CN202099378U

CN202099378U - Surface thin film deposition device with movable crucible

Info

Publication number: CN202099378U
Application number: CN2011201448962U
Authority: CN
Inventors: 倪杨
Original assignee: SURFACE ENGINEERING RESEARCH CENTER OF NINGBO
Current assignee: SURFACE ENGINEERING RESEARCH CENTER OF NINGBO
Priority date: 2011-05-06
Filing date: 2011-05-06
Publication date: 2012-01-04
Anticipated expiration: 2021-05-06

Abstract

The utility model discloses a surface thin film deposition device with a movable crucible, which is provided with a vacuum container, a crucible arranged in the vacuum container and used for accommodating evaporation materials, and a laser irradiator used for generating laser beams for irradiating and heating the evaporation materials, and the crucible is fixedly connected with a control mechanism capable of rotating and moving up and down; the laser irradiator is used as a heating source, so the problem that a heating source material generated by taking heater strips as the heating source is evaporated to enter the vacuum evaporation material steam to became impurities is avoided; simultaneously because the laser beams can irradiate the evaporation material steam, a part of the steam is ionized, i.e. the laser irradiator simultaneously plays the double functions of heating the evaporation materials and ionizing the evaporation material steam; and the control mechanism can control the crucible to rotate and move up and down, and the moving range and use efficiency of the evaporation materials are improved.

Description

A kind of surface film deposition apparatus with movable crucible

Technical field

The utility model relates to a kind of surface processing device, especially a kind of surface film deposition apparatus with movable crucible.

Background technology

Carry out the processing (the for example plated film of surface optical film) of surface coating, normally adopt as the device completion of Fig. 1: wherein 1 is deposition material, the 2nd, the crucible of deposition material is housed; The 3rd, be used to add the heater strip of thermogenesis electron beam; The 4th, the steam of deposition material, the 5th, make the Ionized ionize silk of vapor portion, the 6th, be used to stop heater strip and the excessive thermal baffle of ionize silk heat; The 7th, by vapor deposition surface, the 8th, vacuum vessel.

Yet there is following problems in said apparatus; Promptly because heater strip and ionize silk produce the part evaporation that high temperature tends to cause heater strip and ionize silk constituent material; And sneak in the steam of deposition material and become impurity, thereby finally cause the function film purity drop, influence quality of forming film.

Summary of the invention

The purpose of the utility model promptly is to provide the surface film deposition apparatus of sneaking into impurity in a kind of steam that can effectively prevent deposition material.

The technical scheme that the utility model adopted is following: a kind of surface film deposition apparatus with movable crucible; It has vacuum vessel; Being built in being used in the vacuum vessel holds the crucible of deposition material; Be used to produce the laser irradiator of the laser beam of irradiation and heating deposition material, said crucible can rotate with the member that moves up and down and is fixedly connected with one.

The beneficial effect of the utility model is owing to adopted laser irradiator as heating source, to get into the problem that in deposition material steam become impurity with heater strip as the heating source material evaporation that heating source produces thereby avoided existing; Simultaneously and since laser beam will inevitably irradiation to the steam of deposition material, thereby make the part steam plasmaization, also be that laser irradiator has been brought into play the dual function that heats deposition material and ionize deposition material steam simultaneously; Member can be controlled the crucible rotation and move up and down, and has improved the moving range and the service efficiency of deposition material.

Description of drawings

Fig. 1 is the structural representation of existing surface coating device;

Fig. 2 is the structural representation of the utility model.

Embodiment

Below in conjunction with accompanying drawing 2; Describe the surface film deposition apparatus with movable crucible of the utility model in detail; It has vacuum vessel 9, is built in being used in the vacuum vessel 9 to hold the crucible 11 of deposition material 10, is used to produce the laser irradiator 13 of the laser beam 12 of irradiation and heating deposition material 10; Said laser irradiator 13 laser generator 14 outer with placing vacuum vessel links to each other, and said crucible 11 can rotate with the member that moves up and down 15 and is fixedly connected with one.

Claims

1. surface film deposition apparatus with movable crucible; It has vacuum vessel; Being built in being used in the vacuum vessel holds the crucible of deposition material; Be used to produce the laser irradiator of the laser beam of irradiation and heating deposition material, said crucible can rotate with the member that moves up and down and is fixedly connected with one.