CN202123435U - Grinding gasket trimmer - Google Patents
Grinding gasket trimmer Download PDFInfo
- Publication number
- CN202123435U CN202123435U CN2011202000328U CN201120200032U CN202123435U CN 202123435 U CN202123435 U CN 202123435U CN 2011202000328 U CN2011202000328 U CN 2011202000328U CN 201120200032 U CN201120200032 U CN 201120200032U CN 202123435 U CN202123435 U CN 202123435U
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- Prior art keywords
- pedestal
- grinding
- pallet
- trimmer
- mat trimmer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a grinding gasket trimmer which comprises a revolving bar, a base, a tray and an elastic connecting piece. The revolving bar is fixedly connected with one end of the base; and the tray is connected with the other end of the base through the elastic connecting piece in an elastic manner. The grinding gasket trimmer can be used for effectively buffering counter force of a grinding gasket, and is stout and firm; therefore, dangers caused by sudden damage of the grinding gasket trimmer in the grinding process can be avoided; the manufacturing cost can be reduced; moreover, the wasted time caused by exchanging the damaged grinding gasket trimmer in the grinding process can be also saved so as to be beneficial to increasing the work efficiency.
Description
Technical field
The utility model relates to lapping device, relates in particular to a kind of grinding mat trimmer.
Background technology
Grind in the processing procedure in semi-conductor industry; Wafer be can pile up on the lapped face of grinding pad and the material that removes and the abrasive grains in the lapping liquid ground; These particulates will fill up, stop up the micropore hole on the lapped face, make grinding pad lose grainding capacity, and industry is introduced grinding mat trimmer in process of lapping, to repair grinding pad; Grinding mat trimmer is pressed on the lapped face of grinding pad and rotation; On the lapped face of grinding pad, produce cutting and remove the atomic ability of filling, remove and remain in the particulate on the lapped face, make the lapped face of grinding pad be returned to comparatively ideal state again.
Shown in Figure 1 is the grinding mat trimmer of prior art, and this grinding mat trimmer comprises swingle 11, link 12, pedestal 13 and pallet 14; Said pedestal 13 is connected with said swingle 11 through said link 12, and said pallet 14 is fixed on the bottom of said pedestal 13 through screw 15.
Shown in Figure 2 is the vertical view of said link 12, and said link 12 comprises terminal pad 121, brace 122 and connecting ring 123; Said terminal pad 121 is fixedly mounted on the bottom of said swingle 11; Said connecting ring 123 is fixedly mounted on the top of said pedestal 13; Said brace 122 is arranged between said terminal pad 121 and the said connecting ring 123; One end of said brace 122 is connected with said terminal pad 121, and the other end of said brace 122 is connected with said connecting ring 123, and promptly said link 12 plays a part to connect said swingle 11 and said pedestal 13.
Continuation is referring to Fig. 1, and in grinding processing procedure, said pallet 14 is under the downforce effect that said swingle 11 applies; Be pressed on the lapped face of grinding pad (not showing grinding pad among Fig. 1); Said swingle 11 rotations drive said pedestal 13 and pallet 14 and rotate together, and said pallet 14 is generally diamond disk; Said pallet 14 produces cutting and removes the atomic ability of filling on the lapped face at grinding pad in the process of grinding pad rotation relatively, remove and remain in the particulate on the lapped face.In grinding processing procedure, the downforce that said swingle 11 applies passes to said pedestal 13 and pallet 14 through said link 12, and therefore, said link 12 directly bears the downforce that said swingle 11 applies in grinding processing procedure.Pallet 14 is pressed on the grinding pad described in the processing procedure because grinding; Be 14 pairs of strong effects of grinding pad of said pallet; According to the relation of power and reaction force, grinding pad to said pallet 14 also can be strong effect, if do not control; Grinding pad can pass to said swingle 11 through said pedestal 13 and link 12 to the reaction force of said pallet 14, and said swingle 11 is exerted an influence.
Yet the link of prior art 12 adopts sheet metals to process (said terminal pad 121, brace 122 and connecting ring 123 are sheet metal), can play cushioning effect to the reaction force of grinding pad; Make the reaction force of grinding pad not influence said swingle 11, still, the brace 122 that sheet metal is processed is insecure; Under the downforce effect that said swingle 11 applies, fracture easily, promptly the grinding mat trimmer of prior art damages easily, if in grinding processing procedure; Said brace 122 snaps; Said pedestal 13 can be thrown away suddenly with pallet 14, and is abnormally dangerous like this, with the wafer that damages miscellaneous part and grind.
The utility model content
The purpose of the utility model is to provide a kind of grinding mat trimmer, can effectively cushion the reaction force of grinding pad, and is solid again firm.
In order to reach above-mentioned purpose, the utility model provides a kind of grinding mat trimmer, comprises swingle, pedestal, pallet and draws together Flexible Connector; Said swingle is fixedly connected on an end of said pedestal; Said pallet is connected the other end of said pedestal through said Flexible Connector elasticity.
Above-mentioned grinding mat trimmer, wherein, said pallet is provided with latch, and said latch passes said pedestal, stretches out from the top of said pedestal.
Above-mentioned grinding mat trimmer, wherein, said latch is a cylinder.
Above-mentioned grinding mat trimmer, wherein, said latch is evenly distributed on the same circumference.
Above-mentioned grinding mat trimmer, wherein, said Flexible Connector is evenly distributed on the same circumference.
Above-mentioned grinding mat trimmer, wherein, said Flexible Connector comprises screw and spring, and said screw comprises screw rod and nut, and said nut is arranged on an end of said screw rod, and said spring housing is located on the said screw rod; Said pedestal is provided with the hole, and the end that said screw rod is not provided with nut passes this hole and is threaded with said pallet, and an end of said spring is connected with said nut, and the other end of said spring is connected with said hole.
Above-mentioned grinding mat trimmer, wherein, said hole is arranged on the edge of said pedestal.
Above-mentioned grinding mat trimmer wherein, has a gap between said pedestal and the said pallet, and the center on said pallet top is provided with convexity, and the center of said base bottom is provided with groove, and said groove and said convexity are complementary, and said convexity is stuck in the said groove.
Above-mentioned grinding mat trimmer, wherein, said convexity is hemispherical, and said groove is hemispherical.
In the grinding mat trimmer of the utility model, swingle is directly installed on the pedestal, and the downforce that swingle applies acts directly on the pedestal, because pedestal is durable, therefore, pedestal can not be rotated the downforce that bar applies and damage by pressure; Pallet is connected with pedestal elasticity, and the anticaustic power of the elastic force available buffer grinding pad between pallet and the pedestal avoids the reaction force of grinding pad that swingle is exerted an influence; And the elastic force holding capacity between pallet and the pedestal is strong; Not fragile, therefore, the grinding mat trimmer of the utility model is solid firmly;
The grinding mat trimmer of the utility model is solid can avoid firmly grinding that grinding mat trimmer damages the danger that brings suddenly in the processing procedure; Reduce manufacturing cost; Also saved and ground the time of wasting because of the grinding mat trimmer of changing damage in the processing procedure, thereby helped increasing work efficiency.
Description of drawings
The grinding mat trimmer of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the sketch map of the grinding mat trimmer of prior art.
Fig. 2 is the vertical view of link in the prior art.
Fig. 3 is the cutaway view of the grinding mat trimmer of the utility model.
Fig. 4 is the structural representation of Flexible Connector in the utility model.
Fig. 5 is the partial enlarged drawing of A dotted line circle part among Fig. 3.
Fig. 6 is the partial enlarged drawing of B dotted line circle part among Fig. 3.
The specific embodiment
Below will combine Fig. 3～Fig. 6 that the grinding mat trimmer of the utility model is done further to describe in detail.
The core concept of the utility model is to provide a kind of grinding mat trimmer, and said grinding mat trimmer comprises swingle, pedestal, pallet and Flexible Connector; Said swingle is fixedly connected on an end of said pedestal, and said pallet is connected the other end of said pedestal through said Flexible Connector elasticity.
