CN202003963U - 一种晶圆清洗装置 - Google Patents
一种晶圆清洗装置 Download PDFInfo
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- CN202003963U CN202003963U CN2010206902980U CN201020690298U CN202003963U CN 202003963 U CN202003963 U CN 202003963U CN 2010206902980 U CN2010206902980 U CN 2010206902980U CN 201020690298 U CN201020690298 U CN 201020690298U CN 202003963 U CN202003963 U CN 202003963U
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CN2010206902980U CN202003963U (zh) | 2010-12-30 | 2010-12-30 | 一种晶圆清洗装置 |
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CN2010206902980U CN202003963U (zh) | 2010-12-30 | 2010-12-30 | 一种晶圆清洗装置 |
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CN202003963U true CN202003963U (zh) | 2011-10-05 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103286086A (zh) * | 2012-03-05 | 2013-09-11 | 无锡华润华晶微电子有限公司 | 圆片清洗方法与圆片清洗装置 |
CN106269626A (zh) * | 2015-05-13 | 2017-01-04 | 盛美半导体设备(上海)有限公司 | 防溅射护罩 |
CN108493132A (zh) * | 2018-03-21 | 2018-09-04 | 德淮半导体有限公司 | 晶圆清洗装置及其控制方法 |
CN110791764A (zh) * | 2018-08-02 | 2020-02-14 | 奇景光电股份有限公司 | 清洗治具 |
-
2010
- 2010-12-30 CN CN2010206902980U patent/CN202003963U/zh not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103286086A (zh) * | 2012-03-05 | 2013-09-11 | 无锡华润华晶微电子有限公司 | 圆片清洗方法与圆片清洗装置 |
CN106269626A (zh) * | 2015-05-13 | 2017-01-04 | 盛美半导体设备(上海)有限公司 | 防溅射护罩 |
CN108493132A (zh) * | 2018-03-21 | 2018-09-04 | 德淮半导体有限公司 | 晶圆清洗装置及其控制方法 |
CN110791764A (zh) * | 2018-08-02 | 2020-02-14 | 奇景光电股份有限公司 | 清洗治具 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130329 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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TR01 | Transfer of patent right |
Effective date of registration: 20130329 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111005 Termination date: 20181230 |