CN109211122B - Ultra-precise displacement measurement system and method based on optical neural network - Google Patents
Ultra-precise displacement measurement system and method based on optical neural network Download PDFInfo
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Abstract
The invention discloses an ultra-precise displacement measurement system based on an optical neural network. The system comprises: the system comprises a light source, an optical displacement measuring device, an optical neural network, a detector array and a signal processing device, wherein when a target object moves, a measuring optical signal output by the optical displacement measuring device is used as a signal input by the system, is received by the detector array after being processed by the optical neural network, and is converted into displacement information of the target object by the signal processing device. The invention also discloses an ultra-precise displacement measurement method based on the optical neural network. The invention can directly realize the measurement of the displacement of the target object by processing the measurement optical signal by utilizing the optical neural network, does not need the phase discrimination process of an electronic signal, has extremely high response speed, scalable size and high energy utilization rate, and is suitable for ultra-precise measurement occasions with high speed and high dynamic performance requirements. The system can also realize the multi-degree-of-freedom pose measurement of the target object by increasing the number of input measurement optical signals and detector arrays.
Description
Technical Field
The invention relates to the technical field of ultra-precise displacement measurement, in particular to an ultra-precise displacement measurement system and method based on an optical neural network.
Background
The optical measurement technology plays an important role in an ultra-precise displacement measurement system, and mainly comprises a grating ruler based on the moire fringe principle and an interferometer based on the optical interference principle. The optical displacement measurement system, as a typical displacement sensor, has the advantages of traceability of length, high measurement precision, large measurement range, large dynamic measurement range, low cost, easiness in installation and debugging and the like, and is widely applied to the field of precision and ultra-precision measurement, and is commonly used in closed-loop servo systems of precision machinery and processing equipment.
The displacement sensor of the grating ruler obtains moire fringe optical signals through the measurement of the relative displacement of the indication grating and the scale grating, and photoelectric devices are arranged in the fringes at certain intervals to realize electronic fineness and direction judgment. Due to the quantization error in the process of converting the optical signal into the electric signal, the electronic subdivision precision is limited, and the measurement precision is reduced under the influence of electronic noise in the process of transmitting the electronic signal, so that the ultra-precise measurement requirement is difficult to meet.
The interferometric displacement measurement technology realizes displacement measurement by detecting phase change of interference light, and can be divided into a homodyne interferometric measurement system and a heterodyne interferometric measurement system, and the main difference is whether reference light and measurement light frequency forming the interference light are the same or not. The homodyne interferometry system adopts a four-channel phase discriminator for phase detection, and the heterodyne interferometry system adopts electronic signal processing methods such as phase-locked demodulation and the like for phase detection. In both methods, interference optical signals are required to be converted into electric signals, phase change caused by Doppler effect is extracted by using a special phase discrimination device and then converted into position information of a target object, and the above processes also have the influence of quantization errors and electronic noise. In addition, a reference interference signal is required as a reference in the phase detection process, and the stability of the reference interference signal also affects the measurement accuracy to a great extent. In addition, the phase detection of the phase detector and the process of utilizing the phase decoupling pose have time delay, so that the method cannot meet the measurement requirement under the condition of harsh requirements on measurement precision and dynamic performance.
In order to solve the above problems, the existing solutions mainly use a heterodyne interference scheme, and simultaneously improve the performance and resolution of the phase detector. For example, Zygo and Agilent in the United states have introduced special phase detection cards with a phase resolution of 1/2048. However, due to the existence of the phase discrimination process, the accuracy reduction and the time delay cannot be eliminated fundamentally, and before the phase discrimination device is processed, a photoelectric detector is needed to convert an interference optical signal into an electric signal, so that the performance of the photoelectric detector can also influence the measurement accuracy.
Disclosure of Invention
Based on the above problems, the present invention aims to provide an ultra-precise displacement measurement system based on an optical neural network, which directly realizes displacement measurement without the need of conversion and transmission of intermediate electrical signals and a phase detection process, and avoids the problems of measurement precision reduction and time delay caused by quantization error of photoelectric signal conversion, electronic noise and the phase detection process; the resolution of nanometer is realized, and the high-precision measurement of displacement is realized. The system has the advantages of simple and compact optical structure, convenience for actual installation and operation, good stability and economy and the like.
The invention also aims to provide an ultra-precise displacement measurement method based on the optical neural network.
The above purpose is realized by the following technical scheme:
according to one aspect of the present invention, the present invention provides an ultra-precise displacement measurement system based on an optical neural network, including: the device comprises a light source, an optical displacement measuring device, an optical neural network, a detector array and a signal processing device which are sequentially connected, wherein the light source is used for outputting light and emitting the light into the optical displacement measuring device; the optical displacement measuring device is used for outputting a measuring optical signal; the optical neural network is used for receiving and processing the measuring optical signal and emitting an optical signal; the detector array is used for receiving optical signals and converting the optical signals into electric signals; the signal processing device is used for receiving the electric signal and outputting target displacement information.
Preferably, the optical neural network is obtained by off-line analog simulation training; the optical neural network comprises an active optical neural network and/or a passive optical neural network, wherein the active optical neural network comprises a spatial light modulator, and the passive optical neural network comprises an optical signal input board, an optical diffraction board and an optical signal output board.
Preferably, the light source is an incoherent light source, and the optical displacement measuring device is a grating ruler, and is used for outputting a moire fringe measuring light signal to perform measurement based on a moire fringe principle.
Or preferably, the light source is coherent laser, and the optical displacement measuring device is a homodyne laser interferometer or a homodyne grating interferometer, and is configured to output an interferometric measurement optical signal to perform measurement based on an interferometric principle.
Preferably, the detector array is a CMOS array, a CCD array or other photodetector array.
According to another aspect of the present invention, the present invention provides an ultra-precise displacement measurement method based on an optical neural network, including the following steps: the light source outputs light rays to the optical displacement measuring device, and the light rays are modulated by the motion of the target to be measured and then output a measuring light signal; the measured optical signal is transmitted to an optical neural network, the optical signal is emitted after being modulated by optical diffraction, the optical signal is received by a detector array and is converted into an electric signal, and the electric signal outputs target displacement information through a signal processing device; when the target object moves linearly relative to the optical displacement measuring device, the signal processing device directly outputs the linear displacement of the target to be measured by using the electric signal output by the detector array.
The system can realize multi-degree-of-freedom pose measurement of the target object by increasing the number of input measurement optical signals and the number of detector arrays. The measured optical signals of the input optical neural network do not need to be subjected to signal phase discrimination, when a target object does measurable multi-degree-of-freedom motion, a plurality of measured optical signals are input, and decoupled multi-degree-of-freedom pose information is directly output by adopting a plurality of detector arrays instead of coupled phase information. For example, when the optical displacement measuring device is a homodyne grating interferometer, two interferometric optical signals are output simultaneously, and input optical neural networks are processed in parallel, so that simultaneous measurement of two degrees of freedom is realized.
Has the advantages that:
the ultra-precise displacement measurement system based on the optical neural network has the advantages of small volume, high integration level, low environmental sensitivity, easy processing of measurement signals, and nanometer or even higher resolution and precision; compared with the prior ultra-precise displacement measurement system, the method can effectively avoid the influence of the quantization error, the electronic noise and the phase detection process of photoelectric signal conversion on the measurement precision and the dynamic performance on the basis of meeting the measurement precision requirement. The ultra-precise displacement measurement system based on the optical neural network is particularly suitable for scenes with higher requirements on measurement dynamic performance in industrial application, and can also be applied to the precise measurement of the displacement of a workpiece table of a precise machine tool, a three-coordinate measuring machine, a semiconductor detection device and the like. The invention can also realize the simultaneous measurement of the pose of the target object with multiple degrees of freedom by increasing the number of input measurement optical signals and the number of detector arrays.
Drawings
FIG. 1 is a schematic structural diagram of an ultra-precise displacement measurement system based on an optical neural network according to the present invention;
FIG. 2a is a schematic diagram of the structure of an active optical neural network in the measurement system of the present invention;
FIG. 2b is a schematic diagram of a passive optical neural network in the measurement system of the present invention;
FIG. 3 is a schematic structural diagram of a first embodiment of the ultra-precise displacement measurement system based on an optical neural network according to the present invention;
FIG. 4a is a schematic structural diagram of a second embodiment of the ultra-precise displacement measurement system based on an optical neural network according to the present invention;
fig. 4b is a schematic structural diagram of a third embodiment of the ultra-precise displacement measurement system based on the optical neural network.
The device comprises a light source 1, an optical displacement measuring device 2, an optical neural network 3, a detector array 4 and a signal processing device 5, wherein the light source is connected with the optical displacement measuring device; 211-scale grating, 212-indicator grating; 221-first beam splitter prism, 222-measuring mirror, 223-reference mirror; 231-a second beam splitter prism, 232-a measurement grating, 233-a reference grating; 31-a spatial light modulator; 321-optical signal input plate, 322-optical diffraction plate, 323-optical signal output plate.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention:
fig. 1 schematically shows the structure of the ultra-precise displacement measurement system based on the optical neural network. As shown in fig. 1, the present invention provides an ultra-precise displacement measurement system based on an optical neural network, which includes: the device comprises a light source 1, an optical displacement measuring device 2, an optical neural network 3, a detector array 4 and a signal processing device 5.
