CN202099375U - Multiple ionization surface film coating device - Google Patents
Multiple ionization surface film coating device Download PDFInfo
- Publication number
- CN202099375U CN202099375U CN2011201445894U CN201120144589U CN202099375U CN 202099375 U CN202099375 U CN 202099375U CN 2011201445894 U CN2011201445894 U CN 2011201445894U CN 201120144589 U CN201120144589 U CN 201120144589U CN 202099375 U CN202099375 U CN 202099375U
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- laser
- laser beam
- coating device
- film coating
- surface film
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Abstract
A multiple ionization surface film coating device comprises a vacuum container, a crucible inside the vacuum container for accommodating evaporation materials, a first laser irradiator for irradiating and heating laser beam of the evaporation materials, a second laser radiator for generating laser beam of steam of the evaporation materials, and at least one reflecting mirror arranged on laser path of the laser beam generated by the second laser radiator for pulling the laser beam back. The multiple ionization surface film coating device utilizes the laser radiators as heating sources so as to avoid the problem that an existing surface film coating device utilizes heating wires as the heat source, the heating source materials are evaporated to generate heating source material steam which enters evaporation material steam and serves as impurity. Further, the second laser radiator for generating the ionization evaporation material steam is added in the surface film coating device, thereby strengthening ionization efficiency. The reflecting mirror arranged on the laser path pulls the laser beam back, thereby generating multiple ionization effect on the steam and further strengthening ionization.
Description
Technical field
The utility model relates to a kind of surface processing device, especially a kind of multiple ion surface coating device.
Background technology
Carry out the processing (the for example plated film of surface optical film) of surface coating, normally adopt as the device completion of Fig. 1: wherein 1 is deposition material, the 2nd, the crucible of deposition material is housed; The 3rd, be used to add the heater strip of thermogenesis electron beam; The 4th, the steam of deposition material, the 5th, make the Ionized ionize silk of vapor portion, the 6th, be used to stop heater strip and the excessive thermal baffle of ionize silk heat; The 7th, by vapor deposition surface, the 8th, vacuum vessel.
Yet there is following problems in said apparatus; Promptly because heater strip and ionize silk produce the part evaporation that high temperature tends to cause heater strip and ionize silk constituent material; And sneak in the steam of deposition material and become impurity, thereby finally cause the function film purity drop, influence quality of forming film.
Summary of the invention
The purpose of the utility model promptly is to provide the surface coating device of sneaking into impurity in a kind of steam that can effectively prevent deposition material.
The technical scheme that the utility model adopted is following: a kind of multiple ion surface coating device; It has vacuum vessel; Being built in being used in the vacuum vessel holds the crucible of deposition material; Be used to produce first laser irradiator of the laser beam of irradiation and heating deposition material, be used to produce second laser irradiator of the laser beam of ionize deposition material steam, on the light path of the laser beam that said second laser irradiator produces, the speculum that at least one makes that laser beam is turned back is set.
The beneficial effect of the utility model is owing to adopted laser irradiator as heating source, to get into the problem that in deposition material steam become impurity with heater strip as the heating source material evaporation that heating source produces thereby avoided existing; And added second laser irradiator that is used for ionize deposition material steam, strengthened Ionized efficient; And, further strengthen ionize owing to be provided with speculum on the light path and make laser beam turn back and steam is produced the multiple ion effect.
Description of drawings
Fig. 1 is the structural representation of existing surface coating device;
Fig. 2 is the structural representation of the utility model.
Embodiment
Below in conjunction with accompanying drawing 2; Describe the multiple ion surface coating device of the utility model in detail; It has vacuum vessel 9; Being built in being used in the vacuum vessel 9 holds the crucible 11 of deposition material 10; First laser irradiator, 13, the first laser irradiator 13 that are used to produce the laser beam 12 of irradiation and heating deposition material link to each other with first laser generator 14 that is placed on vacuum vessel, are used to produce second laser irradiator 15 of the laser beam 12 of ionize deposition material steam; Second laser irradiator 15 links to each other with second laser generator 16 that is placed on vacuum vessel, on the light path of the laser beam that said second laser irradiator 15 produces, two speculum 17A, 17B that make that laser beam is turned back is set.
Claims (1)
1. multiple ion surface coating device; It has vacuum vessel; Being built in being used in the vacuum vessel holds the crucible of deposition material; Be used to produce first laser irradiator of the laser beam of irradiation and heating deposition material, be used to produce second laser irradiator of the laser beam of ionize deposition material steam, on the light path of the laser beam that said second laser irradiator produces, the speculum that at least one makes that laser beam is turned back is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201445894U CN202099375U (en) | 2011-05-06 | 2011-05-06 | Multiple ionization surface film coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201445894U CN202099375U (en) | 2011-05-06 | 2011-05-06 | Multiple ionization surface film coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202099375U true CN202099375U (en) | 2012-01-04 |
Family
ID=45385399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201445894U Expired - Fee Related CN202099375U (en) | 2011-05-06 | 2011-05-06 | Multiple ionization surface film coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202099375U (en) |
-
2011
- 2011-05-06 CN CN2011201445894U patent/CN202099375U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120104 Termination date: 20140506 |