CN202092461U - Vacuum atmosphere tube furnace - Google Patents
Vacuum atmosphere tube furnace Download PDFInfo
- Publication number
- CN202092461U CN202092461U CN2011201733637U CN201120173363U CN202092461U CN 202092461 U CN202092461 U CN 202092461U CN 2011201733637 U CN2011201733637 U CN 2011201733637U CN 201120173363 U CN201120173363 U CN 201120173363U CN 202092461 U CN202092461 U CN 202092461U
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- burner hearth
- vacuum atmosphere
- furnace
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Abstract
The utility model discloses a vacuum atmosphere tube furnace, which belongs to experimental furnaces and solve a technical problem that a traditional vacuum atmosphere tube furnace is difficult to control temperature gradients, vacuum degrees of a vacuum system and an atmosphere system are lower, and control accuracy of gas flow is poor. A technical main point is that a furnace cavity is fixed on the upper portion of a mechanical frame, the lower portion of the mechanical frame is a control cabinet, and the vacuum system, the atmosphere system and an electrical control system are arranged in the control cabinet. The furnace cavity adopts design of a high temperature area and a low temperature area, the high temperature area is heated by a U-shaped silicon molybdenum rod, the low temperature area is heated by a federal electric company (FEC) ceramic fiber heater, resisting materials in the furnace cavity all adopt ceramic fiber light materials which are pressed, seamed and spliced, a flame retardant layer, an insulating layer and a thermal-protective layer are sequentially arranged from inside to outside, stainless steel flanges with water cooling devices are fixed at two ends of a high-purity adamantine spar furnace tube, and the stainless steel flanges are respectively connected with the vacuum system and the atmosphere system. The vacuum atmosphere tube furnace is even and stable in temperature, rapid in temperature rising, energy-saving, high in operating temperature, long in service life, simple in operation, stable and reliable and the like.
Description
Technical field
The utility model belongs to the experiment kiln, specifically is the development that is used for CNT, crystalline silicon substrates plated film, the controllable growth of nano-ZnO, the atmosphere sintering of ceramic capacitor (MLCC), the CVD technologies such as diffusion welding (DW) of metal material.
Background technology
Vacuum atmosphere tube type stove serial equipment mainly is applicable to the development, crystalline silicon substrates plated film, the controllable growth of nano-ZnO, the atmosphere sintering of ceramic capacitor (MLCC), the CVD technologies such as diffusion welding (DW) of metal material of CNT.At present, traditional vacuum atmosphere tube type stove is single warm area design, is difficult to realize the control of thermograde, does not satisfy the requirement of CVD technology; On boiler tube is selected, selected high aluminum pipe in the past, its alumina content is low, heat resistance is poor, boiler tube cracking, phenomenon of rupture take place under high-temperature condition easily, cause technological experiment normally not carry out, simultaneously, because boiler tube two ends and middle not support also can cause boiler tube bending even fracture under the high-temperature condition; In addition, vacuum system, atmosphere system adopt traditional mechanical pump and suspended body flowmeter control, and shortcoming is that the system vacuum degree is lower, the gas flow control accuracy is relatively poor, is difficult to reach the index request of high, precision and frontier CVD technological experiment, and the user can not normally be used.
Summary of the invention
A kind of vacuum atmosphere tube type stove of the utility model technical problem to be solved is: overcome the control that above-mentioned traditional vacuum atmosphere tube type stove is difficult to realize thermograde, boiler tube cracking, bending even phenomenon of rupture, vacuum system, atmosphere system vacuum degree is lower, the gas flow control accuracy is relatively poor, is difficult to reach the defectives such as index request of high, precision and frontier CVD technological experiment.
