CN208948861U - A kind of polycrystalline silicon reducing furnace electrode structure - Google Patents
A kind of polycrystalline silicon reducing furnace electrode structure Download PDFInfo
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- CN208948861U CN208948861U CN201821609103.8U CN201821609103U CN208948861U CN 208948861 U CN208948861 U CN 208948861U CN 201821609103 U CN201821609103 U CN 201821609103U CN 208948861 U CN208948861 U CN 208948861U
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Abstract
The utility model discloses a kind of polycrystalline silicon reducing furnace electrode structures, including electrode (1) and the insulation assembly on electrode, insulation assembly includes the insulating functional layers (4) laid on the electrode and the sealing ceramic ring (5) and insulation sleeve (3) that are successively sleeved on insulating functional layers, the direct tube section that insulating functional layers are in electrode is extended below from electrode tip tapering to the position of saddle (8), it uses ceramic powders to be made, and sealing ceramic ring is fitted closely with insulating functional layers.The electrode structure can reduce the phase shortage phenomenon in polycrystalline silicon reducing furnace operational process.
Description
Technical field
The utility model belongs to technical field of polysilicon production, is related to a kind of polycrystalline silicon reducing furnace electrode structure.
Background technique
Reduction furnace operation phase shortage is to restrict one of polysilicon yield and the key reason of other important business indicators, monthly shadow
Reduction furnace output 3% or so is rung, direct economic loss is up to nearly million.Wherein run early period and mid-term single-phase earthing phase shortage also
The 15% of the former total heat number of furnace Zhan, early stage phase shortage directly generate extreme influence, forming region heat to the thermal field in reduction furnace
Imbalance, lead to problems such as the underproduction, cauliflower, fall furnace probability increase.
Currently, most domestic enterprise use reduction furnace insulation system it is essentially identical, that is, rely primarily on tetrafluoro set and
Seperated ceramic ring prevents from climbing electricity between electrode and chassis to control the generation of phase shortage problem.Wherein, seperated ceramic ring only has insulation
Effect has the gap that conductive materials enter between seperated ceramic ring and electrode when reduction furnace operation without sealing function
In, long operational time, insulation degree can become very low, ground connection phase shortage circut breaking occur, to interrupt the production of crystal.And
The insulation system that foreign countries use is substantially sealed insulating part, and in contrast sealed insulating part can preferably eliminate four
Fluorine covers carbonization problem, but climbing electric problem still can not be well solved.
For 36 and 48 pairs of stick reduction furnaces, it is primarily present following problems at present:
1, for small-sized reduction furnace, 36 and 48 pairs of stick reduction furnace transverse direction volumes increase, and electrode tip and ceramic ring are in furnace
It is inside easier to knot silicon, is easier to climb the even blowing out of conductance cause reduction furnace phase shortage, because insulation causes phase shortage to be the main original of reduction furnace phase shortage
One of because；
2, tetrafluoro set is radiated by thermal field in furnace, and than 12 and 24 pairs stick reduction furnaces of heat waste carbonization phenomenon are more serious, long-term to transport
Row causes tetrafluoro set carbonization serious, and insulation will lead to carrying ground probability after reducing increases, and replaces the workload of tetrafluoro set
The big and time is long；
3, a large amount of silicon powders generated in growth course enter the groove between ceramic ring and electrode, at high operating temperatures, density
Reaching a certain level, which will lead to, climbs electric generation, and knot silicon can be generated under more serious situation to be caused to climb electricity, for guarantee throughput rate
The considerations of, the generation of silicon powder, which can only be reduced, not to be avoided that, and in this case, only relying on seperated ceramic ring and tetrafluoro set not can avoid
The case where electrically grounded phase shortage is climbed in appearance.
Therefore a kind of insulation assembly for polycrystalline silicon reducing furnace electrode is needed, to solve the above technical problems.
Utility model content
Technical problem to be solved in the utility model is aiming at the above shortcomings existing in the prior art, to provide a kind of energy
Enough reduce the polycrystalline silicon reducing furnace electrode structure of phase shortage phenomenon in polycrystalline silicon reducing furnace operational process.
