar cells electro-conductive glass of single face antireflective coating, belongs to the photoelectricity field of new, is particularly useful for the solar energy materials field.
Background technology
Along with the utilization to the novel energy solar energy of environment protecting and power-saving, the exploitation of novel solar battery and development more and more become the important topic in Application of Solar Energy field.Thin-film solar cell applications in the solar cell is very extensive at present, be directly connected to the quality of thin-film solar cells quality as the quality of the electro-conductive glass of thin-film solar cells important component part, it is crucial therefore thin-film solar cells being innovated with the improvement of electro-conductive glass always.Existing thin-film solar cells generally comprises glass baseplate and the nesa coating that is arranged on the glass baseplate with electro-conductive glass, also includes antireflective coating, and nesa coating is made up of the metal conductive oxide layer.When preparing with electro-conductive glass, thin-film solar cells adopts conventional preparation method, as adopt low-pressure chemical vapor deposition (being called for short LPCVD), PCVD (being called for short PECVD), magnetron sputtering (being called for short SPUTTER) or thermal spraying methods such as (being called for short SPRAY) to prepare the metal conductive oxide layer, adopt methods such as chemical corrosion method, magnetron sputtering or collosol and gel to prepare antireflective coating.Existing thin-film solar cells generally adopts common float glass process white glass or ultra-white float glass with electro-conductive glass glass baseplate wherein.Nesa coating wherein possesses electric conductivity preferably, simultaneously visible light there is very high transmitance, nesa coating is widely used in electronic industry as a kind of functional material, such as industrial circles such as flat panel display, solar cell, touch-screen, instrument and instrument demonstration, optical coating and building energy conservation glass.Especially in field of solar energy,, the conversion efficiency of thin-film solar cells is played crucial effects as the preceding electrode of thin-film solar cells.Because nesa coating has important effect, therefore according to material difference that nesa coating adopted, electro-conductive glass mainly is divided into three kinds: first kind is ito glass, be indium tin metal oxide, the transmitance height, conductivity is excellent, but exists costing an arm and a leg of raw material indium, be mainly used in industrial circles such as liquid crystal display, touch-screen, seldom use in field of thin film solar cells; Characteristics such as second kind is FTO glass, is the tin ash that fluorine mixes, and it is relatively low to have a cost, and laser ablation is easier to, and optical property is suitable are mainly used in field of thin film solar cells; The third is an AZO glass, is the zinc oxide that aluminium mixes, and optical property and conductance are good, raw material is easy to get, and is cheap for manufacturing cost, nontoxic, be easy to realize mixing, existing when still being applied to thin film solar battery module can be by the defective of process for etching and interface problem restriction.Existing thin-film solar cells has reflex with two surfaces of electro-conductive glass for light, make the light transmittance of sunlight generally be no more than 91.5%, cause this sunlight of about 8.5% not obtain yet utilizing, this sunlight of about 8.5% also is the very huge energy.Therefore people are in order to improve light transmittance etc. constantly to influencing the electro-conductive glass light transmission, the nesa coating film layer structure of conductivity and nephelometric turbidity unit improves and increases antireflective coating, the performance that is provided with improving electro-conductive glass that anti-reflection layer is penetrated layer has certain effect, increase the number of plies of metal conductive oxide layer, change layer of metal oxide conducting layer into multilayer, but still be the physics stack between the multiple layer metal oxide conducting layer, the nesa coating film layer structure is single, poor stability, these improved nesa coating film layer structures are not from changing the performance of electro-conductive glass in essence, the light transmission of electro-conductive glass, conductivity and nephelometric turbidity unit do not obtain too big raising.Cause very huge solar energy still can't to be fully used and to transform, this causes the reduction of solar conversion efficiency, and use cost increases.Therefore light transmission, conductivity and the nephelometric turbidity unit of being badly in need of a kind of electro-conductive glass are better, the stability of nesa coating film layer structure is better, can be from the novel thin film solar cell electro-conductive glass of the film layer structure that changes nesa coating in essence, but this is an insurmountable technical barrier always.
The utility model content
The purpose of this utility model is at the deficiencies in the prior art, provide have good electric conductivity, nephelometric turbidity unit and visible light transmissivity and nesa coating membranous layer stability, and the high heteropleural of cost performance has a kind of thin-film solar cells electro-conductive glass of single face antireflective coating.
The technical scheme that realizes above-mentioned purpose is: a kind of thin-film solar cells electro-conductive glass, include glass baseplate and nesa coating, also include antireflective coating, nesa coating includes the metal conductive oxide layer and the second metal conductive oxide layer, between the metal conductive oxide layer and the second metal conductive oxide layer, be gripped with metal level, metal conductive oxide layer, metal level and the second metal conductive oxide layer are successively set on the side surface of glass baseplate, and antireflective coating is arranged on the opposite side surface of glass baseplate.
Further, described glass baseplate is common float glass process white glass or ultra-white float glass.
Further, described metal conductive oxide layer thickness is 100~500nm, and metal layer thickness is 10~100nm, and the second metal conductive oxide layer thickness is 100~500nm, the thicknesses of layers of antireflective coating is 65~200nm, and the refractive index value of antireflective coating is 1.22~1.4.
Further, described metal conductive oxide layer is AZO, GZO, ZnO, SnO 2Or among the ITO any.
Further, described metal level is any in silver-colored film, aluminium film, the molybdenum film, perhaps is the alloy firm of any the two composition in the silver-colored aluminium molybdenum.
Further, the described second metal conductive oxide layer is AZO, SnO 2: any among F or the ITO.
Adopt the technical solution of the utility model, have the following advantages: (1) has good electric conductivity, nephelometric turbidity unit and visible light transmissivity and nesa coating membranous layer stability, and anti-reflective effect is good.The utility model is changed conducting film rete single structure when existing, the utility model is gripped with metal level between the metal conductive oxide layer and the second metal conductive oxide layer, metal conductive oxide layer, metal level and the second metal conductive oxide layer deposit on the side surface that is arranged on glass baseplate successively, and antireflective coating is arranged on the opposite side surface of glass baseplate.Layer metal deposition of the present utility model is arranged on the metal conductive oxide layer, the metal level and the second metal conductive oxide layer deposit and are arranged on the metal level, the increase of metal level makes that chemical reaction has taken place between the metal level and the second metal conductive oxide layer forms polymer, produces the ball structure.Essential change has taken place in the film layer structure of the utility model nesa coating, is different from the simple physical stack of nesa coating film layer structure in the prior art fully.The utility model is by the innovation to the nesa coating film layer structure, realized the optimum organization of multilayer complex films, improved the performance of nesa coating greatly, made thin-film solar cells better with the light transmission of electro-conductive glass, conductivity is stronger, nephelometric turbidity unit is higher, the nesa coating film layer structure is evenly fine and close, and stability is very good, and wherein sheet resistance can be controlled in 5.9 Ω/~28.5 Ω/ scope, visible light transmissivity reaches more than 75%, and nephelometric turbidity unit can promote more than 5%; And the utility model has the single face antireflective coating, makes the utility model membrane structure very abundant, makes the utility model anti-reflection effect very good; (2) cost performance height, use cost is low.The utility model has remedied the unification of the deficiencies in the prior art and nesa coating film layer structure, enriched the nesa coating film layer structure, design very ingenious, the utility model solves this insoluble always technical problem with simple structure, because performance of the present utility model improves greatly, the photoelectric conversion efficiency that makes the utility model be applied on the thin-film solar cells is very high, makes huge solar energy be fully used and transform, loss is little, and use cost reduces greatly.
Description of drawings
Accompanying drawing is a structural representation of the present utility model.
Embodiment
Below by embodiment the utility model is described in further detail.
Embodiment one
As shown in drawings, a kind of thin-film solar cells electro-conductive glass includes glass baseplate 1 and nesa coating 5, also includes antireflective coating 6.Nesa coating 5 includes the metal conductive oxide layer 2 and the second metal conductive oxide layer 4, between the metal conductive oxide layer 2 and the second metal conductive oxide layer 4, be gripped with metal level 3, metal conductive oxide layer 2, metal level 3 and the second metal conductive oxide layer 4 deposit on the side surface that is arranged on glass baseplate 1 successively, and antireflective coating 6 is arranged on the opposite side surface of glass baseplate 1.Described glass baseplate 1 is the common float glass process white glass of thickness 3.2mm.Described metal conductive oxide layer 2 thickness are 250nm, and metal level 3 thickness are 50nm, and the second metal conductive oxide layer, 4 thickness are 250nm, and the thicknesses of layers of antireflective coating 6 is 100nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is AZO.Described metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 8.8 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment two
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 150nm, and metal level 3 thickness are 30nm, and the second metal conductive oxide layer, 4 thickness are 250nm, and the thicknesses of layers of antireflective coating 6 is 80nm, and the refractive index value of antireflective coating is 1.22~1.4.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 12 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment three
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal level 3 is silver-colored film, and the second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 200nm, metal level 3 thickness are 50nm, the second metal conductive oxide layer, 4 thickness are 300nm, and the thicknesses of layers of antireflective coating 6 is 120nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is GZO.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 9.4 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment four
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical, and the described second metal conductive oxide layer 4 is SnO 2: F.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 150nm, metal level 3 thickness are 50nm, the second metal conductive oxide layer, 4 thickness are 280nm, and the thicknesses of layers of antireflective coating 6 is 70nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is GZO, and metal level 3 is the aluminium film.
The thin-film solar cells that present embodiment makes is good with the electro-conductive glass performance, and its sheet resistance is 11 Ω/, and the visible light wave range mean transmissivity reaches 76%.
