CN102645167A - Absolute displacement measuring device - Google Patents
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- CN102645167A CN102645167A CN2012101370577A CN201210137057A CN102645167A CN 102645167 A CN102645167 A CN 102645167A CN 2012101370577 A CN2012101370577 A CN 2012101370577A CN 201210137057 A CN201210137057 A CN 201210137057A CN 102645167 A CN102645167 A CN 102645167A
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Abstract
The invention relates to an absolute displacement measuring device, which solves the problems of a high component customized cost and a large signal processing difficulty in prior absolute displacement measuring devices. The absolute displacement measuring device comprises a standard grating, a scanning mask, a light source, an optical system, a photoelectric detector and a signal processing circuit, wherein the standard grating further includes an incremental code channel, an absolute code channel and n reference position code channels, the incremental code channel includes first shading stripes arranged along a measuring direction according to a first incremental cycle, the absolute code channel comprises patterns which includes absolute position information and are arranged along the measuring direction, each of reference position code channels comprises the shading stripes arranged in the measuring direction according to an incremental cycle, and the cycle is longer than that of the incremental code channel. Light rays emitted by the light source are illuminated on the scanning mask through the optical system by the standard grating, and the photoelectric detector can receive an absolute position signal, a reference position signal and a subdivision signal. The signal processing circuit is used for processing an optical signal received by the photoelectric detector so as to obtain position values.
Description
Technical field
The present invention relates to a kind of absolute displacement measurement mechanism, be used to measure the accurate surveying instrument of length.
Background technology
Grating displacement sensor is the position read out device that modern displacement measurement system generally adopts, and is widely used in machine tool industry and other processing, manipulation and the pilot system with the form of angle and length-measuring appliance, and its performance impact is to the quality of machining.
At present, the grating chi of the instrument of the known moving displacement that is used for the precision measurement object mainly comprises two kinds of increment type and absolute types.Wherein absolute type grating chi obtains bigger application gradually; Its major advantage is exactly need not seek reference origin; Can be after outage, anyly the position to be measured when giving electricity, relatively the system of difficulty is particularly useful for returning Z-operation for this; Therefore, it has very application prospects on high-grade, digitally controlled machine tools.
General absolute displacement measurement mechanism has two kinds on two tracks and three tracks; These two kinds all is to utilize absolute code channel to produce absolute location information; The increment code channel produces high segmentation relative position information; The absolute code channel of the absolute type grating chi of two tracks also is used to produce reference position information, is used to confirm to be in which increment cycle.And the absolute type grating chi of three code channels is accomplished this function through increasing a code channel.But these grating chis all need the sensor devices of custom-made; Pixel dimension is all very little; Integrating effect is not enough, thereby the contamination resistance of pixel itself is not strong, and the speed of grating chi also receives the strictness restriction of explorer response frequency; Not needing the grating of little pixel chi if can design, all is favourable for improving measuring speed and reliability aspect so.
Summary of the invention
The present invention is for solving device customization cost height in the existing absolute displacement measurement mechanism, and the problem that the signal Processing difficulty is bigger provides a kind of absolute displacement measurement mechanism.
Absolute displacement measurement mechanism, this device comprise light source, optical system, master grating, scanning mask, photodetector and signal processing circuit, and said master grating comprises that absolute code channel, increment code channel and n bar are with reference to code channel; And absolute code channel, increment code channel and n bar are arranged parallel to each other with reference to code channel; The pattern that comprises absolute location information on the said absolute code channel; The increment code channel comprises the first light and shade striped of arranging along direction of measurement according to the first increment cycle; Every comprises the light and shade striped of arranging along direction of measurement according to a kind of increment cycle with reference to code channel, and the cycle of said period ratio increment code channel with reference to code channel is long; N is a positive integer, and n is more than or equal to 2;
Said light source emits beam and converts the collimation incident ray into through optical system; Said collimation incident ray is received by photodetector through the master grating reflection or after being transmitted through the scanning mask; Said photodetector reception forms absolute position signal, n bar reference position signal respectively and segments signal and export signal processing circuit to and handle after the absolute code channel on the master grating, n bar are with reference to code channel and increment code channel, said signal processing circuit is exported accurate absolute position signal.
