CN102155929A - Displacement measuring device based on position-sensitive detector and application method of displacement measuring device - Google Patents
Displacement measuring device based on position-sensitive detector and application method of displacement measuring device Download PDFInfo
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Abstract
The invention provides a displacement measuring device based on a position-sensitive detector and an application method of the displacement measuring device. The position-sensitive detector adopted in the invention is a two-dimensional PSD (phase-sensitive detector); a signal processing module in the existing displacement measurement device based on the position-sensitive detector is improved in a focused manner, and adaptability improvement is performed for a signal pre-processing module, so as to ensure that a phase method can be applied in the method for processing digital signals. The application method comprises steps of: performing multiple beam modulation, signal pre-process and transformation, subsequent digital process and transformation and the like for applying the phase method; and calculating the phase information corresponding to various frequency signals by utilizing an FFT (fast Fourier transformation) algorithm, further processing the various phase information to obtain the displacement information of a plurality of light spots on a PSD photosensitive surface, thereby realizing the precise measurement for the light spot positions of a plurality of beams. The device and the method provided by the invention have the characteristics of high precision, good flexibility, stable system, simple signal processing circuit, low cost and the like.
Description
Technical field
The present invention relates to displacement measuring device and utilization, relate in particular to the displacement measuring device and the utilization thereof of position-based sensing detector.
Background technology
Position-Sensitive Detector (Position Sensitive Detector, be called for short PSD) be a kind of semiconductor photoelectric device to launching spot centre of gravity place sensitivity, it has the position resolution height, response speed is fast, spectral response range is wide, reliability is high, advantages such as treatment circuit is simple relatively obtain utilization more and more widely in the detection of position, displacement, distance, angle and correlative thereof.The displacement measuring device of position-based sensing detector is made up of four parts, and they are PSD, semiconductor laser light source, electronic processing unit and the fixing support of the relative position of PSD and semiconductor laser light source.Wherein, PSD has the branch of a peacekeeping two dimension.One dimension PSD has two output electrodes, and the launching spot that can measure semiconductor laser light source (claims usually in a direction
XDirection) position on and/or displacement, Two-dimensional PSD can be regarded as the synthetic of two one dimension PSD, can determine that the described launching spot of multiple beam (claims on the PSD photosurface usually
X,
YOn the direction) position and/or displacement.Electronic processing unit is for drawing the range finding result, and includes the unit that relates to signal processing mode of signal pre-processing module and follow-up signal processing module.In existing signal processing mode, signal pre-processing module all is that the simulating signal of described launching spot is handled, and for follow-up signal processing module, comprise analog signal processing and digital signal processing dual mode again, the computing method that comprised in these two kinds of signal processing modes all are amplitude methods.Be example now, simply introduce the amplitude method with the two-sided bypass type PSD in the Two-dimensional PSD.
If PSD photosurface area is
, output current is
I1, I2, I3, I4, the amplitude method is to utilize launching spot to exist
X, YDisplacement on the direction and the relation between the electric current are determined the facula position coordinate, represent with following formula:
From above-mentioned formula as can be seen, because the amplitude method is that the output signal amplitude is handled, it is very responsive to noise signal, and therefore, there be, poor anti jamming capability responsive to the bias light induction in its and to the high deficiency of light source requirements.Since in the method for digital signal processing, its computing method adopt the amplitude method to bring so many deficiency, why do not go to adopt other computing method again? reason is that the displacement measuring device of existing position-based sensing detector only is applicable to the amplitude method.
Summary of the invention
First purpose of the present invention is, provides a kind of in the used digital signal processing of its follow-up signal processing module, and its computing method can be without the amplitude method, and then can overcome the displacement measuring device of position-based sensing detector of the deficiency of prior art.
Second purpose of the present invention is, a kind of displacement measuring device that adopts the position-based sensing detector of realizing first goal of the invention is provided, so insensitive to the bias light induction, antijamming capability is stronger, can reduce the application method of light source requirements.
In order to realize described first goal of the invention, a kind of like this displacement measuring device of position-based sensing detector is provided, its aspect same as the prior art is, this displacement measuring device comprises Two-dimensional PSD, its launching spot shines the semiconductor laser light source on this Two-dimensional PSD photosurface, gather the current signal of Two-dimensional PSD and carry out pretreated signal pre-processing module, further the digital signal processing module that pretreated signal is handled.Its improvements are, described signal pre-processing module comprises, realize that current signal changes and the I/V modular converter of elementary amplification to voltage signal, are connected with this I/V modular converter and the output voltage signal value is secondary amplification module and the low-pass filtering module of 0～3V; Described digital signal processing module comprises, A/D modular converter and DSP nucleus module, wherein, the A/D modular converter comprises the multiway analog switch of two parallel connections that 8 tunnel inputs are all arranged, two sampling holders that are connected with these two multiway analog switches respectively are with these two sampling holders sampling holder multidiameter option switch that is connected and the A/D converter that is connected with the sampling holder multidiameter option switch.
In order to realize described second goal of the invention, a kind of application method of displacement measuring device of position-based sensing detector is provided, and the displacement measuring device that this application method adopted is the displacement measuring device of position-based sensing detector of realizing the scheme of first goal of the invention; The step of this application method is as follows:
(1) as required, modulate the multi beam sinusoidal signal driving light source of described semiconductor laser light source through different frequency, and allow it be radiated at the launching spot that obtains respective amount on the described Two-dimensional PSD photosurface;
(2) by the I/V modular converter in the described signal pre-processing module, collection is by the four road output currents that switching current be formed by stacking of each launching spot in described Two-dimensional PSD, the output current of 2 electrodes on the output current of 2 electrodes, the Y direction on the directions X that this four road output current is respectively this Two-dimensional PSD; And realize of conversion and the elementary amplification of described output current to voltage signal by this I/V modular converter; Then, successively by secondary amplification module and low-pass filtering module in the described signal pre-processing module, export its value and be the voltage signal of corresponding described directions X of 0～3V and the voltage signal of corresponding described Y direction;
(3) by two multiway analog switches in the described A/D modular converter and with they two corresponding respectively sampling holders, allow described directions X voltage signal and described Y direction voltage signal realize that its phase information is to pick up from latching synchronously of synchronization; Then, all voltage signals that latch synchronously are sent to by described sampling holder multidiameter option switch successively carry out analog to digital conversion in the described A/D converter;
(4) described voltage signal after carrying out analog to digital conversion is sent in the described DSP nucleus module, does respectively with discrete series to described voltage signal
NThe FFT computing of point, and operation result is saved in storage space in this DSP nucleus module; Then, continue this operation result is asked amplitude versus frequency characte respectively, obtain the initial phase of each signal again according to the relation of amplitude versus frequency characte and initial phase, and then obtain
XDirection and
YThe phase differential of respective signal on the direction; This phase differential is further handled and is obtained
XDirection and
YPositional information on the direction, last form with position coordinates outputs in the display device and shows.
From the scheme that realizes first goal of the invention and second goal of the invention as can be seen, the present invention at first improves digital signal processing module, simultaneously also signal pre-processing module has been carried out adaptive improvement, so, when the pretreated voltage signal of process is carried out follow-up digitized processing, just can adopt the phase method of the deficiency that can overcome prior art.
Because when being radiated on the PSD photosurface through the multi beam launching spot of different frequency modulation, PSD is converted to the current signal of same frequency with every bundle hot spot, and its electrode is exported the signal of a plurality of electric currents stacks, and the signal of these stacks has specific frequency; Bias light because of PSD induction is mainly the white light noise again, and the current signal frequency that its frequency and PSD are converted to is uncorrelated, behind this device of utilization and phase method, 1) current signal that is produced by the white light noise is by filtering preferably after the direct sum low pass circuit; 2) the noise of filtering (all necessarily there is partial noise in all circuit) is not uncorrelated with the useful signal frequency owing to frequency, and power is minimum, so the influence to the measuring accuracy of the displacement measuring device of position-based sensing detector of the present invention can be ignored, the amplitude method is responsive to the bias light induction so this method can overcome effectively, poor anti jamming capability and to shortcomings such as light source requirements height.In brief, compared with prior art, the present invention possesses following advantage:
1) reduced requirement to light source, improved the antijamming capability of system, expanded the utilization scope of PSD effectively, can't eliminate as bias light, the occasion in high-precision laser source can't be provided;
2) stability, dirigibility and the measuring accuracy of system have been improved;
3) signal processing circuit is further simplified, and has reduced design and utilization cost.
Description of drawings
Fig. 1 is the synoptic diagram of primary structure of the present invention;
Fig. 2 is the synoptic diagram of Two-dimensional PSD under the launching spot irradiation among the present invention;
Fig. 3 is a signal pre-processing module block diagram of the present invention;
Fig. 4 is a digital signal processing module block diagram of the present invention;
Fig. 5 is the structural representation of A/D modular converter of the present invention.
Embodiment
One, a kind of displacement measuring device of position-based sensing detector is (with reference to figure 1,2,3,4,5), it comprises Two-dimensional PSD, its launching spot shines the semiconductor laser light source on this Two-dimensional PSD photosurface, gather the current signal of Two-dimensional PSD and carry out pretreated signal pre-processing module, further the digital signal processing module that pretreated signal is handled (those skilled in the art know that, in the displacement measuring device of the position-based sensing detector of practice, also should comprise the fixedly support of the relative position of PSD and semiconductor laser light source, send manual command's operation keyboard, the display of idsplay order and result of detection and corresponding Keysheet module and display module).In the present invention, described signal pre-processing module comprises, realizes that current signal changes and the I/V modular converter of elementary amplification to voltage signal, is connected with this I/V modular converter and the output voltage signal value is secondary amplification module and the low-pass filtering module of 0～3V; Described digital signal processing module comprises, A/D modular converter and DSP nucleus module, (DSP is the abbreviation of digital signal processor Digital Signal Processor), wherein, described A/D modular converter comprises all 8 tunnel input (ADCINA0～ADCINA7, multiway analog switch (the MUXA of two parallel connections of ADCINB0～ADCINB7), MUXB), respectively with these two multiway analog switch (MUXA, MUXB) two sampling holder (S/HA of Lian Jieing, S/HB), with these two sampling holder (S/HA, S/HB) sampling holder multidiameter option switch of Lian Jieing (S/H MUX) and the A/D converter (A/D Converter) that is connected with sampling holder multidiameter option switch (S/H MUX).
Two, a kind of application method of displacement measuring device of position-based sensing detector (with reference to figure 1,2,3,4,5), the displacement measuring device that this application method adopted is the displacement measuring device of the position-based sensing detector of above-mentioned embodiment one; The step of this application method is as follows:
(1) as required, through different frequency
Modulate the multi beam sinusoidal signal driving light source of described semiconductor laser light source
, and allow it be radiated at the launching spot (A, B, C) that obtains respective amount on the described Two-dimensional PSD photosurface; In Fig. 2, A(x1 x2), B(x2, x2), C(x3, y3) represents A, B, three launching spots of C position coordinates at the Two-dimensional PSD photosurface respectively.
(2) by the I/V modular converter in the described signal pre-processing module, collection is by the four road output currents that switching current be formed by stacking of each launching spot in described Two-dimensional PSD, the output current of last 2 electrodes of the directions X that this four road output current is respectively this Two-dimensional PSD (X1, X2) (
I1,
I2), the output current of last 2 electrodes of Y direction (Y1, Y2) (
I3,
I4); And by this I/V modular converter realize described output current (
I1,
I2,
I3,
I4) to the conversion and the elementary amplification of voltage signal; Then, successively by secondary amplification module and low-pass filtering module in the described signal pre-processing module, export the voltage signal that its value is the corresponding described directions X of 0～3V (
U1,
U2) and the voltage signal of corresponding described Y direction (
U3,
U4);
(3) by two multiway analog switches (MUXA, MUXB) in the described A/D modular converter and with they corresponding respectively two sampling holders (S/HA, S/HB), allow described directions X voltage signal (
U1,
U2) and described Y direction voltage signal (
U3,
U4) realize that its phase information is to pick up from latching synchronously of synchronization; Then, all voltage signals that latch synchronously (
U1,
U2,
U3,
U4) be sent in the described A/D converter (A/D Converter) by described sampling holder multidiameter option switch (S/H MUX) successively and carry out analog to digital conversion;
(4) carry out described voltage signal after the analog to digital conversion (
U1,
U2,
U3,
U4) be sent in the described DSP nucleus module, with to described voltage signal (
U1,
U2,
U3,
U4) discrete series do respectively
NThe FFT computing (fast fourier transform) of point, and operation result is saved in storage space in this DSP nucleus module; Then, continue this operation result is asked amplitude versus frequency characte respectively, obtain the initial phase of each signal again according to the relation of amplitude versus frequency characte and initial phase, and then obtain
XDirection and
YThe phase differential of respective signal on the direction; This phase differential is further handled and is obtained
XDirection and
YPositional information on the direction, last form with position coordinates outputs in the display device and shows.
Understand the present invention for assisting more those of ordinary skill, now be radiated on the Two-dimensional PSD photosurface with three beams sinusoidal signal driving light source, two-way output current with directions X (X1 among Fig. 2, X2) is an example, introduces the phase place ratio juris respectively, utilizes fft algorithm to realize the principle of phase demodulation.
The phase place ratio juris:
According to the RC transmission line model of PSD, the initial phase of two electrode output signals on same direction
Be respectively:
Wherein,
LPhotosurface length on this direction of expression PSD;
The expression transmission coefficient, its value is by the electrical quantity decision of PSD.
Determine by choosing typical PSD electrical quantity
, can derive the phase differential of the output signal of two electrodes
Better linearity relation is arranged, thereby can realize launching spot position measurement on the PSD photosurface by measure phase difference.
Utilize FFT fortune method to realize the principle of phase demodulation:
If Two-dimensional PSD converges under the irradiation of light at the three beams sine
XTwo output currents of direction (
I1,
I2) be respectively:
In the formula (3),
Be electric current
I1 DC component,
,
With
Be respectively that angular frequency is
The electric current that produces at X1 electrode place of Sine Modulated light, its initial phase is respectively
Every connotation is corresponding one by one with the every connotation of formula (3) in the formula (4), does not give unnecessary details.
If the signal frequency of three driving light sources of three beams sinusoidal signal correspondence corresponds to
, the A/D converter sample frequency is
, sequence is done
NPoint FFT computing, then frequency resolution is
For different signal frequencies
During condition, this frequency signal on power just in time corresponding to a spectral line.The spectral line of power spectral value maximum is exactly the power spectral line of signal.When
And the counting of FFT computing
NUnder the known condition, promptly can pass through
Obtain the power spectrum maximal value and appear at
On the individual frequency, so only need on amplitude spectrum, get the real part of corresponding frequency spectrum
, then can obtain the initial phase of signal:
In the following formula, the n value is 1,2,3, has so just obtained 3 frequencies that X1 electrode output signal is comprised on the directions X
The initial phase of signal
In like manner, the initial phase of 3 frequency content signals that comprised for X2 electrode output signal on the directions X has:
The n value is 1,2,3 in the formula,
The same with the meaning that is referred in the formula (5), its value is determined by the output signal of X2 electrode.Obtain by formula (6)
After, just can obtain frequency and be
3 phase differential on two electrodes of directions X, producing of the light source of signal excitation
(the n value is 1,2,3).
So far, fft algorithm has been realized the phase demodulation of multiple beam on the direction.
Then, phase differential through type (1), the capable decoupling zero computing of (2) contraposition shift-in that obtains obtained the displacement of corresponding hot spot on directions X.
In like manner, can obtain the displacement of these hot spots on the Y direction according to the method described above, at last operation result is presented on the display, show with the light spot position coordinate form.
The verification experimental verification that passed through of the present invention.During checking, Two-dimensional PSD adopts the two-sided bypass type PSD of the S1300 model of the loose company in Japanese shore, and its effective photosurface is 13mm * 13mm, as shown in Figure 2, the three beams incident light converges light for the red-light LED that adopts the sinusoidal signal modulation, and frequency is respectively 20KHz, 40KHz and 80KHz; Each bundle rayed all will produce corresponding electric current on the PSD surface,
X1, X2, Y1With
Y2On output current
I1, I2, I3With
I4It is the stack of a plurality of electric currents; Become 0～3V voltage signal after this several roads electric current process I/V conversion and secondary amplification and the low-pass filtering
U1, U2, U3With
U4Wherein I/V modular converter employing model is the instrumentation amplifier of AD620, and the configuration direct earth capacitance constitutes first order low-pass filtering and elementary amplification; Secondary amplification module adopts universal amplifier OP07, and voltage is further amplified; Then this several roads voltage signal is carried out anti-aliased filtering by single order RC low pass circuit, output
U1～U4
32 High Performance DSP TMS320F2812 that the dsp chip that adopts in this example is released for TI company, it is integrated 12 high-speed AD converters of 16 passages (the TMS320F2812 chip has comprised DSP nucleus module and A/D modular converter among Fig. 4), and the highest synchronized sampling rate can reach 12.5MSPS; A/D modular converter self integrated multipath electronic switch, two sampling holder and A/D converter (the A/D modular converter is integrated all constituents among Fig. 5) need be write AD sampling and converse routine in the utilization; It is 10240KHz that sampling rate is set in the experiment, to each road signals collecting 1024 point, the discrete series that collects is saved in respectively in the DSP ram in slice respectively, and F2812 can support program's memory space and the 4M data space of maximum 4M; By each discrete series being done 1024 FFT computings, and operation result is saved in storage space in this DSP nucleus module; Then, continue this operation result is asked amplitude versus frequency characte respectively, obtain the initial phase of each signal again according to the relation of amplitude versus frequency characte and initial phase, and then obtain
XDirection and
YThe phase differential of respective signal on the direction; This phase differential is further handled and is obtained
XDirection and
YPositional information on the direction, last form with position coordinates outputs among the LCD and shows.
Adopt device of the present invention and application method, can realize the position and the spatial attitude of multiple beam are accurately measured.This device has characteristics such as good stability, measuring accuracy height, antijamming capability are strong, and the multiple beam under the light interference environment that is specially adapted to have powerful connections detects.Compare with PSD measuring system, have advantages such as good environmental adaptability, simplicity of design, cost be low based on the amplitude method.This detects occasion and scientific research field especially has practical significance at the multiple beam that requires online, high precision, measurement environment complexity.
Claims (2)
1. the displacement measuring device of a position-based sensing detector, it comprises Two-dimensional PSD, its launching spot shines the semiconductor laser light source on this Two-dimensional PSD photosurface, gather the current signal of Two-dimensional PSD and carry out pretreated signal pre-processing module, the further digital signal processing module that pretreated signal is handled, it is characterized in that, described signal pre-processing module comprises, realize that current signal changes and the I/V modular converter of elementary amplification to voltage signal, be connected with this I/V modular converter and the output voltage signal value is secondary amplification module and the low-pass filtering module of 0～3V; Described digital signal processing module comprises, A/D modular converter and DSP nucleus module, wherein, described A/D modular converter comprises all 8 tunnel input (ADCINA0～ADCINA7, multiway analog switch (the MUXA of two parallel connections of ADCINB0～ADCINB7), MUXB), respectively with these two multiway analog switch (MUXA, MUXB) two sampling holder (S/HA of Lian Jieing, S/HB), with these two sampling holder (S/HA, S/HB) sampling holder multidiameter option switch of Lian Jieing (S/H MUX) and the A/D converter (A/D Converter) that is connected with sampling holder multidiameter option switch (S/H MUX).
2. the application method of the displacement measuring device of a position-based sensing detector is characterized in that, the displacement measuring device that this application method adopted is the displacement measuring device of the described position-based sensing detector of claim 1; The step of this application method is as follows:
(1) as required, through different frequency
Modulate the multi beam sinusoidal signal driving light source of described semiconductor laser light source
, and allow it be radiated at the launching spot (A, B, C) that obtains respective amount on the described Two-dimensional PSD photosurface;
(2) by the I/V modular converter in the described signal pre-processing module, collection is by the four road output currents that switching current be formed by stacking of each launching spot in described Two-dimensional PSD, the output current of last 2 electrodes of the directions X that this four road output current is respectively this Two-dimensional PSD (X1, X2) (
I1,
I2), the output current of last 2 electrodes of Y direction (Y1, Y2) (
I3,
I4); And by this I/V modular converter realize described output current (
I1,
I2,
I3,
I4) to the conversion and the elementary amplification of voltage signal; Then, successively by secondary amplification module and low-pass filtering module in the described signal pre-processing module, export the voltage signal that its value is the corresponding described directions X of 0～3V (
U1,
U2) and the voltage signal of corresponding described Y direction (
U3,
U4);
(3) by two multiway analog switches (MUXA, MUXB) in the described A/D modular converter and with they corresponding respectively two sampling holders (S/HA, S/HB), allow described directions X voltage signal (
U1,
U2) and described Y direction voltage signal (
U3,
U4) realize that its phase information is to pick up from latching synchronously of synchronization; Then, all voltage signals that latch synchronously (
U1,
U2,
U3,
U4) be sent in the described A/D converter (A/D Converter) by described sampling holder multidiameter option switch (S/H MUX) successively and carry out analog to digital conversion;
(4) carry out described voltage signal after the analog to digital conversion (
U1,
U2,
U3,
U4) be sent in the described DSP nucleus module, with to described voltage signal (
U1,
U2,
U3,
U4) discrete series do respectively
NThe FFT computing of point, and operation result is saved in storage space in this DSP nucleus module; Then, continue this operation result is asked amplitude versus frequency characte respectively, obtain the initial phase of each signal again according to the relation of amplitude versus frequency characte and initial phase, and then obtain
XDirection and
YThe phase differential of respective signal on the direction; This phase differential is further handled and is obtained
XDirection and
YPositional information on the direction, last form with position coordinates outputs in the display device and shows.
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| CN102620756A (en) * | 2012-03-27 | 2012-08-01 | 天津大学 | Phase sensitive demodulator (PSD) signal single-channel processing method based on modulated laser, and processing circuit |
| CN103256992A (en) * | 2013-04-27 | 2013-08-21 | 江苏北方湖光光电有限公司 | Method for processing PSD signal |
| CN105372624A (en) * | 2014-08-15 | 2016-03-02 | 波音公司 | System and method for array lateral effect position sensing detector |
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| CN102620756A (en) * | 2012-03-27 | 2012-08-01 | 天津大学 | Phase sensitive demodulator (PSD) signal single-channel processing method based on modulated laser, and processing circuit |
| CN103256992A (en) * | 2013-04-27 | 2013-08-21 | 江苏北方湖光光电有限公司 | Method for processing PSD signal |
| CN105372624B (en) * | 2014-08-15 | 2019-08-27 | 波音公司 | System and method for array transversal effect position sensing detector |
| CN105372624A (en) * | 2014-08-15 | 2016-03-02 | 波音公司 | System and method for array lateral effect position sensing detector |
| CN106840217A (en) * | 2015-12-03 | 2017-06-13 | 中国科学院光电研究院 | A kind of signal processing method based on PSD |
| CN106840217B (en) * | 2015-12-03 | 2020-04-28 | 中国科学院光电研究院 | Signal processing method based on PSD |
| CN105571494A (en) * | 2015-12-23 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | PSD-based high-accuracy two-dimensional displacement measuring system |
| CN106444374A (en) * | 2016-08-31 | 2017-02-22 | 中国科学院空间应用工程与技术中心 | 2D-PSD based six-freedom-degree relative movement measuring and modeling method |
| CN108226942A (en) * | 2016-12-21 | 2018-06-29 | 赫克斯冈技术中心 | Laser ranging module with INL error compensations |
| CN108226942B (en) * | 2016-12-21 | 2022-01-04 | 赫克斯冈技术中心 | Distance measuring method for determining distance to target object and electronic laser distance measuring module |
| CN108981585A (en) * | 2017-06-01 | 2018-12-11 | 上海砺晟光电技术有限公司 | It can accurately measure the laser displacement sensor of curved surface displacement of targets |
| CN110411337A (en) * | 2018-04-28 | 2019-11-05 | 中国科学院沈阳自动化研究所 | A kind of multiple beam synchronization two-dimensional position detection method based on PSD |
| CN110411337B (en) * | 2018-04-28 | 2021-01-05 | 中国科学院沈阳自动化研究所 | Multi-beam synchronous two-dimensional position detection method based on PSD |
| CN112212789A (en) * | 2019-07-12 | 2021-01-12 | 上海沃尔沃汽车研发有限公司 | Position detection system and position detection method |
| CN112212789B (en) * | 2019-07-12 | 2021-12-21 | 上海沃尔沃汽车研发有限公司 | Position detection system and position detection method |
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Application publication date: 20110817 |