CN206799173U - Polycrystalline silicon reducing furnace pre-heater - Google Patents
Polycrystalline silicon reducing furnace pre-heater Download PDFInfo
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- CN206799173U CN206799173U CN201720347743.5U CN201720347743U CN206799173U CN 206799173 U CN206799173 U CN 206799173U CN 201720347743 U CN201720347743 U CN 201720347743U CN 206799173 U CN206799173 U CN 206799173U
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- heater
- polycrystalline silicon
- reducing furnace
- silicon reducing
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Abstract
The utility model discloses a kind of polycrystalline silicon reducing furnace pre-heater, it includes interstar connection room, flange group and at least a set of heater block, heater block includes resistive heater and sleeve pipe, resistive heater is the alloy of multiply winding establishment, resistive heater is sheathed on inside pipe casing, sleeve pipe intermediate sleeve is provided with least one spacer flanger for fixed sleeving, and the middle part of sleeve pipe is provided with the suspension rod being connected with flange group；Resistive heater is connected with the wiring pile being connected with external power cord, and wiring pile is arranged in flange group, and the top of flange group is provided with interstar connection room.The utility model compares existing heater, and heater block does not allow power that is yielding, and can providing higher, and can effectively ensure that the high cleanliness of reduction furnace inner environment, and can adjust operating power and programming rate as needed, easily and effectively, highly reliable.
Description
Technical field
It the utility model is related to a kind of device for producing polysilicon, and in particular to a kind of polycrystalline silicon reducing furnace preheating
Device.
Background technology
At present, in current production of polysilicon both at home and abroad, mostly using Siemens Method is improved, improved Siemens utilize hydrogen also
The mode of former trichlorosilane produces polysilicon.The reduction of trichlorosilane is water made of stainless steel or nickel-base alloy in Ultra-low carbon
Carry out in cooling furnace wall reduction furnace, by hydrogen by trichlorosilane reduction into silicon；Silicon core is hit when domestic production polycrystalline silicon reducing furnace starts
Wear and be substantially divided to two kinds：One kind is to be punctured silicon core in reduction furnace with high voltage；Another kind is in reduction furnace using pre-heater
Portion is heated to 400~500 degrees Celsius, raises silicon core temperature, and resistance is suddenly poly- to be declined, then applies voltage breakdown.Domestic reduction furnace
Pre-heater is usually using electric heating tube resistance heating manner, and equipment is reliable, but pre-heater underpower, the efficiency of heating surface
It is low.And production of polysilicon needs environment to keep high purity, while to keep occurring without inside pre-heater going out because of high temperature
Situation about now deforming, these are all the problem of existing pre-heater are difficult to.
The content of the invention
The utility model is directed to the above-mentioned deficiency of prior art, there is provided one kind can adapt to high-power, holding environment height
Degree of purity and resistant to elevated temperatures polycrystalline silicon reducing furnace pre-heater.
In order to solve the above technical problems, the utility model employs following technical proposal：
Provide a kind of polycrystalline silicon reducing furnace pre-heater, it is characterised in that including interstar connection room, flange group and at least a set of
Heater block, heater block include resistive heater and sleeve pipe, and resistive heater is that multiply winds the alloy worked out, adding thermal resistance
Silk braid is located inside pipe casing, and sleeve pipe intermediate sleeve is provided with least one spacer flanger for fixed sleeving, and the middle part of sleeve pipe is provided with
The suspension rod being connected with flange group；Resistive heater is connected with the wiring pile being connected with external power cord, and wiring pile is arranged on flange
In group, the top of flange group is provided with interstar connection room.
In above-mentioned technical proposal, it is preferred that resistive heater is made up of at least 3 bursts of resistance wire winding establishments, a diameter of 3mm
~30mm。
In above-mentioned technical proposal, it is preferred that the material of sleeve pipe is quartz glass or electric heating black matrix ceramics.
In above-mentioned technical proposal, it is preferred that resistive heater is including the hot zone below suspension rod and resistive heater with hanging
The not hot zone for accepting flange is extended to above bar contact position, the length of hot zone is 1500mm ~ 4800mm, not hot zone length
Spend for 300mm ~ 2600mm, the total length of hot zone and not hot zone is 1800mm ~ 6900mm；Overall length of the interstar connection room to flange group
Spend for 500mm ~ 800mm.
In above-mentioned technical proposal, it is preferred that heater block shares 9 ~ 24 groups.