Beneficial effect of the present invention: absolute displacement measurement mechanism of the present invention need be less than 1000 microns sensitization pixel; Can effectively strengthen the integrating effect of detector cells; Thereby help further improving contamination resistance, can change the resolution of system's reading through the code channel that increases, thereby can effectively improve the speed and the acceleration performance of displacement measurement; And the scanning mask cooperates with master grating incident light is carried out the grating filtration treatment; Obtain two-way and represent the signal in complete transmission region and complete light tight zone respectively, confirmed reference position signal, solved the problem of absolute position coarse reading with the segmentation reading; And above-mentioned definite reference position signal is set is an optics average signal, and it is average to need not to carry out electronics again, not only has contamination resistance, and has simplified the reading circuit.
Description of drawings
Fig. 1 is the optical texture synoptic diagram of absolute displacement measurement mechanism of the present invention;
Fig. 2 is the fundamental diagram of signal processing circuit in the absolute displacement measurement mechanism of the present invention;
Fig. 3 is the synoptic diagram of master grating in the absolute displacement measurement mechanism of the present invention;
Fig. 4 is the structural representation of the master grating in the embodiment two;
The synoptic diagram of the absolute position signal that Fig. 5 reads for absolute displacement measurement mechanism of the present invention;
Fig. 6 is the synoptic diagram of scanning mask in the absolute displacement measurement mechanism of the present invention;
Fig. 7 is the synoptic diagram of photodetector in the absolute displacement measurement mechanism of the present invention.
Embodiment
Embodiment one, combination Fig. 1 and Fig. 2 explain this embodiment; The absolute displacement measurement mechanism; This device comprises the absolute displacement measurement mechanism; This device comprises light source 1, optical system 2, master grating 3, scanning mask 4, photodetector 5 and signal processing circuit 6, and said master grating 3 comprises that absolute code channel 3-1, increment code channel 3-2 and n bar are with reference to code channel 3-3; And absolute code channel 3-1, increment code channel 3-2 and n bar are arranged parallel to each other with reference to code channel 3-3; The pattern that comprises absolute location information on the said absolute code channel 3-1; Increment code channel 3-2 comprises the first light and shade striped of arranging along direction of measurement according to the first increment cycle; Every comprises the light and shade striped of arranging along direction of measurement according to a kind of increment cycle with reference to code channel 3-3, and the cycle of said period ratio increment code channel 3-2 with reference to code channel 3-3 is long; N is a positive integer, and n is more than or equal to 2;
Said light source 1 emits beam and converts the collimation incident ray into through optical system 2; Said collimation incident ray is incident to master grating 3 through scanning mask 4; After the absolute code channel 3-1 on the said master grating 3, n bar are with reference to code channel 3-3 and increment code channel 3-2, form absolute position signal, n road reference position signal and segmentation signal respectively; Said photodetector 5 receives absolute position signal, n road reference position signal and segments signal and export signal processing circuit 6 to and handle, the accurate absolute position signal of said signal processing circuit 6 outputs.
The light that the described light source 1 of this embodiment sends converts the collimation incident ray into through optical system 2, and said collimation incident ray shines on the master grating 3 through scanning mask 4, and the light after master grating 3 reflections or transmission is received by photodetector 5.Said light source 1 can be laser diode, sends coherent light.
The light that the described light source 1 of this embodiment sends converts the collimation incident ray into through optical system 2, and said collimation incident ray is through master grating 3 reflections or be transmitted through scanning mask 4 backs by photodetector 5 receptions.
The described signal processing circuit 6 of this embodiment comprises absolute position signal processing unit 6-1, reference position signal processing unit 6-2, segmentation position signalling processing unit 6-3 and high precision absolute position synthesis unit 6-4;
Said reference position signal processing unit 6-2 handles the n road reference position signal of photodetector 5 outputs, obtains screening signal and preliminary segmentation signal, tentatively segments signal and gets into high precision absolute position synthesis unit 6-4;
Said segmentation position signalling processing unit 6-3 handles the segmentation position signalling of photodetector 5 output, obtain segmenting positional value to the high precision absolute position synthesis unit 6-4;
Said absolute position signal processing unit 6-1 handles with the screening signal the absolute position signal of photodetector 5 output, and the skimming reading signal that obtains the absolute position is synthesis unit 6-4 to the high precision absolute position;
It is synthetic that said high precision absolute position synthesis unit 6-4 carries out displacement to the skimming reading signal of preliminary segmentation signal, segmentation positional value and absolute position, obtains the high precision position value.
