CN201583242U - Facula position measurement instrument - Google Patents

Facula position measurement instrument Download PDF

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Publication number
CN201583242U
CN201583242U CN 200920252327 CN200920252327U CN201583242U CN 201583242 U CN201583242 U CN 201583242U CN 200920252327 CN200920252327 CN 200920252327 CN 200920252327 U CN200920252327 U CN 200920252327U CN 201583242 U CN201583242 U CN 201583242U
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CN
China
Prior art keywords
voltage
circuit
signal processing
output terminal
current
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Expired - Lifetime
Application number
CN 200920252327
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Chinese (zh)
Inventor
陈日升
陈志理
张云兴
张志忠
张金玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research Institute of Physical and Chemical Engineering of Nuclear Industry
Original Assignee
Huahe New Technology Development Co Research Institute of Physical and Chemical Engineering of Nuclear Industry
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Priority to CN 200920252327 priority Critical patent/CN201583242U/en
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Publication of CN201583242U publication Critical patent/CN201583242U/en
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Abstract

The utility model discloses a facula position measurement instrument, which includes a PSD (position-sensitive detector), wherein an output terminal of the PSD is communicated with an input terminal of a signal processing circuit, an output terminal of the signal processing circuit is communicated with an input terminal of a singlechip, and an output terminal of the singlechip is communicated with a computer through a USB interface or a 485 interface. The signal processing circuit includes current/voltage switch circuits and voltage amplifier circuits. The current/voltage switch circuits includes four groups of same but independent current/voltage switch circuits, and each group is equipped with a filtration and phase compensation circuit. The voltage amplifier circuits include four groups of same but independent voltage amplifiers. The utility model has the advantages of compact structure, large spectral response range, high response speed and micro-grade measurement precision.

Description

The facula position measuring instrument
Technical field
The utility model belongs to a kind of position measuring instrument, is specifically related to a kind of online, real-time, accurate facula position measuring instrument of Laser Measurement automatically of gamut.
Background technology
Advantages such as the Position-Sensitive Detector device has that volume is little, highly sensitive, the range of linearity is big, noise is low, resolution is high, spectral response range is wide, response speed is fast, price is low and application circuit is simple.Fast development along with science and technology, the scope of the application of facula position measuring instrument constantly enlarges, research also deepens continuously, and all has a wide range of applications in fields such as the detection of optoelectronic position measurement, optics remote control, displacement and vibration and monitoring, laser alignment, orientation detections.
At present, can realize the measuring system that the photoelectric device of position measurement is made up of CCD (Charge Coupled Device (CCD)), PSD (facula position measuring element) and Four Quadrants (4 quadrant detector), wherein PSD enjoys the favor of engineering circle because of having higher sensitivity, good transient response characteristic and compact structure and simple treatment circuit.
Summary of the invention
The utility model proposes in order to overcome the shortcoming that exists in the prior art, and purpose provides a kind of facula position measuring instrument of realizing that facula position is online, real-time, gamut is accurately measured automatically.
The technical solution of the utility model is: a kind of facula position measuring instrument, comprise the PSD detector, the output terminal of PSD detector is communicated with the input end of signal processing circuit, the output terminal of signal processing circuit and the input end of single-chip microcomputer are communicated with, and the output terminal of single-chip microcomputer carries out communication by USB interface or 485 interfaces and computing machine.
Described signal processing circuit comprises current/voltage-converted circuit and voltage amplifier circuit.
Described current/voltage-converted circuit includes four groups of identical and separate current/voltage-converted circuit, and every group is provided with filtering and phase compensating circuit.
Described voltage amplifier circuit includes four groups of identical and separate voltage amplifiers.
The utlity model has the positional accuracy measurement height, compact conformation, characteristics such as noise is low, Two-dimensional PSD pincushion structure 27mm*27mm measuring accuracy reaches micron dimension.
Description of drawings
Fig. 1 is the structured flowchart of facula position measuring instrument of the present utility model;
Fig. 2 is the block diagram of signal processing circuit of the present utility model;
Fig. 3 is the outward appearance front view of facula position measuring instrument of the present utility model.
Wherein:
1PSD detector 2 signal processing circuits
3 single-chip microcomputer 4USB interfaces
5485 interfaces, 6 computing machines
8 housings, 21,25 current/voltage translation filtering circuit
22,26 voltage amplifier circuits
Embodiment
Below, with reference to accompanying drawing and example facula position measuring instrument of the present utility model is elaborated:
As shown in Figure 1, 2, a kind of facula position measuring instrument, comprise PSD detector 1, the output terminal of PSD detector 1 is communicated with the input end of signal processing circuit 2, the input end of the output terminal of signal processing circuit 2 and single-chip microcomputer 3 is communicated with, and the output terminal of single-chip microcomputer 3 carries out communication by USB interface 4 or 485 interfaces 5 and computing machine 6.
485 interfaces 5 are applicable to remote and multipath transmission.
PSD detector 1 adopts big face type two dimension pincushion PSD detector, makes measuring accuracy reach micron dimension by postsignal treatment circuit 2.The model of PSD detector 1 is the detector of W204 (2D-PSD).When LASER Light Source incides the light-sensitive surface of PSD detector 1, owing to there is the lateral light electrical effect, four electrodes will have electric current output.When the diverse location of laser radiation on PSD detector 1, the little electric current of PSD detector 1 output four road varying strengths characterizes the positional information of laser radiation on PSD detector 1.
Signal processing circuit 2 comprises current/voltage (I/V) filtering change-over circuit 21 and voltage amplifier circuit 22.Because the output signal of PSD detector 1 is faint photogenerated current signal, be difficult to detect, so current/voltage filtering change-over circuit 21 need be set, current signal is converted to voltage signal, carry out preposition amplification simultaneously, further handle with convenient.Current/voltage filtering change-over circuit 21 includes four groups of identical and separate current/voltage-converted circuit 25, and every group is provided with filtering and phase compensating circuit.
It is the operational amplifier of LM124W that current/voltage-converted circuit 25 adopts model.
Usually, in systems such as detection, data acquisition, automatic control, higher when the sensor output impedance of sensing, transmission and amplifying element, direct current signal is less, when amplifier needs higher gain, consider to adopt chopper amplifier to reduce external interference, improves signal to noise ratio (S/N ratio) as far as possible.Therefore, the voltage after corresponding four groups of I/V change-over circuits conversion amplifies.
Voltage amplifier circuit 22 includes four groups of identical and separate voltage amplifiers 26, and it is the operational amplifier of ICL7650S that voltage amplifier 26 adopts model.
Four groups of current/voltage-converted circuit 25 of current/voltage filtering change-over circuit 21 are connected with four groups of voltage amplifiers 26 of voltage amplifier circuit 22 respectively.
Wherein three groups the output terminal of four groups of voltage amplifiers 26 of voltage amplifier circuit 22 is connected with the 2nd, 3,4 pins of single-chip microcomputer 3 respectively, and the output terminal of another group is connected with the 7th pin of single-chip microcomputer 3.Voltage amplifier circuit 22 is amplified to the amplitude of voltage in the scope of the input voltage that single-chip microcomputer 3 inner A/D converters are allowed, for the data computation of single-chip microcomputer 3 is given security.
Single-chip microcomputer 3 is by data transmission between USB interface 4 or 485 interfaces 5 and the computing machine 6.
The model of single-chip microcomputer 3 is PIC16F877.
As shown in Figure 3, PSD detector 1 is installed, 485 interfaces 5 is installed, below 485 interfaces 5, USB interface 4 is installed at the upper left quarter of housing 8 at the middle part of housing 8.
The facula position measuring instrument course of work of the present utility model is as follows:
Regulate laser beam intensity, make it be radiated at laser energy on the PSD detector in the working range of PSD detector facula position measuring instrument,, realize the accurate measurement of laser facula in PSD detector photosurface by the computer real-time monitoring laser spot position.
For example, utilize helium-neon (He-Ne) laser instrument that the utility model is experimentized, the spectral response range of facula position measuring instrument is 380nm~1100nm, and working temperature is-20 ℃~+ 60 ℃, stability ± 6 μ m, position resolution 10 μ m.
The utility model compact conformation, spectral response range is big, response speed is fast, measuring accuracy can reach micron dimension.And it is its power supply that the utility model adopts USB interface, thereby avoids using external power supply, has realized the target of miniaturization.

Claims (4)

1. facula position measuring instrument, it is characterized in that: comprise PSD detector (1), the output terminal of PSD detector (1) is communicated with the input end of signal processing circuit (2), the input end of the output terminal of signal processing circuit (2) and single-chip microcomputer (3) is communicated with, and the output terminal of single-chip microcomputer (3) carries out communication by USB interface (4) or 485 interfaces (5) and computing machine (6).
2. facula position measuring instrument according to claim 1 is characterized in that: described signal processing circuit (2) comprises current/voltage filtering change-over circuit (21) and voltage amplifier circuit (22).
3. facula position measuring instrument according to claim 2, it is characterized in that: described current/voltage filtering change-over circuit (21) includes four groups of identical and separate current/voltage-converted circuit (25), and every group is provided with filtering and phase compensating circuit.
4. facula position measuring instrument according to claim 2 is characterized in that: described voltage amplifier circuit (22) includes four groups of identical and separate voltage amplifiers (26).
CN 200920252327 2009-12-30 2009-12-30 Facula position measurement instrument Expired - Lifetime CN201583242U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200920252327 CN201583242U (en) 2009-12-30 2009-12-30 Facula position measurement instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200920252327 CN201583242U (en) 2009-12-30 2009-12-30 Facula position measurement instrument

Publications (1)

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CN201583242U true CN201583242U (en) 2010-09-15

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CN 200920252327 Expired - Lifetime CN201583242U (en) 2009-12-30 2009-12-30 Facula position measurement instrument

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103063289A (en) * 2012-12-11 2013-04-24 华中科技大学 Draught fan impeller disturbance measurement system in pulse gas laser device cavity
CN103148780A (en) * 2013-01-30 2013-06-12 中国科学院长春光学精密机械与物理研究所 Data acquisition device of light spot position detection device of high repetition frequency pulse laser
CN106840217A (en) * 2015-12-03 2017-06-13 中国科学院光电研究院 A kind of signal processing method based on PSD
CN114136229A (en) * 2021-12-01 2022-03-04 上海市计量测试技术研究院 Design method for range splicing of one-dimensional PSD (position sensitive detector) sensor
CN115128977A (en) * 2022-06-08 2022-09-30 绵阳亿元科技有限公司 Laser spot position monitoring system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103063289A (en) * 2012-12-11 2013-04-24 华中科技大学 Draught fan impeller disturbance measurement system in pulse gas laser device cavity
CN103063289B (en) * 2012-12-11 2015-05-20 华中科技大学 Draught fan impeller disturbance measurement system in pulse gas laser device cavity
CN103148780A (en) * 2013-01-30 2013-06-12 中国科学院长春光学精密机械与物理研究所 Data acquisition device of light spot position detection device of high repetition frequency pulse laser
CN106840217A (en) * 2015-12-03 2017-06-13 中国科学院光电研究院 A kind of signal processing method based on PSD
CN106840217B (en) * 2015-12-03 2020-04-28 中国科学院光电研究院 Signal processing method based on PSD
CN114136229A (en) * 2021-12-01 2022-03-04 上海市计量测试技术研究院 Design method for range splicing of one-dimensional PSD (position sensitive detector) sensor
CN114136229B (en) * 2021-12-01 2023-09-19 上海市计量测试技术研究院 Design method for one-dimensional PSD sensor range splicing
CN115128977A (en) * 2022-06-08 2022-09-30 绵阳亿元科技有限公司 Laser spot position monitoring system

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ASS Succession or assignment of patent right

Owner name: INST. OF PHYSICS AND CHEMISTRY ENGINEERING

Free format text: FORMER OWNER: RESEARCH INSTITUTE OF PHYSICAL AND CHEMICAL ENGINEERING OF NUCLEAR INDUSTRY HUAH

Effective date: 20130106

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 300384 NANKAI, TIANJIN TO: 300180 HEDONG, TIANJIN

TR01 Transfer of patent right

Effective date of registration: 20130106

Address after: 300180 Hedong District, Tianjin Jintang Road, No. 168

Patentee after: Inst. of Physics and Chemistry Engineering

Address before: The 300384 Tianjin City Huayuan Industrial Zone Development Road six No. 6 Haitai green industry base building J room 104

Patentee before: Huahe New Technology Development Company, Research Institute of Physical and Chemical Engineering of Nuclear Industry

CX01 Expiry of patent term

Granted publication date: 20100915

CX01 Expiry of patent term