CN201931454U - Vacuum absorption table top and vacuum absorption table provided with same - Google Patents
Vacuum absorption table top and vacuum absorption table provided with same Download PDFInfo
- Publication number
- CN201931454U CN201931454U CN2010206685974U CN201020668597U CN201931454U CN 201931454 U CN201931454 U CN 201931454U CN 2010206685974 U CN2010206685974 U CN 2010206685974U CN 201020668597 U CN201020668597 U CN 201020668597U CN 201931454 U CN201931454 U CN 201931454U
- Authority
- CN
- China
- Prior art keywords
- loading plate
- gripper shoe
- adsorption hole
- table top
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model provides a vacuum absorption table top and a vacuum absorption table provided with the same, which belong to the technical field of vacuum absorption and can solve the problem that the existing vacuum absorption table top is easy to cause surface damage of a work piece. The vacuum absorption table top provided by the utility model comprises a supporting plate used for being arranged on a vacuum source and a bearing plate arranged on the supporting plate, wherein the supporting plate is provided with supporting plate absorption holes; the positions on the bearing plate, which are corresponding to the supporting plate absorption holes, are provided with bearing plate absorption holes; and in the bearing plate, at least the hardness of the part used for bearing work pieces is lower than the hardness of the supporting plate. The vacuum absorption table provided by the utility model comprises the vacuum source used for providing a vacuum environment and the vacuum absorption table top arranged on the vacuum source. The vacuum absorption table top and the vacuum absorption table can be used for supporting a circuit board and the like in an exposure process.
Description
Technical field
The utility model relates to the vacuum suction technical field, the vacuum suction platform that relates in particular to a kind of vacuum suction table top and have this vacuum suction table top.
Background technology
The vacuum suction platform is a kind of workpiece support equipment commonly used, and it is used for supporting and the location workpiece in fields such as wiring board manufacturing, display panels manufacturing, semiconductor technology, optical thin film manufacturings, so that workpiece is carried out various processing.As shown in Figure 1, existing vacuum suction platform generally includes vacuum source, vacuum source comprises the vacuum chamber 9 that connects vavuum pump by vavuum pump interface 93, vacuum chamber 9 top openings also are coated with supporting network 91, have a plurality of gripper shoe adsorption holes " gripper shoe 1 be positioned on the supporting network 91 and and be positioned by location structures such as shop bolts 92; workpiece to be processed is placed on the gripper shoe 1, and when vavuum pump began to vacuumize, workpiece can hold and locate by supported plate adsorption hole 11.
The inventor finds that there are the following problems at least in the prior art: since when absorption gripper shoe 1 both sides be respectively vacuum and atmospheric pressure, have bigger pressure reduction, so gripper shoe 1 must adopt material manufacturing that higher hardness and intensity are arranged to guarantee that it can flexural deformation; But the case hardness of some workpiece is lower (for example, the hardness of PCB surface solder mask only is about 2H and 4H respectively before and after exposure), perhaps the surface of some workpiece has the optical thin film of easy damaged etc., and the active force that workpiece and gripper shoe are 1 big again (because having vacuum adsorption force), when the empty absorptive table of therefore taking seriously was used to support this class workpiece, harder gripper shoe 1 (especially the gripper shoe adsorption hole 11) was easy to cause surfaces such as inhaling trace bad at surface of the work.
Summary of the invention
Embodiment of the present utility model provides a kind of vacuum suction table top, and it can avoid the damage of surface of the work under the situation that guarantees supporting ﹠ stablizing.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
A kind of vacuum suction table top comprises:
Be used to be located at the gripper shoe on the vacuum source, have the gripper shoe adsorption hole on the described gripper shoe;
Be located at the loading plate on the described gripper shoe, have the loading plate adsorption hole with the corresponding position of described gripper shoe adsorption hole on the described loading plate, and in the described loading plate, the hardness that is used to carry the part of workpiece at least is lower than the hardness of described gripper shoe.
Because in the vacuum suction table top of embodiment of the present utility model, the loading plate that workpiece and hardness are lower contacts, and loading plate is supported by the higher gripper shoe of hardness, so it can avoid the damage of surface of the work under the situation of assurance supporting ﹠ stablizing.
