CN102719892A - Sapphire crystal growth furnace energy saving device - Google Patents

Sapphire crystal growth furnace energy saving device Download PDF

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Publication number
CN102719892A
CN102719892A CN2012101218283A CN201210121828A CN102719892A CN 102719892 A CN102719892 A CN 102719892A CN 2012101218283 A CN2012101218283 A CN 2012101218283A CN 201210121828 A CN201210121828 A CN 201210121828A CN 102719892 A CN102719892 A CN 102719892A
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China
Prior art keywords
sapphire
ring
energy saver
electrode
crystal growth
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CN2012101218283A
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Chinese (zh)
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CN102719892B (en
Inventor
虞希高
吴云才
周国清
罗庆波
周林
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Zhejiang Huifeng Zhicheng Technology Co.,Ltd.
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Zhejiang Shangcheng Science & Technology Co Ltd
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Priority to CN201210121828.3A priority Critical patent/CN102719892B/en
Publication of CN102719892A publication Critical patent/CN102719892A/en
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Abstract

The invention belongs to the sapphire crystal growth furnace technology field and specifically relates to a sapphire crystal growth furnace energy saving device. The sapphire crystal growth furnace energy saving device comprises an assembled corundum ceramic retaining ring arranged between an electrode protective sleeve and a furnace wall; a cross section of the retaining ring is in the shape of L; the retaining ring comprises an annular retaining edge and a cylindrical base, wherein an external diameter of the annular retaining edge is greater than a furnace wall electrode hole and an internal diameter of the annular retaining edge is greater than an electrode external diameter; and an internal diameter of the cylindrical base is consistent with the electrode protective sleeve. Preferably, the energy saving device further comprises a second retaining ring arranged between the electrode protective sleeve and a graphite casing. According to the invention, by installing the energy saving device on three electrodes of the sapphire crystal growth furnace, not only heat protection is carried out for hearth welding weak positions, but also can energy loss generated by heat radiation be reduced; the internal quality of sapphire crystals is improved; and a material basis for production of sapphire crystals with greater size is improved.