In order to solve the above technical problems, the utility model adopts the following technical solution:
A kind of polycrystalline silicon reducing furnace electrode structure, the insulation assembly including electrode and on electrode, insulation assembly include
The sealing ceramic ring and insulation sleeve laying insulating functional layers on the electrode and being successively sleeved on insulating functional layers, insulate function
The direct tube section that ergosphere is in electrode is extended below from electrode tip tapering to the position of saddle, and ceramic powders is used to be made, sealing
Ceramic ring is fitted closely with insulating functional layers.
Optionally, insulating functional layers are made of aluminium oxide, silicon nitride or Zirconium dioxide powder.
Optionally, insulating functional layers with a thickness of 250-500 μm, pressure-resistant range is
2500-4000v。
Optionally, sealing ceramic ring includes that can cover the top ceramic ring of the electrode mounting hole on chassis and install in electrode
Lower part ceramic ring in hole.
The length of top ceramic ring is extended below from electrode tip tapering to the top of electrode mounting hole, the length of lower part ceramic ring from
The top of electrode mounting hole extends to the saddle on electrode.
Optionally, the cross sectional shape of top ceramic ring is the double-deck crossette ring.
Optionally, sealing ceramic ring is made of silicon nitride.
Optionally, insulation sleeve is in electrode mounting hole, and upper part is sleeved in the lower part ceramic ring of sealing ceramic ring, its underpart
It extends downwardly and is bonded with the direct tube section of electrode.
Optionally, insulation assembly further includes dead ring, and dead ring is in electrode mounting hole, and be set to insulating functional layers with
It seals between ceramic ring, the lower part ceramic ring equal length of length and sealing ceramic ring.
Optionally, insulation assembly further includes shading ring, and shading ring is provide on the electrode, and the top in electrode mounting hole is simultaneously
The top ceramic ring of covering sealing ceramic ring.
Optionally, insulation sleeve and dead ring are all made of polytetrafluoroethylene (PTFE) and are made, and shading ring is using silicon nitride or oxidation aluminum
At.
Polycrystalline silicon reducing furnace operation in the prior art can be improved using the utility model polycrystalline silicon reducing furnace electrode structure
In the process because of defect, tie silicon, climb electricity caused by phase shortage problem, the polysilicon underproduction, cauliflower, the status that takes place frequently of furnace of falling are reduced, to mention
Rise the yield of polysilicon.
The utility model polycrystalline silicon reducing furnace electrode structure is suitable for the reduction furnace of all type of furnaces, especially suitable for 36 and 48
To in stick reduction furnace.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of polycrystalline silicon reducing furnace electrode structure in the utility model specific embodiment；
Fig. 2 is the structural schematic diagram of the insulating functional layers on electrode.
In figure: 1- electrode, 2- shading ring, 3- insulation sleeve, 4- insulating functional layers, 5- seal ceramic ring, 6- dead ring, the bottom 7-
Disk, 8- saddle.
Specific embodiment
Below in conjunction with the attached drawing in the utility model, the technical solution in the utility model is carried out clear, complete
Description, it is clear that described embodiment is a part of the embodiment of the utility model, instead of all the embodiments.Based on this
Embodiment in utility model, those of ordinary skill in the art are obtained all without making creative work
Other embodiments are fallen within the protection scope of the utility model.
In order to reduce phase shortage problem in polycrystalline silicon reducing furnace operational process, the utility model provides a kind of polycrystalline silicon reducing furnace
Electrode structure, the insulation assembly including electrode and on electrode, insulation assembly include laying insulating functional layers on the electrode,
And it is successively sleeved on sealing ceramic ring and insulation sleeve on insulating functional layers, insulating functional layers are in the direct tube section of electrode from electrode
Until the position of saddle, uses ceramic powders to be made below nose cone portion, sealing ceramic ring is fitted closely with insulating functional layers.Pass through
Above-mentioned insulating functional layers are set on the electrode, is able to ascend the pressure resistance and integral insulation performance of electrode, prevents from discharging, can finally have
Effect reduces the phase shortage problem in polycrystalline silicon reducing furnace operational process.
