CN201793731U - 一种mocvd设备及其反应室密封结构 - Google Patents
一种mocvd设备及其反应室密封结构 Download PDFInfo
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- CN201793731U CN201793731U CN2010202876474U CN201020287647U CN201793731U CN 201793731 U CN201793731 U CN 201793731U CN 2010202876474 U CN2010202876474 U CN 2010202876474U CN 201020287647 U CN201020287647 U CN 201020287647U CN 201793731 U CN201793731 U CN 201793731U
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- cooled electrode
- water cooled
- magnetic fluid
- rotating shaft
- tray rotating
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CN2010202876474U CN201793731U (zh) | 2010-08-11 | 2010-08-11 | 一种mocvd设备及其反应室密封结构 |
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CN2010202876474U CN201793731U (zh) | 2010-08-11 | 2010-08-11 | 一种mocvd设备及其反应室密封结构 |
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CN201793731U true CN201793731U (zh) | 2011-04-13 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105088334A (zh) * | 2014-04-28 | 2015-11-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 顶盖装置及工艺设备 |
CN107130214A (zh) * | 2017-05-11 | 2017-09-05 | 成都西沃克真空科技有限公司 | 一种蒸发器用可旋转的水冷式电极装置 |
CN113088933A (zh) * | 2020-12-14 | 2021-07-09 | 芯三代半导体科技(苏州)有限公司 | 旋转装置 |
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2010
- 2010-08-11 CN CN2010202876474U patent/CN201793731U/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105088334A (zh) * | 2014-04-28 | 2015-11-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 顶盖装置及工艺设备 |
CN105088334B (zh) * | 2014-04-28 | 2018-01-09 | 北京北方华创微电子装备有限公司 | 顶盖装置及工艺设备 |
CN107130214A (zh) * | 2017-05-11 | 2017-09-05 | 成都西沃克真空科技有限公司 | 一种蒸发器用可旋转的水冷式电极装置 |
CN113088933A (zh) * | 2020-12-14 | 2021-07-09 | 芯三代半导体科技(苏州)有限公司 | 旋转装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: ZHEJIANG YUNFENG NEW ENERGY TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: SHANGHAI YUNFENG OPTOELECTRONIC TECHNOLOGY CO., LTD. Effective date: 20120222 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201201 PUDONG NEW AREA, SHANGHAI TO: 321037 JINHUA, ZHEJIANG PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20120222 Address after: 321037 Yang village, Fu town, Jindong District, Zhejiang, Jinhua Patentee after: Zhejiang Yunfeng New Energy Technology Co., Ltd. Address before: 201201, Shanghai Zhangjiang hi tech industry Eastern Victory Road No. 7, building 836, 501 Patentee before: Shanghai Yunfeng Optoelectronic Technology Co., Ltd. |
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C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 321037 Yang village, Fu town, Jindong District, Zhejiang, Jinhua Patentee after: ZHEJIANG YUNFENG NEW MATERIAL TECHNOLOGY CO., LTD. Address before: 321037 Yang village, Fu town, Jindong District, Zhejiang, Jinhua Patentee before: Zhejiang Yunfeng New Energy Technology Co., Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20110413 |