The swingle of the grinding mat trimmer of the utility model directly is connected the top of pedestal; Pallet is connected the bottom of pedestal through Flexible Connector elasticity, and the downforce that swingle applies directly acts on pedestal, and pedestal is solid to sustain the downforce that swingle applies; The reaction force of Flexible Connector available buffer grinding pad; Avoid the reaction force of grinding pad that swingle is exerted an influence, and the Flexible Connector good springiness, and can bear big diastole resistance; Not fragile, make said grinding mat trimmer solid firmly.
The existing grinding mat trimmer that specifies the utility model with specific embodiment:
Referring to Fig. 3, the grinding mat trimmer of present embodiment comprises swingle 21, pedestal 22, pallet 23 and Flexible Connector 24;
Said swingle 21 is fixedly mounted on an end (top) of said pedestal 22;
Said pallet 23 is arranged on the other end (bottom) of said pedestal 22, and is connected with said pedestal 22 elasticity through said Flexible Connector 24;
Said pallet 23 is provided with latch 231; Said latch 231 passes said pedestal 22; Stretch out from the top of said pedestal 22, said latch 231 is used for fixing the relative position of said pallet 23 and said pedestal 22, prevents to produce relative rotation between said pallet 23 and the said pedestal 22;
Preferably, said grinding mat trimmer comprises a plurality of said Flexible Connectors 24, and said a plurality of Flexible Connectors 24 are evenly distributed in the same circumference;
Preferably, said pallet 23 is provided with a plurality of latches 231, and said a plurality of latches 231 are evenly distributed in the same circumference.
Referring to Fig. 4, further, said Flexible Connector 24 comprises screw and spring 241; Said screw comprises screw rod 242 and nut 243; Said nut 243 is arranged on an end of said screw rod 242, and the outer surface of said screw rod 242 is provided with external screw thread, and said pedestal 22 is provided with hole 221; The end that said screw rod 242 is not provided with nut passes this hole 221 and is threaded with said pallet 23; Said spring 241 is set on the said screw rod 242, and an end of said spring 241 is connected with said nut 243, and the other end of said spring 241 is connected with said hole 221;
Preferably, said hole 221 is arranged on the edge of said pedestal 22; Said spring 241 employing good springiness, the spring that stiffness factor is big; Said spring 241 is used to cushion the reaction force of grinding pad, because said spring 241 good springiness and can bear big diastole resistance, therefore, said spring 241 is difficult for being damaged;
Under the elastic force effect of said spring 241, a gap 25 is arranged, between said pedestal 22 and the said pallet 23 referring to Fig. 5; Preferably; The center on said pallet 23 tops is provided with convexity 232, and the center of said pedestal 22 bottoms is provided with groove 223, and said groove 223 is complementary with said protruding 232; Said protruding 232 are stuck in the said groove 223; Said groove 223 and the said protruding 232 motion contact points as said pedestal 22 and said pallet 23 can increase the stiction between said pedestal 22 and the said pallet 23, make said pedestal 22 and said pallet 23 in grinding processing procedure, can follow said swingle 21 rotations better together;
Preferably, said protruding 232 are hemispherical, and said groove 223 is hemispherical.Certainly, in other embodiment of the utility model, said protruding 232 shape can also be that protruding sphere waits other shape, and correspondingly said groove 223 also can be made proper transformation.
Referring to Fig. 6, further, said latch 231 is a cylinder; Said pedestal 22 is provided with pin hole 222; One end of said latch 231 is fixedly installed on the top of said pallet 23, and the other end of said latch 231 passes said pin hole 222, stretches out from the top of said pedestal 22.
In the grinding mat trimmer of present embodiment; Said swingle 21 is directly installed on the said pedestal 22; The downforce that said swingle 21 applies acts directly on the said pedestal 22; Because said pedestal 22 is durable, therefore, said pedestal 22 can not damaged by pressure by the downforce that said swingle 21 applies; Said pallet 23 is connected with said pedestal 22 elasticity; The anticaustic power of the elastic force available buffer grinding pad between said pallet 23 and the said pedestal 22; Avoid the reaction force of grinding pad that said swingle 21 is exerted an influence; And the elastic force holding capacity between said pallet 23 and the said pedestal 22 is strong, and is not fragile, makes that the grinding mat trimmer of present embodiment is solid firmly.