In above-mentioned technical proposal, it is preferred that interstar connection room includes wiring chamber, is provided with upper lid above wiring chamber, on upper lid
It is fixedly installed suspension ring；The side of wiring chamber is uniformly equipped with 3 anti-explosion terminal boxs, and the lower end of wiring chamber is arranged on flange
In group.
In above-mentioned technical proposal, it is preferred that flange group includes being provided with the insulating flange of wiring pile, and insulating flange is arranged on
The upper flange of fixed Undertaking effect has been provided with wire connection cavity room, below insulating flange, fixation is provided with below upper flange
Orchid, wiring chamber, upper flange and mounting flange are coaxially installed with mounting flange, offered in the middle part of mounting flange for heating electricity
The circular hole that resistance silk passes through, the center of mounting flange are provided with suspension rod, and mounting flange edge is provided with by screw and accepts flange simultaneously
On reduction furnace.
In above-mentioned technical proposal, it is preferred that the material of insulating flange, upper flange and mounting flange for quartz, wiring pile and
The material for accepting flange be heat-resisting alloy, and the material of suspension rod and spacer flanger is quartzy.
In above-mentioned technical proposal, it is preferred that insulating flange edge is provided with ceramic briquetting.
The main beneficial effect of above-mentioned polycrystalline silicon reducing furnace pre-heater provided by the utility model is：
Resistive heater is that the winding establishment of multiply resistance wire is formed, compared to existing adding thermal resistance, it is not easy to deform, Neng Gouti
For higher power；The material of resistive heater is high anti-oxidation metal, can avoid making because of oxidation etc. in heating process
Into deformation；The sleeve pipe that material is quartz glass is socketed with outside resistive heater, can effectively prevent resistive heater and sleeve pipe because
High temperature produces deformation and scaling-off, and completely cut off polysilicon and reduction furnace gas contacts with resistive heater and it is pure to influence environment
Degree.
Spacer flanger outside sleeve pipe, can effectively prevent because load-bearing and external force influence and caused by sleeve pipe deformation；Quartz
In the case that the suspension rod of material can ensure environment degree of purity, effectively absorb the weight of resistive heater and sleeve pipe, prevent its because
Load-bearing and there is deformation；9 to 24 group heater blocks can be simultaneously installed on pre-heater, disclosure satisfy that different size polysilicon also
The power demand of former stove.
The flange material contacted with reduction furnace is quartz and heat-resisting alloy, also can guarantee that the high cleanliness of environment and pre-
The low deformability of heater；The material of wiring pile is heat-resisting alloy so that the structure of connecting wire part will not be because of heating electricity
Hinder the high temperature of silk and produce fusing or short circuit；The setting of ceramic briquetting, it can ensure that flange group and heater block will not be because of movements
In there is deformation and displacement；The suspension ring of top can be easy to lift pre-heater, to be cleared up and be adjusted.
Brief description of the drawings
Fig. 1 is the structural representation of polycrystalline silicon reducing furnace pre-heater.
Fig. 2 is the structural representation of the resistive heater of polycrystalline silicon reducing furnace pre-heater.
Fig. 3 is the top view of polycrystalline silicon reducing furnace pre-heater.
Fig. 4 is the partial enlarged drawing in A portions in Fig. 1.
Wherein, 1, suspension ring, 2, wiring chamber, 3, anti-explosion terminal box, 4, insulating flange, 5, upper flange, 6, mounting flange, 7,
Accept flange, 8, sleeve pipe, 9, resistive heater, 10, spacer flanger 11, upper lid 12, wiring pile 13, suspension rod, 14, ceramic briquetting.
Embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
Embodiment one：
As shown in figure 1, it is the structural representation of polycrystalline silicon reducing furnace pre-heater.The utility model embodiment one it is more
Crystal silicon reduction furnace preheater, including resistive heater 9 and sleeve pipe 8, resistive heater 9 are the high anti-oxidation of multiply winding establishment
Metal, a diameter of 4mm to 12mm；As shown in Fig. 2 the adding thermal resistance for being 10mm for the overall diameter that 8 bursts of resistance wire windings are compiled into
Silk.
Wound and worked out by multiply, compared to the resistive heater used in existing polycrystalline silicon reducing furnace, is unlikely to deform, simultaneously
Bigger power can be born.
The material of sleeve pipe 8 is quartz glass or electric heating black matrix ceramics, and the intermediate method of five layers of quartz material is provided with sleeve pipe 8
Orchid 10, the middle upper portion of sleeve pipe 8, is fixedly connected with quartzy suspension rod 13.
Sleeve pipe 8 can keep the shape of resistive heater 9, prevent its deformation and scaling-off.The material of sleeve pipe 8 is quartz, its
Temperature distortion degree is small, and will not produce reaction with reduction furnace inner environment, keeps the high cleanliness of environment；Spacer flanger 10 can have
The structure of fixed sleeving 8 is imitated, prevents sleeve pipe 8 from producing displacement and deformation, quartzy suspension rod 13 and can accept resistive heater 9, sleeve pipe 8
With the weight of spacer flanger 10, resistive heater deformation because of load-bearing is prevented.
One group of heater block is made up of resistive heater 9, sleeve pipe 8, spacer flanger 10, suspension rod 13 and wiring pile 12, heating
Annexation between part is as shown in figure 4, polycrystalline silicon reducing furnace pre-heater shares 9 groups of heater blocks in the present embodiment.
The both ends of resistive heater 9 are connected with wiring pile 12 made of heat-resisting alloy above sleeve pipe 8, and wiring pile 12 is with leading to
The high temperature lead connection that wiring chamber 2 is stretched into the one end of anti-explosion terminal box 3 is crossed, the high temperature lead other end is outside anti-explosion terminal box with outside
Portion's power line connection.
The material of wiring pile is heat-resisting alloy so that the structure of the conductor part of connection will not be because of the height of resistive heater
Temperature and produce fusing or short circuit.
The side of wiring chamber 2 is uniformly fitted with 3 anti-explosion terminal boxs 3, and the top of wiring chamber 2 is provided with lid 11,
The suspension ring 1 for being easy to the whole heater of handling are installed on upper lid 11.
Bottom is provided with the insulating flange 4 of quartz material in wiring chamber 2, and the top edge of insulating flange 4 is symmetrically installed useful
To consolidate the ceramic briquetting 14 of flange part, the top of insulating flange 4 is provided with wiring pile 12, and the lower section of insulating flange 4 has been connected with
The upper flange 5 of the quartz material of Undertaking effect, the lower section of upper flange 5 are provided with the mounting flange 6 of quartz material, on mounting flange 6
Wiring chamber 2, upper flange 5 and insulating flange 4 are coaxially installed with from outside to inside, and the middle part of mounting flange 6 is offered for heating electricity
The circular hole that resistance silk 9 passes through, the center of mounting flange 6 are provided with suspension rod 13, and the edge of mounting flange 6 is provided with resistance to heat seal by screw
Flange 7 is accepted made of golden and on heating furnace.
The flange material contacted with reduction furnace is quartz and heat-resisting alloy, can guarantee that high cleanliness and the heating of environment
The low deformability of device；The material of wiring pile 12 is heat-resisting alloy so that the structure of the conductor part of connection will not be because of heating electricity
Hinder the high temperature of silk 9 and produce fusing or short circuit, the setting of ceramic briquetting 14, can ensure that flange group and heating part will not be because moving
There is deformation and displacement in dynamic；The suspension ring 1 of top can be easy to lift heater, to be cleared up and be adjusted.
Embodiment two
As shown in figure 3, it is the top view of polycrystalline silicon reducing furnace pre-heater.The present embodiment and the polysilicon of embodiment one
The main distinction of reduction furnace preheater is：Including by resistive heater 9, sleeve pipe 8, spacer flanger 10, suspension rod 13 and wiring
The heater block of the composition of stake 12 is one group, and the polycrystalline silicon reducing furnace pre-heater in the utility model embodiment two shares 18 groups and added
Thermal part, compared to 9 groups in embodiment one, the present embodiment can bear bigger heating power, and reaching production polysilicon needs
Temperature-time is shorter, raw material silicon core can be heated into required temperature in shorter time, improve the efficiency of production.
Specific embodiment of the present utility model is described above, in order to which those skilled in the art understand
The utility model, it should be apparent that the utility model is not limited to the scope of embodiment, to the common skill of the art
For art personnel, if various change in the spirit and scope of the present utility model that appended claim limits and determines,
These changes are it will be apparent that all utilize the innovation and creation of the utility model design in the row of protection.
Claims (9)
1. a kind of polycrystalline silicon reducing furnace pre-heater, it is characterised in that including interstar connection room, flange group and at least a set of heating part
Part, the heater block include resistive heater (9) and sleeve pipe (8), and the resistive heater (9) is the conjunction of multiply winding establishment
Gold, resistive heater (9) are sheathed on that sleeve pipe (8) is internal, and sleeve pipe (8) intermediate sleeve is provided with least one for fixed sleeving (8)
Spacer flanger (10), the middle part of sleeve pipe are provided with the suspension rod (13) being connected with flange group；Resistive heater (9) is connected with and external electrical
The wiring pile (12) of source line connection, wiring pile (12) are arranged in flange group, and the top of flange group is provided with interstar connection room.
2. polycrystalline silicon reducing furnace pre-heater according to claim 1, it is characterised in that the resistive heater (9) by
At least 3 bursts of resistance wire winding establishments are formed, a diameter of 3mm~30mm.
3. polycrystalline silicon reducing furnace pre-heater according to claim 1, it is characterised in that the material of described sleeve pipe (8) is
Quartz glass or electric heating black matrix ceramics.
4. polycrystalline silicon reducing furnace pre-heater according to claim 1, it is characterised in that resistive heater (9) bag
Include the hot zone below suspension rod (13) and resistive heater (9) and accept flange (7) with being extended to above suspension rod (13) contact position
Not hot zone, the length of hot zone is 1500mm~4800mm, and the length of hot zone is not 300mm~2600mm, hot zone with
The total length of hot zone is not 1800mm~6900mm；Interstar connection room to the total length of flange group be 500mm~800mm.
5. polycrystalline silicon reducing furnace pre-heater according to claim 1, it is characterised in that the heater block shares 9~
24 groups.
6. polycrystalline silicon reducing furnace pre-heater according to claim 1, it is characterised in that the interstar connection room includes wire connection cavity
Room (2), wiring chamber (2) top are provided with upper lid (11), suspension ring (1) are fixedly installed on upper lid (11)；The side of wiring chamber (2)
Face is uniformly equipped with 3 anti-explosion terminal boxs (3), and the lower end of wiring chamber (2) is arranged in flange group.
7. polycrystalline silicon reducing furnace pre-heater according to claim 6, it is characterised in that the flange group includes being provided with
The insulating flange (4) of wiring pile (12), the insulating flange (4) are arranged in wiring chamber (2), the lower section of insulating flange (4)
The upper flange (5) of fixed Undertaking effect has been provided with, mounting flange (6), the mounting flange are provided with below upper flange (5)
(6) wiring chamber (2), upper flange (5) and mounting flange (6) are coaxially installed with, is offered in the middle part of mounting flange (6) for adding
The circular hole that hot water radiation wire (9) passes through, the center of mounting flange (6) are provided with suspension rod (13), and mounting flange (6) edge passes through screw
It is provided with and accepts flange (7) and on reduction furnace.
8. polycrystalline silicon reducing furnace pre-heater according to claim 7, it is characterised in that the insulating flange (4), upper method
The material of blue (5) and mounting flange (6) is quartz, and the material of the wiring pile (12) and undertaking flange (7) is heat-resisting alloy, institute
The material for stating suspension rod (13) and spacer flanger (10) is quartz.
9. polycrystalline silicon reducing furnace pre-heater according to claim 7, it is characterised in that insulating flange (4) edge
It is provided with ceramic briquetting (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720347743.5U CN206799173U (en) | 2017-04-05 | 2017-04-05 | Polycrystalline silicon reducing furnace pre-heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720347743.5U CN206799173U (en) | 2017-04-05 | 2017-04-05 | Polycrystalline silicon reducing furnace pre-heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206799173U true CN206799173U (en) | 2017-12-26 |
Family
ID=60731375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720347743.5U Active CN206799173U (en) | 2017-04-05 | 2017-04-05 | Polycrystalline silicon reducing furnace pre-heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206799173U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115235116A (en) * | 2022-08-05 | 2022-10-25 | 北京巨恒芯展环保科技有限公司 | Explosion-proof industrial air heating equipment |
-
2017
- 2017-04-05 CN CN201720347743.5U patent/CN206799173U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115235116A (en) * | 2022-08-05 | 2022-10-25 | 北京巨恒芯展环保科技有限公司 | Explosion-proof industrial air heating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 610000 No. 188, Gangzhong Road, north area of Chengdu modern industrial port, Pidu District, Chengdu, Sichuan Patentee after: Chengdu Fulong Intelligent Furnace Equipment Co.,Ltd. Address before: 610017 No. 188, Gangzhong Road, north area of Chengdu modern industrial port, Pixian County, Chengdu City, Sichuan Province Patentee before: CHENGDU FULONG QUARTZ ELECTRIC APPLIANCES CO.,LTD. |