CN203021302U - Quartz insulating element of electrode for reduction furnace - Google Patents
Quartz insulating element of electrode for reduction furnace Download PDFInfo
- Publication number
- CN203021302U CN203021302U CN 201220647736 CN201220647736U CN203021302U CN 203021302 U CN203021302 U CN 203021302U CN 201220647736 CN201220647736 CN 201220647736 CN 201220647736 U CN201220647736 U CN 201220647736U CN 203021302 U CN203021302 U CN 203021302U
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- insulating
- insulation
- reduction furnace
- electrode
- ring
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Abstract
The utility model relates to a polysilicon production process, and discloses a quartz insulating element of an electrode for a reduction furnace. The quartz insulating element is characterized by comprising an insulating outer ring, an insulating inner ring and an insulating top cover which are made of quartz, wherein the insulating inner ring is configured between an upper electrode of an internal chassis of the reduction furnace and a teflon insulating sleeve; the insulating outer ring is sleeved on the upper end of the teflon insulating sleeve of the chassis of the reduction furnace so as to reduce that the radiation heat of silicon rods in the furnace burns up the teflon insulating sleeve; and the top surfaces of the insulating outer ring and the insulating inner ring are arranged in a same plane, the insulating top cover is arranged on the insulating outer ring and the insulating inner ring, so that the chassis of the reduction furnace, the insulating outer ring, the insulating inner ring and the insulating top cover define a closed space, thereby reducing that the radiation heat of silicon rods in the furnace and high-temperature airflows burn up the teflon insulating sleeve. The quartz insulating element disclosed by the utility model can ensure the long-period insulation, low maintenance and stable running of the electrode for the reduction furnace.
Description
Technical field
The utility model relates to production of polysilicon technique, is the quartzy insulating component of a kind of electrode for reduction furnace.
Background technology
The production of polysilicon main technique is improved Siemens at present, and its reduction operation is mainly to provide thermal source by electric energy, allows the vapour deposition in the stove of High Temperature High Pressure of reaction mixing raw material generate polysilicon.Will be under the temperature condition of 100 ℃ to 200 ℃ due to the startup of reduction reaction, provide the high pressure of 3000V to 12000V to puncture energising to silicon core in stove the energy is provided, this just requires the attached insulating component insulating property of electrode to get well; And the teflon insulation of electrode cover is very easily burnt out by high temperature in whole polysilicon deposition production process, and this just requires the heat-proof quality of insulating component good, heatproof is high, chemical stability will be got well.The principle of the quartzy insulating component of electrode for reduction furnace is exactly to utilize quartzy have extremely low thermal expansivity, high temperature tolerance, fabulous chemical stability, the good performances such as electrical insulating property, to reach the purpose that the electrode for reduction furnace electrical insulation capability is good, hang down maintenance, operation steady in a long-term.
Electrode for reduction furnace insulating component in the production of polysilicon industry mainly adopts the ceramic insulation ring at present, the ceramic insulation ring is due to slightly large (0 ~ 1000 ℃ of thermal expansivity, the quartz sand thermal expansivity-be 5.5 * 10-7/ ℃), the ceramic insulation ring has cracking to damage phenomenon when silicon rod grows into Φ 40mm left and right; The ceramic insulation ring opening damages more than 30% when silicon rod grows to Φ 100mm left and right; This makes the teflon insulation cover of electrode burn seriously, changes frequently, brings larger potential safety hazard for producing simultaneously.
The utility model content
The purpose of this utility model is to provide the quartzy insulating component of electrode for reduction furnace that a kind of electrical insulation capability is good, hang down maintenance, operation steady in a long-term, good electric insulativity when so namely having guaranteed to start guarantees that again insulating component damages phenomenon without any cracking in whole silicon rod process of growth; Guaranteed not the continous-stable of breaks in production, do not increased spare parts consumption, also do not affected product purity, and reduced production safety hidden danger.
The technical solution of the utility model is as follows:
The quartzy insulating component of electrode for reduction furnace is characterized in that: comprise the interior ring of insulation outer shroud, insulation and the insulating top cover made by quartz; In insulation, ring is configured between the interior chassis top electrode of reduction furnace and teflon insulation cover; The insulation exterior ring cap is in the teflon insulation set upper side of chassis of reducing furnace, for reducing silicon rod radiant heat burning the teflon insulation cover in stove; In insulation outer shroud and insulation, the end face of ring is positioned at same plane, encircle in described insulation and be provided with insulating top cover above the insulation outer shroud, allowing chassis of reducing furnace, the interior ring of insulation, insulation outer shroud, insulating top cover surround an enclosed space, is to reduce silicon rod radiant heat and high temperature gas flow burning the teflon insulation cover in stove.
In described insulation, ring, insulation outer shroud and insulating top cover are frosting.
The beneficial effects of the utility model are as follows:
The utility model can guarantee electrode for reduction furnace insulation energy long period, low maintenance, stable;
In quartzy insulation, ring is placed between the interior chassis top electrode of reduction furnace and teflon insulation cover, can strengthen the electrical insulating property between them;
Quartzy insulation exterior ring cap puts at the chassis of reducing furnace teflon insulation, can reduce silicon rod radiant heat burning the teflon insulation cover in stove;
In quartzy insulation, ring and insulation outer shroud are frosting in addition, further strengthen its heat-proof quality;
Quartzy insulating top cover is frosting entirely, be placed on the interior ring of quartzy insulation and quartzy insulation outer shroud, allow ring, quartzy insulation outer shroud in its furnace hearth plate, quartzy insulation, quartzy insulating top cover surrounds an enclosed space, is to reduce silicon rod radiant heat and high temperature gas flow burning the teflon insulation cover in stove.
Description of drawings
Fig. 1 is structural representation of the present utility model
Wherein Reference numeral is: 1 insulation outer shroud, ring in 2 insulation, 3 insulating top covers.
Embodiment
As shown in Figure 1, the quartzy insulating component of electrode for reduction furnace comprises the interior ring 2 of insulation outer shroud 1, insulation and the insulating top cover 3 made by quartz; In insulation, ring 2 is configured between the interior chassis top electrode of reduction furnace and teflon insulation cover; Insulation outer shroud 1 is enclosed within the teflon insulation set upper side of chassis of reducing furnace, for reducing silicon rod radiant heat burning the teflon insulation cover in stove; In insulation outer shroud 1 and insulation, the end face of ring 2 is positioned at same plane, in described insulation, ring 2 is provided with insulating top cover 3 with insulating above outer shroud 1, allowing chassis of reducing furnace, the interior ring 2 of insulation, insulation outer shroud 1, insulating top cover 3 surround an enclosed space, is to reduce silicon rod radiant heat and high temperature gas flow burning the teflon insulation cover in stove.
In described insulation, ring 2, insulation outer shroud 1 and insulating top cover 3 are frosting.
Claims (3)
1. the quartzy insulating component of electrode for reduction furnace, is characterized in that: comprise insulation outer shroud (1), the interior ring of insulation (2) and the insulating top cover (3) made by quartz; In insulation, ring (2) is configured between the interior chassis top electrode of reduction furnace and teflon insulation cover; Insulation outer shroud (1) is enclosed within the teflon insulation set upper side of chassis of reducing furnace; In insulation outer shroud (1) and insulation, the end face of ring (2) is positioned at same plane, encircle (2) in described insulation and be provided with insulating top cover (3) above insulation outer shroud (1), in chassis of reducing furnace, insulation, ring (2), the outer shroud (1) that insulate, insulating top cover (3) surround an enclosed space.
2. the quartzy insulating component of electrode for reduction furnace according to claim 1, it is characterized in that: in described insulation, ring (2), insulation outer shroud (1) are frosting.
3. the quartzy insulating component of electrode for reduction furnace according to claim 1, it is characterized in that: described insulating top cover (3) is frosting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220647736 CN203021302U (en) | 2012-11-30 | 2012-11-30 | Quartz insulating element of electrode for reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220647736 CN203021302U (en) | 2012-11-30 | 2012-11-30 | Quartz insulating element of electrode for reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203021302U true CN203021302U (en) | 2013-06-26 |
Family
ID=48645298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220647736 Expired - Lifetime CN203021302U (en) | 2012-11-30 | 2012-11-30 | Quartz insulating element of electrode for reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203021302U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103553580A (en) * | 2013-10-16 | 2014-02-05 | 徐州协鑫太阳能材料有限公司 | Insulating magnetic ring for polysilicon reduction furnace and manufacturing method thereof |
| CN110182813A (en) * | 2019-06-12 | 2019-08-30 | 厦门佰事兴新材料科技有限公司 | The maintaining method of electrode for reduction furnace |
-
2012
- 2012-11-30 CN CN 201220647736 patent/CN203021302U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103553580A (en) * | 2013-10-16 | 2014-02-05 | 徐州协鑫太阳能材料有限公司 | Insulating magnetic ring for polysilicon reduction furnace and manufacturing method thereof |
| CN103553580B (en) * | 2013-10-16 | 2014-11-05 | 徐州协鑫太阳能材料有限公司 | Insulating magnetic ring for polysilicon reduction furnace and manufacturing method thereof |
| CN110182813A (en) * | 2019-06-12 | 2019-08-30 | 厦门佰事兴新材料科技有限公司 | The maintaining method of electrode for reduction furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130626 |