Embodiment five
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 100nm, and metal level 3 thickness are 10nm, and the second metal conductive oxide layer, 4 thickness are 230nm, and the thicknesses of layers of antireflective coating 6 is 65nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is ZnO, and metal level 3 is a molybdenum film, and the second metal conductive oxide layer 4 is AZO.
Embodiment six
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 400nm, metal level 3 thickness are 80nm, the second metal conductive oxide layer, 4 thickness are 500nm, and the thicknesses of layers of antireflective coating 6 is 150nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is SnO 2, metal level 3 is the aerdentalloy film, the second metal conductive oxide layer 4 is AZO.
Embodiment seven
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 500nm, metal level 3 thickness are 100nm, the second metal conductive oxide layer, 4 thickness are 450nm, and the thicknesses of layers of antireflective coating 6 is 180nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is ITO, and metal level 3 is the silver-molybdenbum film, and the second metal conductive oxide layer 4 is ITO.
Embodiment eight
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: different with embodiment one is that described glass baseplate 1 is the ultra-white float glass of thickness 3.2mm; Described metal conductive oxide layer 2 thickness are 120nm, and metal level 3 thickness are 20nm, and the second metal conductive oxide layer, 4 thickness are 200nm, and the thicknesses of layers of antireflective coating 6 is 90nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is ITO, and metal level 3 is an aluminium molybdenum alloy film, and the second metal conductive oxide layer 4 is SnO 2: F.
Embodiment nine
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical, and described metal conductive oxide layer 2 is AZO, and metal level 3 is silver-colored film.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 300nm, metal level 3 thickness are 60nm, the second metal conductive oxide layer, 4 thickness are 100nm, and the thicknesses of layers of antireflective coating 6 is 130nm, and the refractive index value of antireflective coating is 1.22~1.4.The described second metal conductive oxide layer 4 is AZO.
Embodiment ten
As shown in drawings, a kind of thin-film solar cells electro-conductive glass, this embodiment electro-conductive glass and embodiment one structure are basic identical.Different with embodiment one is: described metal conductive oxide layer 2 thickness are 480nm, metal level 3 thickness are 90nm, the second metal conductive oxide layer, 4 thickness are 480nm, and the thicknesses of layers of antireflective coating 6 is 200nm, and the refractive index value of antireflective coating is 1.22~1.4.Described metal conductive oxide layer 2 is AZO, and metal level 3 is the aluminium film, and the second metal conductive oxide layer 4 is ITO.
The utility model in addition to the implementation, parameters can be adjusted according to specific requirement, chooses in each regulation parameter area.
Embodiment of the present utility model is a lot, can't be exhaustive, and the technical scheme that all employings are equal to replacement or equivalence replacement formation all belongs to the claimed scope of utility model.

Claims (6)

1. thin-film solar cells electro-conductive glass, include glass baseplate (1) and nesa coating (5), also include antireflective coating (6), nesa coating (5) includes the metal conductive oxide layer (2) and the second metal conductive oxide layer (4), it is characterized in that: between the metal conductive oxide layer (2) and the second metal conductive oxide layer (4), be gripped with metal level (3), metal conductive oxide layer (2), the metal level (3) and the second metal conductive oxide layer (4) are successively set on the side surface of glass baseplate (1), and antireflective coating (6) is arranged on the opposite side surface of glass baseplate (1).
2. a kind of thin-film solar cells electro-conductive glass according to claim 1 is characterized in that: described glass baseplate (1) is common float glass process white glass or ultra-white float glass.
3. according to the described a kind of thin-film solar cells electro-conductive glass of ` claim 1, it is characterized in that: described metal conductive oxide layer (2) thickness is 100~500nm, metal level (3) thickness is 10~100nm, second metal conductive oxide layer (4) thickness is 100~500nm, the thicknesses of layers of antireflective coating (6) is 65~200nm, and the refractive index value of antireflective coating is 1.22~1.4.
4. a kind of thin-film solar cells electro-conductive glass according to claim 1 is characterized in that: described metal conductive oxide layer (2) is AZO, GZO, ZnO, SnO 2Or among the ITO any.
5. a kind of thin-film solar cells electro-conductive glass according to claim 1 is characterized in that: described metal level (3) is any in silver-colored film, aluminium film, the molybdenum film.
6. a kind of thin-film solar cells electro-conductive glass according to claim 1 is characterized in that: the described second metal conductive oxide layer (4) is AZO, SnO 2: any among F or the ITO.
CN 201120058770 2011-03-09 2011-03-09 Conductive glass for thin film solar cells Expired - Lifetime CN202013890U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683436A (en) * 2011-03-09 2012-09-19 常州亚玛顿股份有限公司 Conductive glass for thin film solar battery and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102683436A (en) * 2011-03-09 2012-09-19 常州亚玛顿股份有限公司 Conductive glass for thin film solar battery and preparation method thereof
CN102683436B (en) * 2011-03-09 2016-03-30 常州亚玛顿股份有限公司 A kind of thin-film solar cells electro-conductive glass and preparation method thereof

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Granted publication date: 20111019