CN102095379A - Absolute grating scale - Google Patents
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- CN102095379A CN102095379A CN 201010575398 CN201010575398A CN102095379A CN 102095379 A CN102095379 A CN 102095379A CN 201010575398 CN201010575398 CN 201010575398 CN 201010575398 A CN201010575398 A CN 201010575398A CN 102095379 A CN102095379 A CN 102095379A
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Abstract
The invention relates to an absolute grating scale comprising a standard grating, a photoelectric detector and a light source. The absolute grating scale further comprises a scanning mask. The light source emits ray; the ray is sent into the standard grating via the scanning mask; the photoelectric detector receives an absolute position signal, a reference position signal and a subdivided signal. The reference position signal is divided into two paths, wherein one path is the combination of two translucidus signals, and the other path is the combination of a completely-lighttight signal and a completely-transmitting signal. The absolute grating scale has the advantage of simple reading circuit.
Description
[technical field]
The present invention relates to a kind of absolute type grating chi, a kind of accurate surveying instrument that is used to measure length.
[background technology]
The grating chi that is used for position measurement has in mechanical industry very widely and uses, and its performance impact is to the quality of machining.
At present, the grating chi of the instrument of the known moving displacement that is used for the precision measurement object mainly comprises two kinds of increment type and absolute types.Wherein absolute type grating chi is obtaining bigger application gradually, and its major advantage is exactly not need to seek reference origin, can be after outage, anyly the position is measured when giving electricity.Therefore, it has very application prospects on numerically-controlled machine.
Three general track absolute type grating chis, except absolute code channel that has absolute location information and the increment code channel that is used for producing the segmentation positional information, also has an increment code channel, when measuring, for the reference signal that receives the incident of increment code channel needs a lot of photoelectricity receiving elements, make circuit complicated, and will average effect elimination noise in the middle of signal processing, processing of circuit signal difficulty is bigger.
[summary of the invention]
Complicated for circuit in the solution prior art absolute type grating chi, the problem that the signal Processing difficulty is bigger is necessary to provide a kind of circuit structure the simple and better simply absolute type grating of signal Processing chi.
A kind of absolute type grating chi, it comprises a master grating, a photodetector, reaches a light source, this absolute type grating chi further comprises the one scan mask, this light source emits beam, inject this master grating via this scanning mask, this photodetector is surveyed the light signal that is filtered and formed by this master grating, is respectively absolute position signal, reference position signal and segmentation signal.This reference position signal comprises two-way, and wherein one the tunnel is the combination of two semi-transparent signals, the combination of a complete light tight signal of another Lu Weiyi and a complete printing opacity signal.
With respect to prior art, the scanning mask of this absolute type grating chi setting cooperates with master grating incident light is carried out the grating filtration treatment, obtain two-way and represent the signal in complete transmission region and complete light tight zone respectively, determined reference position signal, solved the problem of absolute position coarse reading with the segmentation reading; And above-mentioned definite reference position signal is set is an optics average signal, and it is average to need not to carry out electronics again, has simplified the reading circuit, has reduced the processing of circuit difficulty.
[description of drawings]
Fig. 1 is the optical texture synoptic diagram of absolute type grating chi of the present invention.
Fig. 2 is the photovoltaic principals synoptic diagram of absolute type grating chi shown in Figure 1.
Fig. 3 is the structural representation of scanning mask shown in Figure 1.
Fig. 4 is the signal schematic representation that reads of absolute type grating chi shown in Figure 1
[embodiment]
See also Fig. 1 to Fig. 3, Fig. 1 is the optical texture synoptic diagram of absolute type grating chi of the present invention.Fig. 2 is the photovoltaic principals synoptic diagram of absolute type grating chi shown in Figure 1.The structural representation of the scanning mask that Fig. 3 is shown in Figure 1.This absolute type grating chi 800 mainly comprises a master grating 19, one scan mask 20, one photodetectors 18, one signal processing circuits 100, one optical systems (figure does not show) and a light source 30.This light source 30 emits beam, be converted to the collimation incident ray via this optical system, this collimation incident ray is injected this master grating 19 via this scanning mask 20, and this photodetector 18 is to receive from the light signal of these master grating 19 incidents and export this signal processing circuit 100 to handle.This light source can be laser diode.
