CN201904369U - LED (light emitting diode) surface-mounting package structure based on silicon substrate - Google Patents

LED (light emitting diode) surface-mounting package structure based on silicon substrate Download PDF

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Publication number
CN201904369U
CN201904369U CN2010202799459U CN201020279945U CN201904369U CN 201904369 U CN201904369 U CN 201904369U CN 2010202799459 U CN2010202799459 U CN 2010202799459U CN 201020279945 U CN201020279945 U CN 201020279945U CN 201904369 U CN201904369 U CN 201904369U
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CN
China
Prior art keywords
silicon substrate
metal
led
layer
led chip
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Expired - Lifetime
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CN2010202799459U
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Chinese (zh)
Inventor
肖国伟
曾照明
陈海英
周玉刚
侯宇
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Guangdong APT Electronics Ltd
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APT (GUANGZHOU) ELECTRONICS Ltd
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Priority to CN2010202799459U priority Critical patent/CN201904369U/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48464Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area also being a ball bond, i.e. ball-to-ball
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

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  • Led Device Packages (AREA)

Abstract

The utility model discloses an LED (light emitting diode) surface-mounting package structure based on a silicon substrate, which comprises a silicon substrate, an LED chip, a circular ring convex wall and a lens. The upper surface of the silicon substrate is a planar structure. An oxidization layer is covered on the upper surface of the silicon substrate, a metal electrode layer is arranged on the upper surface of the oxidization layer, and the upper surface of the metal electrode layer is provided with a metal convex point. A through hole penetrating through the silicon substrate is arranged below the metal electrode layer. The inner wall of the through hole and part of the lower surface of the silicon substrate are covered by an insulation layer, and the surface of the insulation layer in the through hole is covered by a metal connecting layer. Two conductive metal welding pads are respectively arranged on the lower surface of the silicon substrate and are isolated from the silicon substrate. A heat-conduction metal welding pad is arranged on the lower surface of the silicon substrate, and the LED chip is inversely arranged on the silicon substrate. The LED chip and the metal electrode layer in the LED chip are isolated from the outside by the circular ring convex wall and the lens. The LED surface-mounting package structure has the advantages of good heat dissipation effect and small volume; meanwhile, the packaging without a gold wire ensures high reliability of the structure, therefore, large production packaging of the wafer grade is realized, and the packaging cost is reduced.

Description

A kind of LED surface patch formula encapsulating structure based on silicon substrate
Technical field
The utility model belongs to the manufacturing field of luminescent device, relates to a kind of LED encapsulating structure based on silicon substrate.
Background technology
Light-emitting diode (LED) light source has high efficiency, long-life, does not contain the advantage of harmful substances such as Hg.Along with the fast development of LED technology, performances such as the brightness of LED, life-span have all obtained great lifting, make LED application more and more widely, from outdoor lightings such as street lamps to room lightings such as decorative lamps, all use one after another or be replaced with LED as light source.
The encapsulating structure of LED surface attaching type (SMD) is because it uses convenient and volume is little etc. that advantage has become main packing forms.See also Fig. 1, it is a LED surface mounting structure commonly used in the prior art, comprises that a package support 100 and is mounted on led chip 200 in the package support 100 by solid brilliant technology.Package support 100 surfaces are provided with metal lead wire 500, and the metal lead wire 500 of led chip 200 both sides is provided with electrode 400, and the positive and negative electrode of led chip 200 is electrically connected with electrode 400 on the package support 100 respectively by gold thread 300.Above led chip 200, fill embedding colloid 600 by fluorescent powder coated and sealing adhesive process, thereby finish encapsulation led chip 200.Yet, there is following problem in present this LED surface mounting structure: because package support 100 is that the employing metallic support is a substrate, form also to cut after jetting plastic groove or the sealing of mold casting forming mode, so its temperature tolerance is not good, thermal diffusivity is not ideal enough, microminiaturized being difficult for makes again.In addition, owing to having adopted led chip 200 upper surfaces are adorned the structure of pasting and adopting gold thread 300 connection electrode, and gold thread connects the maximum failure mode of appearance in lost efficacy LED production often and the use.In addition, the led chip 200 that the upper surface dress pastes is by the sapphire heat radiation, and its radiating effect is not good.
In order to solve the problem that above-mentioned enclosure support structure exists, one preferably method be to adopt silicon substrate directly as the base plate for packaging of led chip.At present also fail mass selling and application in practice, relevant patent report is just arranged based on the SMD constructed products of silicon substrate.What they adopted mostly all is that the silicon chip upper surface is dug a dark groove, digs through the hole again in groove, and the electrode in the upper surface groove is linked lower surface, forms the packing forms of SMD; Led chip is embedded in the silicon groove, fills fluorescent material and sealing during encapsulation in groove; And what generally adopt is that positive cartridge chip is beaten gold thread and connected.Part has also adopted the structure of flip-chip.See also Fig. 2, this encapsulating structure comprises a silicon substrate 10, a led chip 20 and packing colloid 30.Wherein the upper surface of this silicon substrate 10 has a dark groove, and led chip 20 upside-down mountings are in the dark groove of this silicon substrate 10.Be provided with through hole 50 in the groove of the silicon substrate 10 of the positive and negative electrode correspondence of led chip 20, the lower surface of the silicon substrate 10 of through hole 50 correspondences has conductive welding disk 60, and led chip 20 is electrically connected with conductive welding disk 60 by the lead-in wire of establishing in the through hole 50.This packing colloid 30 is to form by filling fluorescent material and sealing in dark groove.This structure need be corroded silicon chip for a long time owing to need dig big dark groove at the upper surface of silicon chip, and complex process and cost are higher; Very dark owing to groove simultaneously, thus the difficulty of portion's wiring within it increases, if particularly adopt flip-chip, need make metal salient point on the electrode in groove, and its technology difficulty is bigger; Moreover, be not easy the peripheral circuit (as electrostatic discharge protective circuit, drive circuit etc.) of integrated LED on silicon substrate because the silicon substrate upper surface has dark groove, also be restricted on its application prospect; In addition, be subjected to the restriction of groove size, the core number of placing in the groove is limited, is difficult for realizing multi-chip modules.
The utility model content
The purpose of this utility model is to overcome shortcoming of the prior art with not enough, and a kind of perfect heat-dissipating, simple, low-cost, the controlled LED surface mounting structure of quality of technology are provided.
A kind of LED surface patch formula encapsulating structure based on silicon substrate comprises silicon substrate, led chip, the protruding wall of annulus and lens.The upper surface of described silicon substrate is a planar structure, no groove, one oxide layer covers the upper surface of silicon substrate, is arranged on the upper surface and the mutually insulated of this oxide layer respectively in order to two metal electrode layers that connect positive and negative electrode, and the upper surface of described metal electrode layer is respectively arranged with metal salient point; The corresponding silicon substrate in metal electrode layer below is respectively equipped with the through hole of through-silicon substrate; One insulating barrier covers the inwall of described through hole and the part lower surface of silicon substrate; One metal connecting layer covers the surface of insulating layer in the through hole; Two conducting metal pads are separately positioned on the silicon substrate lower surface and by insulating barrier and silicon substrate insulation, the position of this conducting metal pad is corresponding with lead to the hole site, and is electrically connected with the metal electrode layer of silicon substrate upper surface by the interior metal connecting layer of through hole; One heat-conducting metal pad is arranged between the silicon substrate lower surface two conducting metal pads, naked layer between itself and the silicon substrate.Described led chip upside-down mounting is on this silicon substrate, and both positive and negative polarity is connected with two metal salient points respectively.The upper surface that the protruding wall of described annulus is arranged on silicon substrate forms enclosing region, and described led chip is arranged in this enclosing region.Described lens are by the protruding wall restriction of annulus moulding, described lens parcel led chip and interior metal electrode layer thereof.Described lens are to form by the feasible liquid colloid direct forming of the surface tension restriction of the protruding wall of annulus, make led chip and interior metal electrode layer thereof be isolated from the outside.
With respect to prior art, encapsulating structure good heat dissipation effect of the present utility model, volume are little; Not having the gold thread encapsulation simultaneously makes this structure have high reliability.Directly saved the step of digging dark groove at silicon chip surface at the surperficial flip LED chips of silicon substrate, technology cost and technology difficulty have been reduced, simultaneously can easily carry out arranging of led chip, can realize easily arbitrarily that multi-chip modules connects and encapsulation at the silicon chip upper surface.Employing is done the method for the protruding wall of annulus at the silicon chip upper surface, has realized directly forming lens preferably by encapsulation point glue, and is lower than traditional mold lens cost.
In order to understand the utility model more clearly, set forth embodiment of the present utility model below with reference to description of drawings.
Description of drawings
Fig. 1 is a LED surface mounting structure schematic diagram commonly used in the prior art.
Fig. 2 be in the prior art silicon substrate as the encapsulating structure schematic diagram of the base plate for packaging of led chip.
Fig. 3 the utility model is based on the generalized section of the LED encapsulating structure of silicon substrate.
Fig. 4 is a vertical view shown in Figure 3.
Fig. 5 is a upward view shown in Figure 3.
Embodiment
Please consult Fig. 3, Fig. 4 and Fig. 5 simultaneously, it is respectively generalized section, vertical view and the upward view of the utility model based on the LED encapsulating structure of silicon substrate.This LED encapsulating structure comprises silicon substrate 1, led chip 2 and lens 12.Concrete, the upper surface of this silicon substrate 1 is a planar structure, no groove.One oxide layer 5 covers the upper surface of silicon substrate 1.Be arranged on the upper surface and the mutually insulated of this oxide layer 5 respectively in order to two metal electrode layers 4 that connect positive and negative electrode.The upper surface of metal electrode layer 4 is respectively arranged with metal salient point 3.Led chip 2 upside-down mountings are on this silicon substrate 1, and the both positive and negative polarity of led chip 2 is connected with two metal salient points 3 respectively, thereby are electrically connected with metal electrode layer 4.Silicon substrate 1 corresponding below the metal electrode layer 4 of led chip 2 both sides is respectively equipped with the through hole 6 that runs through its upper and lower surface, and the lower surface of the inwall of through hole 6 and silicon substrate 1 covers an insulating barrier 7.One metal connecting layer 8 covers insulating barrier 7 surfaces in the through hole 6.Two conducting metal pads 9 are separately positioned on silicon substrate 1 lower surface and pass through insulating barrier 7 and silicon substrate 1 insulation, the position of this conducting metal pad 9 is corresponding with through hole 6 positions, and it is electrically connected with the metal electrode layer 4 of silicon substrate 1 upper surface by the metal connecting layer 8 in the through hole 6.One heat-conducting metal pad 10 is provided with between two conducting metal pads 9, and under led chip 2 lower surface of corresponding silicon substrate 1, and naked layer between heat-conducting metal pad 10 and the silicon substrate 1.The upper surface of led chip 2 is coated with a phosphor powder layer 13.Both sides at two through holes 6 of silicon substrate 1 upper surface are provided with the protruding wall 11 of an annulus, and it provides a restricted quarter for lens 12, and lens 12 are isolated from the outside led chip 2 and interior metal line thereof.
Concrete, the material of described metal salient point 3 can be material single in lead, tin, gold, nickel, copper, aluminium, the indium, multilayer material or alloy.
The material of described conducting metal pad 9 and heat-conducting metal pad 10 can be single material, multilayer material or alloy in nickel, gold, silver, aluminium, titanium, tungsten, cadmium, vanadium, the platinum etc.
The height of the protruding wall 11 of described annulus is between 10um~500um.The material that the protruding wall 11 of described annulus is adopted can be metal, oxide, nitride, the permanent photoresist that uses of polyimides (Polyimide) or curable back etc.
The material of described lens 12 is transparent resin or silica gel; Also can be resin or the silica gel that is mixed with graininess fluorescent material; Or be made up of two layers of material: ground floor is colloid or the fluorescent material solid thin-sheet that is mixed with fluorescent material, and the second layer is transparent resin or silica gel.
Described insulating barrier 7 can be polyimides (Polyimide), silica, silicon nitride, the permanent photoresist that uses in curable back etc.
Below describe the manufacturing step of LED encapsulating structure of the present utility model in detail:
Step S1: make led chip 2.Particularly, growth has the extension disk of nitride multilayer gallium on Sapphire Substrate, through sequence of process steps such as photoetching, etching, layer metal deposition and passivation layer protections, forms P electrode and N electrode on led chip, and the metal pad on the electrode.This disk cuts into the led chip 2 of simple grain behind grinding and polishing.
Step S2: on silicon substrate 1, form oxide layer 5, metal electrode layer 4 and metal salient point 3.Particularly, on silicon substrate 1, at first the thermal oxidation technology by semiconductor production forms certain thickness oxide layer 5 at the upper surface of silicon substrate disk.Form metal electrode layer 4 on the surface of oxide layer 5 by technologies such as evaporation, sputter or plating then, again by photoetching, corrode or figure and the line that technology forms metal level 4 corresponding to led chip such as peel off.Plant mode such as ball at last by plating, evaporation or metal wire and form metal salient point 3 at the upper surface that becomes metal electrode layer 4.
Step S3: form through hole 6 at silicon substrate 1.Particularly, silicon chip is carried out lower surface grind, be ground to needed thickness.Carry out technologies such as cvd dielectric layer, gluing, exposure, development, corrosion then at the silicon chip lower surface, form the figure of lead to the hole site.Then pass through dielectric layer or photoresist as masking layer, silicon is carried out dry etching or wet etching, thereby erode away through hole 6.The oxide layer 5 of described through hole 6 through-silicon substrates 1 upper surface.
Step S4: the insulating barrier 7 that forms through hole 6 inner surfaces and silicon substrate 1 lower surface.Particularly, in through hole 6, form a layer insulating by plating mode or spraying method with silicon substrate 1 lower surface.Leave in the through hole the perforate that is connected with silicon chip upper surface metal by exposure imaging, the position insulating barrier of the corresponding heat-conducting metal pad 10 of silicon chip lower surface also is removed simultaneously, keeps the insulating barrier at two conducting metal pad 9 places.
Step S5: form metal connecting layer 8, conducting metal pad 9 and heat-conducting metal pad 10.Particularly, form metal connecting layer 8 and on the insulating barrier 7 of the lower surface of silicon substrate 1, form conducting metal pad 9 by insulating barrier 7 surface of modes such as plating, chemical plating in through hole 6, form heat-conducting metal pad 10 in lower surface led chip 2 corresponding positions of silicon substrate 1.Conducting metal pad 9 is realized and being electrically connected of the metal electrode layer 4 of silicon substrate 1 upper surface by metal connecting layer 8.
Step S6: form the protruding wall 11 of annulus.Particularly, be coated with a dielectric layer at the upper surface of silicon substrate 1, this dielectric layer can be used the permanent photoresist that uses of polyimides (Polyimide) or curable back etc., and the coating back is with exposure and develop and form the protruding wall 11 of annulus of desired thickness.
Step S7: the front surface that led chip 2 flip chip bondings is connected on silicon substrate 1.Flip chip bonding equipment by automation is connected on led chip 2 flip chip bondings one by one on the silicon chip upper surface, the flip chip bonding process is actual to be metal salient point 3 with the bonding process of the metal pad of the P electrode of led chip 2 and N electrode, can adopt the mode of Reflow Soldering or decide technology with adding hyperacoustic nation after the heating.
Step S8: at led chip 2 surface applied phosphor powder layers 13.Fluorescent powder grain sneaked into earlier make fluorescent glue in the glue, apply then, application pattern can be spraying, brush or drip mode such as glue.
Step S9: form lens 12.Carry out a glue above the silicon substrate 1 in the protruding wall 11 of annulus, point glue amount is according to the viscosity decision of chip size and glue, making the surface tension of protruding wall 11 outside height of annulus can limit glue can not stretch out, simultaneously because capillary effect, suitably the glue amount can make raising up near hemispherical of glue, and baking-curing promptly forms lens 12 behind the some glue.
With respect to prior art, the utility model has reduced technology cost and technology difficulty directly at the surperficial flip LED chips of silicon substrate and saved the step of digging dark groove at silicon chip surface.The silicon substrate upper surface has not had groove; can easily be implemented in the peripheral circuit of silicon substrate surface integrated LED; as anti-static protective circuit, LED constant-current drive circuit etc.; simultaneously can easily carry out arranging of led chip, can realize easily arbitrarily that multi-chip modules connects and encapsulation at the silicon chip upper surface.Employing is done the method for the protruding wall of annulus at the silicon chip upper surface, has realized consistent encapsulation point glue, and has formed lens preferably, and is lower than traditional mold lens cost.The encapsulating structure of utility model can conveniently be done cutting again after finishing all packaging process on the whole silicon wafer, realize the LED encapsulation of wafer scale, reduces the cost of encapsulation.In addition, the utility model adopts one deck silicon as base plate for packaging, and the heat that led chip is produced directly derives by silicon, and thermal resistance is smaller.Adopt flip chip bonding technology that LED directly is connected on the silicon substrate by metal salient point, dispel the heat by sapphire, have better radiating effect with respect to the forward LED product.Do not have a gold thread in the whole encapsulating structure, reduced because gold thread connects the integrity problem that lost efficacy and cause.Whole encapsulating structure volume is smaller, helps the structure miniaturization of LED (particularly great power LED) and module thereof, makes things convenient for the secondary optics design of the light fixture product of back.
In addition, the LED encapsulating structure based on silicon substrate of the present utility model also can have numerous embodiments.At the upper surface of led chip one phosphor powder layer is set separately as need not, but directly forms lens, be packaged into blue-ray LED with transparent resin glue or silica gel point glue; Perhaps fluorescent powder grain is evenly mixed with casting glue, direct chip upper point glue in the annulus of silicon chip surface then, and baking-curing forms lens.Perhaps stick the fluorescent material solid thin-sheet of having made earlier on the led chip surface, and then form lens with transparent casting glue point glue in the annulus of silicon chip surface.
The utility model is not limited to above-mentioned execution mode, if various changes of the present utility model or distortion are not broken away from spirit and scope of the present utility model, if these changes and distortion belong within claim of the present utility model and the equivalent technologies scope, then the utility model also is intended to comprise these changes and distortion.

Claims (2)

1. the LED surface patch formula encapsulating structure based on silicon substrate is characterized in that: comprise
---silicon substrate, the upper surface of described silicon substrate is a planar structure, no groove, one oxide layer covers the upper surface of silicon substrate, be arranged on the upper surface and the mutually insulated of this oxide layer respectively in order to two metal electrode layers that connect positive and negative electrode, the upper surface of described metal electrode layer is respectively arranged with metal salient point; The corresponding silicon substrate in metal electrode layer below is respectively equipped with the through hole of through-silicon substrate; One insulating barrier covers the inwall of described through hole and the part lower surface of silicon substrate; One metal connecting layer covers the surface of insulating layer in the through hole; Two conducting metal pads are separately positioned on the silicon substrate lower surface and by insulating barrier and silicon substrate insulation, the position of this conducting metal pad is corresponding with lead to the hole site, and is electrically connected with the metal electrode layer of silicon substrate upper surface by the interior metal connecting layer of through hole; One heat-conducting metal pad is arranged between the silicon substrate lower surface two conducting metal pads, naked layer between itself and the silicon substrate;
---led chip, its upside-down mounting are on this silicon substrate, and both positive and negative polarity is connected with two metal salient points respectively;
---the protruding wall of annulus, the upper surface that is arranged on silicon substrate forms enclosing region, and described led chip is arranged in this enclosing region;
---lens, it is by the protruding wall restriction of annulus moulding, described lens parcel led chip and interior metal electrode layer thereof.
2. the LED surface patch formula encapsulating structure based on silicon substrate according to claim 1, it is characterized in that: the height of the protruding wall of described annulus is between 10um~500um.
CN2010202799459U 2010-07-30 2010-07-30 LED (light emitting diode) surface-mounting package structure based on silicon substrate Expired - Lifetime CN201904369U (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102800798A (en) * 2011-10-26 2012-11-28 清华大学 LED (Light Emitting Diode) packaging structure and packaging method thereof
CN103066195A (en) * 2013-01-25 2013-04-24 中国科学院半导体研究所 Inverted light emitting diode using graphene as thermal conductive layer
CN103633237A (en) * 2013-12-18 2014-03-12 江阴长电先进封装有限公司 LED (Light Emitting Diode) packaging structure and wafer level packaging method thereof
CN103700738A (en) * 2013-12-29 2014-04-02 哈尔滨固泰电子有限责任公司 LED (Light-Emitting Diode) packaging method and LED device on basis of special substrate
CN104051596A (en) * 2014-05-26 2014-09-17 广州市尤特新材料有限公司 LED glass support and manufacturing method thereof
CN104168004A (en) * 2013-05-16 2014-11-26 太阳诱电株式会社 Electronic component and method of fabricating the same
CN107123721A (en) * 2017-07-06 2017-09-01 厦门多彩光电子科技有限公司 A kind of band lens type LED encapsulation structure and method for packing
CN110176438A (en) * 2019-06-11 2019-08-27 厦门市三安光电科技有限公司 Light emitting diode
CN110299442A (en) * 2018-12-13 2019-10-01 广州硅芯电子科技有限公司 LED display module and its manufacturing method
WO2020000635A1 (en) * 2018-06-25 2020-01-02 江苏罗化新材料有限公司 Chip-level led package structure of dual-chip, and manufacturing method therefor

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102800798A (en) * 2011-10-26 2012-11-28 清华大学 LED (Light Emitting Diode) packaging structure and packaging method thereof
CN103066195A (en) * 2013-01-25 2013-04-24 中国科学院半导体研究所 Inverted light emitting diode using graphene as thermal conductive layer
CN104168004B (en) * 2013-05-16 2017-08-15 太阳诱电株式会社 Electronic component and its manufacture method
CN104168004A (en) * 2013-05-16 2014-11-26 太阳诱电株式会社 Electronic component and method of fabricating the same
CN103633237B (en) * 2013-12-18 2016-03-30 江阴长电先进封装有限公司 LED packaging structure and wafer level packaging method thereof
CN103633237A (en) * 2013-12-18 2014-03-12 江阴长电先进封装有限公司 LED (Light Emitting Diode) packaging structure and wafer level packaging method thereof
CN103700738A (en) * 2013-12-29 2014-04-02 哈尔滨固泰电子有限责任公司 LED (Light-Emitting Diode) packaging method and LED device on basis of special substrate
CN104051596B (en) * 2014-05-26 2017-01-18 广州市尤特新材料有限公司 Manufacturing method of LED glass support
CN104051596A (en) * 2014-05-26 2014-09-17 广州市尤特新材料有限公司 LED glass support and manufacturing method thereof
CN107123721A (en) * 2017-07-06 2017-09-01 厦门多彩光电子科技有限公司 A kind of band lens type LED encapsulation structure and method for packing
CN107123721B (en) * 2017-07-06 2023-07-07 深圳市永吉光电科技有限公司 LED packaging structure with lens and packaging method
WO2020000635A1 (en) * 2018-06-25 2020-01-02 江苏罗化新材料有限公司 Chip-level led package structure of dual-chip, and manufacturing method therefor
CN110299442A (en) * 2018-12-13 2019-10-01 广州硅芯电子科技有限公司 LED display module and its manufacturing method
CN110176438A (en) * 2019-06-11 2019-08-27 厦门市三安光电科技有限公司 Light emitting diode

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