CN201678765U - Combined electrode insulation ring - Google Patents
Combined electrode insulation ring Download PDFInfo
- Publication number
- CN201678765U CN201678765U CN2010201786358U CN201020178635U CN201678765U CN 201678765 U CN201678765 U CN 201678765U CN 2010201786358 U CN2010201786358 U CN 2010201786358U CN 201020178635 U CN201020178635 U CN 201020178635U CN 201678765 U CN201678765 U CN 201678765U
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- insulation tube
- heat insulation
- insulation pipe
- insulation
- instlated tubular
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Abstract
The utility model discloses a combined electrode insulation ring, which is of a high-purity accessory for a polycrystalline silicon reduction furnace, and comprises an insulation pipe (4), a heat insulation plate (6) and a heat insulation pipe (7), wherein the insulation pipe (4) is in a tubular structure and is sleeved outside a reduction furnace electrode (3), and the inner diameter of the heat insulation pipe (7) is larger than the outer diameter of the insulation pipe (4); the heat insulation pipe (7) is sleeved outside the insulation pipe (4), and the heat insulation plate (6) is in an annular structure; the inner diameter of the heat insulation plate (6) is matched with the outer diameter of the insulation pipe (4), and the outer diameter of the insulation pipe (4) is equal to the outer diameter of the heat insulation plate (6); and the heat insulation plate (6) is sleeved outside the insulation pipe (4) and is arranged on the heat insulation pipe (7). The electrode insulation ring of the utility model is formed by combining three mutually independent components, i.e., the insulation pipe, the heat insulation plate and the heat insulation pipe, and the damaged component only needs to be replaced; and the cost can be obviously reduced in the process of use.
Description
Technical field
The utility model relates to a kind of combined electrode dead ring.
Background technology
In polysilicon production process, electric current flows through polycrystalline silicon rod and makes the polycrystalline silicon rod heating through the electrode in the reduction furnace, and unstripped gas is carried out reduction reaction continuously on the high temperature silicon rod, and deposition makes polysilicon.Polysilicon is a semiconductor material, and cold resistance is very big under the room temperature, along with the rising of temperature reduces rapidly.Therefore at the production initial stage, need to overcome cold resistance with 1～30,000 volt of high voltage electric earlier, flow through polycrystalline silicon rod, the heating polycrystalline silicon rod.For preventing to be punctured by high-voltage arc between electrode and the furnace hearth plate, need between electrode and furnace hearth plate, to install the insulation porcelain ring.Produce the later stage, temperature is very high in the stove, and unstripped gas contains hydrogenchloride again, needs the insulation porcelain ring with high-temperature corrosion resistance, the thermal insulation protection gasket.
At present domestic all production polysilicon factories, the electrode insulation ring (calling " porcelain ring " in the following text) that all adopts stupalith to do because the high temperature resistant impact property of porcelain ring is not ideal enough, all has damage after each stove production finishes, the porcelain ring that need more renew, cost is higher.And in the preparation process of present employed ceramic insulation ring, use sizing agent, material purity 3N, impurity easily volatilize with hcl reaction under 1000 ℃ of high temperature, and (polysilicon purity is at 6N～10N) to influence the purity of polysilicon.And existing electrode insulation ring all is structure as a whole, so any part of electrode insulation ring is damaged and all needs the dead ring that more renews, and maintenance cost is higher.
The utility model content
Technical problem to be solved in the utility model provides a kind of combined electrode dead ring, and this electrode insulation ring is combined by several parts, wherein during certain parts damages, only needs to change parts that damage and get final product, in use can be significantly reduced to originally.
The technical scheme in the invention for solving the above technical problem is: the combined electrode dead ring, comprise insulation tube, thermal baffle, instlated tubular, the cylindrical structure of described insulation tube also is enclosed within outside the reduction furnace electrode, instlated tubular is internal diameter greater than the cylinder of insulation tube external diameter and is enclosed within outside the insulation tube, described thermal baffle is circular ring structure and thermal baffle internal diameter and insulation tube external diameter and is complementary, external diameter equates that with the instlated tubular external diameter thermal baffle is socketed on outside the insulation tube and places on the instlated tubular.Thermal baffle internal diameter described here and insulation tube external diameter are complementary and are meant that the thermal baffle internal diameter equates with the insulation tube external diameter or is slightly larger than the insulation tube external diameter, makes insulation tube just can pass the circular hollow space of thermal baffle.
Described insulation tube height is higher than instlated tubular.
The thickness of described insulation tube, thermal baffle, instlated tubular is 5～10mm.This thickness is lower than the thickness of existing dead ring, makes the easier thermally equivalent of dead ring of the present utility model, avoids dead ring as much as possible because the inequality of being heated causes the damage of breaking.
Described insulation tube, thermal baffle, instlated tubular are made by silicide.Silicide can be selected transparency silica glass, opaque silica glass etc. for use.
In sum, the beneficial effects of the utility model are:
1, electrode insulation ring of the present utility model by three of insulation tubes, thermal baffle, instlated tubular mutually independently parts combine, during one of them parts damages, only need to change parts that damage and get final product, in use can be significantly reduced to originally.
2, electrode insulation ring of the present utility model can overcome the defective that existing dead ring damages easily, reduce cost, improve the quality of products, this silicide dead ring adopts silicide to substitute traditional stupalith, and high-temperature corrosion resistance is functional, can be repeatedly used, be significantly reduced to this, when avoiding using the traditional porcelain ring, the detrimental impurity of new porcelain ring volatilizees under high temperature corrosion, influences the polysilicon quality.The utility model silicide dead ring is high-purity accessory that polycrystalline silicon reducing furnace is used.
3, the silicon compound electrode dead ring adopts silicide to make, purity between 3N～5N, 1～30,000 volt of silicide dead ring proof voltage, its electric conductivity is 10
-6～10
-8Ω
-1Cm
-1, high temperature resistant 1400～1600 ℃, 1.07～1.19 kilocalories of/meter 2 hours degree of thermal conductivity, the nitric acid with proportion 1.2～1.5 under 100～130 ℃ boils 1～3 day weight loss 0.1～1 gram/rice altogether
2
Description of drawings
Fig. 1 is the structural representation that electrode insulation ring of the present utility model is installed on the reduction furnace chassis;
Fig. 2 is the assembling synoptic diagram of electrode insulation ring of the present utility model;
Fig. 3 is the structural representation of electrode insulation ring of the present utility model in reduction furnace.
Mark and corresponding component title in the accompanying drawing: 1-reduction furnace body of heater, 2-reduction furnace chassis, 3-reduction furnace electrode, 4-insulation tube, 5-gasket, 6-thermal baffle, 7-instlated tubular, 8-combined electrode dead ring.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Extremely shown in Figure 2 referring to Fig. 1, combined electrode dead ring of the present utility model comprises insulation tube 4, thermal baffle 6, the instlated tubular of being made by silicide 7, insulation tube 4 cylindrical structures also are socketed on outside the reduction furnace electrode 3, instlated tubular 7 for internal diameter greater than the cylinder of insulation tube 4 external diameters and be enclosed within outside the insulation tube 4, insulation tube 4 highly is higher than instlated tubular 7; Thermal baffle 6 is circular ring structure and thermal baffle 6 internal diameters and insulation tube 4 external diameters and is complementary, and external diameter equates that with instlated tubular 7 external diameters thermal baffle 6 is socketed on outside the insulation tube 4 and places on the instlated tubular 7; Constitute a pipe shape cavity between insulation tube 4, the instlated tubular 7, the cavity place is provided with gasket 5, gasket 5 has the annular protrusion with cavity coupling, and the annular protrusion of gasket 5 is positioned at cavity and the bottom is cylindrical that reduction furnace electrode 3 and reduction furnace chassis 2 are separated.
As mentioned above, just can realize the utility model preferably.
Claims (4)
1. combined electrode dead ring, it is characterized in that, comprise insulation tube (4), thermal baffle (6), instlated tubular (7), the cylindrical structure of described insulation tube (4) also is enclosed within outside the reduction furnace electrode (3), instlated tubular (7) for internal diameter greater than the cylinder of insulation tube (4) external diameter and be enclosed within outside the insulation tube (4), described thermal baffle (6) is circular ring structure and thermal baffle (6) internal diameter and insulation tube (4) external diameter and is complementary, external diameter equates that with instlated tubular (7) external diameter thermal baffle (6) is socketed on outside the insulation tube (4) and places on the instlated tubular (7).
2. combined electrode dead ring according to claim 1 is characterized in that, described insulation tube (4) highly is higher than instlated tubular (7).
3. combined electrode dead ring according to claim 1 is characterized in that, described insulation tube (4), thermal baffle (6), instlated tubular (7) are made by silicide.
4. combined electrode dead ring according to claim 1 is characterized in that, the thickness of described insulation tube (4), thermal baffle (6), instlated tubular (7) is 5～10mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201786358U CN201678765U (en) | 2010-05-04 | 2010-05-04 | Combined electrode insulation ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201786358U CN201678765U (en) | 2010-05-04 | 2010-05-04 | Combined electrode insulation ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201678765U true CN201678765U (en) | 2010-12-22 |
Family
ID=43343817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201786358U Expired - Fee Related CN201678765U (en) | 2010-05-04 | 2010-05-04 | Combined electrode insulation ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201678765U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102215614A (en) * | 2011-05-16 | 2011-10-12 | 江西赛维Ldk太阳能高科技有限公司 | Graphite electrode and polycrystalline ingot furnace |
| CN102719892A (en) * | 2012-04-24 | 2012-10-10 | 浙江上城科技有限公司 | Sapphire crystal growth furnace energy saving device |
| CN102883481A (en) * | 2012-09-25 | 2013-01-16 | 中国船舶重工集团公司第七一八研究所 | High-temperature-resistant double-helix coil type heating element |
| CN106714360A (en) * | 2017-01-10 | 2017-05-24 | 中国工程物理研究院材料研究所 | High temperature atmosphere pressure sintering furnace electrode common insulation fault maintenance method |
-
2010
- 2010-05-04 CN CN2010201786358U patent/CN201678765U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102215614A (en) * | 2011-05-16 | 2011-10-12 | 江西赛维Ldk太阳能高科技有限公司 | Graphite electrode and polycrystalline ingot furnace |
| CN102215614B (en) * | 2011-05-16 | 2012-12-05 | 江西赛维Ldk太阳能高科技有限公司 | Graphite electrode and polycrystalline ingot furnace |
| CN102719892A (en) * | 2012-04-24 | 2012-10-10 | 浙江上城科技有限公司 | Sapphire crystal growth furnace energy saving device |
| CN102719892B (en) * | 2012-04-24 | 2015-01-28 | 浙江上城科技有限公司 | Sapphire crystal growth furnace energy saving device |
| CN102883481A (en) * | 2012-09-25 | 2013-01-16 | 中国船舶重工集团公司第七一八研究所 | High-temperature-resistant double-helix coil type heating element |
| CN106714360A (en) * | 2017-01-10 | 2017-05-24 | 中国工程物理研究院材料研究所 | High temperature atmosphere pressure sintering furnace electrode common insulation fault maintenance method |
| CN106714360B (en) * | 2017-01-10 | 2020-03-06 | 中国工程物理研究院材料研究所 | Maintenance method for common insulation fault of electrode of high-temperature atmosphere pressure sintering furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101222 Termination date: 20130504 |