CN201962063U - Micro inertial sensor embedded with lateral movable electrode - Google Patents
Micro inertial sensor embedded with lateral movable electrode Download PDFInfo
- Publication number
- CN201962063U CN201962063U CN2011200297537U CN201120029753U CN201962063U CN 201962063 U CN201962063 U CN 201962063U CN 2011200297537 U CN2011200297537 U CN 2011200297537U CN 201120029753 U CN201120029753 U CN 201120029753U CN 201962063 U CN201962063 U CN 201962063U
- Authority
- CN
- China
- Prior art keywords
- mass
- shaped sensor
- electrode
- sensor
- comb shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Pressure Sensors (AREA)
Abstract
The utility model relates to a micro inertial sensor embedded with a lateral movable electrode. The existing sensor has loud noise, bad stability and small range and bandwidth. The micro inertial sensor embedded with the lateral movable electrode comprises a first baseplate, a cross comb teeth type fixed counter electrode for detection which is arranged on the upper surface of the first baseplate, a sensor anchor point which is fixed on the first baseplate, a fixed mass block anchor point, a strip-type sensor mass block of a second baseplate, a U-shaped sensor support beam which connects the sensor anchor point and the strip-type sensor mass block, a double-grate-shaped oscillator pair, a U-shaped sensor connection beam which connects the strip-type sensor mass block and the double-grate-shaped oscillator pair, a comb-shaped fixed electrode which is fixed on a mass block, an outer extraction electrode of a sensor, an electric insulation layer, a drive wire and the extraction electrode of the drive wire, wherein the strip-type sensor mass block is suspended above the first baseplate, the outer side of the double-grate-shaped oscillator pair is connected with a comb teeth type movable eletrode. The micro inertial sensor disclosed by the utility model has a novel structure and high resolution ratio and sensitivity.
Description
Technical field
The utility model belongs to the micro-electronic mechanical skill field, relates to a kind of micro-inertia sensor, be specifically related to a kind of contain double grid shape oscillator to and oscillator on embedded the high-resolution micro-inertia sensor of transversely movable electrodes.
Background technology
Recently for over ten years, the accelerometer of making of micro mechanical technology has obtained development rapidly.Its main acceleration detection technology has pressure drag detection, piezoelectric detection, heat detection, resonance detection, electromagnetic detection, light detection, tunnel current detection and capacitance detecting etc.In addition, also have some accelerometers, as acceleration by light degree meter, electromagnetic accelerometer, capacitance accelerometer etc. based on these detection techniques.The development of acceleration by light degree meter mainly is for the advantage in conjunction with light and micromechanics, makes the sensor of the high electromagnetic shielding or the good linearity.In these sensors, capacitance acceleration transducer, temperature coefficient is little, highly sensitive owing to having, and advantages such as good stability are maximum class acceleration transducers of developing at present.The preparation method of micro-mechanical capacitance type sensor has surface micromachined method and bulk silicon micro mechanic processing method.Adopt surface micromachined technology can and ic process compatibility, thereby the peripheral circuit of integrated sensor, cost is low, but the noise of sensor is big, poor stability, range and bandwidth are little.Adopt the bulk silicon micro mechanic processing technology can improve the quality of sensor chip, thereby reduce noise, improve stability, improve sensitivity.Shortcoming is that volume is big slightly, but can produce the micro-mechanical inertia sensor of superhigh precision.In order to obtain higher measurement sensitivity and to reduce the complexity of peripheral circuit, can be by quality that increases sensor vibration generator and the method that increases the static test electric capacity of sensor, thus reduce mechanical noise and circuit noise.And for the capacitance type sensor with the broach shape of bulk silicon technological such as dark reaction particle etching (Deep RIE) processing, the depth-to-width ratio of its plates capacitance is generally less than 27:1, and this quality that has just limited sensor vibration generator increases and the reducing of capacitor plate spacing.And for little spacing plates capacitance, its press mold air damping is bigger, has increased the mechanical noise of sensor.Reducing this mechanical noise can be by etching amortisseur bar on pole plate, or electric capacity is changed into the mode of variable area, make damping show as slide-film damping, and one of method that reduces circuit noise is to detect electric capacity by increasing.
Summary of the invention
The purpose of this utility model be to provide a kind of contain double grid shape oscillator to and oscillator on embedded the high-resolution micro-inertia sensor of transversely movable electrodes.
A kind of micro-inertia sensor that embeds transversely movable electrodes comprises that the detection of first substrate and upper surface thereof is fixing to electrode with intersection broach shape, be fixed in the sensor anchor point on first substrate, fixed mass piece anchor point, the bar shaped sensor mass that is suspended from first substrate top of second substrate, the U-shaped sensor brace summer that the sensor anchor point is linked to each other with bar shaped sensor mass, it is right that the outside connects the double grid shape oscillator of comb shape movable electrode, with bar shaped sensor mass and the U-shaped sensor tie-beam of double grid shape oscillator to linking to each other, comb shape fixed electrode on the fixed mass piece, the outside extraction electrode of sensor, electric insulation layer, drive lead and drive the lead extraction electrode.
Described bar shaped sensor mass is positioned at second substrate center, bar shaped sensor mass is made up of rectangular block and bar shaped sensor mass rectangular preiection, is symmetrically arranged with bar shaped sensor mass rectangular preiection along the cross central line of bar shaped sensor mass.
Described double grid shape oscillator is to comprising two responsive grid masses, responsive grid mass lays respectively at the both sides of bar shaped sensor mass, and each responsive grid mass is by vertically equidistant, horizontal parallel grid electrode, the frame and the responsive grid mass rectangular preiection of connection grid electrode are formed.The longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Responsive grid mass rectangular preiection is relative with bar shaped sensor mass rectangular preiection, forms the electric capacity adjusting play.Link to each other by two U-shaped sensor tie-beams between each responsive grid mass and the bar shaped sensor mass, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of bar shaped sensor mass, and these two U-shaped sensor tie-beams are symmetrical arranged with the two U-shaped sensor tie-beams in addition that are positioned at bar shaped sensor mass opposite side along the longitudinal centre line of bar shaped sensor mass.Described every U-shaped sensor tie-beam starts from a jiao of frame of responsive grid mass, the corresponding angles of rectangular block finally, and its U-shaped bottom is near the cross central line of bar shaped sensor mass.
Described comb shape movable electrode is made up of with the comb shape movable electrode rectangular strip that is connected comb shape movable electrode broach n equally spaced comb shape movable electrode broach, n 〉=1, comb shape movable electrode broach and vertical setting of comb shape movable electrode rectangular strip, comb shape movable electrode rectangular strip and vertical setting of responsive grid mass side.M bar comb shape movable electrode be arranged in parallel and forms one group of silicon strip group, m 〉=2.Each responsive grid mass frame outside correspondence respectively is provided with two groups of silicon strip groups.
The comb shape movable electrode that the responsive grid mass frame outside is every group is symmetrical arranged along the cross central line of bar shaped sensor mass; Comb shape movable electrode in the silicon strip group of frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass.
Described sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, sensor outside extraction electrode is arranged on the sensor anchor point.
Described fixed mass piece comprises fixed mass piece anchor point and m bar comb shape fixed electrode, and described fixed mass piece anchor point is fixed in the fixed mass piece on first substrate, each fixed mass piece and every group of corresponding setting of silicon strip group.Described comb shape fixed electrode is made up of with the comb shape fixed electrode rectangular strip that is connected n comb shape fixed electrode broach n equally spaced comb shape fixed electrode broach.The comb shape fixed electrode is relative with the comb shape movable electrode position in the silicon strip group, and comb shape fixed electrode broach is corresponding arranged in a crossed manner with comb shape movable electrode broach.
Described driving lead has two, vertically be arranged at respectively on the inboard frame of corresponding responsive grid mass, the plain conductor of being laid on U-shaped sensor tie-beam, rectangular block corner end and the U-shaped sensor brace summer of an end by the edge correspondence of every driving lead is connected with corresponding driving lead extraction electrode.Between the metal connecting line on driving lead, plain conductor, rectangular block corner end and the responsive grid mass, the metal level that drives lead extraction electrode composition and responsive grid mass counterpart, be provided with electric insulation layer.