The described n bar of this embodiment is inequality with reference to the cycle that at least two code channels among the code channel 3-3 comprise, and the cycle of the reference code channel 3-3 that the cycle is less is less than the minimum line width of absolute code channel 3-1.
Absolute code channel 3-1 on the said master grating 3 of this embodiment, n bar with reference to the delineation precision of code channel 3-3 and increment code channel 3-2 be arranged in order from low to high into, absolute code channel 3-1, bigger less reference code channel 3-3 and increment code channel 3-2 of reference code channel 3-3, cycle of cycle.The cycle of said reference code channel 3-3 than large period is the integral multiple than the cycle of the reference code channel 3-3 of minor cycle.
Embodiment two, combination Fig. 1 to Fig. 7 explain this embodiment, and this embodiment is the embodiment of embodiment one described absolute displacement measurement mechanism:
This embodiment promptly is shown n with reference to code channel bar numerical table according to there being two to narrate the workflow of absolute displacement measurement mechanism with reference to code channel, and to get n be 2, and other n is not that 2 situation working method is identical in essence.
In conjunction with Fig. 3 and Fig. 4, master grating 3 comprise absolute code channel 3-1, first with reference to code channel 3-3-1 and second with reference to code channel 3-3-2, and increment code channel 3-2.This absolute code channel 3-1, first is parallel to each other in regular turn with reference to code channel 3-3-2 and this increment code channel 3-2 with reference to code channel 3-3-1, second and forms a line.This increment code channel 3-2 is for having certain one-period D
4Increment carve rail, its printing opacity has the identical cycle with lightproof part.Second also is that an increment is carved rail with reference to code channel 3-3-2, and its printing opacity has identical cycle D equally with lightproof part
3, and its printing opacity and lightproof part the width than the printing opacity of increment code channel 3-2 and lightproof part is big respectively.First also is that an increment is carved rail with reference to code channel 3-3-1, and its printing opacity has identical cycle D equally with lightproof part
2, and its printing opacity and lightproof part are big with reference to the width of the printing opacity of code channel 3-3-2 and lightproof part than second.This is that the pattern of sign absolute location information is pseudo-random code (being the M sequence in this example) above absolute code channel 3-1, and the code word of each code element is sequenced to be arranged on the code channel, in Fig. 4, is labeled as respectively: " C1, C2, C4, C5, C6 ... ".Wherein, the representative at random of each code element has same widths D
1Light transmission part or lightproof part, can set light transmission part and lightproof part and represent ' 0 ' perhaps ' 1 ' respectively, then these continuous some code elements constitute a complete code word, a corresponding unique absolute position value.What need replenish is; The absolute code channel 3-1 here and first is with reference to predetermined phase relation is arranged between the code channel 3-3-1; First with reference to code channel 3-3-1 and second with reference to predetermined phase relation is arranged between the code channel 3-3-2, second with reference between code channel 3-3-2 and the increment code channel 3-2 predetermined phase relation being arranged.First with reference to code channel 3-3-1 groove cycle D
2Be second with reference to code channel 3-3-2 groove cycle D
3Integral multiple; In this embodiment 4 times of relations, D
2=4*D
3, second is increment code channel 3-2 groove cycle D with reference to code channel 3-3-2 groove cycle D3
4In the integral multiple, this embodiment 4 times of relations, D
3=4*D
4Suppose D
4=20 microns, D then
3=80 microns, D
2=320 microns.With reference to code channel 3-3, respectively comprise the reference code channel 3-3 that the cycle has nothing in common with each other for the n bar, wherein the reference code channel 3-3 cycle of cycle minimum is less than the line width of absolute code channel.Than cycle of the reference code channel 3-3 of large period be integral multiple than the cycle of the reference code channel 3-3 of minor cycle, and at least 2 comprise the cycle with reference to code channel 3-3 and have nothing in common with each other, wherein less reference code channel 3-3 cycle in cycle is less than the line width of absolute code channel.