As a kind of preferred version of embodiment of the present utility model, the cross sectional dimensions of described loading plate adsorption hole less than or greater than the cross sectional dimensions of its pairing described gripper shoe adsorption hole.
As a kind of preferred version of embodiment of the present utility model, described loading plate adsorption hole and gripper shoe adsorption hole are circular hole, and the diameter of described loading plate adsorption hole is littler more than 1 millimeter than the diameter of its pairing described gripper shoe adsorption hole.
A kind of preferred version as embodiment of the present utility model, described loading plate adsorption hole and gripper shoe adsorption hole are circular hole, and the diameter of described loading plate adsorption hole is between 0.5 millimeter to 1 millimeter, and the diameter of described gripper shoe adsorption hole is between 1.5 millimeters to 3 millimeters.
As a kind of preferred version of embodiment of the present utility model, described loading plate is used to carry on the face of described workpiece and has chamfering at the edge of described loading plate adsorption hole.
As a kind of preferred version of embodiment of the present utility model, described loading plate is made of plastics or rubber.
As a kind of preferred version of embodiment of the present utility model, described loading plate is made of in polyvinyl chloride, polypropylene, polyurethanes, the butadiene-styrene rubber any one.
As a kind of preferred version of embodiment of the present utility model, the thickness of described loading plate is between 0.1 millimeter to 0.5 millimeter.
As a kind of preferred version of embodiment of the present utility model, the thickness of described loading plate is 0.2 millimeter.
Embodiment of the present utility model also provides a kind of vacuum suction platform, and it can avoid the damage of surface of the work.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
A kind of vacuum suction platform comprises the vacuum source that is used to provide vacuum environment, and is located at the above-mentioned vacuum suction table top on the described vacuum source.
Because the vacuum suction platform of embodiment of the present utility model has above-mentioned vacuum suction table top, so it can avoid the damage of surface of the work under the situation that guarantees supporting ﹠ stablizing.
As a kind of preferred version of embodiment of the present utility model, the vacuum suction platform also comprises the location structure that is used for described gripper shoe and loading plate relative positioning.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the existing vacuum suction platform structural representation when decomposing;
Fig. 2 is the structural representation of the vacuum suction table top of the utility model embodiment one when decomposing;
Sectional structure schematic diagram when Fig. 3 is the vacuum suction table top carrying workpiece of the utility model embodiment one;
Fig. 4 is the sectional structure schematic diagram of the another kind of loading plate of the utility model embodiment;
Fig. 5 is the structural representation of the vacuum suction platform of the utility model embodiment two when decomposing.
The specific embodiment
The utility model provides a kind of vacuum suction table top, comprising:
Be used to be located at the gripper shoe on the vacuum source, have the gripper shoe adsorption hole on the described gripper shoe;
It is characterized in that described vacuum suction table top also comprises:
Be located at the loading plate on the described gripper shoe, have the loading plate adsorption hole with the corresponding position of described gripper shoe adsorption hole on the described loading plate, and in the described loading plate, the hardness that is used to carry the part of workpiece at least is lower than the hardness of described gripper shoe.
Preferably, in each embodiment of the present utility model, the cross sectional dimensions of described loading plate adsorption hole less than or greater than the cross sectional dimensions of its pairing described gripper shoe adsorption hole.
Preferably, in each embodiment of the present utility model, described loading plate adsorption hole and gripper shoe adsorption hole are circular hole, and the diameter of described loading plate adsorption hole is littler more than 1 millimeter than the diameter of its pairing described gripper shoe adsorption hole.
Preferably, in each embodiment of the present utility model, described loading plate adsorption hole and gripper shoe adsorption hole are circular hole, and the diameter of described loading plate adsorption hole is between 0.5 millimeter to 1 millimeter, and the diameter of described gripper shoe adsorption hole is between 1.5 millimeters to 3 millimeters.
Preferably, in each embodiment of the present utility model, described loading plate is used to carry on the face of described workpiece and has chamfering at the edge of described loading plate adsorption hole.
Preferably, in each embodiment of the present utility model, described loading plate is made of plastics or rubber.