Embodiment:
As shown in Figure 1, 2, the polycrystalline silicon reducing furnace electrode structure in the present embodiment includes electrode 1 and on electrode 1
Insulation assembly.Wherein, electrode 1 is mounted in the electrode mounting hole on chassis 7, and upper part is stretched out from electrode mounting hole, under
Portion is fitted closely with chassis.Electrode 1 includes integrally formed upper and lower two parts, and top is divided into electrode tip tapering, for conductive,
Its outer diameter becomes larger；Lower part is divided into the direct tube section of electrode, and outer diameter does not change.Saddle 8, saddle 8 are additionally provided on electrode 1
In electrode mounting hole.
Wherein, the insulation assembly is especially suitable in 36 and 48 pairs of stick reduction furnaces.
The insulation assembly includes the insulating functional layers 4 laid on the electrode and is successively sleeved on insulating functional layers 4
Sealing ceramic ring 5 and insulation sleeve 3.As shown in Fig. 2, insulating functional layers 4 are in the direct tube section of electrode, the length of insulating functional layers is
L is extended below from electrode tip tapering up to saddle 8.
Insulating functional layers 4 are made of ceramic powders.In the present embodiment, insulating functional layers 4 using aluminium oxide, silicon nitride,
Or Zirconium dioxide powder is made, purity is greater than 99.99%, and insulating functional layers are not made of mixture, and are not included
Metallic conductor powder.
Optionally, insulating functional layers 4 with a thickness of 250-500 μm, such as with a thickness of 300 μm；The pressure resistance of insulating functional layers
Range is 2500-4000v, such as pressure resistance 3000v.
Specifically, insulating functional layers 4 be one ceramic powders using surface reinforcement modifying technical treatment and made of
Functional coating.Insulating functional layers 4 are pre-processed by integrally formed electrode by matrix surface quartz sand, i.e. progress surface machining
Processing, carries out bottoming through its surface smoothness >=0.8 after the completion of the mechanical process of surface, then by AT13, finally in bottoming
Ceramic powders are laid on electrode, to form the insulating functional layers 4.In the case that temperature change is greater than 180 DEG C, insulate function
Bond strength between ergosphere and matrix is greater than 25MPA.
Sealing ceramic ring 5 is fitted closely with insulating functional layers 4, to play the role of completely cutting off silicon powder for sealing.
In the present embodiment, sealing ceramic ring 5 is up-down structure comprising can cover top ceramic ring and the place of electrode mounting hole
In the lower part ceramic ring in electrode mounting hole.
The length of top ceramic ring is extended below from electrode tip tapering to the top of electrode mounting hole, the length of lower part ceramic ring
It is the saddle 8 extended to from the top (i.e. the upper surface on chassis) of electrode mounting hole on electrode.Top ceramic ring and lower part ceramic ring
Internal diameter is identical, and the outer diameter of top ceramic ring is greater than the outer diameter of lower part ceramic ring, protrudes from chassis 7, so as to cover electrode peace
Fill hole.Wherein, top ceramic ring is bonded with electrode seal, plays the role of completely cutting off silicon powder.
In the present embodiment, sealing ceramic ring 5 preferably use silicon nitride material, lower part be located at tetrafluoro set and electrode tip tapering it
Between, the identical top outer diameter of inside diameter is greater than lower part, and it is prominent on chassis, cover electrode mounting hole.
As shown in Fig. 2, the cross sectional shape of top ceramic ring is the double-deck crossette shape, naturally it is also possible to use multilayer crossette ring.It is logical
It crosses using this shape, has on the one hand ensured that chassis 7 and interelectrode gap are greater than creepage distance, and integral type is configured to
Motor rate is climbed in reduction；On the other hand it is also convenient for installing and separating with electrode tip.
In this implementation, between chassis 7 and electrode 1, the top of insulation sleeve 3 is covered under sealing ceramic ring insulation sleeve 3
In portion's ceramic ring, the lower part of insulation sleeve continues to extend downwardly and be bonded with the direct tube section of electrode, and insulation sleeve 3 passes through copper spiral shell under electrode
Mother fits closely with chassis 7.
Optionally, the insulation assembly further includes dead ring 6, and dead ring 6 is in below the top ceramic ring of sealing ceramic ring, and
Between insulating functional layers 4 and sealing ceramic ring 5, the purpose of setting is while silicon powder to be avoided to accumulate to increase sealing function
Caused insulation decline, the position of dead ring 6 is corresponding to the sealing position of lower part ceramic ring of ceramic ring, and the length of the two is also equal.
In the present embodiment, insulation sleeve 3 and dead ring 6 are made of polytetrafluoroethylene (PTFE).
Optionally, the insulation assembly further includes shading ring 2, and shading ring 2 is cyclic annular or three-dimensional bell-type, and shading ring 2 is provide with
On electrode 1, the nose cone portion of electrode is stretched out from shading ring 2, and the top in electrode mounting hole simultaneously covers the upper of sealing ceramic ring
Portion's ceramic ring, that is to say, that shading ring 2 is located on chassis, and position is corresponding to the sealing top ceramic ring of ceramic ring.
The length of shading ring 2 is greater than or equal to the length of the top ceramic ring of sealing ceramic ring.Shading ring 2 uses silicon nitride/oxygen
Change aluminium to be made, plays a part of to shield heat radiation reduction knot silicon.
In the present embodiment, in above-mentioned insulation assembly, it is made of in insulation assembly insulation sleeve 3, sealing ceramic ring 5, dead ring 6
Seal assembly cause insulation to decline to prevent silicon powder in reduction furnace operational process from entering the gap of chassis and electrode；By sealing
Ceramic ring 5, shading ring 2 constitute the insulating assembly of electrode in insulation assembly, to prevent 4 knot silicon of insulating functional layers, while can prevent
Insulation sleeve 3 is because of decline of insulating caused by carbonization damage.
The utility model polycrystalline silicon reducing furnace electrode structure improves two-piece type insulation assembly in the prior art, from knot
On structure in all directions to electrode carry out insulation and sealing protection, so as to reduce in reduction furnace operational process in the prior art because
Defect ties silicon, climbs phase shortage problem caused by electricity, it can be achieved that polysilicon yield is promoted, cauliflower ratio declines and controls the rate of falling furnace
Purpose is more advantageous to the promotion and improvement of technology controlling and process.
It is understood that embodiment of above is merely to illustrate that the principles of the present invention and uses exemplary
Embodiment, however the utility model is not limited thereto.For those skilled in the art, this is not being departed from
In the case where the spirit and essence of utility model, various changes and modifications can be made therein, these variations and modifications are also considered as this reality
With novel protection scope.
Claims (10)
1. a kind of polycrystalline silicon reducing furnace electrode structure, including electrode (1) and the insulation assembly on electrode, which is characterized in that
Insulation assembly includes the insulating functional layers (4) laid on the electrode and the sealing ceramic ring being successively sleeved on insulating functional layers
(5) it is extended below from electrode tip tapering to the position of saddle (8) with insulation sleeve (3), the direct tube section that insulating functional layers are in electrode,
It uses ceramic powders to be made, and sealing ceramic ring is fitted closely with insulating functional layers.
2. polycrystalline silicon reducing furnace electrode structure as described in claim 1, which is characterized in that insulating functional layers (4) are using oxidation
Aluminium, silicon nitride or Zirconium dioxide powder are made.
3. polycrystalline silicon reducing furnace electrode structure as described in claim 1, which is characterized in that insulating functional layers (4) with a thickness of
250-500 μm, pressure-resistant range is 2500-4000v.