Description

The long brilliant stove energy saver of a kind of sapphire
Technical field
The invention belongs to the long brilliant stove technical field of sapphire, be specifically related to the long brilliant stove energy saver of a kind of sapphire.
Background technology
Sapphire crystal is owing to have HS, high firmness; A series of good comprehensive physical and chemical performances such as high temperature resistant, wear-resisting wiping, chemicalstability are good; Being the epitaxially grown commercialization substrate material of GaN base LED, accounting for market 95%, is the base mateiral of semiconductor lighting technology and industry.
The fusing point of sapphire crystal is up to 2050 ℃; It is extremely difficult to grow; The above sapphire crystal of diameter 200mm mainly contains kyropoulos and heat-exchanging method; Heat-exchanging method is the present unique method of the sapphire crystal of stable growth overall dimension and high optical quality in the world, and it can independently control in the crystal thermograde in the thermograde and melt, helps growing high-quality, large-sized sapphire crystal.At present can 100 kilograms of sapphire optical crystals of volume production.
The brilliant stove of length that heat-exchanging method uses is exactly to load onto the heat exchanger that a tungsten is processed in the bottom of vacuum graphite resistor furnace, in cooling helium flow mistake is arranged, be placed on the crucible that raw material is housed on the top of heat exchanger; Both overlap at the center, and seed crystal places the center of crucible bottom, after the raw material in the crucible is heated fusing; At this moment, because helium flow through heat exchanger cooling, does not melt seed crystal; After helium gas flow strengthens gradually; The also corresponding increase of then taking away from melt of heat is grown up seed crystal gradually, and the melt in the whole crucible is all solidified.
The heat-exchanging method production sapphire crystal cycle is very long, and more than 15 days, needed heating power is very high, and its long brilliant characteristics have determined long brilliant stove in for a long time, all to be in the condition of high temperature.The long brilliant furnace structure of prior art sapphire is as shown in Figure 1, and long brilliant stove well heater links to each other with three electrodes, and there are three holes in three electrode, can produce heat leakage.
The leakage of this place's heat has following problem:
1) can cause burner hearth welding weakness to occur possibly leaking even the crack, the minor amount of water of leakage flash evapn in the long brilliant stove of 2000 degree becomes gaseous state, causes the furnace pressure fast rise, and long brilliant process is out of control, and possibly cause the production safety accident.
2) leakage of heat is exactly the waste of heat energy, can increase the heating power in the sapphire production process, and each more energy consumption of growth needs is unfavorable for energy-conservation and environmental protection.
3) leakage of heat can reduce the space in the temperature field in well heater or the crucible, and has limited more greatly in the temperature field, higher crystalline production, also can reduce the internal soundness of the sapphire crystal of present production.
Summary of the invention
The present invention is according to the deficiency of prior art; A kind of assembly type energy saver is provided; Be installed on three electrodes of the long brilliant stove of sapphire, both can weld weak location and carry out thermal protection, can reduce the energy waste that thermal radiation produces again burner hearth; Improve the inner quality of sapphire crystal, improved basic substance for producing larger sized sapphire crystal.
Concrete technical scheme of the present invention is:
The long brilliant stove energy saver of a kind of sapphire; It is characterized in that this energy saver comprises an assembly type corundum ceramic back-up ring that is arranged between electrode protection cover and the furnace wall; This back-up ring xsect is L-shaped; Internal diameter overlaps consistent cylinder base greater than the annular retaining edge of electrode external diameter with an internal diameter and electrode protection greater than the furnace wall electrode hole to comprise external diameter.Optimally, said energy saver also comprises second back-up ring of being located between electric motor protecting cover and the graphite casing.
Optimally, said assembly type back-up ring is put together by two semicircles are scarce.
Optimally, the retaining of said back-up ring is provided with a circular groove that is used for socket electrode protection cover along the surface.
Optimally, said semicircle lacks through buckle structure continuous.
Optimally, said retaining is curved along the bottom.
Cylinder base can be arranged to certain tapering, is complementary with burner hearth, and this helps annulus and closely contacts with burner hearth.
The heat conduction efficiency of corundum ceramic is lower; Protection can effectively be blocked to three electrode welding of burner hearth weakness in the ceramic ring lateral part; Effectively reduce the actual temperature of electrode commissure, the stress of avoiding weld seam to produce because of thermal radiation causes cracking, simultaneously the also space between the enclosed-electrode graphite protective sleeve to a certain extent; Prevent heat leak, thereby improve the thermo-efficiency of thermal field.
The pottery back-up ring adopts high-quality corundum to fire and forms, and purity 95%-99% can bear the above high temperature of 1700 degree for a long time and indeformable, and the chemical ingredients of corundum is identical with sapphire simultaneously, thereby in the burner hearth of having avoided impurity is introduced, influences the crystalline quality.
Because the mounting condition of the long brilliant stove of sapphire is limit, and can't make back-up ring and graphite protective sleeve one-body molded, therefore, this programme is the optimal selection under the prior art condition.
Description of drawings
Fig. 1 is the long brilliant furnace structure synoptic diagram of prior art sapphire.
Fig. 2 is the long brilliant furnace structure synoptic diagram of sapphire that contains the present invention's pottery back-up ring.
Fig. 3 is the present invention's pottery back-up ring plan structure synoptic diagram.
Fig. 4 is the present invention's pottery back-up ring sectional structure synoptic diagram.
Fig. 5 is the long brilliant furnace structure synoptic diagram of sapphire that contains two ceramic back-up rings of the present invention.
Fig. 6 is an arced ceramic back-up ring sectional structure synoptic diagram of the present invention.
Fig. 7 is the present invention's pottery back-up ring male and female amalgamation structural representation.
Fig. 8 is the present invention's pottery back-up ring step amalgamation structural representation.
Wherein, electrode 1, furnace wall 2, graphite casing 3, well heater 4, electrode protection cover 5; Slit 6, back-up ring 7, the second back-up rings 8, electrode protection cover 9, circular groove 10, the first semicircles lack 71; Second semicircle lacks 72, projection 710, base 711, retaining edge 712, plane 713; Projection 714, groove 720, groove 724, base 82, cambered surface 81.
Embodiment
Below in conjunction with accompanying drawing the present invention is done further description.
Like Fig. 2-shown in Figure 4; Energy saver comprises an assembly type corundum ceramic back-up ring 7 that is arranged between electrode protection cover 9 and the furnace wall 2; These back-up ring 7 xsects are L-shaped; Internal diameter overlaps consistent cylinder base 711 greater than the annular retaining edge 712 of electrode external diameter with an internal diameter and electrode protection greater than the furnace wall electrode hole to comprise external diameter.
As shown in Figure 5, this energy saver also can comprise second back-up ring 8 of being located between electric motor protecting cover and the graphite casing.
As shown in Figure 3, assembly type back-up ring 7 lacks 72 by semicircle scarce 71 and semicircle and is put together, and the retaining of back-up ring 7 is provided with a circular groove 10 that is used for socket electrode protection cover 9 along 712 surfaces.
Said semicircle lacks 71 and links to each other through buckle structure with semicircle scarce 72, and concrete structure can be like Fig. 7 and two kinds of heteroid buckles shown in Figure 8.
Optimally, said retaining can be curved along the bottom 81, the burner hearth 2 of the circular arc of fitting better and graphite casing 3.

Claims (6)

1. a sapphire is grown brilliant stove energy saver; It is characterized in that this energy saver comprises an assembly type corundum ceramic back-up ring that is arranged between electrode protection cover and the furnace wall; This back-up ring xsect is L-shaped; Internal diameter overlaps consistent cylinder base greater than the annular retaining edge of electrode external diameter with an internal diameter and electrode protection greater than the furnace wall electrode hole to comprise external diameter.
2. the long brilliant stove energy saver of sapphire according to claim 1 is characterized in that said energy saver also comprises second back-up ring of being located between electric motor protecting cover and the graphite casing.
3. the long brilliant stove energy saver of sapphire according to claim 1 and 2 is characterized in that said back-up ring is put together by two semicircles are scarce.
4. the long brilliant stove energy saver of sapphire according to claim 1 and 2 is characterized in that the retaining of said back-up ring is provided with a circular groove that is used for socket electrode protection cover along the surface.
5. the long brilliant stove energy saver of sapphire according to claim 3, it is continuous to it is characterized in that said semicircle lacks through buckle structure.
6. the long brilliant stove energy saver of sapphire according to claim 1 and 2 is characterized in that the retaining of said back-up ring is curved along the bottom.
CN201210121828.3A 2012-04-24 2012-04-24 Sapphire crystal growth furnace energy saving device Active CN102719892B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210121828.3A CN102719892B (en) 2012-04-24 2012-04-24 Sapphire crystal growth furnace energy saving device

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CN201210121828.3A CN102719892B (en) 2012-04-24 2012-04-24 Sapphire crystal growth furnace energy saving device

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CN102719892B CN102719892B (en) 2015-01-28

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104195641A (en) * 2014-09-04 2014-12-10 南京晶升能源设备有限公司 Riveted tungsten plate heater for sapphire single crystal furnace

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201258367Y (en) * 2008-07-11 2009-06-17 北京有色金属研究总院 Electric pole mechanism for vertical pulling ingle-crystal furnace thermal field
CN101519801A (en) * 2008-02-26 2009-09-02 绿能科技股份有限公司 Long crystal furnace construction configuration
CN201678765U (en) * 2010-05-04 2010-12-22 雅安永旺硅业有限公司 Combined electrode insulation ring
CN202610392U (en) * 2012-04-24 2012-12-19 浙江上城科技有限公司 Energy-saving device of sapphire crystal growing furnace

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101519801A (en) * 2008-02-26 2009-09-02 绿能科技股份有限公司 Long crystal furnace construction configuration
CN201258367Y (en) * 2008-07-11 2009-06-17 北京有色金属研究总院 Electric pole mechanism for vertical pulling ingle-crystal furnace thermal field
CN201678765U (en) * 2010-05-04 2010-12-22 雅安永旺硅业有限公司 Combined electrode insulation ring
CN202610392U (en) * 2012-04-24 2012-12-19 浙江上城科技有限公司 Energy-saving device of sapphire crystal growing furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104195641A (en) * 2014-09-04 2014-12-10 南京晶升能源设备有限公司 Riveted tungsten plate heater for sapphire single crystal furnace

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Address after: 314400 Haining Economic Development Zone, Zhejiang City, Jiaxing Province, Kim Jin Road, No. 11, No.

Patentee after: Zhejiang Huifeng Alwayseal Technology Ltd

Address before: 314400 Haining City, Zhejiang Province Economic Development Zone in the city of gold on the road No. 11, No.

Patentee before: Zhejiang Shangcheng Science & Technology Co., Ltd.

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Address after: 314400 Jinchang Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang, 11

Patentee after: Zhejiang Huifeng Zhicheng Technology Co.,Ltd.

Address before: 314400 Jinchang Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang, 11

Patentee before: ZHEJIANG HUIFENG PLASTIC TECHNOLOGY CO.,LTD.