First with reference to code channel 3-3-1, second with reference to code channel 3-3-2 and increment code channel 3-2 all be respectively by etc. the pattern in cycle (cycle is respectively D
2, D
3, D
4) arrange; Because it is the mean effort of Moire fringe is not high for the delineation accuracy requirement of each periodic pattern, generally higher for the pattern delineation accuracy requirement of absolute code channel 3-1; This is because in whole measurement length; The pattern of each code word size all is unique, but the absolute unit width is big more, will be low more for the requirement of edge delineation precision; One of beneficial effect of the present invention is exactly the delineation precision that has reduced absolute code channel 3-1, has reduced the position accuracy demand of absolute code channel probe unit array 5-1 simultaneously.What need proposition is that each can be arranged along direction of measurement according to any permutation and combination on perpendicular to the direction of direction of measurement with reference to code channel 3-3 and absolute code channel 3-1 and increment code channel 3-2 abreast.
In conjunction with Fig. 6; Scanning mask 4 in this embodiment comprise first quarter rail 4-2, second quarter rail 4-3, three quarters of an hour rail 4-4 and the bright part 4-1 of full impregnated, respectively corresponding first with reference to code channel 3-3-1, second with reference to code channel 3-3-2, increment code channel 3-2, absolute code channel 3-1; Groove on the said first quarter rail 4-2 is arranged and is made up of four groups of grooves, and phase differential is 90 ° between four groups of grooves, with first group phase differential be respectively 0 °, 90 °, 180 ° and 270 °.Groove on this second quarter rail 4-3 is arranged and also is made up of four groups of grooves, and phase differential is 90 ° between four groups of grooves, with first group phase differential be respectively 0 °, 90 °, 180 ° and 270 °.Groove on this three quarters of an hour rail 4-4 is arranged and also is made up of four groups of grooves, and phase differential is 90 ° between four groups of grooves, with first group phase differential be respectively 0 °, 90 °, 180 ° and 270 °.Wherein, first quarter rail 4-2, second quarter rail 4-3 and the three quarters of an hour rail 4-4 groove cycle be D
2, D
3, D
4Respectively with master grating 3 in corresponding first with reference to code channel 3-3-1, second with reference to the cycle of code channel 3-3-2 and increment code channel 3-2 identical.Printing opacity and lightproof part on the said first quarter rail 4-2 have same period, but the two width is different, and the width of each lightproof part is narrow than each light transmission part.But the width sum of the last light transmission part of the first rail 4-2 at quarter and lightproof part first equates with the width sum of lightproof part with reference to the last light transmission part of code channel 3-3-1 with this.Equally, printing opacity and lightproof part on this second quarter rail 4-3 have same period, but the two width is different, and the width of each lightproof part is narrow than each light transmission part.But the width sum of the last light transmission part of the said second rail 4-3 at quarter and lightproof part second equates with the width sum of lightproof part with reference to the last light transmission part of code channel 3-3-2 with this.The bright part 4-1 of this full impregnated is corresponding with the absolute code channel 3-1 on this master grating 3.In this embodiment; With reference on the corresponding scanning mask 4 of code channel 3-3 first quarter rail 4-2 and second quarter rail 4-3 the width of light transmission part and lightproof part be 3:1 than all, with reference on the master grating 3 of code channel 3-3 correspondence first with reference to code channel 3-3-1 and second with reference to the width of code channel 3-3-2 light transmission part and lightproof part all than being 1:1.
In conjunction with Fig. 7; Photodetector 5 is by being used for absolute code channel probe unit array 5-1 that absolute signal measures, being used for photodiode group 5-2 that first reference signal measures, being used for photodiode group 5-3 that second reference signal measures, being used for the photodiode group 5-4 that increment signal is measured, correspond respectively to absolute code channel 3-1, first with reference to code channel 3-3-1, second with reference to code channel 3-3-2, increment code channel 3-2.
Absolute code channel probe unit array 5-1 receives the black and white strip information on the absolute code channel 3-1 that scans; The photodiode group 5-2 that is used for the measurement of first reference signal has four group's photodiodes; Be used to receive from seeing through first with reference to code channel 3-3-1 and by the light signal of the rail 4-2 modulation at first quarter of scanning mask 4; Four group's photodiodes receive the light signal from corresponding four groups of scanning mask 4 patterns respectively, and phase differential is 90 ° between the signal.The photodiode group 5-3 that is used for the measurement of second reference signal has four group's photodiodes; Be used to receive from seeing through second with reference to code channel 3-3-2 and by the light signal of the rail 4-3 modulation at second quarter of scanning mask 4; Four group's photodiodes receive the light signal from corresponding four groups of scanning mask 4 patterns respectively, and phase differential is 90 ° between the signal.The photodiode group 5-4 that is used for the increment signal measurement has four group's photodiodes; Be used to receive light signal from seeing through increment code channel 3-2 and being modulated by the three quarters of an hour rail 4-4 of scanning mask 4; Four group's photodiodes receive the light signal from corresponding four groups of scanning mask 4 patterns respectively, and phase differential is 90 ° between the signal.The device of the special arrangement of this process; Be used for photodiode group 5-2 that first reference signal measures, be used for the photodiode group 5-3 that second reference signal measures and be used for signal that each photodetector of photodiode group 5-4 that increment signal measures reads just having passed through mean effort before handling carrying out electronics, help improving the contamination resistance of frame of reference.
