CN105571494A - PSD-based high-accuracy two-dimensional displacement measuring system - Google Patents

PSD-based high-accuracy two-dimensional displacement measuring system Download PDF

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Publication number
CN105571494A
CN105571494A CN201510974502.9A CN201510974502A CN105571494A CN 105571494 A CN105571494 A CN 105571494A CN 201510974502 A CN201510974502 A CN 201510974502A CN 105571494 A CN105571494 A CN 105571494A
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CN
China
Prior art keywords
psd
dimensional displacement
high precision
measurement system
displacement measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510974502.9A
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Chinese (zh)
Inventor
张振东
姜润强
王红宣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201510974502.9A priority Critical patent/CN105571494A/en
Publication of CN105571494A publication Critical patent/CN105571494A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Abstract

The invention relates to a PSD-based high-accuracy two-dimensional displacement measuring system. The system comprises a PSD signal acquiring and processing circuit board, a power supply and a laser. The PSD signal acquiring and processing circuit board is respectively connected with the power supply and the laser. The power supply and the laser are connected. The signal processing flow of the PSD signal acquiring and processing circuit board is successively composed of a PSD, a PSD front-end signal conditioning unit, an analog-to-digital conversion unit and a digital signal processing unit. The digital signal processing unit is connected with an upper computer. According to the technical scheme of the invention, the PSD-based high-accuracy two-dimensional displacement measuring system integrates the PSD signal acquiring and processing circuit board, the laser and the power supply as a whole so as to form a complete set of two-dimensional displacement measuring system. in this way, not only the measurement accuracy is improved, but also the displacement detection is digitized and automated.

Description

Based on the high precision two-dimensional displacement measurement system of PSD
Technical field
The invention belongs to field of measuring technique, relate to a kind of high precision two-dimensional displacement measurement system based on PSD.
Background technology
Along with the development of modern science and technology, non-contact detecting technology becomes the most important measure of modern detecting gradually.Device-Optoelectronic Position Sensitive Detector PSD partly led by the current solid having occurred that a class is new,, subsequent process circuit advantages of simple structure and simple high, real-time with its resolution, be widely used in non-contact laser displacement detection system, active on-line checkingi can be carried out to revolving parts or intergrated system of no-rotating part size and Form and position error in real time.Necessarily non-linear owing to having, only have and it is revised, just can reach quite high precision.
Summary of the invention
The present invention will solve the technical matters existed in prior art, provides the high precision two-dimensional displacement measurement system based on PSD that a kind of contactless, high precision responds fast.
In order to solve the problems of the technologies described above, technical scheme of the present invention is specific as follows:
Based on a high precision two-dimensional displacement measurement system of PSD, comprising:
PSD signal acquisition process circuit board, power supply and laser instrument; Described PSD signal acquisition process circuit board is connected with laser instrument with power supply respectively; Described power supply is connected with laser instrument;
Described PSD signal acquisition process circuit board comprises successively on signal processing flow: PSD, PSD front end signal conditioning unit, AD conversion unit and digital signal processing unit; Described digital signal processing unit is connected with host computer.
In technique scheme, described PSD is the DL100-7 chip that first-sensor company produces.
In technique scheme, described PSD has 100mm 2photosensitive area, can displacement in responsive both direction.
In technique scheme, described signal condition unit is ADA4077-2 chip.
In technique scheme, described AD conversion unit is AD7656B-1 chip.
In technique scheme, described digital signal processing unit is MCUF28027 chip.
In technique scheme, obtain luminous point two-dimensional position information after the four road current signal process that PSD can export by described digital signal processing unit, then positional information is sent to host computer.
The present invention has following beneficial effect:
High precision two-dimensional displacement measurement system based on PSD of the present invention, PSD signal acquisition process plate, laser instrument, power supply are integrated, become the bidimensional displacement measurement system of complete set, not only can improve measuring accuracy, but also achieve digitizing and the robotization of displacement detecting.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is the structural representation of the high precision two-dimensional displacement measurement system based on PSD of the present invention.
Embodiment
Invention thought of the present invention is: the present invention is core with PSD, constitutes a kind of high precision, high speed, contactless displacement detection system.This system not only can improve measuring accuracy, but also achieves digitizing and the robotization of displacement detecting.
Below in conjunction with accompanying drawing, the present invention is described in detail.
As shown in Figure 1, the high precision two-dimensional displacement measurement system based on PSD of the present invention comprises: PSD signal acquisition process circuit board, power supply and laser instrument; Described PSD signal acquisition process circuit board is core component, and it comprises: PSD, PSD front end signal conditioning unit, AD conversion unit and digital signal processing unit.
Below this circuit board is described in detail.The DL100-7 that position sensor PositionSensingDetector (PSD) adopts first-sensor company to produce.This model PSD has 100mm 2photosensitive area, can displacement in responsive both direction.
The current signal that PSD exports is converted to voltage signal and carries out low-pass filtering by signal condition unit, and signal condition unit selects ADA4077-2.Modulus switching device selects AD7656B-1, and this chip has 16 effective resolutions, has-5V ~+5V and-10V ~+10V two grades of measurement ranges.Digital signal processing unit adopts low cost MCUF28027, and this device has 60MHz dominant frequency and inline process, and its data-handling capacity can meet PSD signal processing demands.Obtain luminous point two-dimensional position information after the four road current signal process that PSD exports by digital signal processing unit, then positional information is sent to host computer.
High precision two-dimensional displacement measurement system based on PSD of the present invention, PSD signal acquisition process plate, laser instrument, power supply are integrated, become the bidimensional displacement measurement system of complete set, not only can improve measuring accuracy, but also achieve digitizing and the robotization of displacement detecting.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain of the invention.

Claims (7)

1., based on a high precision two-dimensional displacement measurement system of PSD, it is characterized in that, comprising:
PSD signal acquisition process circuit board, power supply and laser instrument; Described PSD signal acquisition process circuit board is connected with laser instrument with power supply respectively; Described power supply is connected with laser instrument;
Described PSD signal acquisition process circuit board comprises successively on signal processing flow: PSD, PSD front end signal conditioning unit, AD conversion unit and digital signal processing unit; Described digital signal processing unit is connected with host computer.
2. the high precision two-dimensional displacement measurement system based on PSD according to claim 1, is characterized in that, described PSD is the DL100-7 chip that first-sensor company produces.
3. the high precision two-dimensional displacement measurement system based on PSD according to claim 1, it is characterized in that, described PSD has 100mm 2photosensitive area, can displacement in responsive both direction.
4. the high precision two-dimensional displacement measurement system based on PSD according to claim 1, is characterized in that, described signal condition unit is ADA4077-2 chip.
5. the high precision two-dimensional displacement measurement system based on PSD according to claim 1, is characterized in that, described AD conversion unit is AD7656B-1 chip.
6. the high precision two-dimensional displacement measurement system based on PSD according to claim 1, is characterized in that, described digital signal processing unit is MCUF28027 chip.
7. the high precision two-dimensional displacement measurement system based on PSD according to any one in claim 1-6, it is characterized in that, obtain luminous point two-dimensional position information after the four road current signal process that PSD can export by described digital signal processing unit, then positional information is sent to host computer.
CN201510974502.9A 2015-12-23 2015-12-23 PSD-based high-accuracy two-dimensional displacement measuring system Pending CN105571494A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510974502.9A CN105571494A (en) 2015-12-23 2015-12-23 PSD-based high-accuracy two-dimensional displacement measuring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510974502.9A CN105571494A (en) 2015-12-23 2015-12-23 PSD-based high-accuracy two-dimensional displacement measuring system

Publications (1)

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CN105571494A true CN105571494A (en) 2016-05-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107631693A (en) * 2017-09-14 2018-01-26 重庆大学 A kind of two-dimentional multiple spot laser displacement measurement system
CN108801169A (en) * 2018-06-25 2018-11-13 上海卫星工程研究所 One-dimensional PSD sensor module suitable for the in-orbit deformation measurement of satellite structure

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030211892A1 (en) * 2002-05-10 2003-11-13 Nec Corporation Target device and light detecting device
CN201155969Y (en) * 2008-01-08 2008-11-26 西安理工大学 Device for utilizing two-dimension PSD position sensor for measuring rectangular guiding rail linearity
CN102155929A (en) * 2011-03-29 2011-08-17 重庆大学 Displacement measuring device based on position-sensitive detector and application method of displacement measuring device
CN203654046U (en) * 2013-12-31 2014-06-18 武汉理工大学 PS/2 protocol-based non-contact yarn photoelectric detection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030211892A1 (en) * 2002-05-10 2003-11-13 Nec Corporation Target device and light detecting device
CN201155969Y (en) * 2008-01-08 2008-11-26 西安理工大学 Device for utilizing two-dimension PSD position sensor for measuring rectangular guiding rail linearity
CN102155929A (en) * 2011-03-29 2011-08-17 重庆大学 Displacement measuring device based on position-sensitive detector and application method of displacement measuring device
CN203654046U (en) * 2013-12-31 2014-06-18 武汉理工大学 PS/2 protocol-based non-contact yarn photoelectric detection device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107631693A (en) * 2017-09-14 2018-01-26 重庆大学 A kind of two-dimentional multiple spot laser displacement measurement system
CN107631693B (en) * 2017-09-14 2020-02-07 重庆大学 Two-dimensional multipoint laser displacement measurement system
CN108801169A (en) * 2018-06-25 2018-11-13 上海卫星工程研究所 One-dimensional PSD sensor module suitable for the in-orbit deformation measurement of satellite structure
CN108801169B (en) * 2018-06-25 2020-10-09 上海卫星工程研究所 One-dimensional PSD sensor assembly suitable for satellite structure in-orbit deformation measurement

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Application publication date: 20160511