Described electric capacity adjusting play is littler more than one micron than the horizontal spacing between the corresponding broach on corresponding comb shape movable electrode and the comb shape fixed electrode.
The broach shape is fixing to have two groups to electrode with intersecting in described detection, and each group is made up of the comb electrodes and the extraction electrode of relative intersection respectively, and the interelectrode gap of each adjacent fingers is not less than one micron, and the corresponding composition of the comb electrodes of intersection comb electrodes is right.
Described grid electrode be positioned at corresponding comb electrodes right directly over.
It is right that the micro-inertia sensor that the utility model relates to includes transversely movable double grid shape oscillator, the initial separation that can design sensor detection electric capacity is bigger, thereby solve dark reaction particle etching depth-to-width ratio and can not do thick restriction to the quality of sensor vibration generator less than 27:1, then by the responsive grid mass of field drives, reduce to detect the electric capacity spacing, thereby the initial detecting electric capacity that increases sensor is to reduce the testing circuit noise, and sensor is done the thick oscillator quality that increased, thereby also reduced the mechanical noise of sensor, and contained two responsive grid masses and double to have increased detection electric capacity.In addition, can also change the range and the response characteristic of sensor by the size that changes sensor brace summer and mass.
Simultaneously, the high accuracy micro-inertia sensor novel structure that the utility model relates to, resolution ratio and highly sensitive, manufacture craft is simple, helps reducing cost and improving yield rate, is a kind of micro-inertia sensor that can practical application.
Description of drawings
Fig. 1 (a) be first substrate of the present utility model and on detection fixing with intersecting the broach shape to the electrode schematic diagram;
Fig. 1 (b) is along A-A among Fig. 1 (a)
'To the decomposition profile diagram of device architecture;
Fig. 2 (a) is the structural representation on second substrate of the present utility model;
Fig. 2 (b) is along B-B among Fig. 2 (a)
'To the decomposition profile diagram of device architecture;
Fig. 3 is the sectional drawing combination of Fig. 1 (b) and Fig. 2 (b);
Fig. 4 is the enlarged drawing of a pair of comb shape movable electrode of the present utility model and comb shape fixed electrode.
The specific embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is further specified, but the utility model only limits to the embodiment that introduced by no means.
With reference to figure 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, the detection that forms two group switching centre symmetries on first substrate 1 is fixing to electrode with intersection broach shape, the connection coupling electrode 2 of corresponding fixed mass interblock, and the connecting line between connection coupling electrode 2 and the extraction electrode 4, the broach shape is fixing to be made up of horizontal comb electrodes 3 and the extraction electrode that intersects relatively in edge electrode with intersecting in detection; Forming the sensor anchor point 13 that is fixed on first substrate 1 on second substrate, second substrate be suspended from first substrate, 1 top bar shaped sensor mass 25, two U-shaped sensor brace summers 9 that sensor anchor point 13 is linked to each other with bar shaped sensor mass 25, form two right responsive grid masses 20 of double grid shape oscillator, the U-shaped sensor tie-beam 17 that responsive grid mass is linked to each other with bar shaped sensor mass, comb shape fixed electrode on the fixed mass piece 6, the outside extraction electrode 12 of sensor, electric insulation layer 28 under the metal level 29, driving lead 27 on the electric insulation layer and driving lead right side extraction electrode 14.As Fig. 2 (a), 2 (b), Fig. 3 and shown in Figure 4, form the horizontal spacing G of 7 of corresponding comb shape movable electrode broach 15 and comb shape fixed electrode broach
4, the gap 32 between first substrate 1 and the responsive grid mass 20 is as the G among Fig. 3
1Shown in; The detection that forms on responsive grid mass and first substrate is fixed gaps between electrodes 30 with intersecting the broach shape; Gap 31 between internal two comb electrodes of comb electrodes, the internal gap of each comb electrodes is identical.A corresponding comb shape movable electrode and the comb shape fixed electrode broach electric capacity that partners is right, forms the right longitudinal pitch of adjacent fingers electric capacity, and its value is not less than 30 microns.
In conjunction with Fig. 1 (a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, structure of the present utility model is described.
With reference to figure 2 (a), 2 (b), bar shaped sensor mass is positioned at second substrate center, bar shaped sensor mass is made up of rectangular block 23 and bar shaped sensor mass rectangular preiection 21, is symmetrically arranged with bar shaped sensor mass rectangular preiection along the cross central line of bar shaped sensor mass.
With reference to figure 2 (a), 2 (b), double grid shape oscillator is to comprising two responsive grid masses 20, responsive grid mass lays respectively at the both sides of bar shaped sensor mass, each responsive grid mass is made up of vertical equidistant, horizontal parallel grid electrode 26, the frame 24 and the responsive grid mass rectangular preiection 22 of connection grid electrode, and the longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Responsive grid mass rectangular preiection is relative with bar shaped sensor mass rectangular preiection, forms electric capacity adjusting play 18.Link to each other by two U-shaped sensor tie-beams 17 between each responsive grid mass and the bar shaped sensor mass, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of bar shaped sensor mass, and these two U-shaped sensor tie-beams are symmetrical arranged with the two U-shaped sensor tie-beams in addition that are positioned at bar shaped sensor mass opposite side along the longitudinal centre line of bar shaped sensor mass.Every U-shaped sensor tie-beam starts from a jiao of frame 24 of responsive grid mass, the corresponding angles of rectangular block finally, and its U-shaped bottom is near the cross central line of bar shaped sensor mass.
With reference to figure 2 (a), 2 (b), the comb shape movable electrode is made up of with the comb shape movable electrode rectangular strip 16 that is connected comb shape movable electrode broach six equally spaced comb shape movable electrode broach 15, comb shape movable electrode broach and vertical setting of comb shape movable electrode rectangular strip, comb shape movable electrode rectangular strip and vertical setting of responsive grid mass side.Article three, the comb shape movable electrode be arranged in parallel and forms one group of silicon strip group.Each responsive grid mass frame outside correspondence respectively is provided with two groups of silicon strip groups.
With reference to figure 2 (a), 2 (b), the comb shape movable electrode that the responsive grid mass frame outside is every group is symmetrical arranged along the cross central line of bar shaped sensor mass; Comb shape movable electrode in the silicon strip group of frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass.
With reference to figure 2 (a), 2 (b), the sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, sensor outside extraction electrode 12 is arranged on the sensor anchor point.
With reference to figure 2 (a), 2 (b), fixed mass piece 6 comprises fixed mass piece anchor point and three comb shape fixed electrodes, and fixed mass piece anchor point is fixed in the fixed mass piece on first substrate, each fixed mass piece and every group of corresponding setting of silicon strip group.The comb shape fixed electrode is made up of with the comb shape fixed electrode rectangular strip 8 that is connected six comb shape fixed electrode broach six equally spaced comb shape fixed electrode broach 7.The comb shape fixed electrode is relative with the comb shape movable electrode position in the silicon strip group, and comb shape fixed electrode broach is corresponding arranged in a crossed manner with comb shape movable electrode broach, and comb shape fixed electrode broach and comb shape movable electrode broach form gap 19.
With reference to figure 2 (a), Fig. 2 (b), Fig. 3, drive lead 27 and have two, vertically be arranged at respectively on the inboard frame of corresponding responsive grid mass, the plain conductor of being laid on U-shaped sensor tie-beam, rectangular block corner end and the U-shaped sensor brace summer of an end by the edge correspondence of every driving lead 10 is connected with corresponding driving lead extraction electrode.Between the metal connecting line on driving lead, plain conductor, rectangular block corner end and the responsive grid mass, the metal level 29 that drives lead extraction electrode composition and responsive grid mass counterpart, be provided with electric insulation layer.
With reference to figure 2 (a) and Fig. 4, the electric capacity adjusting play forms the horizontal spacing G in gap than corresponding comb shape fixed electrode broach and comb shape movable electrode broach
4Little more than one micron, the initial detection spacing of sensor capacitance is electric capacity adjusting play and horizontal spacing G
4Between difference.
With reference to figure 1 (a), Fig. 1 (b), detecting with intersection broach shape is fixing has two groups to electrode, and each group is made up of laterally relative comb electrodes 3 and the extraction electrode 4 that intersects in edge respectively, and the corresponding composition of the comb electrodes of intersection comb electrodes is to 5.
Corresponding respectively directly over the gap 31 between two internal two comb electrodes of comb electrodes with reference to 3, two grid electrodes of figure.
In conjunction with Fig. 1 (a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, the thickness of grid electrode is less than second substrate thickness on the responsive grid mass of formation.
Each spacing for clearer and more definite description detection electric capacity further describes in conjunction with Fig. 3 and Fig. 4, and comb electrodes shown in the arrow among Fig. 3, is used G to the distance between the both sides
0Expression, its value is greater than the width of grid electrode; Comb shape movable electrode broach 15 on the responsive grid mass and the gap G between the comb shape fixed electrode broach 7 on the fixed mass piece 6
4Expression, shown in the corresponding arrow among Fig. 4, span is ten microns to 50 microns; The comb shape movable electrode broach on the responsive grid mass and the longitudinal size of the stack between the comb shape fixed electrode broach on the fixed mass piece shown in the corresponding arrow among Fig. 4, are used G
2Expression, its value is not less than one micron; Spacing between the comb shape movable electrode broach of every pair of broach electric capacity centering and the corresponding comb shape fixed electrode rectangular strip shown in the corresponding arrow among Fig. 4, is used G
3Expression, its value is not less than ten microns.The lower surface of each grid electrode and corresponding detection with intersect the broach shape fixing to gaps between electrodes 30 greater than four microns, be not more than the width of grid electrode; The width of grid electrode is greater than gap 31.
Electric capacity adjusting play 18 usefulness d1 between bar shaped sensor mass rectangular preiection 21 and the responsive grid mass rectangular preiection 22 represent that comb shape fixed electrode broach 7 and comb shape movable electrode broach 15 form gap 19 and use G
4Expression, and G
4=(d1+x), (x is the static initial capacitance spacing of sensor, x 〉=1, unit: micron).The driving lead that is positioned at bar shaped sensor mass left side,, be connected respectively on the encapsulation shell pin driving lead left side extraction electrode 11 with gold thread, and insert constant-current source with outside gold ball bonding technology.The driving lead that is positioned at bar shaped sensor mass right side, with outside gold ball bonding technology, be connected respectively on the encapsulation shell pin driving lead right side extraction electrode 14 with gold thread, and the constant-current source of the driving lead opposite phase in access and left side.The outside extraction electrode of sensor is connected to the encapsulation shell pin, and is connected to ground, and extraction electrode 4 is connected respectively to the encapsulation shell pin, and represents with V1 and V2 respectively, with the micromechanical process processed sensor time, and G
4, d1 can be provided with higher value, process thicker sensor mass piece, thereby the mass quality is bigger.The uniform magnetic field of proper orientation is set in the encapsulation shell cap directly over sensor construction, make the direction of the Ampere force that on two metal driving lead, produces all point to the longitudinal centre line of bar shaped sensor mass, and vertical with the longitudinal centre line of bar shaped sensor mass.Two Ampere forces that drive on the lead make the electric capacity adjusting play 18 between bar shaped sensor mass rectangular preiection 21 and the responsive grid mass rectangular preiection 22 be decreased to zero, and at this moment, the static initial capacitance spacing of testing sensor is G
4-d1, because the spacing of electric capacity reduces greatly, thereby the initial detecting electric capacity of sensor increases greatly.Power up carrier signal respectively at V1, V2 end again, movable mass is connected to ground by anchor point.When on the sensitive direction acceleration signal being arranged, because the effect of inertia force, produce displacement, thereby cause the grid electrode 26 on the responsive grid mass 20 and detect with intersecting the fixing comb electrodes to electrode of broach shape to the stack area change of 5 differential capacitances of forming and the stack area change of corresponding comb shape fixed electrode broach 7 and the comb shape movable electrode broach 15 corresponding differential capacitances of forming, and then cause the variation that electric capacity is bigger, this changes the big or small linear of electric capacity and outside inertial signal, by detecting the size that capacitance variations just can obtain acceleration on the sensitive direction, and because the sensor construction design characteristic, detection electric capacity is differential variation, and this has increased the range of linearity and the range of sensor.
The high accuracy micro-inertia sensor that the utility model relates to, because driving lead, available Ampere force cause broach electric capacity spacing to reduce, thereby under the situation that does not increase lateral dimension, increased the oscillator quality and detected electric capacity, and double grid shape oscillator doubles to have increased detection electric capacity to containing two responsive grid masses, these factors reduce the mechanical noise of sensor and circuit noise greatly, thereby make sensor can reach very high precision, the utility model adopts micro mechanical technology to make simultaneously, technology is simple, helps improving yield rate and reduces manufacturing cost.
Claims (1)
1. micro-inertia sensor that embeds transversely movable electrodes, the detection that comprises first substrate and upper surface thereof is fixing to electrode with intersection broach shape, be fixed in the sensor anchor point on first substrate, fixed mass piece anchor point, the bar shaped sensor mass that is suspended from first substrate top of second substrate, the U-shaped sensor brace summer that the sensor anchor point is linked to each other with bar shaped sensor mass, it is right that the outside connects the double grid shape oscillator of comb shape movable electrode, with bar shaped sensor mass and the U-shaped sensor tie-beam of double grid shape oscillator to linking to each other, comb shape fixed electrode on the fixed mass piece, the outside extraction electrode of sensor, electric insulation layer, drive lead and drive the lead extraction electrode, it is characterized in that:
Described bar shaped sensor mass is positioned at second substrate center, bar shaped sensor mass is made up of rectangular block and bar shaped sensor mass rectangular preiection, is symmetrically arranged with bar shaped sensor mass rectangular preiection along the cross central line of bar shaped sensor mass;
Described double grid shape oscillator is to comprising two responsive grid masses, responsive grid mass lays respectively at the both sides of bar shaped sensor mass, and each responsive grid mass is by vertically equidistant, horizontal parallel grid electrode, the frame and the responsive grid mass rectangular preiection of connection grid electrode are formed; The longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Responsive grid mass rectangular preiection is relative with bar shaped sensor mass rectangular preiection, forms the electric capacity adjusting play; Link to each other by two U-shaped sensor tie-beams between each responsive grid mass and the bar shaped sensor mass, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of bar shaped sensor mass, and these two U-shaped sensor tie-beams are symmetrical arranged with the two U-shaped sensor tie-beams in addition that are positioned at bar shaped sensor mass opposite side along the longitudinal centre line of bar shaped sensor mass; Described every U-shaped sensor tie-beam starts from a jiao of frame of responsive grid mass, the corresponding angles of rectangular block finally, and its U-shaped bottom is near the cross central line of bar shaped sensor mass;
Described comb shape movable electrode is made up of with the comb shape movable electrode rectangular strip that is connected comb shape movable electrode broach n equally spaced comb shape movable electrode broach, n 〉=1, comb shape movable electrode broach and vertical setting of comb shape movable electrode rectangular strip, comb shape movable electrode rectangular strip and vertical setting of responsive grid mass side; M bar comb shape movable electrode be arranged in parallel and forms one group of silicon strip group, m 〉=2; Each responsive grid mass frame outside correspondence respectively is provided with two groups of silicon strip groups;
The comb shape movable electrode that the responsive grid mass frame outside is every group is symmetrical arranged along the cross central line of bar shaped sensor mass; Comb shape movable electrode in the silicon strip group of frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass;
Described sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, sensor outside extraction electrode is arranged on the sensor anchor point;
Described fixed mass piece comprises fixed mass piece anchor point and m bar comb shape fixed electrode, and described fixed mass piece anchor point is fixed in the fixed mass piece on first substrate, each fixed mass piece and every group of corresponding setting of silicon strip group; Described comb shape fixed electrode is made up of with the comb shape fixed electrode rectangular strip that is connected n comb shape fixed electrode broach n equally spaced comb shape fixed electrode broach; The comb shape fixed electrode is relative with the comb shape movable electrode position in the silicon strip group, and comb shape fixed electrode broach is corresponding arranged in a crossed manner with comb shape movable electrode broach;
Described driving lead has two, vertically be arranged at respectively on the inboard frame of corresponding responsive grid mass, the plain conductor of being laid on U-shaped sensor tie-beam, rectangular block corner end and the U-shaped sensor brace summer of an end by the edge correspondence of every driving lead is connected with corresponding driving lead extraction electrode; Between the metal connecting line on driving lead, plain conductor, rectangular block corner end and the responsive grid mass, the metal level that drives lead extraction electrode composition and responsive grid mass counterpart, be provided with electric insulation layer;
Described electric capacity adjusting play is littler more than one micron than the horizontal spacing between the corresponding broach on corresponding comb shape movable electrode and the comb shape fixed electrode;
The broach shape is fixing to have two groups to electrode with intersecting in described detection, and each group is made up of the comb electrodes and the extraction electrode of relative intersection respectively, and the interelectrode gap of each adjacent fingers is more than or equal to one micron, and the corresponding composition of the comb electrodes of intersection comb electrodes is right;
Described grid electrode be positioned at corresponding comb electrodes right directly over.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200297537U CN201962063U (en) | 2011-01-28 | 2011-01-28 | Micro inertial sensor embedded with lateral movable electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200297537U CN201962063U (en) | 2011-01-28 | 2011-01-28 | Micro inertial sensor embedded with lateral movable electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201962063U true CN201962063U (en) | 2011-09-07 |
Family
ID=44524599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200297537U Expired - Lifetime CN201962063U (en) | 2011-01-28 | 2011-01-28 | Micro inertial sensor embedded with lateral movable electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201962063U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101637A (en) * | 2011-01-28 | 2011-06-22 | 杭州电子科技大学 | Micro inertial sensor with embedded transverse movable electrode |
-
2011
- 2011-01-28 CN CN2011200297537U patent/CN201962063U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101637A (en) * | 2011-01-28 | 2011-06-22 | 杭州电子科技大学 | Micro inertial sensor with embedded transverse movable electrode |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100552453C (en) | Symmetry straight beam structure condenser type micro-acceleration sensor and preparation method thereof | |
| CN101858929B (en) | Capacitive micro-acceleration sensor with symmetrically combined elastic beam structure and production method thereof | |
| CN104698222B (en) | Three axle single-chip integration resonant capacitance formula silicon micro accerometers and its processing method | |
| CN101481084B (en) | Micro-inertial sensor with variable pitch capacitor | |
| CN102128953B (en) | Capacitive micro-acceleration sensor with symmetrically inclined folded beam structure | |
| CN103344785A (en) | Capacitive micro inertial sensor with self calibration function | |
| CN102156201B (en) | Three-axis capacitive micro accelerometer based on silicon on insulator (SOI) process and micropackage technology | |
| CN101271124B (en) | L-beam piezoresistance type micro-accelerometer and production method thereof | |
| CN101792108B (en) | Large capacitance micro inertial sensor based on slide-film damping and manufacturing method thereof | |
| CN101038299A (en) | Uniaxle integrated inertia measurement device based on single mass-block | |
| CN1278922C (en) | Fork type micromechanical gyro and its manufacturing method | |
| CN101792109B (en) | Micro inertial sensor with embedded transversely movable electrodes and manufacturing method thereof | |
| US20120125103A1 (en) | Z-axis capacitive accelerometer | |
| CN101504426B (en) | Comb condenser type dual-spindle accelerometer | |
| CN102647657B (en) | Monolithic integrated MEMS (Micro-electromechanical Systems) piezoresistive ultrasonic sensor | |
| CN102101637B (en) | Micro inertial sensor with embedded transverse movable electrode | |
| CN105182005B (en) | A kind of accelerometer | |
| CN101531334A (en) | Magnetic drive micro-inertial sensor for increasing detection capacitance and preparation method | |
| CN104198762A (en) | Eight-beam symmetrical silicon micro-accelerometer | |
| CN201628723U (en) | Large-capacitor micro-inertia sensor based on slide-film damping | |
| CN201605163U (en) | High-capacitance micro inertial sensor with comb-shaped damping holes | |
| CN201694830U (en) | Micro inertial sensor with embedded transversely movable electrodes | |
| CN101655368A (en) | Electromagnet driven gyroscope based on nanometer film quantum tunneling effect | |
| CN204848255U (en) | Little inertial sensor based on electromagnetic induction | |
| CN101839923A (en) | Two-axis accelerometer based on SOI technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110907 Effective date of abandoning: 20120502 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20110907 Effective date of abandoning: 20120502 |