Please consult Fig. 2 again, this master grating 19 comprises one with reference to code channel 16, an increment code channel 17 and an absolute code channel 15.This absolute code channel 15, this is parallel to each other in regular turn with reference to code channel 16 and this increment code channel 17 and forms a line.This increment code channel 17 is carved rail for the increment with certain one-period, and its printing opacity has identical cycle and width with lightproof part.This also is that an increment is carved rail with reference to code channel 16, and its printing opacity has identical cycle and width equally with lightproof part, and its printing opacity and lightproof part are big than the width of the printing opacity of this increment code channel 17 and lightproof part.This is that the pattern of sign absolute location information is a pseudo-random code above absolute code channel 15, and the code word of each code element is sequenced to be arranged on the code channel, is labeled as respectively: " C1, C2, C4, C5, C6...... ".Wherein, the representative at random of each code element has the light transmission part or the lightproof part of same widths, can set light transmission part and lightproof part and represent ' 0 ' or ' 1 ' respectively, then these continuous some code elements, constitute a complete code word, a corresponding unique absolute position value.
Please consult Fig. 3 again, this scanning mask 20 comprise one first quarter rail 21, second quarter the rail 22 and bright part 23 of a full impregnated.Groove on this rail 22 is arranged corresponding with the groove on this increment code channel 17 at second quarter, and the same with the raster groove of using in the common increment grating chi, its light transmission part and lightproof part have same period and width.This, rail groove of 21 with reference to the groove on the code channel 16, was the indication grating with specific pattern characteristics corresponding to this at first quarter.Printing opacity and lightproof part on this rail 21 have same period at first quarter, but the two width difference, the width of each lightproof part is wide than each light transmission part.But a light transmission part equates with the width sum of lightproof part with reference to a light transmission part on the code channel 16 with this with the width sum of lightproof part on this rail 21 at first quarter.The bright part 23 of this full impregnated is corresponding with the absolute code channel 15 on this master grating.Width ratio with reference to the light transmission part on the indication grating of code channel correspondence and lightproof part is 3: 1, is 1: 1 with reference to the width ratio of light transmission part on the master grating of code channel correspondence and lightproof part.
Please consult Fig. 2 and Fig. 3 more in the lump, this photodetector 18 is used to read the light signal of master grating outgoing, and it comprises three group number-reading unit, is respectively increment reading unit 12, reference count unit 13 and reading unit, absolute position 14.These reading unit, absolute position 14 usefulness line array CCDs receive absolute position signal, therein signal are divided into several portions, and each code word width has two parts, are respectively absolute indication part and expansion.This reference count unit 12 comprises four detectors, have two respectively correspondence read this with reference to full impregnated light on the code channel 16 and complete lighttight regional signal, other two read heads are then corresponding to read the signal in semi-transparent zone, to obtain this with reference to code channel 16 corresponding reference reading information.The device of the special arrangement of this process, the signal that each photodetector is read had just passed through mean effort before carrying out the electronics processing.These 12 correspondences in increment reading unit read the segmentation signal of these increment code channel 17 outputs.
This signal processing circuit 100 comprises absolute position signal processing unit 5, reference position signal processing unit 6, segmentation position signalling processing unit 7 and a high precision absolute position synthesis unit 11.The signal of 11 pairs of above-mentioned absolute position signal processing units 5 of this high precision absolute position synthesis unit, reference position signal processing unit 6 and 7 outputs of segmentation position signalling processing unit synthesizes processing, to export accurate position signalling.
When absolute type grating chi was measured, this light source 30 emitted beam, and is converted to the collimation incident ray via this optical system, and this collimation incident ray is injected this master grating 19 via this scanning mask 20.After bright part 23 reached this absolute code channel 15 by this full impregnated in regular turn when this collimation incident ray, this reading unit, absolute position 14 read the optical signalling that constitutes a complete code, represents a rough absolute position signal 1; When this collimation incident ray pass through in regular turn this at first quarter rail 21 and this with reference to code channel 16 after, differed the signal of four/one-period mutually, as shown in Figure 4, four reading windows (1)-(4) of this reference count unit 13, to read four sinusoidal signals, phase place of these four sinusoidal signals once differs 90 degree.As shown in Figure 4, above-mentioned four sinusoidal signals in four intervals that constitute by four dotted lines along with the change of displacement generation waveform, in arbitrary interval, there is the two-way sinusoidal signal to be in high level signal position and low level signal position respectively, two paths of signals then mediates in addition.As the interval of the most close this reading window in Fig. 4, the corresponding sinusoidal signal in reading window (1) and (3) is in low level and high level position respectively, and the corresponding sinusoidal signal in reading window (2) and (4) then is in the centre position of rising and descending respectively.According to above-mentioned sinusoidal signal, can obtain complete printing opacity of two-way and complete lighttight signal, obtain reference position signal 2, reference position signal represents these in four reading windows, there are two to be respectively to be in full impregnated light and complete lighttight zone on reference code channel 16, and other two read heads are in semi-transparent zone, so can carry out Subdividing Processing to it; After this collimation incident ray was carved rail 22 and this increment code channel 17 by this in regular turn, this increment reading unit read four groups of sinusoidal signals for 12 pages, promptly segments position signalling 3.
These photodetector 18 its reference position signal that read 2 of output enter reference position signal processing unit 6 by filtering and A/D conversion, obtain screening signal 4 and preliminary segmentation signal 8, this screening signal 4 enters this absolute position signal processing unit 5 and this this high precision absolute position synthesis unit 11.These photodetector 18 its these segmentation position signallings 3 that read of output enter into segmentation position signalling processing unit 7 by filtering and A/D conversion, obtain the segmentation positional value 10 of position and import this high precision absolute position synthesis unit 11.These photodetector 18 its these absolute position signals 1 that read of output enter into absolute position signal processing unit 5 by filtering and A/D conversion; This absolute position signal processing unit 5 is handled this absolute position signal 1 and this screening signal 4, seeks the coarse reading signal 9 that obtains this absolute position by the mode of index.11 pairs of these coarse reading signals 9 of this high precision absolute position synthesis unit, this tentatively segments signal 8, this segmentation signal 10 and carries out the synthetic of displacement, obtains high precision position value 12 at last.
Among the present invention, this of this absolute type grating chi 800 with reference to code channel 16 and this scanning mask first quarter rail 21 cooperate, obtain complete printing opacity of two-way and complete lighttight signal,, solved the problem of absolute position coarse reading with the segmentation reading to determine reference position signal; And above-mentioned definite reference position signal is set is an optics average signal, and it is average to need not to carry out electronics again, has simplified the reading circuit, has reduced the processing of circuit difficulty.
In sum, the invention is not restricted to above-mentioned embodiment, can be narrower than its light transmission part as each lightproof part on this rail 21 at first quarter, need only keep printing opacity and lightproof part on rail 21 at this is not wide getting final product at first quarter.In addition, when light signal is converted into electric signal, to the light transmission part or the lightproof part of high level and low level representative, can be according to required setting.
Claims (11)
1. absolute type grating chi, it comprises a master grating, one photodetector, an and light source, it is characterized in that: this absolute type grating chi further comprises the one scan mask, this light source emits beam, inject this master grating via this scanning mask, this photodetector is surveyed the light signal that is filtered and formed by this master grating, be respectively absolute position signal, reference position signal and segmentation signal, wherein, this reference position signal comprises two-way, wherein one the tunnel is the combination of two semi-transparent signals, the combination of a complete light tight signal of another Lu Weiyi and a complete printing opacity signal.
2. absolute type grating chi according to claim 1, it is characterized in that: this scanning mask comprise one first quarter rail, second quarter rail and the bright part of a full impregnated, this, rail was the indication grating with specific period Pareto diagram at first quarter, its printing opacity and lightproof part light transmission part have same period, and the width of this light transmission part is different with the width of this lightproof part.
3. absolute type grating chi according to claim 2 is characterized in that: this, rail was the indication grating with specific period Pareto diagram at second quarter, and its light transmission part and lightproof part have same period and width.
4. absolute type grating chi according to claim 3, it is characterized in that: this master grating comprises one with reference to code channel, an increment code channel and an absolute code channel, this with reference to code channel with this at first quarter rail corresponding, this increment code channel with this at second quarter rail corresponding, the corresponding complete light transmission part that should the scanning mask of also absolute code channel.
5. absolute type grating chi according to claim 4, it is characterized in that: this photodetector is used to read the light signal of this master grating outgoing, it comprises three group number-reading unit, is respectively increment reading unit, reference count unit and reading unit, absolute position.
6. absolute type grating chi according to claim 5, it is characterized in that: this reference count unit comprises four detectors, have two respectively correspondence read this with reference to full impregnated light on the code channel and complete lighttight regional signal, the then corresponding signal in semi-transparent zone that reads of other two read heads.
7. absolute type grating chi according to claim 5, it is characterized in that: this reading unit, absolute position is a kind of in line array CCD, CMOS and the silicon photocell, it receives absolute position signal, and the absolute position signal signal is divided into several portions, and each code word width has two parts.
8. absolute type grating chi according to claim 1, it is characterized in that: this signal processing circuit comprises the absolute position signal processing unit, the reference position signal processing unit, a segmentation position signalling processing unit and a high precision absolute position synthesis unit, this reference position signal processing unit is exported the two-way unlike signal respectively to absolute position signal processing unit and high precision absolute position synthesis unit after receiving the signal Processing of this photodetector, segment and directly export high precision absolute position synthesis unit to after the position signalling processing unit is received the signal Processing of this photodetector, this absolute position signal processing unit exports high precision absolute position synthesis unit to after receiving the signal Processing of the signal of this photodetector and the output of this reference position signal processing unit, its interior signal of the synthetic input of this high precision absolute position synthesis unit is to obtain accurate absolute position.
9. absolute type grating chi according to claim 5 is characterized in that: corresponding four windows with reference to code channel have the phase differential of 90 degree respectively on this indication grating.
10. absolute type grating chi according to claim 6, it is characterized in that: the width ratio with reference to the light transmission part on the indication grating of code channel correspondence and lightproof part is 3: 1, is 1: 1 with reference to the width ratio of light transmission part on the master grating of code channel correspondence and lightproof part.
11. absolute type grating chi according to claim 7 is characterized in that: the window of reference orbit and segmentation track correspondence is at least two on this indication grating.
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| CN102645167A (en) * | 2012-05-04 | 2012-08-22 | 中国科学院长春光学精密机械与物理研究所 | Absolute displacement measuring device |
| CN103063239A (en) * | 2012-12-28 | 2013-04-24 | 广东工业大学 | Test platform and test method for absolute grating ruler |
| CN103234456A (en) * | 2013-04-10 | 2013-08-07 | 河北科技大学 | Ultrahigh resolution linear encoder |
| CN103411540A (en) * | 2013-07-26 | 2013-11-27 | 广东工业大学 | High-precision grating displacement measuring device |
| WO2013174216A1 (en) * | 2012-05-24 | 2013-11-28 | 广东工业大学 | Single-track absolute grating scale and image encoding method thereof |
| CN103512500A (en) * | 2013-07-26 | 2014-01-15 | 广东工业大学 | Image collecting circuit of high-speed absolute grating ruler |
| CN103560780A (en) * | 2013-11-11 | 2014-02-05 | 清华大学 | Method for processing absolute grating signals |
| CN103759749A (en) * | 2013-12-13 | 2014-04-30 | 合肥工业大学 | Single-code-channel absolute position encoder |
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| CN108151658A (en) * | 2018-01-24 | 2018-06-12 | 清华大学深圳研究生院 | A kind of device and method for judging grating scale reference point absolute position |
| CN108151658B (en) * | 2018-01-24 | 2023-08-11 | 清华大学深圳研究生院 | Device and method for judging absolute position of reference point of grating ruler |
| CN108489406A (en) * | 2018-02-26 | 2018-09-04 | 上海贝高医疗科技有限公司 | A kind of method that Application Optics coding carries out linear measure longimetry |
| CN108534810A (en) * | 2018-03-07 | 2018-09-14 | 珠海格力节能环保制冷技术研究中心有限公司 | Photoelectric encoder and dynamic grating |
| CN110411485A (en) * | 2018-04-27 | 2019-11-05 | 广东工业大学 | The transmission-type absolute rotary encoder and measurement method of light interference are filtered out based on exposure mask |
| CN108827351B (en) * | 2018-06-28 | 2021-07-06 | 广东工业大学 | Rotary encoder and measuring method thereof |
| CN108827351A (en) * | 2018-06-28 | 2018-11-16 | 广东工业大学 | A kind of rotary encoder and its measurement method |
| CN111735483B (en) * | 2020-07-22 | 2021-04-20 | 中国科学院长春光学精密机械与物理研究所 | Absolute position identification method for incremental photoelectric encoder |
| CN111735483A (en) * | 2020-07-22 | 2020-10-02 | 中国科学院长春光学精密机械与物理研究所 | Absolute position identification method for incremental photoelectric encoder |
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