4. polycrystalline silicon reducing furnace electrode structure as described in any one of claims 1-3, which is characterized in that sealing ceramic ring (5) packet
The top ceramic ring that can cover the electrode mounting hole on chassis and the lower part ceramic ring in electrode mounting hole are included,
The length of top ceramic ring is extended below from electrode tip tapering to the top of electrode mounting hole, and the length of lower part ceramic ring is from electrode
The top of mounting hole extends to the saddle (8) on electrode.
5. polycrystalline silicon reducing furnace electrode structure as claimed in claim 4, which is characterized in that the cross sectional shape of top ceramic ring is double
Layer crossette ring.
6. polycrystalline silicon reducing furnace electrode structure as claimed in claim 4, which is characterized in that sealing ceramic ring (5) uses silicon nitride
It is made.
7. polycrystalline silicon reducing furnace electrode structure as claimed in claim 4, which is characterized in that insulation sleeve (3) is in electrode installation
Kong Zhong, upper part are sleeved in the lower part ceramic ring of sealing ceramic ring, and its underpart extends downwardly and is bonded with the direct tube section of electrode.
8. polycrystalline silicon reducing furnace electrode structure as claimed in claim 4, which is characterized in that insulation assembly further includes dead ring
(6), dead ring is in electrode mounting hole, and is set between insulating functional layers and sealing ceramic ring, length and sealing ceramic ring
Lower part ceramic ring equal length.
9. polycrystalline silicon reducing furnace electrode structure as claimed in claim 8, which is characterized in that insulation assembly further includes shading ring
(2), shading ring is provide on the electrode, the top in electrode mounting hole and the top ceramic ring for covering sealing ceramic ring.
10. polycrystalline silicon reducing furnace electrode structure as claimed in claim 9, which is characterized in that insulation sleeve and dead ring are all made of
Polytetrafluoroethylene (PTFE) is made, and shading ring is made of silicon nitride or aluminium oxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201821609103.8U CN208948861U (en) | 2018-09-30 | 2018-09-30 | A kind of polycrystalline silicon reducing furnace electrode structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821609103.8U CN208948861U (en) | 2018-09-30 | 2018-09-30 | A kind of polycrystalline silicon reducing furnace electrode structure |
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| CN208948861U true CN208948861U (en) | 2019-06-07 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110182813A (en) * | 2019-06-12 | 2019-08-30 | 厦门佰事兴新材料科技有限公司 | The maintaining method of electrode for reduction furnace |
| CN110759345A (en) * | 2019-10-31 | 2020-02-07 | 新疆东方希望新能源有限公司 | Ceramic insulation ring structure applied to reduction furnace |
| CN110759346A (en) * | 2019-11-28 | 2020-02-07 | 广东省新材料研究所 | Polysilicon reduction furnace electrode and manufacturing method thereof |
| CN115092932A (en) * | 2022-07-04 | 2022-09-23 | 衡阳凯新特种材料科技有限公司 | Reduction furnace for producing polycrystalline silicon and feeding control method |
-
2018
- 2018-09-30 CN CN201821609103.8U patent/CN208948861U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110182813A (en) * | 2019-06-12 | 2019-08-30 | 厦门佰事兴新材料科技有限公司 | The maintaining method of electrode for reduction furnace |
| CN110759345A (en) * | 2019-10-31 | 2020-02-07 | 新疆东方希望新能源有限公司 | Ceramic insulation ring structure applied to reduction furnace |
| CN110759346A (en) * | 2019-11-28 | 2020-02-07 | 广东省新材料研究所 | Polysilicon reduction furnace electrode and manufacturing method thereof |
| CN115092932A (en) * | 2022-07-04 | 2022-09-23 | 衡阳凯新特种材料科技有限公司 | Reduction furnace for producing polycrystalline silicon and feeding control method |
| CN115092932B (en) * | 2022-07-04 | 2023-08-22 | 衡阳凯新特种材料科技有限公司 | Reduction furnace for producing polycrystalline silicon and feeding control method |
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Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2023990000586 Denomination of utility model: An electrode structure for polycrystalline silicon reduction furnace Granted publication date: 20190607 License type: Common License Record date: 20230605 |