CN202610393U - Heat preserving device for sapphire crystal growth furnace - Google Patents
Heat preserving device for sapphire crystal growth furnace Download PDFInfo
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- CN202610393U CN202610393U CN 201220177711 CN201220177711U CN202610393U CN 202610393 U CN202610393 U CN 202610393U CN 201220177711 CN201220177711 CN 201220177711 CN 201220177711 U CN201220177711 U CN 201220177711U CN 202610393 U CN202610393 U CN 202610393U
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- graphite
- heat preserving
- insulation layer
- thermal insulation
- sapphire
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Abstract
The utility model relates to a heat preserving device for a sapphire crystal growth furnace. The heat preserving device comprises a graphite felt gasket and a graphite felt enclosure, wherein the graphite felt gasket consists of three fan-shaped soft felts which are between a graphite snap ring and a lower heat preserving layer and have the same shape as that of the cross section of the heat preserving layer, and is used for reducing the gap between the graphite snap ring and the lower heat preserving layer; and the graphite felt enclosure is a square graphite quilt of which the length is equal to the length of the periphery of the heat preserving layer, contains three electrode holes with open bottoms and is mounted on an electrode protective sleeve to envelop the gap between the graphite snap ring and the lower heat preserving layer. The heat preserving device is arranged between a thermal-field snap ring and the lower heat preserving layer or on the edge of a joint part, can reduce the energy consumption of thermal radiation, improves the inherent quality of the sapphire crystal, and improves the material basis for the production of bigger sapphire crystals.
Description
Technical field
The utility model relates to the long brilliant stove attemperator of a kind of sapphire.
Background technology
Sapphire crystal is owing to have HS, high firmness; A series of good comprehensive physical and chemical performances such as high temperature resistant, wear-resisting wiping, chemicalstability are good; Being the epitaxially grown commercialization substrate material of GaN base LED, accounting for market 95%, is the base mateiral of semiconductor lighting technology and industry.
The fusing point of sapphire crystal is up to 2050 ℃; It is extremely difficult to grow; The above sapphire crystal of diameter 200mm mainly contains kyropoulos and heat-exchanging method; Heat-exchanging method is the present unique method of the sapphire crystal of stable growth overall dimension and high optical quality in the world, and it can independently control in the crystal thermograde in the thermograde and melt, helps growing high-quality, large-sized sapphire crystal.At present can 100 kilograms of sapphire optical crystals of volume production.
The brilliant stove of length that heat-exchanging method uses is exactly to load onto the heat exchanger that a tungsten is processed in the bottom of vacuum graphite resistor furnace, in cooling helium flow mistake is arranged, be placed on the crucible that raw material is housed on the top of heat exchanger; Both overlap at the center, and seed crystal places the center of crucible bottom, after the raw material in the crucible is heated fusing; At this moment, because helium flow through heat exchanger cooling, does not melt seed crystal; After helium gas flow strengthens gradually; The also corresponding increase of then taking away from melt of heat is grown up seed crystal gradually, and the melt in the whole crucible is all solidified.
It is very long that heat-exchanging method is produced the sapphire crystal cycle, and more than 15 days, needed heating power is very high.According to long brilliant technology and experience, the thermal equilibrium stage before the long brilliant beginning has determined long power when brilliant, and the heat-insulating property that improves thermal field helps to reduce the heating power in long brilliant stage.As far as whole thermal field, the leakage of heat is except three electrode holes, and the slit between split ring and the bottom thermal insulation layer also is a principal passage of leaking.
The leakage of this place's heat has following problem:
1) leakage of heat is exactly the waste of heat energy, can increase the heating power in the sapphire production process, and each more energy consumption of growth needs is unfavorable for energy-conservation and environmental protection.
2) leakage of heat can reduce the space in the temperature field in well heater or the crucible, and has limited more greatly in the temperature field, higher crystalline production, also can reduce the internal soundness of the sapphire crystal of present production.
Summary of the invention
The utility model is according to the deficiency of existing installation; Provide a kind of reusable length brilliant stove attemperator; Be installed between thermal field split ring and the bottom thermal insulation layer or the edge, joint portion; Can reduce the energy waste that thermal radiation produces, improve the inner quality of sapphire crystal, improve basic substance for producing larger sized sapphire crystal.
The technological line of the utility model:
The long brilliant stove attemperator of a kind of sapphire is characterized in that this attemperator comprises
The graphite felt pad is made up of three fan-shaped soft felts that place between graphite split ring and the bottom thermal insulation layer, shape is identical with the thermal insulation layer cross section, is used to reduce the slit between graphite split ring and the bottom thermal insulation layer,
Graphite felt is surrounded, and the soft felt of square graphite that length equates with the thermal insulation layer periphery contains the electrode hole of three bottom openings on it, be installed in electrode protection and put the slit that is used between coating graphite split ring and the bottom thermal insulation layer.
Owing to be plane contact outwardly between graphite split ring and the bottom thermal insulation layer in the long brilliant stove of sapphire; But can know after amplifying; Because the surface flatness of graphite split ring and bottom thermal insulation layer is not enough, be actually the multiple spot contact between the two, there is bigger slit.The utility model scheme contacts with the bottom insulation layer surface with the graphite split ring through the flexible material of graphite felt, can increase contact area greatly, thereby the slit that causes both reduces greatly.
Further, be provided with connection piece between the said fan-shaped pad.The purpose that connection piece is set between pad is the exposed portions serve of coated electrode protective sleeve, reduces the slit of electrode protection cover and graphite split ring.
Further, said fan-shaped pad upper surface is the indent arc.Curved surfaces helps pad edge and the seamless link of electrode protection cover.
Wherein, the thermal insulation layer sectional area is identical between two electrodes of the specification of fan-shaped soft felt and long brilliant stove.Fan-shaped soft felt is placed between split ring and the bottom thermal insulation layer slit is between the two reduced.
The length of the soft felt of square graphite equates with the thermal field outer perimeter, according to the position of electrode in thermal field, on soft felt, opens three electrode holes, and the while is at the bottom slot of electrode hole.
The soft felt of square graphite can be installed in electrode protection and put, and twines the slit between split ring and the bottom thermal insulation layer simultaneously.
The utility model attemperator through splitting slit between choma and the bottom thermal insulation layer effective filling and block, can reduce heat leakage, thereby improve thermal field efficient, cut down the consumption of energy.
The material of two kinds of soft felts is identical with the material of soft felt in the thermal field, can effectively avoid introducing other impurity, thereby avoid influencing the crystalline quality.
Description of drawings
Fig. 1 is the long brilliant furnace structure sectional view of the sapphire of using the utility model.
Fig. 2 is the utility model graphite felt pads chip architecture synoptic diagram.
Fig. 3 is the long brilliant stove part-structure synoptic diagram of the sapphire of using the utility model graphite felt pad.
Fig. 4 surrounds the deployed configuration synoptic diagram for the utility model graphite felt.
Fig. 5 is the utility model graphite felt sectional structure synoptic diagram.
The long brilliant stove part-structure synoptic diagram of sapphire that Fig. 6 surrounds for using the utility model graphite felt.
Fig. 7 is the long brilliant furnace structure sectional view of the sapphire of using the utility model graphite felt pad.
Fig. 8 is the utility model graphite felt pad and connection piece structural representation.
Wherein, furnace wall 1, graphite felt surrounds 2, electrode 3, electrode protection cover 4, graphite felt pad 5, graphite casing 6, well heater 7, burner hearth 8, graphite split ring 9, thermal insulation layer 10, connection piece 11, electrode hole 21, opening 22, bottom 52, end 51.
Embodiment
Below in conjunction with accompanying drawing the present invention is done further description.
As shown in Figure 1, this programme attemperator comprises graphite felt encirclement 2 and graphite felt pad 5.
Wherein, Graphite felt pad 5 pads as shown in Figure 2 are located between graphite split ring 9 and the bottom thermal insulation layer 10 (as shown in Figure 3); Three fan-shaped soft felts by shape is identical with bottom thermal insulation layer 10 xsects are formed, and are used to fill up the slit between graphite split ring 9 and the bottom thermal insulation layer 10.Optimally, between this graphite felt pad 5 connection piece 11 can be set, as shown in Figure 8, be used for further remedying that electrode protection overlaps the slit of 4 parts between graphite split ring 9 and the bottom thermal insulation layer 10; The xsect of graphite felt pad 5 can be rectangle or indent curved surfaces as shown in Figure 6, and 4 seamless joining were overlapped for electrode protection in end 51.Its medial end portions 51 is higher than bottom 52.
It is as shown in Figure 4 that graphite felt is surrounded 2 structures; It is the soft felt of square graphite that a length equates with bottom thermal insulation layer 10 peripheries; The electrode hole 21 that contains three bottom openings 22 on it; Be installed in electrode protection and put the slit that is used between coating graphite split ring 9 and the bottom thermal insulation layer 10, its installation site is as shown in Figure 5.
The utility model also can only use graphite felt to surround or the graphite felt pad separately according to concrete needs, is illustrated in figure 7 as the structural representation of independent use graphite felt pad 5.
Wherein, A kind of further prioritization scheme is to be fined away in the bottom of split ring 9, and thermal insulation layer 10 tops are corresponding makes structural modification, forms a contract type structure; And then graphite felt pad 5 and graphite felt are surrounded 2 add, utilize outwards the distributing of gradient block heat of thermal insulation layer 10.
Claims (3)
1. the long brilliant stove attemperator of sapphire is characterized in that this attemperator comprises
The graphite felt pad is made up of three fan-shaped soft felts that place between graphite split ring and the bottom thermal insulation layer, shape is identical with the thermal insulation layer cross section, is used to reduce the slit between graphite split ring and the bottom thermal insulation layer,
Graphite felt is surrounded, and the soft felt of square graphite that length equates with the thermal insulation layer periphery contains the electrode hole of three bottom openings on it, be installed in electrode protection and put the slit that is used between coating graphite split ring and the bottom thermal insulation layer.
2. the long brilliant stove attemperator of sapphire according to claim 1 is characterized in that being provided with connection piece between the said fan-shaped pad.
3. the long brilliant stove attemperator of sapphire according to claim 1 is characterized in that said fan-shaped pad upper surface is the indent arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220177711 CN202610393U (en) | 2012-04-24 | 2012-04-24 | Heat preserving device for sapphire crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220177711 CN202610393U (en) | 2012-04-24 | 2012-04-24 | Heat preserving device for sapphire crystal growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202610393U true CN202610393U (en) | 2012-12-19 |
Family
ID=47344105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220177711 Expired - Fee Related CN202610393U (en) | 2012-04-24 | 2012-04-24 | Heat preserving device for sapphire crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202610393U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020202793A1 (en) | 2020-03-04 | 2021-09-09 | Sgl Carbon Se | Electrically decoupled high temperature thermal insulation |
-
2012
- 2012-04-24 CN CN 201220177711 patent/CN202610393U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102020202793A1 (en) | 2020-03-04 | 2021-09-09 | Sgl Carbon Se | Electrically decoupled high temperature thermal insulation |
| WO2021175594A1 (en) | 2020-03-04 | 2021-09-10 | Sgl Carbon Se | Electrically decoupled high-temperature thermal insulation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121219 Termination date: 20160424 |