CN201898118U - 一种晶圆清洗装置 - Google Patents
一种晶圆清洗装置 Download PDFInfo
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- CN201898118U CN201898118U CN2010206445896U CN201020644589U CN201898118U CN 201898118 U CN201898118 U CN 201898118U CN 2010206445896 U CN2010206445896 U CN 2010206445896U CN 201020644589 U CN201020644589 U CN 201020644589U CN 201898118 U CN201898118 U CN 201898118U
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- wafer
- circular arc
- cleaning
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- wafer cleaning
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Priority Applications (1)
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CN2010206445896U CN201898118U (zh) | 2010-12-06 | 2010-12-06 | 一种晶圆清洗装置 |
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CN2010206445896U CN201898118U (zh) | 2010-12-06 | 2010-12-06 | 一种晶圆清洗装置 |
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CN201898118U true CN201898118U (zh) | 2011-07-13 |
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CN2010206445896U Expired - Fee Related CN201898118U (zh) | 2010-12-06 | 2010-12-06 | 一种晶圆清洗装置 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102658273A (zh) * | 2012-05-09 | 2012-09-12 | 上海宏力半导体制造有限公司 | 清洗装置 |
CN103943457A (zh) * | 2013-01-17 | 2014-07-23 | 株式会社迪思科 | 分离装置 |
CN104174601A (zh) * | 2014-07-23 | 2014-12-03 | 上海华虹宏力半导体制造有限公司 | 半导体晶圆的刷洗装置和刷洗方法 |
CN104795345A (zh) * | 2014-01-22 | 2015-07-22 | 株式会社迪思科 | 分离装置 |
CN112466780A (zh) * | 2020-10-29 | 2021-03-09 | 威科赛乐微电子股份有限公司 | 一种晶片清洗槽及晶片清洗方法 |
-
2010
- 2010-12-06 CN CN2010206445896U patent/CN201898118U/zh not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102658273A (zh) * | 2012-05-09 | 2012-09-12 | 上海宏力半导体制造有限公司 | 清洗装置 |
CN103943457A (zh) * | 2013-01-17 | 2014-07-23 | 株式会社迪思科 | 分离装置 |
CN103943457B (zh) * | 2013-01-17 | 2018-10-12 | 株式会社迪思科 | 分离装置 |
CN104795345A (zh) * | 2014-01-22 | 2015-07-22 | 株式会社迪思科 | 分离装置 |
CN104795345B (zh) * | 2014-01-22 | 2019-04-19 | 株式会社迪思科 | 分离装置 |
CN104174601A (zh) * | 2014-07-23 | 2014-12-03 | 上海华虹宏力半导体制造有限公司 | 半导体晶圆的刷洗装置和刷洗方法 |
CN104174601B (zh) * | 2014-07-23 | 2016-03-09 | 上海华虹宏力半导体制造有限公司 | 半导体晶圆的刷洗装置和刷洗方法 |
CN112466780A (zh) * | 2020-10-29 | 2021-03-09 | 威科赛乐微电子股份有限公司 | 一种晶片清洗槽及晶片清洗方法 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130321 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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TR01 | Transfer of patent right |
Effective date of registration: 20130321 Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110713 Termination date: 20181206 |