Preferably, in each embodiment of the present utility model, described loading plate is made of in polyvinyl chloride, polypropylene, polyurethanes, the butadiene-styrene rubber any one.
Preferably, in each embodiment of the present utility model, the thickness of described loading plate is between 0.1 millimeter to 0.5 millimeter.
Preferably, in each embodiment of the present utility model, the thickness of described loading plate is 0.2 millimeter.
The utility model provides a kind of vacuum suction platform, comprises the vacuum source that is used to provide vacuum environment, it is characterized in that, described vacuum suction platform also comprises:
Be located on the described vacuum source, vacuum suction table top as the aforementioned.
Preferably, in each embodiment of the present utility model, also comprise: be used for location structure described gripper shoe and loading plate relative positioning.
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme of the utility model embodiment is clearly and completely described, obviously, described embodiment only is a part of embodiment of the present utility model, rather than whole embodiment.Based on the embodiment in the utility model, all other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work belong to the scope that the utility model is protected.
The utility model embodiment provides a kind of vacuum suction table top, comprising:
Be used to be located at the gripper shoe on the vacuum source, have the gripper shoe adsorption hole on the described gripper shoe;
Be located at the loading plate on the described gripper shoe, have the loading plate adsorption hole with the corresponding position of described gripper shoe adsorption hole on the described loading plate, and in the described loading plate, the hardness that is used to carry the part of workpiece at least is lower than the hardness of described gripper shoe.
Because in the vacuum suction table top of embodiment of the present utility model, the loading plate that workpiece and hardness are lower contacts, and loading plate is supported by the higher gripper shoe of hardness, so it can avoid the damage of surface of the work under the situation of assurance supporting ﹠ stablizing; And it also can improve the workpiece yield rate thus, reduces steps such as the detection of follow-up required surface, skin patching, and makes the vacuum suction table top can be used to support some to cross soft original and inapplicable workpiece because of the surface, thereby has enlarged its range of application.
Embodiment one
The utility model embodiment provides a kind of vacuum suction table top, and to shown in Figure 4, it comprises gripper shoe 1 and loading plate 2 as Fig. 2.
Gripper shoe 1 is used to be located at vacuum source (this vacuum source can be the forms such as vacuum chamber that the top is provided with supporting network), has a plurality of gripper shoe adsorption holes 11 on the gripper shoe 1.This gripper shoe 1 can have and existing conventional gripper shoe 1 similar structure.From material, gripper shoe 1 preferably is made of the material that alloy, engineering plastics etc. has higher hardness and intensity, for example by stainless steel, aluminium alloy, Teflon formations such as (polytetrafluoroethylene (PTFE)).When being made of alloy material, gripper shoe 1 thickness is preferably at 0.5～1mm, and when being made of engineering plastics, gripper shoe 1 thickness is preferably at 1～2mm.Gripper shoe adsorption hole 11 is preferably the circular hole of aperture at 1.5～3mm.The distribution of gripper shoe adsorption hole 11 on gripper shoe 1 also can be taked different existing modes, for example, can evenly distribute as shown in Figure 2; Or also can be big in the position distribution density at corresponding workpiece (for example wiring board in exposure technology) 8 edges (as hole centre-to-centre spacing 4～8mm), and it is less (as hole centre-to-centre spacing 10～15mm), to reach better adsorption effect in the position distribution density at corresponding workpiece 8 middle parts.
2 of loading plates are positioned on the gripper shoe 1, thereby it can directly contact with workpiece 8 when absorption.Has loading plate adsorption hole 21 with gripper shoe adsorption hole 11 corresponding positions on the loading plate 2, that is to say when loading plate 2 correctly is positioned on the gripper shoe 1, there is loading plate adsorption hole 21 gripper shoe adsorption hole 11 tops, loading plate adsorption hole 21 belows also have 11, two kinds of holes of gripper shoe adsorption hole 11,21 to form the structure that connects.This loading plate 2 is used for the hardness of the part of supporting workpiece 8 should be less than the hardness of gripper shoe 1 (certainly, also but the hardness of loading plate 2 integral body all is lower than the hardness of gripper shoe 1), inhale the trace equivalent damage to guarantee that loading plate 2 (especially the loading plate adsorption hole 21) can not cause workpiece 8 surfaces that are in contact with it.Preferably, this loading plate 2 can be made of plastics or elastomeric material, for example by any one formation in polyvinyl chloride (PVC), polyurethanes (PU), polypropylene, the butadiene-styrene rubber; The material that certain loading plate 2 also can be lower than gripper shoe 1 hardness by other hardness constitutes.
When adsorbing, the higher gripper shoe 1 of hardness can be resisted the pressure reduction of its both sides and not flexural deformation substantially, thereby guarantees that supporting surface is smooth, for workpiece 8 provides stable and supports uniformly; And the lower loading plate 2 of hardness can closely contact with gripper shoe 1, thereby assurance is softer with workpiece 8 contacted surfaces, inhales traces etc. to prevent that workpiece 8 surfaces from producing.
Preferably, the cross sectional dimensions of loading plate adsorption hole 21 is less than the cross sectional dimensions of its pairing gripper shoe adsorption hole 11; That is to say that loading plate adsorption hole 21 is preferably littler than gripper shoe adsorption hole 11, and look up that loading plate adsorption hole 21 is preferably placed in the gripper shoe adsorption hole 11 from side perpendicular to loading plate 2 and gripper shoe 1.Like this, as shown in Figure 3, when adsorbing, because the effect of suction, loading plate 2 can produce slight depression at the periphery of loading plate adsorption hole 21, thereby make loading plate adsorption hole 21 peripheries form contacting of seamlessly transitting, producing damage with loading plate adsorption hole 21 corresponding positions to avoid workpiece 8 better with workpiece 8.More preferably, when loading plate adsorption hole 21 and gripper shoe adsorption hole 11 were circular hole, the diameter of loading plate adsorption hole 21 should be than the diameter of gripper shoe adsorption hole 11 more than the little 1mm (just more than the little 0.5mm of each side in hole); Again preferably, when the diameter of gripper shoe adsorption hole 11 was between 1.5～3mm, the diameter of loading plate adsorption hole 21 can be between 0.5～1mm.
Preferably, as shown in Figure 4, loading plate 2 is used to carry that the edge at loading plate adsorption hole 21 has chamfering 211 on the face of workpiece 8, and this chamfering 211 can play the effect that prevents loading plate adsorption hole 21 damage workpiece 8 equally.
Preferably, the thickness of loading plate 2 between 0.1～0.5mm, 0.2mm more preferably.The thickness of this scope can guarantee that loading plate 2 itself has enough intensity, can provide enough protections for workpiece 8, and loading plate adsorption hole 21 peripheries can produce the depression of enough degree in the time of also can guaranteeing to adsorb simultaneously.
Preferably, on gripper shoe 1 and loading plate 2, all can have shop bolt hole 12,22 etc. and be used for location structure gripper shoe 1 and loading plate 2 relative positionings.
Embodiment two
The utility model embodiment provides a kind of vacuum suction platform, and as shown in Figure 5, it comprises the vacuum source that is used to provide vacuum environment, and is located at the above-mentioned vacuum suction table top on the described vacuum source.
Wherein, vacuum source can comprise vacuum chamber 9, and vacuum chamber 9 has the vavuum pump interface 93 that links to each other with vavuum pump, and vacuum chamber 9 top openings and be provided with supporting network 91, the gripper shoe 1 of vacuum suction table top can be arranged on this supporting network 91.Certainly, this vacuum source also can be the known vacuum source of other form, and for example, supporting network 91 can supported waits replacement; Or vacuum source can be directly link to each other with vavuum pump, have a vacuum cups of big opening etc.
Preferably, the vacuum suction platform also can comprise the location structure that is used for gripper shoe 1 and loading plate 2 relative positionings.Location structure is used for gripper shoe 1 and loading plate 2 relative positionings, thereby gripper shoe adsorption hole 11 and loading plate adsorption hole 21 can be in correspondence position accurately when guaranteeing absorption.This location structure can comprise at least two shop bolts 92 that are located on the vacuum chamber 9, shop bolt 92 can pass the pin locating hole 12,22 on gripper shoe 1 and the loading plate 2, thereby with gripper shoe 1 and loading plate 2 relative positionings (this moment reality be with vacuum chamber 9, gripper shoe 1, loading plate 2 relative positionings).Certainly, location structure also can be other many known forms, and for example, location structure also can comprise a circle chimb that is located at the vacuum chamber periphery, thereby gripper shoe 1 and loading plate 2 are limited in this chimb together; For another example, location structure also can comprise projection that is positioned at gripper shoe 1 edge and the recess that is positioned at loading plate 2 edges, can be with gripper shoe 1 and loading plate 2 relative positionings when projection snaps in recess.
Because the vacuum suction platform of embodiment of the present utility model has above-mentioned vacuum suction table top, therefore it can avoid the damage of surface of the work under the situation that guarantees supporting ﹠ stablizing, and raising workpiece yield rate, reduce steps such as the detection of follow-up required surface, skin patching, have bigger range of application.
Obviously, the vacuum suction table top of the utility model embodiment and vacuum suction platform also can carry out many variations.For example, the concrete shape of loading plate, gripper shoe, size, material etc. can be different; The concrete shape of loading plate adsorption hole, gripper shoe adsorption hole, size, distributing position can be different; The concrete form of location structure can be different; The concrete form of vacuum source can be not equal.
Obviously, the vacuum suction table top of the utility model embodiment and vacuum suction platform are not limited to be used in the solder mask exposure-processed of wiring board; They also can be used in many other fields, for example support many other workpiece such as liquid crystal display substrate, semiconductor substrate, silicon chip, optical element in technologies such as thin film deposition, etching, development, friction.
The above; it only is the specific embodiment of the present utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.
Claims (11)
1. vacuum suction table top comprises:
Be used to be located at the gripper shoe on the vacuum source, have the gripper shoe adsorption hole on the described gripper shoe;
It is characterized in that described vacuum suction table top also comprises:
Be located at the loading plate on the described gripper shoe, have the loading plate adsorption hole with the corresponding position of described gripper shoe adsorption hole on the described loading plate, and in the described loading plate, the hardness that is used to carry the part of workpiece at least is lower than the hardness of described gripper shoe.
2. vacuum suction table top according to claim 1 is characterized in that, the cross sectional dimensions of described loading plate adsorption hole less than or greater than the cross sectional dimensions of its pairing described gripper shoe adsorption hole.
3. vacuum suction table top according to claim 1 is characterized in that, described loading plate adsorption hole and gripper shoe adsorption hole are circular hole, and the diameter of described loading plate adsorption hole is littler more than 1 millimeter than the diameter of its pairing described gripper shoe adsorption hole.
4. vacuum suction table top according to claim 1, it is characterized in that, described loading plate adsorption hole and gripper shoe adsorption hole are circular hole, and the diameter of described loading plate adsorption hole is between 0.5 millimeter to 1 millimeter, and the diameter of described gripper shoe adsorption hole is between 1.5 millimeters to 3 millimeters.
5. vacuum suction table top according to claim 1 is characterized in that, described loading plate is used to carry on the face of described workpiece and has chamfering at the edge of described loading plate adsorption hole.
6. according to any described vacuum suction table top in the claim 1 to 5, it is characterized in that described loading plate is made of plastics or rubber.
7. according to any described vacuum suction table top in the claim 1 to 5, it is characterized in that described loading plate is made of in polyvinyl chloride, polypropylene, polyurethanes, the butadiene-styrene rubber any one.
8. according to any described vacuum suction table top of claim 1 to 5, it is characterized in that the thickness of described loading plate is between 0.1 millimeter to 0.5 millimeter.
9. according to any described vacuum suction table top in the claim 1 to 5, it is characterized in that the thickness of described loading plate is 0.2 millimeter.
10. a vacuum suction platform comprises the vacuum source that is used to provide vacuum environment, it is characterized in that, described vacuum suction platform also comprises:
Be located on the described vacuum source, as any described vacuum suction table top in the above-mentioned claim 1 to 9.
11. vacuum suction platform according to claim 10 is characterized in that, also comprises: be used for location structure with described gripper shoe and loading plate relative positioning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206685974U CN201931454U (en) | 2010-12-09 | 2010-12-09 | Vacuum absorption table top and vacuum absorption table provided with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206685974U CN201931454U (en) | 2010-12-09 | 2010-12-09 | Vacuum absorption table top and vacuum absorption table provided with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201931454U true CN201931454U (en) | 2011-08-17 |
Family
ID=44442993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206685974U Expired - Fee Related CN201931454U (en) | 2010-12-09 | 2010-12-09 | Vacuum absorption table top and vacuum absorption table provided with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201931454U (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104040753A (en) * | 2011-12-19 | 2014-09-10 | Gs爱能吉股份有限公司 | Thin film battery module, thin film battery package, thin film battery package manufacturing device, and thin film battery package manufacturing method |
| CN104260120A (en) * | 2014-08-01 | 2015-01-07 | 中环高科（天津）股份有限公司 | Process for improving horizontality of cutting table board of cutting machine |
| CN106891094A (en) * | 2015-12-14 | 2017-06-27 | 上海申和热磁电子有限公司 | Laser cutting machine workbench for covering copper ceramic substrate |
| CN107608024A (en) * | 2017-10-18 | 2018-01-19 | 江苏亨通光网科技有限公司 | A kind of automatic absorbing device and method of attaching for array waveguide grating AWG |
| CN108820794A (en) * | 2018-07-13 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | A kind of detachable bearing assembly |
| CN110270905A (en) * | 2019-07-23 | 2019-09-24 | 珠海晨新科技有限公司 | A kind of CNC bearing table device of liquid crystal module edging |
| CN110789004A (en) * | 2019-11-20 | 2020-02-14 | 苏州科韵激光科技有限公司 | Cutting platform and cutting equipment |
| CN111069163A (en) * | 2019-12-04 | 2020-04-28 | 惠州易晖光电材料股份有限公司 | Nano mask material removing production line and production process thereof |
| CN111251262A (en) * | 2020-01-20 | 2020-06-09 | 成都京东方光电科技有限公司 | Display panel bearing table |
| CN111580235A (en) * | 2020-05-11 | 2020-08-25 | 深圳爱克莱特科技股份有限公司 | Lens assembly system and lens assembly method |
| CN111913363A (en) * | 2019-05-09 | 2020-11-10 | 株式会社阿迪泰克工程 | Direct writing type exposure device |
| CN112518687A (en) * | 2020-12-08 | 2021-03-19 | 深圳市韩安特科技有限公司 | Display screen bearing device |
-
2010
- 2010-12-09 CN CN2010206685974U patent/CN201931454U/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104040753A (en) * | 2011-12-19 | 2014-09-10 | Gs爱能吉股份有限公司 | Thin film battery module, thin film battery package, thin film battery package manufacturing device, and thin film battery package manufacturing method |
| US9728754B2 (en) | 2011-12-19 | 2017-08-08 | Applied Materials, Inc. | Thin film battery module, thin film battery package, thin film battery package manufacturing device, and thin film battery package manufacturing method |
| CN104040753B (en) * | 2011-12-19 | 2017-11-03 | 应用材料公司 | Hull cell module, film battery assembly and its manufacture device and manufacture method |
| CN104260120A (en) * | 2014-08-01 | 2015-01-07 | 中环高科（天津）股份有限公司 | Process for improving horizontality of cutting table board of cutting machine |
| CN106891094A (en) * | 2015-12-14 | 2017-06-27 | 上海申和热磁电子有限公司 | Laser cutting machine workbench for covering copper ceramic substrate |
| CN107608024A (en) * | 2017-10-18 | 2018-01-19 | 江苏亨通光网科技有限公司 | A kind of automatic absorbing device and method of attaching for array waveguide grating AWG |
| CN108820794A (en) * | 2018-07-13 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | A kind of detachable bearing assembly |
| CN111913363A (en) * | 2019-05-09 | 2020-11-10 | 株式会社阿迪泰克工程 | Direct writing type exposure device |
| CN110270905A (en) * | 2019-07-23 | 2019-09-24 | 珠海晨新科技有限公司 | A kind of CNC bearing table device of liquid crystal module edging |
| CN110789004A (en) * | 2019-11-20 | 2020-02-14 | 苏州科韵激光科技有限公司 | Cutting platform and cutting equipment |
| CN110789004B (en) * | 2019-11-20 | 2021-10-29 | 苏州科韵激光科技有限公司 | Self-adaptive accurate-positioning movable cutting platform and cutting equipment |
| CN111069163A (en) * | 2019-12-04 | 2020-04-28 | 惠州易晖光电材料股份有限公司 | Nano mask material removing production line and production process thereof |
| CN111069163B (en) * | 2019-12-04 | 2021-12-10 | 惠州易晖光电材料股份有限公司 | Nano mask material removing production line and production process thereof |
| CN111251262A (en) * | 2020-01-20 | 2020-06-09 | 成都京东方光电科技有限公司 | Display panel bearing table |
| CN111251262B (en) * | 2020-01-20 | 2022-01-28 | 成都京东方光电科技有限公司 | Display panel bearing table |
| CN111580235A (en) * | 2020-05-11 | 2020-08-25 | 深圳爱克莱特科技股份有限公司 | Lens assembly system and lens assembly method |
| CN112518687A (en) * | 2020-12-08 | 2021-03-19 | 深圳市韩安特科技有限公司 | Display screen bearing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201931454U (en) | Vacuum absorption table top and vacuum absorption table provided with same | |
| JP4468893B2 (en) | Vacuum suction head | |
| CN108188590B (en) | Cutting method of flexible medium | |
| TW200715456A (en) | Substrate mounting base, method for manufacturing the same and substrate processing apparatus | |
| CN108198772B (en) | Bearing assembly, cutting equipment and cutting method of flexible medium | |
| TWM504009U (en) | Vacuum alignment lamination apparatus with flexible membrance | |
| KR20190122281A (en) | Method of attaching substrate and apparatus for attaching substatr | |
| WO2017121467A1 (en) | Holding arrangement for holding a substrate, carrier for supporting a substrate, vacuum processing system, method for holding a substrate, and method for releasing a substrate | |
| CN108307587B (en) | Working method of coating adsorption device of BGA substrate | |
| TWM553877U (en) | Bed jig for cutting circuit board | |
| WO2021164427A1 (en) | Processing platform | |
| JP2013243203A (en) | Support device | |
| JP2012049430A (en) | Cutting device | |
| KR102643141B1 (en) | Electrostatic chuck and electrostatic adsorption apparatus | |
| TWM449343U (en) | Vacuum suction device | |
| CN108857981A (en) | Product orientation device and localization method | |
| CN109461844B (en) | Method for manufacturing flexible substrate | |
| KR100771279B1 (en) | Method for printing solder pastes using a mask and a jig used therefor | |
| KR20210125798A (en) | Adhesion Chuck , Adhesion Pad micro lens pattern design of Big or middle size Transfer device for Glass , plate etc. | |
| CN109616573B (en) | Laser peeling device for flexible substrate and laser peeling method for flexible substrate | |
| KR20210125789A (en) | Adhesion Chuck , Adhesion Pad micro lens pattern design of Big or middle size Transfer device for Glass , plate etc. | |
| CN114507484B (en) | Adhesion adsorption device | |
| CN215898347U (en) | Keep thin PCB base plate roughness's absorption positioner | |
| CN201156132Y (en) | Electrostatic absorption station | |
| KR100420177B1 (en) | Vacuum pad for picking up ball grid array package |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HANGZHOU FANGZHENG SU'NENG TECHNOLOGY CO., LTD. Effective date: 20121011 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20121011 Address after: 100871 Beijing, Haidian District into the house road, founder of the building on the 5 floor, No. 298 Patentee after: Peking Founder Group Co., Ltd. Patentee after: Hangzhou Fangzheng Su'neng Technology Co., Ltd. Address before: 100871 Beijing, Haidian District into the house road, founder of the building on the 5 floor, No. 298 Patentee before: Peking Founder Group Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110817 Termination date: 20181209 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |