CN101135553A - Photoelectric displacement sensor and displacement measurement method - Google Patents
Photoelectric displacement sensor and displacement measurement method Download PDFInfo
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- CN101135553A CN101135553A CNA2007101640679A CN200710164067A CN101135553A CN 101135553 A CN101135553 A CN 101135553A CN A2007101640679 A CNA2007101640679 A CN A2007101640679A CN 200710164067 A CN200710164067 A CN 200710164067A CN 101135553 A CN101135553 A CN 101135553A
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Abstract
The displacement sensor comprises: a laser, a optical fiber and a displacement scale plate. The invention is highly accurate, long service life and low cost. Comparing the touched displacement senor, the invention uses a non-touched solution to sense the displacement so as to greatly increase the service life of the sensor.
Description
Technical field
The present invention relates to microelectronics, photoelectron, Industry Control and instrumental science field, relate in particular to sensor field
Background technology
There is a large amount of line-shape constructions in the foundation works construction, as highway, railway, municipal pipeline, oil transportation gas transmission engineering, subway, tunnel, bridge, dam and dyke etc., it is big that these line-shape constructions generally have span, characteristics such as landforms geologic condition complexity along the line, relatively more responsive to environmental changes such as peripheral geology, landforms, weathers, normal generation relative settlement, engineering problems such as distortion, seepage, fracture and erosion, influenced the normal use of engineering, cause heavy losses, also the ecologic environment of line of project is caused sometimes to have a strong impact on.Therefore, take corresponding monitoring technology means that the main body and the affiliated facility of line-shape construction carried out health monitoring and diagnosis, in time early-warning and predicting is the key subjects that numerous scientific workers and engineering technical personnel must face.
Displacement transducer is widely used in engineering, Industry Control, instrumental science field, at the monitoring of engineering topography and geomorphology and the measurement in the Aero-Space.Traditional displacement transducer generally uses the brush of contact, along with increasing of access times caused the brush mechanical fatigue, serviceable life is limited, because the size of mechanical type brush can't be accomplished micron dimension, makes not high based on the displacement transducer precision of brush principle simultaneously.At present, high-precision displacement transducer mainly is to utilize principles such as grating, magnetic grid, appearance grid and mechanical technique to reflect the displacement size of testee, and the cost of manufacture height costs an arm and a leg, and high-end product is monopolized by external product mostly.The displacement transducer that needs a kind of precision height, life-span length and relative low price on the market.
Summary of the invention
(1) problem that will solve
The object of the present invention is to provide a kind of precision height, the life-span is long, cost is low, volume is little displacement transducer.
(2) technical scheme
For achieving the above object, the invention provides a kind ofly based on photoelectric displacement transducer, this sensor combines microelectronics and photoelectronic technology.Microelectric technique can realize large scale integrated circuit, and the extensive integrated immediate interest of bringing is exactly low-cost.Along with the develop rapidly of microelectric technique, lithographic accuracy has entered nanometer scale, and the volume of circuit is more and more littler, and precision improves constantly.Photoelectron technology is based on optoelectronics, and comprehensive utilization optics, precision optical machinery, electronics and computer technology solve the technology-oriented discipline that various engineerings are used problem.Information carrier expands to optical band by electromagnetic wave bands, thereby makes that photoelectricity science and light mechanical and electrical integration concentrate on that optical information obtains, transmits, on the optoelectronic information industry of processing, record, storage, demonstration and sensing etc.Utilize photoelectric technology can realize the noncontact sensing, reach the purpose of long service life.The combination of microelectronics and photoelectron technology can realize the displacement transducer product of high precision, low cost and high life.This photoelectric sensor is made up of laser instrument, optical fiber, displacement scaleplate.
In the such scheme, laser instrument is according to the material of optical semiconductor detector and fixed, and the radiation wavelength of laser instrument is the wavelength of the photogenerated current responsiveness of semiconductor material when maximum.
In the such scheme, thereby optical fiber and laser instrument coupling optically focused prevent that the radiant light of laser instrument from dispersing, and improve the utilization factor of radiant light.When optical fiber optically focused can not satisfy accuracy requirement, add shadow shield, adopt recognition technology simultaneously, a plurality of photo-detectors are exported the situation of photocurrent simultaneously, calculate the center of plane of illumination.
In the such scheme, the displacement scaleplate is made up of some identical optical semiconductor detectors.The optical semiconductor detector is a kind of light receiving element that utilizes the photoelectric effect principle to make, and when being subjected to radiation of light source, produces photocurrent, and the structure and the radiation light wavelength of the size of photocurrent and the material of photo-detector, photo-detector have direct relation.
In the such scheme, the displacement measurement method of photoelectric sensor: an end of laser instrument links to each other with measured piece, the other end by optical fiber to displacement scaleplate radiation laser, photo-detector on the displacement scaleplate is sensed laser, will produce photocurrent, the output branch road of measuring light electric current can be judged the position scale of photo-detector, the position scale that moves the whole story is subtracted each other, promptly obtain moving displacement.
(3) beneficial effect
From technique scheme as can be seen, the present invention has following beneficial effect:
This invention adopts photoelectric technology to realize non-contact displacement transducer, and this New Displacement Transducer can improve serviceable life greatly; Utilize microelectronic retrofit manufacturing technology that precision is improved greatly; Microelectronic large-scale production descends cost, and volume is little, compact conformation.Adopt the method for the invention, utilize the combination of existing microelectronics and photoelectron technology to make displacement transducer satisfy precision height, the life-span is long, cost is low, volume is little requirement.
Description of drawings
Fig. 1 is the structural representation of this invention, and " 1 " mark is measured piece among Fig. 1, and what " 2 " marked is laser instrument, and what " 3 " marked is optical fiber, and what " 4 " marked is photo-detector, and what " 5 " marked is scaleplate;
Fig. 2 is the displacement scaleplate photo etched mask domain of this invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Principle of sensors during sensor measurement, makes an end of laser instrument link to each other with measured piece as shown in Figure 1, and the other end passes through optical fiber radiation laser to the displacement scaleplate.The displacement scaleplate is fixed, and it is arranged side by side by some identical optical semiconductor detectors and constitutes.
Photo-detector is a kind of signal receiving element, and input signal is a light signal, and output is photocurrent, promptly owing to photoelectric effect, and the inner excess carriers that produce of semiconductor, excess carriers spread to the concentration lower from the concentration eminence, thereby produce electric current.Photo-detector mainly contains structure in PIN detector and the avalanche photodide two.The PIN detector is the device that adds one deck depletion layer on the basis of general photodiode, and it has the quantum efficiency height, dark current is low, response speed is high, working bias voltage is low, do not have the characteristics of multiplier effect.Avalanche photodide is a kind ofly to utilize higher bias voltage to quicken the electron hole pair that photon excitation goes out, and it is right to collide out the secondary electron hole, forms the device of photocurrent multiplication.It has higher quantum efficiency, higher response, multiplier effect is arranged.
As shown in Figure 1, displacement scaleplate parallel arranged the identical photo-detector of size, is used for the position of exploring laser light.Each photo-detector is represented an independently position scale, and when measured piece moved, laser instrument moved along the displacement scaleplate thereupon together.The radiant light of motion laser instrument at the whole story has been responded to different photo-detectors respectively, and,, just can judge the position scale of photo-detector by detecting the output branch road of photocurrent at relevant position generation photocurrent, the scale that moves the whole story is subtracted each other, just can obtain the displacement of measured piece.
Fig. 2 is the photo etched mask domain of photoelectric displacement sensor scaleplate, and it is big or small corresponding with displacement scaleplate material object.1 millimeter of length overall, minimum scale is 10 microns, and is two-layer about being divided into, and represents ten and a position respectively.Wherein, rectangle BCIH and rectangle DEKJ two parts are the photosensitive area of photo-detector, and rectangle ABHG, CDJI, EDLK three parts are the ohmic contact regions of photodetector, ten square frames of last row and five pressure welding point that square frame is a metal lead wire of arranging down.
The precision of this displacement transducer is determined by two factors: the size of single photo-detector and radiant light area.Be to improve precision, solve two problems: one will accomplish single photo-detector enough for a short time, and two will make the swept area of laser instrument enough little.First problem is solved by microelectronic retrofit technology.At present, the lithographic accuracy of microelectric technique has entered the nanometer stage, and promptly in theory, single photo-detector can be accomplished below 100 nanometers.Second problem can be alleviated by the optical fiber coupling, but light signal by the exiting surface diameter behind the optical fiber in micron dimension.If will further dwindle plane of illumination, need between optical fiber and displacement scaleplate, add shadow shield, control exiting surface diameter is below 1 micron.When a plurality of photo-detectors are exported photocurrent simultaneously, utilize recognition technology, the center that measuring light is shown up, thereby the position of definite light source.
Claims (6)
1. a photoelectric displacement sensor is characterized in that, this displacement transducer is made up of laser instrument, optical fiber and displacement scaleplate.
2. photoelectric displacement sensor according to claim 1 is characterized in that, laser instrument is according to the material of optical semiconductor detector and fixed, and the radiation wavelength of laser instrument is the wavelength of the photogenerated current responsiveness of semiconductor material when maximum.
3. photoelectric displacement sensor according to claim 1 is characterized in that, described optical fiber is used for laser instrument is carried out optically focused, prevents that the radiant light of laser instrument from dispersing.
4. photoelectric displacement sensor according to claim 1 is characterized in that, when optical fiber optically focused can not satisfy accuracy requirement, adds shadow shield, adopts recognition technology simultaneously, and a plurality of photo-detectors are exported the situation of photocurrent simultaneously, calculates the center of plane of illumination.
5. photoelectric displacement sensor according to claim 1 is characterized in that, described displacement scaleplate is made up of some identical optical semiconductor detectors.
6. use the displacement measurement method of the described photoelectric sensor of claim 1: photoelectric displacement sensor according to claim 1, one end of laser instrument links to each other with measured piece, the other end by optical fiber to displacement scaleplate radiation laser, photo-detector on the displacement scaleplate is sensed laser, will produce photocurrent, the output branch road of measuring light electric current can be judged the position scale of photo-detector, the position scale that moves the whole story is subtracted each other, promptly obtain moving displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101640679A CN101135553A (en) | 2007-10-17 | 2007-10-17 | Photoelectric displacement sensor and displacement measurement method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101640679A CN101135553A (en) | 2007-10-17 | 2007-10-17 | Photoelectric displacement sensor and displacement measurement method |
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| CN101135553A true CN101135553A (en) | 2008-03-05 |
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| CNA2007101640679A Pending CN101135553A (en) | 2007-10-17 | 2007-10-17 | Photoelectric displacement sensor and displacement measurement method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095379A (en) * | 2010-08-27 | 2011-06-15 | 中国科学院长春光学精密机械与物理研究所 | Absolute grating scale |
| CN101672624B (en) * | 2009-10-16 | 2011-07-06 | 中国科学院微电子研究所 | Photoelectric displacement sensor and preparation method thereof |
| CN107457793A (en) * | 2016-06-03 | 2017-12-12 | 发纳科美国公司 | Dynamic laser touch-sensing is carried out using multirobot dynamic subscriber frame |
| CN109141349A (en) * | 2018-07-19 | 2019-01-04 | 中国地质环境监测院 | A method of it is compressed based on fiber grating detection technology Monitoring Surface Subsidence area's soil body |
| CN109211122A (en) * | 2018-10-30 | 2019-01-15 | 清华大学 | Ultraprecise displacement measurement system and method based on optical neural network |
-
2007
- 2007-10-17 CN CNA2007101640679A patent/CN101135553A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101672624B (en) * | 2009-10-16 | 2011-07-06 | 中国科学院微电子研究所 | Photoelectric displacement sensor and preparation method thereof |
| CN102095379A (en) * | 2010-08-27 | 2011-06-15 | 中国科学院长春光学精密机械与物理研究所 | Absolute grating scale |
| CN102095379B (en) * | 2010-08-27 | 2012-11-07 | 中国科学院长春光学精密机械与物理研究所 | Absolute grating scale |
| CN107457793A (en) * | 2016-06-03 | 2017-12-12 | 发纳科美国公司 | Dynamic laser touch-sensing is carried out using multirobot dynamic subscriber frame |
| CN109141349A (en) * | 2018-07-19 | 2019-01-04 | 中国地质环境监测院 | A method of it is compressed based on fiber grating detection technology Monitoring Surface Subsidence area's soil body |
| CN109141349B (en) * | 2018-07-19 | 2024-04-05 | 中国地质环境监测院 | Method for monitoring soil compression of ground subsidence area based on fiber grating sensing technology |
| CN109211122A (en) * | 2018-10-30 | 2019-01-15 | 清华大学 | Ultraprecise displacement measurement system and method based on optical neural network |
| CN109211122B (en) * | 2018-10-30 | 2020-05-15 | 清华大学 | Ultra-precise displacement measurement system and method based on optical neural network |
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Open date: 20080305 |