CN202099063U - Vertical type silicon tetrachloride electric heating device - Google Patents

Vertical type silicon tetrachloride electric heating device Download PDF

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Publication number
CN202099063U
CN202099063U CN2011201432894U CN201120143289U CN202099063U CN 202099063 U CN202099063 U CN 202099063U CN 2011201432894 U CN2011201432894 U CN 2011201432894U CN 201120143289 U CN201120143289 U CN 201120143289U CN 202099063 U CN202099063 U CN 202099063U
Authority
CN
China
Prior art keywords
cylindrical protective
silicon tetrachloride
thermal insulation
metal tube
air channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2011201432894U
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Chinese (zh)
Inventor
俞祥九
戚洪明
陈曙峰
陈清华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HUANENG WUXI ELECTROTHERMAL EQUIPMENT CO Ltd
Original Assignee
HUANENG WUXI ELECTROTHERMAL EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HUANENG WUXI ELECTROTHERMAL EQUIPMENT CO Ltd filed Critical HUANENG WUXI ELECTROTHERMAL EQUIPMENT CO Ltd
Priority to CN2011201432894U priority Critical patent/CN202099063U/en
Application granted granted Critical
Publication of CN202099063U publication Critical patent/CN202099063U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a silicon tetrachloride electric heating device, in particular to a vertical type silicon tetrachloride electric heating device which resolves the problems of scaling and corrosion and is explosion-proof. A cylindrical protective casing is lined with a high-temperature ceramic fiber thermal insulation layer, a heating resistance wire is supported by a high-temperature-resistant ceramic piece and hung on a material inner layer of the high-temperature ceramic fiber thermal insulation layer in internal mode, and the inner side of the high-temperature-resistant ceramic piece is provided with a spiral or snakelike metal tube. A distribution control box is arranged on one side of the outside of the cylindrical protective casing, and the bottom of the cylindrical protective casing is provided with a sensor and an air fan. Nitrogen-filling holes are arranged on the cylindrical protective casing and the distribution control box, an air channel is arranged in the middle part of the inside of the cylindrical protective casing, and the air fan is connected with the air channel. The vertical type silicon tetrachloride electric heating device has the advantages of resolving the scaling and corrosion problems, improving treatment capability of silicon tetrachloride, reducing operational cost of enterprises and the like and has great using value.

Description

Rectilinear silicon tetrachloride electric heater
Technical field
The utility model relates to a kind of electric heater, particularly relates to a kind of solution fouling and etching problem, and explosion-proof rectilinear silicon tetrachloride electric heater.
Background technology
In the polysilicon industry, 1 kilogram of polysilicon of present domestic generation will produce 15 kilograms by-product silicon tetrachloride, and the processing of silicon tetrachloride is difficulty very, mainly is because the characteristic that silicon tetrachloride has stronger corrodibility and in heat-processed, is easy to fouling.Common circulation heater is often obstruction of generation equipment and corrosion of elements damage in heat-processed, and be no more than 1 month and will damage general duration of service, increases the enterprise operation cost.
The utility model content
The utility model provides a kind of and can solve fouling and etching problem to the deficiency of prior art, can also be at the rectilinear silicon tetrachloride electric heater of explosion-proof occasion use.
For realizing above purpose, the technical scheme that the utility model adopts is:
Rectilinear silicon tetrachloride electric heater is by transmitter, cylindrical protective shell, volution or snakelike metal tube, high-temperature ceramic fibre thermal insulation layer, heating resistance wire, refractory ceramics spare, distribution controlling box, blower fan, air channel with fill the nitrogen mouth and form; Cylindrical protective shell liner high-temperature ceramic fibre thermal insulation layer wherein; Heating resistance wire leans on refractory ceramics spare to support; And in be hung on high-temperature ceramic fibre thermal insulation layer material internal layer; Refractory ceramics spare installed inside volution or snakelike metal tube, heating resistance wire heats medium in volution or the snakelike metal tube through the radiation heating mode; The distribution controlling box is installed in cylindrical protective housing exterior one side; Cylindrical protective outer casing bottom sensor installation and blower fan; Cylindrical protective shell and distribution controlling box are provided with and fill the nitrogen mouth; To cylindrical protective shell and distribution controlling box inner body nitrogen filled protection, cylindrical protective enclosure middle portion is provided with the air channel, and blower fan links to each other with the air channel.
Above-mentioned volution or snakelike metal tube adopt the corrosive of anti-silicon tetrachloride composite alloy material (316H and INCOLOY800).
The rectilinear silicon tetrachloride electric heater of the utility model can solve following technical problem: heat volution or snakelike metal tube radiation heating mode through heating resistance wire (1), little to medium homogeneous heating, flow resistance in the metal tube, be not easy fouling; (2) volution or snakelike metal tube adopt the corrosive of anti-silicon tetrachloride composite alloy (316H and INCOLOY800) to have erosion resistance, high temperature resistant, high pressure resistant characteristics; (3) cylindrical protective shell and distribution controlling box are provided with and fill the nitrogen mouth, to cylindrical protective shell and distribution controlling box inner body nitrogen filled protection, have prolonged the work-ing life of nichrome wire on the one hand, can be used on explosion-proof occasion on the other hand; (4) the cylindrical protective shell is designed to the vertical-type structure, whole take up an area of little, in light weight, warm start is fast, easy to maintenance.
Description of drawings
Fig. 1 is the rectilinear silicon tetrachloride electric heater of a utility model structure sectional view.
Embodiment
As shown in the figure; The rectilinear silicon tetrachloride electric heater of the utility model is by transmitter 1, cylindrical protective shell 2, volution or snakelike metal tube 3, high-temperature ceramic fibre thermal insulation layer 4, heating resistance wire 5, refractory ceramics spare 6, distribution controlling box 7, blower fan 8, air channel 9 with fill nitrogen mouth 10 and form.When starting working; Heated medium---silicon tetrachloride is from volution or 3 one entering of snakelike metal tube; Through the control of 7 pairs of heating resistance wires 5 of distribution control, to realize cylindrical protective shell 2 spiral or snakelike metal tube 3 are carried out radiation heating, heated medium---silicon tetrachloride flows out from volution or snakelike metal tube 3 other ends; Because it is adopt the radiation heating mode to heat, little to medium homogeneous heating, flow resistance in the metal tube, be not easy fouling; Cylindrical protective shell 2 is provided with distribution controlling box 7 and fills nitrogen mouth 10, to cylindrical protective shell 2 and distribution controlling box 7 inner body nitrogen filled protections, has prolonged the work-ing life of nichrome wire on the one hand, can be used on explosion-proof occasion on the other hand; Transmitter 1 is installed in cylindrical protective shell 2 bottoms, is used for control agent temperature and the overtemperature prote inner to cylindrical protective shell 2; Blower fan 8 links to each other with air channel 9, is used for cylindrical protective shell 2 inside are blown into air, makes cylindrical protective shell 2 internal temperatures even.
The beneficial effect of the utility model is, solved fouling and etching problem, improves the silicon tetrachloride processing power, reduced advantage such as enterprise operation cost, has great use value.

Claims (2)

1. rectilinear silicon tetrachloride electric heater is by transmitter, cylindrical protective shell, volution or snakelike metal tube, high-temperature ceramic fibre thermal insulation layer, heating resistance wire, refractory ceramics spare, distribution controlling box, blower fan, air channel with fill the nitrogen mouth and form; It is characterized in that: cylindrical protective shell liner high-temperature ceramic fibre thermal insulation layer wherein, heating resistance wire lean on refractory ceramics spare to support, and in be hung on high-temperature ceramic fibre thermal insulation layer material internal layer, refractory ceramics spare installed inside volution or snakelike metal tube; The distribution controlling box is installed in cylindrical protective housing exterior one side; Cylindrical protective outer casing bottom sensor installation and blower fan; Cylindrical protective shell and distribution controlling box are provided with and fill the nitrogen mouth, and cylindrical protective enclosure middle portion is provided with the air channel, and blower fan links to each other with the air channel.
2. rectilinear silicon tetrachloride electric heater according to claim 1 is characterized in that: described volution or snakelike metal tube adopt composite alloy material.
CN2011201432894U 2011-05-09 2011-05-09 Vertical type silicon tetrachloride electric heating device Expired - Lifetime CN202099063U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011201432894U CN202099063U (en) 2011-05-09 2011-05-09 Vertical type silicon tetrachloride electric heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011201432894U CN202099063U (en) 2011-05-09 2011-05-09 Vertical type silicon tetrachloride electric heating device

Publications (1)

Publication Number Publication Date
CN202099063U true CN202099063U (en) 2012-01-04

Family

ID=45385088

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011201432894U Expired - Lifetime CN202099063U (en) 2011-05-09 2011-05-09 Vertical type silicon tetrachloride electric heating device

Country Status (1)

Country Link
CN (1) CN202099063U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106572548A (en) * 2016-10-28 2017-04-19 江阴市国豪电热电器制造有限公司 Silicon tetrachloride explosion-proof electric heater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106572548A (en) * 2016-10-28 2017-04-19 江阴市国豪电热电器制造有限公司 Silicon tetrachloride explosion-proof electric heater

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C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20120104

CX01 Expiry of patent term