The grinding mat trimmer of present embodiment is solid can avoid firmly grinding that grinding mat trimmer damages the danger that brings suddenly in the processing procedure; Reduce manufacturing cost; Also saved and ground the time of wasting because of the grinding mat trimmer of changing damage in the processing procedure, thereby helped increasing work efficiency.
Claims (9)
1. grinding mat trimmer; Comprise swingle, pedestal and pallet, it is characterized in that this grinding mat trimmer also comprises Flexible Connector; Said swingle is fixedly connected on an end of said pedestal, and said pallet is connected the other end of said pedestal through said Flexible Connector elasticity.
2. grinding mat trimmer as claimed in claim 1 is characterized in that said pallet is provided with latch, and said latch passes said pedestal, stretches out from the top of said pedestal.
3. grinding mat trimmer as claimed in claim 2 is characterized in that, said latch is a cylinder.
4. like claim 2 or 3 described grinding mat trimmers, it is characterized in that said latch is evenly distributed on the same circumference.
5. grinding mat trimmer as claimed in claim 1 is characterized in that said Flexible Connector is evenly distributed on the same circumference.
6. grinding mat trimmer as claimed in claim 1 is characterized in that said Flexible Connector comprises screw and spring, and said screw comprises screw rod and nut, and said nut is arranged on an end of said screw rod, and said spring housing is located on the said screw rod;
Said pedestal is provided with the hole, and the end that said screw rod is not provided with nut passes this hole and is threaded with said pallet, and an end of said spring is connected with said nut, and the other end of said spring is connected with said hole.
7. grinding mat trimmer as claimed in claim 6 is characterized in that said hole is arranged on the edge of said pedestal.
8. grinding mat trimmer as claimed in claim 1 is characterized in that, between said pedestal and the said pallet gap is arranged; The center on said pallet top is provided with convexity; The center of said base bottom is provided with groove, and said groove and said convexity are complementary, and said convexity is stuck in the said groove.
9. grinding mat trimmer as claimed in claim 8 is characterized in that said convexity is hemispherical, and said groove is hemispherical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202000328U CN202123435U (en) | 2011-06-14 | 2011-06-14 | Grinding gasket trimmer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202000328U CN202123435U (en) | 2011-06-14 | 2011-06-14 | Grinding gasket trimmer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202123435U true CN202123435U (en) | 2012-01-25 |
Family
ID=45486506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202000328U Expired - Fee Related CN202123435U (en) | 2011-06-14 | 2011-06-14 | Grinding gasket trimmer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202123435U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106078493A (en) * | 2016-06-23 | 2016-11-09 | 上海汉虹精密机械有限公司 | The method of ceramic disk grinding wheel twin grinding processing sapphire wafer |
| CN106956213A (en) * | 2017-02-24 | 2017-07-18 | 咏巨科技有限公司 | Combined finisher and its manufacture method |
| CN107671725A (en) * | 2017-10-20 | 2018-02-09 | 德淮半导体有限公司 | Repair disc system, chemical mechanical polishing device and Ginding process |
-
2011
- 2011-06-14 CN CN2011202000328U patent/CN202123435U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106078493A (en) * | 2016-06-23 | 2016-11-09 | 上海汉虹精密机械有限公司 | The method of ceramic disk grinding wheel twin grinding processing sapphire wafer |
| CN106956213A (en) * | 2017-02-24 | 2017-07-18 | 咏巨科技有限公司 | Combined finisher and its manufacture method |
| CN106956213B (en) * | 2017-02-24 | 2019-01-22 | 咏巨科技有限公司 | Combined finisher and its manufacturing method |
| CN107671725A (en) * | 2017-10-20 | 2018-02-09 | 德淮半导体有限公司 | Repair disc system, chemical mechanical polishing device and Ginding process |
| CN107671725B (en) * | 2017-10-20 | 2019-08-06 | 德淮半导体有限公司 | Modify disc system, chemical mechanical polishing device and grinding method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130422 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130422 Address after: 100176, No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120125 Termination date: 20180614 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |