CN202103312U - Deep sub-wavelength surface plasmon micro-cavity laser - Google Patents
Deep sub-wavelength surface plasmon micro-cavity laser Download PDFInfo
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- CN202103312U CN202103312U CN2011200588049U CN201120058804U CN202103312U CN 202103312 U CN202103312 U CN 202103312U CN 2011200588049 U CN2011200588049 U CN 2011200588049U CN 201120058804 U CN201120058804 U CN 201120058804U CN 202103312 U CN202103312 U CN 202103312U
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Abstract
A deep sub-wavelength surface plasmon micro-cavity laser is composed of a deep sub-wavelength surface plasmon resonant cavity (1), a double output end straight waveguide (2), and a metal thin film substrate (3). The deep sub-wavelength surface plasmon resonant cavity (1) is laterally coupled with the double output end straight waveguide (2), the deep sub-wavelength surface plasmon resonant cavity (1) and the double output end straight waveguide (2) are prepared on the metal thin film substrate (3), and a pump light source (4) enters along the direction vertical with the end face of the deep sub-wavelength surface plasmon resonant cavity (1). By adopting the laser, an ultra small light spot laser is realized by using a nanoscale surface plasma waveguide device, the method of combining a photonic component with an electronic component and integrating the two in a nanoscale chip is possible, and a novel laser light source, that is, a deep sub-wavelength surface plasmon echo wall mode laser is provided for realizing a nano integrated chip. The laser has small output light spots, high intensity and simple technology.
Description
Technical field
The utility model belongs to micro-nano photoelectron and laser technology field, particularly a kind of degree of depth sub-wavelength surface plasma excimer micro-cavity laser.
Background technology
A kind of form of existing of occurring in nature energy only, and laser is a kind of light with property.Common light does not have so-called coherence.The coherence of light is meant that light that two bundles possess certain condition is gathered together and can produces interference.Laser also has monochromaticjty good (being to mainly contain a wavelength or frequency in the beam of laser) except having the coherence, the premium properties of good directionality (even propagate into far place, energy also mainly concentrates in the very little light beam).Just because of above these characteristics have been arranged, laser all is widely used in industry, civilian and military.Since first laser came out in the world, laser technology was maked rapid progress, and constantly influenced and changing our life.
Laser is the Primary Component of optoelectronic device and system equipment.Because laser has that volume is little, in light weight, brightness is high, electro-optical efficiency is high, low in energy consumption, operating on low voltage, series of advantages such as can directly modulate, and has been widely used in optoelectronic areas.In optoelectronic applications.The performance quality of laser has determined that the performance of optoelectronic device and system is good and bad.The development level of laser has also determined the development level of optoelectronic device and system.Through introducing semiconductor nanowires and nano-array, present microlaser has reached the level of diffraction limit.For further reducing size, break through diffraction limit, the researcher introduces novel leaded light mechanism, and therefore emerging surface plasma body technique becomes the research focus.
In recent years, along with the development of nano science and nano-electron, a kind of brand-new waveguiding structure--surface plasma excimer (Surface Plasmon Polaritions-SPPs) waveguide becomes the emerging research direction in integrated optics field.Surface plasma excimer is a kind of that propagate in the metal surface and be constrained on a kind of non-radiated electromagnetic wave on this surface.Surface plasma excimer is constrained on the free electron results of interaction that waveguide surface is light and metal.Surface plasmon wave guide has the not available characteristic of normal optical waveguide: as can be implemented in the signal transmission on the nanoscale; But the single polarization state in the inhibit signal long-range transmission course realizes single mode transport under the various sizes; The metal core layer structure of surface plasmon wave guide not only can propagating optical signal, can also propagating electrical signals, can be implemented in that photoelectricity mixes on the same chip; The dielectric constant of metal is a plural number, and its imaginary part is represented the light absorbing ability of metal, through the design of metal core layer being realized the rapid decay of signal; Can directly modulate with the high efficiency modulation of realizing the surface plasmon wave guide device to the metal core layer of surface plasmon wave guide etc.In the surface plasma excimer fiber waveguide mechanism of proper metal and medium composition; The lateral light field distribution can be limited in tens nanometers even the littler scope; Therefore can break through diffraction limit, utilize this characteristics, be devoted to the miniaturization of laser component and integrated.And based on the above-mentioned characteristic of surface plasmon wave guide, the surface plasmon wave guide device can be in optical communication, optical sensing field performance important application.
Summary of the invention
Technical problem: the utility model proposes a kind of degree of depth sub-wavelength surface plasma excimer micro-cavity laser; Adopt nanoscale surface plasma waveguide device to realize extra small light spot laser device; The two combines to become possibility in the unified chip that is integrated in nanoscale to make photonic element and electronic component, for the realization of nanometer integrated chip provides the new pattern laser light source---degree of depth sub-wavelength surface plasma Whispering-gallery-mode laser, it is little to have an output facula; Advantages such as intensity is big, and technology is simple.
Technical scheme: the degree of depth sub-wavelength surface plasma excimer micro-cavity laser of the utility model is by degree of depth sub-wavelength surface plasmon resonance chamber, and dual output end straight wave guide and metallic film substrate constitute; Its position relation is degree of depth sub-wavelength surface plasmon resonance chamber and dual output end straight wave guide lateral; And; Degree of depth sub-wavelength surface plasmon resonance chamber and dual output end straight wave guide are prepared on the metallic film substrate, and pump light source gets into perpendicular to the end face in degree of depth sub-wavelength surface plasmon resonance chamber.The wave band of pump light source is that ultraviolet arrives infrared band.
Described degree of depth sub-wavelength surface plasmon resonance chamber is prepared from surface plasmon wave guide; From top to bottom by gain media layer, insulating medium layer; Metal level constitutes, and the diameter in degree of depth sub-wavelength surface plasmon resonance chamber is between hundreds of nanometers to tens of microns.
Described gain media layer is meant GaAs, indium phosphide, cadmium sulfide, zinc oxide, gallium nitride, cadmium selenide or zinc sulfide semiconductor material; Or the organic material or the inorganic material of optical gain are arranged; Thickness is the above order of magnitude of tens nanometer, and described insulating medium layer is meant magnesium fluoride or silicon dioxide low refractive index dielectric material, and thickness is between number nanometer to the tens nanometer; Described metal level is meant gold, silver, aluminium, copper, titanium, nickel, chromium material; Or alloy separately, or the compound material of different metal layer, thickness is the above order of magnitude of tens nanometer.
Described degree of depth sub-wavelength surface plasmon resonance cavity shape is a dish.
Dual output end straight wave guide is prepared from surface plasmon wave guide; By the sandwich layer of the dielectric material of the top covering of the dielectric material of high index of refraction, low-refraction, form from top to bottom by the under-clad layer of metal material and metallic film substrate for surface plasmon wave guide.
Said core layer thickness is between number nanometer to the tens nanometer, and top covering thickness is the above order of magnitude of tens nanometer, more than the under-clad layer thickness tens nanometer magnitude.
Said top covering is silicon, GaAs, indium phosphide, cadmium sulfide, zinc oxide, gallium nitride, cadmium selenide or zinc sulphide materials, or the organic material or the inorganic material of optical gain are arranged; Under-clad layer is gold, silver, aluminium, copper, titanium, nickel, chromium metal material, or alloy separately, or the compound material of different metal layer; The metallic film substrate is gold, silver, aluminium, copper, titanium, nickel, chromium, or alloy separately, or the compound material of different metal layer.
The degree of depth sub-wavelength surface plasma excimer micro-cavity laser light path that the utility model proposed is following: the pump light that excitation source produces is normally incident on the degree of depth sub-wavelength surface plasmon resonance chamber; Form population inversion in the gain media layer, realize the optical pumping process that laser produces; Simultaneously; The pump light of vertical incidence encourages in resonant cavity and forms the surface plasma bulk-mode, and the surface plasma bulk-mode that meets condition of resonance produces resonance in resonant cavity, because the leaded light mechanism that surface plasma wave is led and the characteristics of waveguiding structure itself; Most of mode light is limited in transmitting in the waveguide core layer; Under the optical pumping condition, the gain media layer constantly forms population inversion, accomplishes stimulated radiation; Therefore the surface plasma bulk-mode (evanescent wave) that is in sandwich layer is constantly increased the surface plasma bulk-mode energy of resonance in the resonant cavity by constantly gain; Surface plasma bulk-mode in the resonant cavity is coupled in the straight wave guide sandwich layer according to certain coupling ratio, brings out from one of straight wave guide sandwich layer and penetrates the laser that forms extra small hot spot.
Beneficial effect: the utility model has following advantage compared with prior art:
1, the utility model proposed degree of depth sub-wavelength surface plasma excimer micro-cavity laser and conventional laser are compared, and break through diffraction limit, and its microcavity Whispering-gallery-mode size is more than one percent of an optical diffraction limit;
2, the utility model proposed degree of depth sub-wavelength surface plasma excimer micro-cavity laser and conventional laser are compared, and can produce the output facula of degree of depth sub-wavelength, and spot intensity increases;
3, the utility model proposed degree of depth sub-wavelength surface plasma excimer micro-cavity laser and conventional laser are compared, and have the dual output port, effectively reduce the quantity of laser in the integrated optical circuit;
3, the utility model proposed degree of depth sub-wavelength surface plasma excimer micro-cavity laser and conventional laser are compared, and technology and microelectronic technique are compatible, because structure level number of the present invention is less, technology is simple, and cost is low, and rate of finished products is high.
Description of drawings
Fig. 1 is a degree of depth sub-wavelength surface plasma excimer micro-cavity laser overall structure sketch map.
Fig. 2 is a degree of depth sub-wavelength surface plasma excimer micro-cavity laser cross sectional representation.
Fig. 3 is a degree of depth sub-wavelength surface plasma excimer micro-cavity laser vertical view.
Fig. 4 is a degree of depth sub-wavelength surface plasmon resonance chamber Whispering-gallery-mode Energy distribution coordinatograph.
Fig. 5 is a degree of depth sub-wavelength surface plasma excimer straight wave guide cross section Energy distribution coordinatograph.
Have among the above figure: the under-clad layer 23 of excimer resonant cavity 1, dual output end straight wave guide 2, metallic film substrate 3, pump light source 4, gain media layer 11, insulating medium layer 12, metal level 13, top covering 21, sandwich layer 22, metal material.
Embodiment
Further describe below in conjunction with the technical scheme of accompanying drawing the utility model.
The degree of depth sub-wavelength surface plasma excimer micro-cavity laser of the utility model is seen from structure, and this laser is by degree of depth sub-wavelength surface plasmon resonance chamber, and dual output end straight wave guide and metallic film substrate constitute; Its position relation is positioned at the place ahead, dual output end straight wave guide middle part for degree of depth sub-wavelength surface plasmon resonance chamber, and degree of depth sub-wavelength surface plasmon resonance cavity edge and dual output end straight wave guide marginating compartment make resonant cavity satisfy the optimum resonance condition for the number nanometer scale; Wherein, Degree of depth sub-wavelength surface plasmon resonance chamber is prepared from surface plasmon wave guide, and from top to bottom by gain media layer, insulating medium layer, metal level constitutes; Wherein, The gain media layer is meant semi-conducting materials such as GaAs, indium phosphide, cadmium sulfide, zinc oxide, gallium nitride, cadmium selenide, zinc sulphide, or the organic material or the inorganic material of optical gain are arranged, and thickness is the above order of magnitude of tens nanometer; Insulating medium layer is meant low refractive index dielectric materials such as magnesium fluoride, silicon dioxide; Thickness is between number nanometer to the tens nanometer, and metal level is meant precious metal materials such as gold, silver, aluminium, copper, titanium, nickel, chromium or alloy separately; Or the compound material of different metal layer, thickness is the above order of magnitude of tens nanometer.The diameter in surface plasmon resonance chamber is between hundreds of nanometers to tens of microns.Degree of depth sub-wavelength surface plasmon resonance cavity shape is a dish.Dual output end straight wave guide is prepared from surface plasmon wave guide; Surface plasmon wave guide is by top covering, sandwich layer, and under-clad layer and metallic film substrate are formed, and its sandwich layer is the dielectric material of low-refraction; Thickness is between number nanometer to the tens nanometer; Top covering is materials such as dielectric material such as silicon, GaAs, indium phosphide, cadmium sulfide, zinc oxide, gallium nitride, cadmium selenide, the zinc sulphide of high index of refraction, or the organic material or the inorganic material of optical gain are arranged, and thickness is the above order of magnitude of tens nanometer; Under-clad layer is for referring to precious metal materials such as gold, silver, aluminium, copper, titanium, nickel, chromium; Or alloy separately, or the compound material of different metal layer, thickness is the above order of magnitude of tens nanometer.The metallic film substrate is precious metal materials such as finger gold, silver, aluminium, copper, titanium, nickel, chromium, or alloy separately, or the compound material of different metal layer, and thickness is the above order of magnitude of tens nanometer.Degree of depth sub-wavelength surface plasmon resonance chamber, dual output end straight wave guide is prepared in (Fig. 1) on the metallic film substrate simultaneously.
Can know according to Maxwell equation group and boundary condition thereof; Have only the TM transverse magnetic mode to propagate perpendicular to the interface of metal and medium; The excitating surface plasma excimer that can be coupled produces surface plasma excimer, and the TE transverse electric mode can not produce the phenomenon that coupling excites.When light transmitted in degree of depth sub-wavelength surface plasma excimer straight wave guide, light well was limited in middle insulated medium layer (Fig. 5).
The degree of depth sub-wavelength surface plasma excimer micro-cavity laser principle that the utility model proposed is following:
The pump light that excitation source produces is normally incident on the degree of depth sub-wavelength surface plasmon resonance chamber, forms population inversion in the gain media layer, realizes the optical pumping process that laser produces; Simultaneously; The pump light of vertical incidence encourages in resonant cavity and forms the surface plasma bulk-mode, and the surface plasma bulk-mode that meets condition of resonance produces resonance in resonant cavity, because the leaded light mechanism that surface plasma wave is led and the characteristics of waveguiding structure itself; Most of mode light is limited in transmitting in the waveguide core layer; Under the optical pumping condition, the gain media layer constantly forms population inversion, accomplishes stimulated radiation; Therefore the surface plasma bulk-mode (evanescent wave) that is in sandwich layer is constantly increased the surface plasma bulk-mode energy of resonance in the resonant cavity by constantly gain; Surface plasma bulk-mode in the resonant cavity is coupled in the straight wave guide sandwich layer according to certain coupling ratio, brings out from one of straight wave guide sandwich layer and penetrates the laser that forms extra small hot spot.
The degree of depth sub-wavelength surface plasma excimer micro-cavity laser that the utility model proposed; We verify through numerical simulation; We adopt surface plasma excimer microcavity diameter is 1 micron, and waveguide core layer thickness is 5 nanometers, and upper and lower cladding thickness is 200 nanometers; Straight wave guide waveguide core layer thickness is 5 nanometers; Upper and lower cladding thickness is 200 nanometers; Width is 150 nanometers; Analog result is that degree of depth sub-wavelength surface plasmon resonance chamber Whispering-gallery-mode Energy distribution coordinatograph (Fig. 4) display light has formed Whispering-gallery-mode in microcavity, and degree of depth sub-wavelength surface plasma excimer straight wave guide Energy distribution coordinatograph (Fig. 5) has verified that light well is limited in the waveguide core layer transmission.
Claims (10)
1. degree of depth sub-wavelength surface plasma excimer micro-cavity laser is characterized in that: this laser is by degree of depth sub-wavelength surface plasmon resonance chamber (1), and dual output end straight wave guide (2) and metallic film substrate (3) constitute; Its position relation is degree of depth sub-wavelength surface plasmon resonance chamber (1) and dual output end straight wave guide (2) lateral; And; Degree of depth sub-wavelength surface plasmon resonance chamber (1) is prepared on the metallic film substrate (3) with dual output end straight wave guide (2), and pump light source (4) gets into perpendicular to the end face in degree of depth sub-wavelength surface plasmon resonance chamber (1).
2. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 1; It is characterized in that described degree of depth sub-wavelength surface plasmon resonance chamber (1) is prepared from surface plasmon wave guide; From top to bottom by gain media layer (11), insulating medium layer (12); Metal level (13) constitutes, and the diameter in degree of depth sub-wavelength surface plasmon resonance chamber (1) is between hundreds of nanometers to tens of microns.
3. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 2; It is characterized in that described gain media layer (11) is meant semi-conducting materials such as GaAs, indium phosphide, cadmium sulfide, zinc oxide, gallium nitride, cadmium selenide or zinc sulphide; Or the organic material or the inorganic material of optical gain are arranged; Thickness is the above order of magnitude of tens nanometer
4. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 2 is characterized in that described insulating medium layer (12) is meant low refractive index dielectric materials such as magnesium fluoride or silicon dioxide, and thickness is between number nanometer to the tens nanometer,
5. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 2; It is characterized in that described metal level (13) is meant gold, silver, aluminium, copper, titanium, nickel, chromium material; Or alloy separately; Or the compound material of different metal layer, thickness is the above order of magnitude of tens nanometer.
6. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 1 is characterized in that described degree of depth sub-wavelength surface plasmon resonance chamber (1) is shaped as dish.
7. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 1; It is characterized in that dual output end straight wave guide (2) is prepared from surface plasmon wave guide; By the sandwich layer (23) of the dielectric material of the top covering (21) of the dielectric material of high index of refraction, low-refraction, form from top to bottom by under-clad layer of metal material (23) and metallic film substrate (3) for surface plasmon wave guide.
8. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 7; It is characterized in that said sandwich layer (22) thickness is between number nanometer to the tens nanometer; Top covering (21) thickness is the above order of magnitude of tens nanometer, more than under-clad layer (23) the thickness tens nanometer magnitude.
9. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 7; It is characterized in that said top covering (21) is silicon, GaAs, indium phosphide, cadmium sulfide, zinc oxide, gallium nitride, cadmium selenide or zinc sulphide materials, or the organic material or the inorganic material of optical gain are arranged; Under-clad layer (23) is gold, silver, aluminium, copper, titanium, nickel, chromium metal material, or alloy separately, or the compound material of different metal layer; Metallic film substrate (3) is gold, silver, aluminium, copper, titanium, nickel, chromium, or alloy separately, or the compound material of different metal layer.
10. degree of depth sub-wavelength surface plasma excimer micro-cavity laser according to claim 1, the wave band that it is characterized in that pump light source (4) is that ultraviolet arrives infrared band.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102148476A (en) * | 2011-03-08 | 2011-08-10 | 东南大学 | Deep sub-wavelength surface plasmon polariton microcavity laser |
| CN102931580A (en) * | 2012-11-26 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | Bragg reflector coupling surface plasma laser light source |
| CN104009393A (en) * | 2014-04-30 | 2014-08-27 | 南京邮电大学 | Electric pump gallium nitride micro laser capable of achieving single-direction emission and preparation method thereof |
| CN107132616A (en) * | 2017-05-22 | 2017-09-05 | 浙江大学 | The polarizer that a kind of transverse electric field based on composite waveguide passes through |
| CN107748402A (en) * | 2017-10-16 | 2018-03-02 | 中国科学院上海光学精密机械研究所 | Double plate optics Whispering-gallery-mode lithium niobate microcavity and preparation method thereof |
-
2011
- 2011-03-08 CN CN2011200588049U patent/CN202103312U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102148476A (en) * | 2011-03-08 | 2011-08-10 | 东南大学 | Deep sub-wavelength surface plasmon polariton microcavity laser |
| CN102931580A (en) * | 2012-11-26 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | Bragg reflector coupling surface plasma laser light source |
| CN104009393A (en) * | 2014-04-30 | 2014-08-27 | 南京邮电大学 | Electric pump gallium nitride micro laser capable of achieving single-direction emission and preparation method thereof |
| CN107132616A (en) * | 2017-05-22 | 2017-09-05 | 浙江大学 | The polarizer that a kind of transverse electric field based on composite waveguide passes through |
| CN107748402A (en) * | 2017-10-16 | 2018-03-02 | 中国科学院上海光学精密机械研究所 | Double plate optics Whispering-gallery-mode lithium niobate microcavity and preparation method thereof |
| CN107748402B (en) * | 2017-10-16 | 2019-10-18 | 中国科学院上海光学精密机械研究所 | Double plate optics Whispering-gallery-mode lithium niobate microcavity and preparation method thereof |
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Granted publication date: 20120104 Effective date of abandoning: 20120627 |