Technical solution adopted in the utility model is: a kind of vacuum atmosphere tube type stove mainly contains mechanical framework, burner hearth, switch board composition, mechanical framework is a up-down structure, top fixedly burner hearth, bottom is switch board, vacuum system, atmosphere system and electric control system are installed in the switch board, and roller is equipped with in the mechanical framework bottom.Burner hearth adopts high low-temperature space design, and the heating of U type Si-Mo rod is adopted in the high-temperature region, and the Si-Mo rod both sides arrange that low-temperature space adopts the heating of FEC ceramic fibre heater, and the circumference formula arranges that high low-temperature space design has diaphragm structure; Anti-material in the burner hearth all selects for use the ceramic fibre light material seaming of exerting pressure assembled, is flame retardant coating, heat-insulation layer and thermal insulation layer from inside to outside successively, selects mullite fiber, high aluminum fiber and alumina silicate fibre respectively for use; High-purity corundum boiler tube in the burner hearth can free in and out burner hearth, high-purity corundum boiler tube two ends are fixed with the steel flange of band water-cooled, steel flange is detachable, the sealing of silica gel circle, the two ends steel flange meets vacuum system and atmosphere system respectively, and vacuum system 4 and atmosphere system 5 adopt vacuum unit and mass flowmenter control.
The beneficial effects of the utility model are: burner hearth adopts high and low warm area design, can effectively realize thermograde; The light fibre material thermal conductivity is lower, proportion is little, can effectively reduce the power consumption in the normal use of equipment; Vacuum system and atmosphere system adopt vacuum unit and mass flowmenter control, make that vacuum is higher, the gas flow control accuracy is better, reach the index request of high, precision and frontier CVD technological experiment.
Description of drawings
Fig. 1 is a kind of vacuum atmosphere tube type stove of the utility model front view.
1 is mechanical framework, and 2 is burner hearth, and 3 is switch board, 4 is vacuum system, and 5 is the atmosphere system, and 6 is electric control system, 7 is roller, and 8 is the high-temperature region, and 9 is Si-Mo rod, 10 is low-temperature space, and 11 is FEC ceramic fibre heater, and 12 is diaphragm structure, 13 is flame retardant coating, and 14 is heat-insulation layer, and 15 is thermal insulation layer, 16 is the high-purity corundum boiler tube, and 17 is steel flange.
The specific embodiment
As Fig. 1, a kind of vacuum atmosphere tube type stove mainly contains mechanical framework 1, burner hearth 2, switch board 3 compositions, mechanical framework 1 is a up-down structure, top fixedly burner hearth 2, bottom is switch board 3, vacuum system 4, atmosphere system 5 and electric control system 6 are installed in the switch board 3, roller 7 is equipped with in mechanical framework 1 bottom, can move.Mechanical framework 1 main body all adopts GB A3 sheet material and section bar to be welded, and elegant in appearance for equipment appearance, the free-standing electrostatically plastic-blasting is all adopted on the surface, and maintenance, repair are very convenient.
Burner hearth 2 adopts high low-temperature space design, and 9 heating of U type Si-Mo rod are adopted in high-temperature region 8, and Si-Mo rod 9 both sides are arranged, low-temperature space 10 adopts 11 heating of FEC ceramic fibre heater, the circumference formula arranges that high low-temperature space design has diaphragm structure 12, can effectively realize thermograde.
Anti-materials in the burner hearth 2 all select for use the ceramic fibre light material seaming of exerting pressure assembled, planarization, the sealing of burner hearth 2 have effectively been guaranteed, be flame retardant coating 13, heat-insulation layer 14 and thermal insulation layer 15 from inside to outside successively, select mullite fiber, high aluminum fiber and alumina silicate fibre respectively for use.
High-purity corundum boiler tube 16 in the burner hearth 2 can free in and out burner hearth 2, high-purity corundum boiler tube 16 two ends are fixed with the steel flange 17 of band water-cooled, steel flange 17 is detachable, the sealing of silica gel circle, two ends steel flange 17 meets vacuum system 4 and atmosphere system 5 respectively, vacuum system 4 and atmosphere system 5 adopt vacuum unit and mass flowmenter control, make that vacuum is higher, the gas flow control accuracy is better, reach the index request of high, precision and frontier CVD technological experiment.
Claims (5)
1. vacuum atmosphere tube type stove, mainly contain mechanical framework (1), burner hearth (2), switch board (3) composition, it is characterized in that: described mechanical framework (1) is a up-down structure, top fixedly burner hearth (2), bottom is switch board (3), vacuum system (4), atmosphere system (5) and electric control system (6) are installed in the switch board (3), and roller (7) is equipped with in mechanical framework (1) bottom.
2. a kind of vacuum atmosphere tube type stove according to claim 1, it is characterized in that: described burner hearth (2) adopts high low-temperature space design, U type Si-Mo rod (9) heating is adopted in high-temperature region (8), Si-Mo rod (9) both sides are arranged, low-temperature space (10) adopts FEC ceramic fibre heater (11) heating, the circumference formula arranges that high low-temperature space design has diaphragm structure (12).
3. a kind of vacuum atmosphere tube type stove according to claim 2, it is characterized in that: the anti-material in the described burner hearth (2) all selects for use the ceramic fibre light material seaming of exerting pressure assembled, be flame retardant coating (13), heat-insulation layer (14) and thermal insulation layer (15) from inside to outside successively, select mullite fiber, high aluminum fiber and alumina silicate fibre respectively for use.
4. a kind of vacuum atmosphere tube type stove according to claim 2, it is characterized in that: the high-purity corundum boiler tube (16) in the described burner hearth (2) can free in and out burner hearth (2), high-purity corundum boiler tube (16) two ends are fixed with the steel flange (17) of band water-cooled, steel flange (17) is detachable, the sealing of silica gel circle, two ends steel flange (17) meets vacuum system (4) and atmosphere system (5) respectively.
5. a kind of vacuum atmosphere tube type stove according to claim 1 is characterized in that: described vacuum system (4) and atmosphere system (5) adopt vacuum unit and mass flowmenter control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201733637U CN202092461U (en) | 2011-05-27 | 2011-05-27 | Vacuum atmosphere tube furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201733637U CN202092461U (en) | 2011-05-27 | 2011-05-27 | Vacuum atmosphere tube furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202092461U true CN202092461U (en) | 2011-12-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201733637U Expired - Fee Related CN202092461U (en) | 2011-05-27 | 2011-05-27 | Vacuum atmosphere tube furnace |
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| CN (1) | CN202092461U (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809287A (en) * | 2012-08-18 | 2012-12-05 | 合肥荣业新材料设备有限公司 | Vacuum atmosphere furnace with shared hood |
| CN102829631A (en) * | 2012-09-26 | 2012-12-19 | 哈尔滨工业大学 | Sealing visual pipe furnace |
| CN102853668A (en) * | 2012-09-18 | 2013-01-02 | 吉首大学 | Experimental vacuum furnace |
| CN104180657A (en) * | 2014-09-03 | 2014-12-03 | 中国环境科学研究院 | Tubular high-temperature furnace and temperature control adsorption furnace combined device |
| CN104197699A (en) * | 2014-09-11 | 2014-12-10 | 辽宁生物医学材料研发中心有限公司 | Tubular furnace |
| CN104324936A (en) * | 2014-10-24 | 2015-02-04 | 北京建筑材料科学研究总院有限公司 | Rotary type polluted soil thermal desorption experiment device and experiment method |
| CN106424721A (en) * | 2015-08-11 | 2017-02-22 | 精工爱普生株式会社 | Sintered body production method, degreased body production method, and heating furnace |
| CN106969634A (en) * | 2017-03-31 | 2017-07-21 | 西京学院 | A kind of many atmosphere calciner plants of use for laboratory nano particle |
| CN108088246A (en) * | 2017-12-22 | 2018-05-29 | 合肥费舍罗热工装备有限公司 | A kind of vertical gradient furnace |
| CN108151529A (en) * | 2017-12-22 | 2018-06-12 | 合肥费舍罗热工装备有限公司 | A kind of dual temperature area open-type sliding rail stove |
| CN108204737A (en) * | 2018-01-04 | 2018-06-26 | 湖南新天力科技有限公司 | A kind of horizontal reducing atmosphere vacuum annealing furnace |
| CN109059536A (en) * | 2018-08-13 | 2018-12-21 | 深圳市南方源芯电气有限公司 | A kind of sintering furnace |
| CN111197856A (en) * | 2020-01-20 | 2020-05-26 | 北京航天试验技术研究所 | Small-size high temperature air electric heater unit |
-
2011
- 2011-05-27 CN CN2011201733637U patent/CN202092461U/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809287A (en) * | 2012-08-18 | 2012-12-05 | 合肥荣业新材料设备有限公司 | Vacuum atmosphere furnace with shared hood |
| CN102853668A (en) * | 2012-09-18 | 2013-01-02 | 吉首大学 | Experimental vacuum furnace |
| CN102829631A (en) * | 2012-09-26 | 2012-12-19 | 哈尔滨工业大学 | Sealing visual pipe furnace |
| CN102829631B (en) * | 2012-09-26 | 2014-06-25 | 哈尔滨工业大学 | Sealing visual pipe furnace |
| CN104180657B (en) * | 2014-09-03 | 2016-06-22 | 中国环境科学研究院 | Tube type high-temperature furnace and temperature control absorption stove combined apparatus |
| CN104180657A (en) * | 2014-09-03 | 2014-12-03 | 中国环境科学研究院 | Tubular high-temperature furnace and temperature control adsorption furnace combined device |
| CN104197699A (en) * | 2014-09-11 | 2014-12-10 | 辽宁生物医学材料研发中心有限公司 | Tubular furnace |
| CN104197699B (en) * | 2014-09-11 | 2016-07-06 | 辽宁生物医学材料研发中心有限公司 | A kind of tube furnace |
| CN104324936A (en) * | 2014-10-24 | 2015-02-04 | 北京建筑材料科学研究总院有限公司 | Rotary type polluted soil thermal desorption experiment device and experiment method |
| CN104324936B (en) * | 2014-10-24 | 2016-04-13 | 北京建筑材料科学研究总院有限公司 | A kind of swinging Polluted Soil Thermal desorption experimental provision and experimental technique |
| CN106424721A (en) * | 2015-08-11 | 2017-02-22 | 精工爱普生株式会社 | Sintered body production method, degreased body production method, and heating furnace |
| CN106969634A (en) * | 2017-03-31 | 2017-07-21 | 西京学院 | A kind of many atmosphere calciner plants of use for laboratory nano particle |
| CN108088246A (en) * | 2017-12-22 | 2018-05-29 | 合肥费舍罗热工装备有限公司 | A kind of vertical gradient furnace |
| CN108151529A (en) * | 2017-12-22 | 2018-06-12 | 合肥费舍罗热工装备有限公司 | A kind of dual temperature area open-type sliding rail stove |
| CN108204737A (en) * | 2018-01-04 | 2018-06-26 | 湖南新天力科技有限公司 | A kind of horizontal reducing atmosphere vacuum annealing furnace |
| CN109059536A (en) * | 2018-08-13 | 2018-12-21 | 深圳市南方源芯电气有限公司 | A kind of sintering furnace |
| CN111197856A (en) * | 2020-01-20 | 2020-05-26 | 北京航天试验技术研究所 | Small-size high temperature air electric heater unit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HENGYANG ZHONGKE PHOTOELECTRONIC CO., LTD. Free format text: FORMER OWNER: HEFEI GAOGE HEAT TREATMENT APPLIED TECHNOLOGY CO., LTD. Effective date: 20140324 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 231131 HEFEI, ANHUI PROVINCE TO: 421100 HENGYANG, HUNAN PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20140324 Address after: 421100, No. 239, gathered Avenue, Hengnan County, Hengyang, Hunan Patentee after: HENGYANG ZHONGKE PHOTOELECTRON CO., LTD. Address before: Jinzang road Shuangfeng Industrial District of Hefei City, Anhui province 231131 No. 006 Patentee before: Hefei Gaoge Heat Treatment Applied Technology Co., Ltd. |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20151203 Address after: 421100, No. 239, gathered Avenue, Hengnan County, Hengyang, Hunan Patentee after: HENGYANG ZHONGKE PHOTOELECTRON CO., LTD. Patentee after: JIANGSU ZHONGKE PHOTOELECTRIC CO., LTD. Address before: 421100, No. 239, gathered Avenue, Hengnan County, Hengyang, Hunan Patentee before: HENGYANG ZHONGKE PHOTOELECTRON CO., LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111228 Termination date: 20190527 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |