CN110182813A - The maintaining method of electrode for reduction furnace - Google Patents
The maintaining method of electrode for reduction furnace Download PDFInfo
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- CN110182813A CN110182813A CN201910505175.0A CN201910505175A CN110182813A CN 110182813 A CN110182813 A CN 110182813A CN 201910505175 A CN201910505175 A CN 201910505175A CN 110182813 A CN110182813 A CN 110182813A
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- electrode
- reduction furnace
- conductive fibre
- furnace
- reduction
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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Abstract
The present invention relates to production of polysilicon equipment technical fields, and in particular to a kind of improvement of electrode for reduction furnace.The present invention discloses a kind of maintaining method of electrode for reduction furnace, it is specific: to carry out cladding one non-conductive fibre clad of setting at the position in reduction furnace bell jar that the needs of electrode for reduction furnace are dielectrically separated from, it stays in and is coated with the electrode for reduction furnace of above-mentioned non-conductive fibre clad and is mounted to reduction furnace using a period of time and after depositing silicon crystal, removing deposited silicon crystal non-conductive fibre clad on electrode for reduction furnace, and cladding one non-conductive fibre clad of setting is then re-started on electrode for reduction furnace.The present invention by adopting the above technical scheme, can be improved the electrode for reduction furnace maintenance period and reduce maintenance cost.
Description
Technical field
The present invention relates to production of polysilicon equipment technical fields, and in particular to a kind of improvement of electrode for reduction furnace.
Background technique
Currently, production of polysilicon mainly uses improved Siemens technique, principle is exactly in reduction furnace using high pressure
Breakdown mode makes silicon core become conductor, and promotion electric current makes silicon core, and temperature rapid increase, uses on 1100 DEG C or so of HIGH-PURITY SILICON core
High-purity high-purity trichlorosilane of hydrogen reduction generates polysilicon deposition on silicon core, generates polycrystalline silicon rod.The reduction of this method needs
Furnace is mainly made of reduction furnace bell jar and chassis of reducing furnace, is wherein equipped with electrode for reduction furnace on chassis of reducing furnace.Reduction furnace electricity
Pole need to be able to bear high temperature, condition of high voltage as one of significant components, and cannot influence silicon crystal in reduction furnace, guarantee more
The stable operation of crystal silicon reduction furnace.
To meet above-mentioned requirements, existing electrode for reduction furnace structure is often designed complex, as CN208561705U is mentioned
A kind of polycrystalline silicon reducing furnace electrode structure out, structure is as shown in Figure 1, include electrode body 1, the electrode body 1 is mounted on reduction
Electrode insulation set 3, the electrode insulation set 3 and electrode body are equipped in furnace hearth plate 2, between the electrode body 1 and chassis of reducing furnace 2
1 is socketed and fits closely, and the electrode body 1 is also socketed with dead ring 4, and the dead ring 4 is fitted closely with electrode body 1, described
Dead ring 4 is located at the top of electrode insulation set 3, and the electrode body 1 is equipped with upper flange 5 and lower flange, and the dead ring 4 is mounted on
Below upper flange 5, Upper gasket 6,4 lower end surface of dead ring and reduction are equipped between 4 upper surface of the upper flange 5 and dead ring
Lower gasket 7 is equipped between the upper surface of furnace hearth plate 2,4 lower end surface of dead ring is equipped with annular protrusion 8, and the annular protrusion 8 is stretched
Enter between 2 top of electrode insulation set 3 and chassis of reducing furnace, the corresponding lower flange of the electrode insulation set 3 is equipped with step, the step
It is inside and outside to be equipped with interior fluororubber pad 9 and outer fluororubber pad 10 respectively.For another example CN207091011U is also to propose another one kind
Polycrystalline silicon reducing furnace electrode covers 8 including copper ring 5, ceramic ring 2 and the electrode insulation between chassis of reducing furnace 9 and electrode 1,
Wherein copper ring 5 is sleeved on electrode 1 and is interference fitted between electrode 1, copper ring 5 is fixed on electrode 1, electrode is exhausted
Edge set 8 is embedded in chassis of reducing furnace 9, and ceramic ring 2 is inserted between copper ring 5 and electrode insulation set 8, to promote electrode 1 to also
The insulation performance of former furnace hearth plate 9, and reduce the enrichment of silicon powder particle here, electrode 1 is mounted on chassis of reducing furnace 9.Institute
It states 2 top of ceramic ring and is equipped with annular notch close to the position of electrode 1, cyclic annular ceramic ring compressing member 3 is equipped in the notch, and ceramic ring compresses
The inside of part 3 is provided with screw thread, and the outside of copper ring 5 is provided with screw thread, passes through the internal screw thread and copper ring 5 of ceramic ring compressing member 3
External screw thread be threadedly coupled to compress ceramic ring 2 downwards, and realize the sealing between ceramic ring 2 and copper ring 5.In the ceramic ring
It is provided with the first gasket 6 between portion and ceramic ring compressing member 3, is provided with the second pad between the ceramic ring top and chassis of reducing furnace 9
Piece 7.The insulating component further includes on chassis of reducing furnace 9 and being sleeved on ceramic ring 2 (specially ceramic ring top) outside
Isolation cover 4, to prevent silicon powder deposit in ceramic ring 2.
It can be seen that the electrode for reduction furnace structure of the prior art is complex, applicant in this case organizes inventor by grinding with great concentration
Study carefully, propose a kind of electrode for reduction furnace of improvement, and propose patent application, and authorizes the patent in 2018-02-02
Conductor layer is arranged using in the conehead periphery of electrode breakthroughly in CN206955649U, the structure of the polycrystalline silicon reducing furnace electrode,
Silver coating is such as sprayed, and sprays the insulating layer made of pure ceramic powders in the linkage section periphery in addition to conehead, to be formed
A kind of electrode for reduction furnace of improvement.For the preparation method of the electrode for reduction furnace of the improvement, other people are also proposed in 2017-11-30
And authorize patent of invention CN108002390B.
However, the more complex electrode for reduction furnace of the structure of the prior art or applicant in this case propose improvement before being
Electrode for reduction furnace is all to belong to attrition component for production of polysilicon, at regular intervals after use, requires to stop production, from
Electrode for reduction furnace is removed out on reduction furnace carries out maintenance.As shown in figure 3, being first electrode for reduction furnace when using one section
Between after, entire electrode for reduction furnace includes that all deposited silicon on electrode bar and insulation sleeve, need dismantle, pickling and again spraying etc.
Maintenance process.As shown in figure 4, the electrode for reduction furnace for applicant's improvement is also that deposited silicon in use for some time
(black portions).As shown in figure 5, multiple electrode for reduction furnace are equipped on chassis of reducing furnace, wherein 2 electrode for reduction furnace are complete
At maintenance (i.e. again after polishing grinding again spray-on coating), installation is gone back afterwards, and other electrode for reduction furnace, which are waiting, to be torn open
It unloads and maintenance.
As it can be seen that how to improve the guarantor of the electrode for reduction furnace for the improvement that electrode for reduction furnace is proposed in particular for applicant in this case
Supporting maintenance period and reducing maintenance cost then is the technical issues of needing further Improvement.
Summary of the invention
In view of the above technical problems, applicant in this case organizes inventor by numerous studies, and proposing one kind can be improved
Electrode for reduction furnace maintenance period and the method for reducing maintenance cost, specifically adopt the following technical scheme that
The maintaining method of electrode for reduction furnace, it is specific: to be in reduction furnace clock what the needs of electrode for reduction furnace were dielectrically separated from
Position in cover carries out cladding one non-conductive fibre clad of setting, stays in the reduction furnace for being coated with above-mentioned non-conductive fibre clad
Electrode is mounted to reduction furnace using a period of time and after depositing silicon crystal, and removing deposited silicon crystal on electrode for reduction furnace
Non-conductive fibre clad then re-starts cladding one non-conductive fibre clad of setting on electrode for reduction furnace.
The present invention by adopting the above technical scheme, can be improved the electrode for reduction furnace maintenance period and reduce maintenance at
This.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the electrode for reduction furnace of the first prior art；
Fig. 2 is the structural schematic diagram of the electrode for reduction furnace of second of prior art；
Fig. 3 is the schematic diagram of first electrode for reduction furnace in use for some time；
Fig. 4 is the schematic diagram of the electrode for reduction furnace of applicant's improvement in use for some time；
Fig. 5 is the schematic diagram that maintenance is carried out to the partial reduction furnace electrode on chassis of reducing furnace；
Fig. 6 is the structural schematic diagram of the polycrystalline silicon reducing furnace electrode for the improvement that first patent CN206955649U is proposed；Figure
7a is the schematic diagram of the non-conductive fibre housing for being arranged；
Fig. 7 b is the insulating batt schematic diagram for wrapping；
Fig. 8 is the structural schematic diagram of the electrode for reduction furnace of one embodiment of the invention.
Specific embodiment
To further illustrate that each embodiment, the present invention are provided with attached drawing.These attached drawings are that the invention discloses one of content
Point, mainly to illustrate embodiment, and the associated description of specification can be cooperated to explain the operation principles of embodiment.Cooperation ginseng
These contents are examined, those of ordinary skill in the art will be understood that other possible embodiments and advantages of the present invention.In figure
Component be not necessarily to scale, and similar component symbol is conventionally used to indicate similar component.
Now in conjunction with the drawings and specific embodiments, the present invention is further described.
As shown in fig.6, the polycrystalline silicon reducing furnace electricity for the improvement that the first patent CN206955649U of inventor is proposed
In the structure of pole, only in 11 periphery setting conductor layer 4 of the conehead of electrode 1, silver coating is such as sprayed, and in the company in addition to conehead 11
Section periphery spraying insulating layer 5 made of pure ceramic powders is connect, and is specifically roughened out using first be roughened on the surface layer of electrode 1
Layer 2, which is then coated on the basis of binder course 3, sprays conductor layer 4 and insulating layer 5 respectively again to improve the fastness of spray coating, from
And form a kind of electrode for reduction furnace of improvement.
Inventor has found during then implementing the art solutions, although the polycrystalline silicon reducing furnace electrode
It is attempt to by passing through ceramic coated powder in the necessary function part of electrode 1 i.e. 11 periphery setting conductor layer 4 of conehead, other parts
End is dielectrically separated from as insulating layer 5 to realize, compared to the polycrystalline silicon reducing furnace electrode of the first technology again before this, can with gram
Taking this kind of electrode structure needs ectonexine to be socketed insulating silicon nitride inner sleeve and silicon dioxide insulator housing respectively and bring structure
Complicated disadvantage, so that structure is simpler.But in actual use, the region due to electrode 1 in addition to conehead 11
Because setting insulating layer 5 is to engage one layer of ceramic powder last layer by way of spraying, it is contemplated that the stabilization of technology difficulty and spray coating
Property and cost, the thickness of the ceramic powder last layer as insulating layer 5 can not be especially thick, thus to guarantee that the pressure resistance of electrode is reliable
Property, in practical applications, it can be still socketed in the barred body part (i.e. linkage section part) of the insulating layer 5 of the ceramic spraying of electrode 1
One insulation sleeve (as shown in Figure 4) improves pressure-resistant reliability to prevent from climbing electricity.In this way, using one in polycrystalline silicon reducing furnace electrode
After the section time, when polycrystalline silicon reducing furnace electrode deposition silicon reaches certain thickness, need to carry out maintenance to it, it is also necessary to remove
Insulation sleeve dismantles entire electrode from chassis of reducing furnace and re-starts after polishing grinding spray-on coating again again.As it can be seen that after improvement
Polycrystalline silicon reducing furnace electrode be still also intended to spend more manpower and material resources and time cost in maintenance, also will affect
To the production efficiency of polysilicon.
Therefore, inventor passes through long term test and research, proposes a kind of maintaining method of electrode for reduction furnace, can be improved also
Former furnace electrode maintenance period and reduction maintenance cost.It is specific as an embodiment:
A is arranged a circle such as Fig. 7 a institute at the position in reduction furnace bell jar that the needs of electrode for reduction furnace are dielectrically separated from
The non-conductive fibre housing shown, or in one circle of position wrapping for needing to be dielectrically separated from or multi-turn (according to actual needs) such as Fig. 7 b institute
The insulating batt shown.
The embodiment is illustrated by taking the polycrystalline silicon reducing furnace electrode that first patent CN206955649U is proposed as an example, is joined
It reads shown in Fig. 8, which is to be sheathed on non-conductive fibre housing as shown in Figure 7a or non-conductive fibre as shown in Figure 7b
Layer be paperwrapped in electrode 1 barred body part (linkage section part) ceramic spraying insulating layer 5 11 or less conehead and boss more than it
Between region, form a non-conductive fibre clad 6, which is just that cylindrical outer shape is also easy to operate, while just at
Chassis of reducing furnace is exposed outside in reduction furnace bell jar, is easy to produce the region of accumulation silicon wafer.
The fiber that the material selection high temperature resistance of non-conductive fibre clad 6 in the embodiment is good and insulation performance is good
Material, at the same it is optimal, and selecting has certain flexible material.The embodiment, it is preferred to use ceramic fibre material.Specifically,
For example, by using Jinan flue thermal Ceramics Co., Ltd provide product code be HLGX-236 standard ceramic fibrous paper or
HLGX-436 high alumina ceramic fibrous paper or the product code for using Shandong Min Ye refractory fibre Co., Ltd to provide is MYTX-BZ-
06 standard type ceramic fiber paper or MYTX-GL-06 high aluminium profiles ceramic fiber paper are wrapped, or using from applicant in this case to
The ceramic fibre sleeving tubular member of these companies customization is socketed.
B is mounted to reduction furnace in the electrode for reduction furnace for being coated with above-mentioned non-conductive fibre clad 6 and uses a period of time
Afterwards, to deposit silicon crystal thereon to when influencing production, removal deposited silicon crystal non-conductive fibre clad 6, again
Non-conductive fibre housing as shown in Figure 7a is sheathed on or insulating batt packet as shown in Figure 7b in the way of in above-mentioned A
Be around in the barred body part of electrode 1 to conehead 11 with the region more than boss, form a new non-conductive fibre clad 6
Afterwards, it can reuse.
The embodiment coats new non-conductive fibre clad 6 after deposited silicon crystal non-conductive fibre clad 6 using removal
It can reach and maintenance quickly carried out to electrode for reduction furnace.Through testing, quickly maintenance is carried out for several times using the way of example
Just need afterwards using dismantled in the conventional mode, pickling and again spraying etc. general maintenances maintenance procedures, reach extension
The period of general maintenance maintenance, the purpose for reducing maintenance cost.
Simultaneously as in the embodiment, due to using non-conductive fibre clad 6 to the barred body part ceramic spraying of electrode
Insulating layer 5 is covered, except through removing -- it covers up to outside Fast-Maintenance again, due to depositing for non-conductive fibre clad 6
Also the insulating reliability of electrode is further being improved, thus in practical applications, can be completely omitted as shown in Figure 4 exhausted
Edge set is also simplifying electrode structure down to a certain degree, is reducing installation difficulty, improve installation effectiveness, reduce hardware at
This.
According to the maintaining method of above-mentioned electrode for reduction furnace, the present invention also proposes that a kind of structure is simple, has and can quickly protect
Support the electrode for reduction furnace of function.
As shown in fig.8, the present invention discloses the electrode for reduction furnace of an embodiment, the 11 periphery setting of conehead of the electrode 1 is led
Body layer 4 such as sprays silver coating, and sprays in the linkage section periphery in addition to conehead 11 such as the insulating layer made of pure ceramic powders
5.Wherein: insulating layer 5 on the barred body of the electrode 1 at least in reduction furnace bell jar exposed parts (need to insulate and
It is easy the region of deposition silicon crystal) one layer of non-conductive fibre clad 6 of covering, the non-conductive fibre clad 6 of the embodiment is will such as
Non-conductive fibre housing shown in Fig. 7 a is sheathed on or insulating batt as shown in Figure 7b is paperwrapped in the formation of electrode 1.
More preferably, the surface layer of electrode 1 is roughened roughened layer 2 out and is then coated on the basis of binder course 3 embodiment
Spray conductor layer 4 and insulating layer 5 respectively again to improve the fastness of spray coating.
The present invention discloses the electrode for reduction furnace of other embodiments, which can going back using other prior arts
Former furnace electrode structure, the difference is that, also it is dielectrically separated from the exposed and needs in reduction furnace bell jar of electrode
Non-conductive fibre housing as shown in Figure 7a is sheathed on or insulating batt as shown in Figure 7b is paperwrapped in 1 shape of electrode by part
It, being capable of quick maintenance function with realization at a non-conductive fibre clad 6.
Although specifically showing and describing the present invention in conjunction with preferred embodiment, those skilled in the art should be bright
It is white, it is not departing from the spirit and scope of the present invention defined by the appended claims, it in the form and details can be right
The present invention makes a variety of changes, and is protection scope of the present invention.
Claims (5)
1. the maintaining method of electrode for reduction furnace, it is characterised in that: be in reduction furnace what the needs of electrode for reduction furnace were dielectrically separated from
Position in bell jar carries out cladding one non-conductive fibre clad of setting, stays in the reduction for being coated with above-mentioned non-conductive fibre clad
Furnace electrode is mounted to reduction furnace using a period of time and after depositing silicon crystal, and removing deposited silicon wafer on electrode for reduction furnace
Body non-conductive fibre clad then re-starts cladding one non-conductive fibre clad of setting on electrode for reduction furnace.
2. the maintaining method of electrode for reduction furnace according to claim 1, it is characterised in that: the cladding of the non-conductive fibre clad
Set-up mode is: being arranged using non-conductive fibre housing.
3. the maintaining method of electrode for reduction furnace according to claim 1, it is characterised in that: the cladding of the non-conductive fibre clad
Set-up mode is: carrying out one circle of wrapping or multi-turn using insulating batt.
4. the maintaining method of electrode for reduction furnace according to claim 1, it is characterised in that: the non-conductive fibre clad is using pottery
Porcelain Fiber Materials.
5. the maintaining method of electrode for reduction furnace according to claim 1, it is characterised in that: the cladding position of the electrode for reduction furnace
Conehead in electrode is with the region more than boss.
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| CN201910505175.0A CN110182813B (en) | 2019-06-12 | 2019-06-12 | Method for maintaining electrode of reduction furnace |
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| CN201910505175.0A CN110182813B (en) | 2019-06-12 | 2019-06-12 | Method for maintaining electrode of reduction furnace |
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| CN110182813A true CN110182813A (en) | 2019-08-30 |
| CN110182813B CN110182813B (en) | 2021-01-12 |
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Citations (8)
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| CN101613106A (en) * | 2008-06-24 | 2009-12-30 | 三菱麻铁里亚尔株式会社 | Poly plant |
| EP2108619B1 (en) * | 2008-03-21 | 2011-06-22 | Mitsubishi Materials Corporation | Polycrystalline silicon reactor |
| CN203021302U (en) * | 2012-11-30 | 2013-06-26 | 四川永祥多晶硅有限公司 | Quartz insulating element of electrode for reduction furnace |
| CN104066679A (en) * | 2012-02-23 | 2014-09-24 | 信越化学工业株式会社 | Polycrystalline silicon rod manufacturing method |
| CN106629737A (en) * | 2016-08-23 | 2017-05-10 | 内蒙古盾安光伏科技有限公司 | Electrode component of polysilicon reducing furnace |
| CN206799174U (en) * | 2017-06-15 | 2017-12-26 | 新特能源股份有限公司 | A kind of polycrystalline silicon reducing furnace electrode insulation component |
| CN206955649U (en) * | 2017-03-10 | 2018-02-02 | 厦门佰事兴新材料科技有限公司 | Polycrystalline silicon reducing furnace electrode |
| CN208948861U (en) * | 2018-09-30 | 2019-06-07 | 新特能源股份有限公司 | A kind of polycrystalline silicon reducing furnace electrode structure |
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2019
- 2019-06-12 CN CN201910505175.0A patent/CN110182813B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2108619B1 (en) * | 2008-03-21 | 2011-06-22 | Mitsubishi Materials Corporation | Polycrystalline silicon reactor |
| CN101613106A (en) * | 2008-06-24 | 2009-12-30 | 三菱麻铁里亚尔株式会社 | Poly plant |
| CN104066679A (en) * | 2012-02-23 | 2014-09-24 | 信越化学工业株式会社 | Polycrystalline silicon rod manufacturing method |
| CN203021302U (en) * | 2012-11-30 | 2013-06-26 | 四川永祥多晶硅有限公司 | Quartz insulating element of electrode for reduction furnace |
| CN106629737A (en) * | 2016-08-23 | 2017-05-10 | 内蒙古盾安光伏科技有限公司 | Electrode component of polysilicon reducing furnace |
| CN206955649U (en) * | 2017-03-10 | 2018-02-02 | 厦门佰事兴新材料科技有限公司 | Polycrystalline silicon reducing furnace electrode |
| CN206799174U (en) * | 2017-06-15 | 2017-12-26 | 新特能源股份有限公司 | A kind of polycrystalline silicon reducing furnace electrode insulation component |
| CN208948861U (en) * | 2018-09-30 | 2019-06-07 | 新特能源股份有限公司 | A kind of polycrystalline silicon reducing furnace electrode structure |
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| LAM, LK ET AL: "Kinetics of nickel-induced lateral crystallization of amorphous silicon thin-film transistors by rapid thermal and furnace anneals", 《APPLIED PHYSICS LETTERS》 * |
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Denomination of invention: Maintenance method of reduction furnace electrode Effective date of registration: 20211101 Granted publication date: 20210112 Pledgee: Bank of China Limited by Share Ltd. Xiamen branch Pledgor: XIAMEN BAISHIXING NEW MATERIAL TECHNOLOGY CO.,LTD. Registration number: Y2021980011685 |