The ultra-precise displacement measuring system can directly realize the measurement of the displacement of the target object by processing the measuring optical signal by using the optical neural network 3. When the target object moves, the measuring system takes the measuring optical signal output by the optical displacement measuring instrument as a signal input, the signal input is received by the detector array 4 after being processed by the optical neural network 3, and finally the signal input is converted into displacement information of the target object through the signal processing device 5.
In the invention, the optical neural network 3 is obtained by off-line analog simulation training, can be realized by adopting the structures of an active optical neural network and a passive optical neural network, and utilizes optical signals to process and transmit information in parallel. The detector array 4 may be a cmos (complementary Metal Oxide semiconductor) array, a ccd (charge Coupled device) array, or other photodetector array.
Fig. 2a and 2b schematically show the structure of the optical neural network in the present invention. As shown in fig. 2a, the active optical neural network consists of a spatial light modulator 31, which performs processing of the incoming measurement optical signal under the control of a time-varying electrical drive signal or other signals a-f. As shown in fig. 2b, the passive optical neural network is composed of an optical signal input board 321, an optical diffraction board 322 and an optical signal output board 323; the optical diffraction plate 322 controls diffraction efficiency by changing the thickness of the diffraction plate to realize the processing of the input measuring optical signal, each diffraction structure forms a unit neural network unit, and the multilayer optical diffraction plates 322 are aligned to form a fixed optical neural network 3 structure.
The ultra-precise displacement measurement method (measurement principle) based on the optical neural network 3 provided by the present invention is described in detail with reference to fig. 1, fig. 2a and fig. 2 b: the light source 1 outputs light rays to the optical displacement measuring device 2, and the light rays are modulated by the movement of a target to be measured and then output a measuring light signal; the measuring optical signal is transmitted to an optical neural network 3, an emergent optical signal is modulated and processed by optical diffraction and is received by a detector array 4 and converted into an electric signal, and the electric signal outputs target displacement information through a signal processing device 5; when the target object moves linearly with respect to the optical displacement measuring device 2, the signal processing device 5 may directly output the linear displacement of the target to be measured using the electrical signal output from the detector array 4. When the target object moves linearly relative to the optical displacement measuring device 2, the signal processing device 5 directly outputs the linear displacement of the target to be measured using the electrical signal output from the detector array 4. The method adopts the measuring system of the invention to directly realize displacement measurement by utilizing the optical neural network 3, does not need the phase discrimination process of electronic signals, has the characteristics of extremely high response speed, scalable size, high energy utilization rate and the like, and is particularly suitable for ultra-precise measuring occasions with high speed and high dynamic performance requirements.
In the invention, the system can also realize the simultaneous measurement of the multi-degree-of-freedom pose of the target object by increasing the number of input measurement optical signals and the number of detector arrays 4. The measured optical signals of the input optical neural network 3 do not need to be subjected to signal phase discrimination, when a target object does measurable multi-degree-of-freedom motion, a plurality of measured optical signals are input, and decoupled multi-degree-of-freedom pose information is directly output by adopting a plurality of detector arrays 4 instead of coupled phase information.
Specific embodiments are described below in conjunction with fig. 3, 4a, and 4 b:
first embodiment
Fig. 3 schematically shows the structure of the grating scale displacement measurement system based on the optical neural network 3, that is, the structure of the measurement system when the optical displacement measurement device 2 is a grating scale, including: the device comprises a light source 1, an optical displacement measuring device 2, an optical neural network 3, a detector array 4 and a signal processing device 5.
As shown in fig. 3, in this embodiment, an incoherent light source is used as the light source 1, the optical displacement measuring device 2 is a grating scale, and the optical neural network 3 is a spatial light modulator 31.
The working principle of the embodiment is completely the same as that of the invention, the grating ruler mainly comprises a scale grating 211 and an indicating grating 212, when the two gratings move relatively, a moire fringe optical signal is output, high-precision displacement information can be directly output after being processed by the optical neural network 3, and subdivision and direction judgment are not needed.
Second embodiment
Fig. 4a schematically shows the structure of the optical interferometric displacement measuring system based on the optical neural network 3, namely the structure of the measuring system when the optical displacement measuring device 2 is an optical interferometer, comprising: the device comprises a light source 1, an optical displacement measuring device 2, an optical neural network 3, a detector array 4 and a signal processing device 5.
As shown in fig. 4a, in this embodiment, the light source 1 is a single-frequency laser, the optical displacement measuring device 2 is a homodyne laser interferometer, and the optical neural network 3 is a passive optical neural network; the homodyne laser interferometer includes a first beam splitter prism 221, a reference mirror 223, and a measurement mirror 222.
Compared with the first embodiment, the optical displacement measuring device 2 of the present embodiment uses an optical interferometer, and outputs an interferometric optical signal to obtain higher measurement resolution and accuracy.
Third embodiment
Fig. 4b schematically shows the structure of the optical interferometric displacement measuring system based on the optical neural network 3, namely the structure of the measuring system when the optical displacement measuring device 2 is an optical interferometer, which comprises: the device comprises a light source 1, an optical displacement measuring device 2, an optical neural network 3, a detector array 4 and a signal processing device 5.
As shown in fig. 4b, in this embodiment, the light source 1 is a single-frequency laser, the optical displacement measuring device 2 is a homodyne grating interferometer, and the optical neural network 3 is a passive optical neural network; the homodyne grating interferometer comprises a second beam splitter prism 231, a reference grating 233 and a measurement grating 232.
Compared with the second embodiment, the optical displacement measuring device 2 of the embodiment adopts a homodyne grating interferometer, and can simultaneously output two measuring optical signals besides higher measuring resolution and precision, and input the optical signals into the optical neural network 3 for parallel processing, thereby realizing simultaneous measurement of two degrees of freedom.
The measuring system and the measuring method in the embodiment have short measuring optical path and little influence by environment, the measuring system adopts the optical neural network 3, the volume and the number of system parts can be effectively reduced, the anti-interference capability and the system integration of the system are improved, the influence of a phase detection process on the measuring precision and the dynamic performance can be effectively avoided, the measuring signal is easy to process, and the measuring resolution of linear displacement can reach the nanometer level; the system also has the advantages of simple structure, small volume, light weight, easy installation and arrangement, convenient application and the like; but also can realize the simultaneous measurement of multiple degrees of freedom; the device can also be applied to the precision measurement of the displacement of the workpiece table of a precision machine tool, a three-coordinate measuring machine, semiconductor detection equipment and the like.
While the preferred embodiments of the present invention have been illustrated and described, it will be appreciated by those skilled in the art that the foregoing embodiments are illustrative and not restrictive, and that various modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (6)
1. An ultra-precise displacement measurement system based on an optical neural network, comprising: a light source, an optical displacement measuring device, an optical neural network, a detector array and a signal processing device which are connected in sequence,
the light source is used for outputting light rays and emitting the light rays into the optical displacement measuring device, and the optical displacement measuring device outputs a measuring light signal after the movement modulation of the object to be measured;
the optical neural network is used for receiving and processing the measuring optical signal and emitting an optical signal;
the detector array is used for receiving optical signals and converting the optical signals into electric signals;
the signal processing device is used for receiving the electric signal and outputting target displacement information;
the optical neural network is obtained by off-line analog simulation training, is realized by adopting a structure of an active optical neural network or a passive optical neural network, and utilizes optical signals to process and transmit information in parallel; the active optical neural network comprises a spatial light modulator; the passive optical neural network comprises an optical signal input plate, an optical diffraction plate and an optical signal output plate.
2. The ultra-precise displacement measurement system based on the optical neural network as claimed in claim 1, wherein the light source is an incoherent light source, and the optical displacement measurement device is a grating ruler for outputting a moire fringe measurement light signal.
3. The ultra-precise displacement measuring system based on the optical neural network as claimed in claim 1, wherein the light source is a coherent laser, and the optical displacement measuring device is a homodyne laser interferometer or a homodyne grating interferometer for outputting an interferometric optical signal.
4. The ultra-precise displacement measurement system based on the optical neural network as claimed in claim 1, wherein the detector array is a CMOS array or a CCD array.
5. An ultra-precise displacement measurement method based on an optical neural network, which is characterized in that the ultra-precise displacement measurement system based on the optical neural network as claimed in claim 1 is adopted for measurement, and the method comprises the following steps:
the light source outputs light rays to the optical displacement measuring device, and the light rays are modulated by the motion of the target to be measured and then output a measuring light signal;
the measured optical signal is transmitted to an optical neural network, the optical signal is emitted after being modulated by optical diffraction, the optical signal is received by a detector array and is converted into an electric signal, and the electric signal outputs target displacement information through a signal processing device;
when the target object moves linearly relative to the optical displacement measuring device, the signal processing device directly outputs the linear displacement of the target to be measured by using the electric signal output by the detector array.
6. The ultra-precise displacement measurement method based on the optical neural network as claimed in claim 5, wherein the measurement optical signal input into the optical neural network does not need to undergo signal phase discrimination, and when the target object makes measurable multi-degree-of-freedom motion, a plurality of measurement optical signals are input and a plurality of detector arrays are adopted to directly output decoupled multi-degree-of-freedom pose information instead of coupled phase information.
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| CN110334804B (en) * | 2019-06-20 | 2021-09-07 | 清华大学 | All-optical depth diffraction neural network system and method based on spatial partially coherent light |
| CN111458777A (en) * | 2020-04-22 | 2020-07-28 | 中国计量大学 | Optical chip and manufacturing method |
| CN114037070A (en) * | 2022-01-07 | 2022-02-11 | 苏州浪潮智能科技有限公司 | Optical signal processing method, photonic neural network chip and design method thereof |
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