CN202099377U

CN202099377U - Surface film deposition device provided with multiple clapboards

Info

Publication number: CN202099377U
Application number: CN2011201448695U
Authority: CN
Inventors: 倪杨
Original assignee: SURFACE ENGINEERING RESEARCH CENTER OF NINGBO
Current assignee: SURFACE ENGINEERING RESEARCH CENTER OF NINGBO
Priority date: 2011-05-06
Filing date: 2011-05-06
Publication date: 2012-01-04
Anticipated expiration: 2021-05-06

Abstract

The utility model relates to a surface film deposition device provided with multiple clapboards, which is provided with a vacuum vessel, a crucible that is arranged in the vacuum vessel and is used for containing an evaporate plating material, and a laser irradiator that is used for generating a laser beam used for irradiating and heating the evaporate plating material; the multiple clapboards are arranged between the laser irradiator and steam of the evaporate plating material, and the laser beam is only allowed to pass through the clapboards; as the laser irradiator is adopted as a heating source, the problem that the heating source material is evaporated, enters the steam of the evaporate plating material and becomes impurities as the existing heating wire is taken as the heating source can be avoided; meanwhile, the steam of the evaporate plating material is necessarily irradiated by the laser beam, so that part of the steam is ionized, namely, double functions of heating the evaporate plating material and ionizing the steam of the evaporate plating material can be exerted by the laser irradiator at the same time; in addition, the multiple clapboards are arranged, so that the pollution that the steam of the evaporate plating material is deposited on the laser irradiator can be effectively avoided.

Description

A kind of surface film deposition apparatus with multiple dividing plate

Technical field

The utility model relates to a kind of surface processing device, especially a kind of surface film deposition apparatus with multiple dividing plate.

Background technology

Carry out the processing (the for example plated film of surface optical film) of surface coating, normally adopt as the device completion of Fig. 1: wherein 1 is deposition material, the 2nd, the crucible of deposition material is housed; The 3rd, be used to add the heater strip of thermogenesis electron beam; The 4th, the steam of deposition material, the 5th, make the Ionized ionize silk of vapor portion, the 6th, be used to stop heater strip and the excessive thermal baffle of ionize silk heat; The 7th, by vapor deposition surface, the 8th, vacuum vessel.

Yet there is following problems in said apparatus; Promptly because heater strip and ionize silk produce the part evaporation that high temperature tends to cause heater strip and ionize silk constituent material; And sneak in the steam of deposition material and become impurity, thereby finally cause the function film purity drop, influence quality of forming film.

Summary of the invention

The purpose of the utility model promptly is to provide the surface film deposition apparatus of sneaking into impurity in a kind of steam that can effectively prevent deposition material.

The technical scheme that the utility model adopted is following: a kind of surface film deposition apparatus with multiple dividing plate; It has vacuum vessel; Being built in being used in the vacuum vessel holds the crucible of deposition material; The laser irradiator that is used to produce irradiation and heats the laser beam of deposition material is provided with the multiple dividing plate that only allows laser beam to pass through between the steam of said laser irradiator and deposition material.

The beneficial effect of the utility model is owing to adopted laser irradiator as heating source, to get into the problem that in deposition material steam become impurity with heater strip as the heating source material evaporation that heating source produces thereby avoided existing; Simultaneously and since laser beam will inevitably irradiation to the steam of deposition material, thereby make the part steam plasmaization, also be that laser irradiator has been brought into play the dual function that heats deposition material and ionize deposition material steam simultaneously; In addition, owing to be provided with multiple dividing plate, can effectively prevent the laser irradiator pollution that the vapor deposition of deposition material causes to the laser irradiator place.

Description of drawings

Fig. 1 is the structural representation of existing surface coating device;

Fig. 2 is the structural representation of the utility model.

Embodiment

Below in conjunction with accompanying drawing 2; Describe the surface film deposition apparatus with multiple dividing plate of the utility model in detail; It has vacuum vessel 9; Being built in being used in the vacuum vessel 9 holds the crucible 11 of deposition material 10; The laser irradiator 13 that is used to produce irradiation and heats the laser beam 12 of deposition material 10, laser irradiator 13 is connected with vacuum vessel 9 outer laser generators 14, between the steam of said laser irradiator 13 and deposition material 10, is provided with double dividing plate 15A, the 15B that only allows laser beam to pass through.

Claims

1. surface film deposition apparatus with multiple dividing plate; It has vacuum vessel; Being built in being used in the vacuum vessel holds the crucible of deposition material; The laser irradiator that is used to produce irradiation and heats the laser beam of deposition material is provided with the multiple dividing plate that only allows laser beam to pass through between the steam of said laser irradiator and deposition material.