The signal processing flow of this embodiment is:
The reference information that signal processing circuit at first obtains with reference to code channel through the n bar and provide the absolute position value that precision is higher than the increment code channel cycle from the absolute location information that absolute code channel obtains, this positional value combines to combine to obtain the absolute position value from the subdivided information that the increment track obtains.Be specially signal processing circuit 6 and comprise absolute position signal processing unit 6-1, reference position signal processing unit 6-2, segmentation position signalling processing unit 6-3 and a high precision absolute position synthesis unit 6-4.This high precision absolute position synthesis unit 6-4 synthesizes processing to the signal of above-mentioned absolute position signal processing unit 6-1, reference position signal processing unit 6-2 and segmentation position signalling processing unit 6-3 output, to export accurate absolute position signal.
Said photodetector 5 its first reference position signal S3 that read of output and the second reference position signal S2 get into reference position signal processing unit 6-2 through filtering and A/D conversion; Obtain screening signal and preliminary segmentation signal, this screening signal gets into this absolute position signal processing unit 6-1 and preliminary segmentation signal gets into high precision absolute position synthesis unit 6-4.This photodetector 5 its this segmentation position signalling S1 that read of output enter into segmentation position signalling processing unit 6-3 through filtering and A/D conversion, obtain the segmentation positional value of position and import this high precision absolute position synthesis unit 6-4.This photodetector 5 its this absolute position signal S4 that read of output enter into absolute position signal processing unit 6-1 through filtering and A/D conversion; This absolute position signal processing unit 6-1 handles this absolute position signal S4 and should screen signal, seeks the coarse reading signal that obtains this absolute position through the mode of index.This high precision absolute position synthesis unit 6-4 to this coarse reading signal, this tentatively segments signal, this segmentation positional value and carries out the synthetic of displacement, obtains the high precision position value at last.
The measuring process of the described absolute displacement measurement mechanism of this embodiment is: light source 1 emits beam, and converts the collimation incident ray into via optical system 2, and this collimation incident ray is injected this master grating 3 via this scanning mask 4.After this collimation incident ray was in regular turn through the bright part 4-1 of this full impregnated and this absolute code channel 3-1, this absolute code channel probe unit array 5-1 read the optical signalling that constitutes a complete code, represents a rough absolute position signal S4; When this collimation incident ray pass through in regular turn this first quarter rail 4-2 and this first with reference to code channel 3-3-1 after; Differed the signal of four/one-period each other; These four reading windows that are used for the photodiode group 5-2 of first reference signal measurement are read the first reference position signal S3 in these four cycles, and phase place differs four/one-period successively; When this collimation incident ray pass through in regular turn this second quarter rail 4-3 and this second with reference to code channel 3-3-2 after; Differed the signal of four/one-period each other; These four reading windows that are used for the photodiode group 5-3 of second reference signal measurement are read this four cycle second reference position signal S2, and phase place differs four/one-period successively; After this collimation incident ray passes through this three quarters of an hour rail 4-4 and this increment code channel 3-2 in regular turn; Differed the signal of four/one-period each other; These four reading windows that are used for the photodiode group 5-4 of increment signal measurement are read this four sinusoidal signals segmentation position signalling S1, and phase place differs 90 ° successively.
The concrete grammar of signal Processing is described below.The process of reading absolute position signal has been shown in Fig. 5, and horizontal ordinate is represented displacement, and ordinate representation signal readout at first utilizes the first reference position signal S3, and the mode of in reference position signal processing unit 6-2, tabling look-up is D
2Precision is accurate to D in cycle
2/ 4; The cycle intrinsic displacement that utilization obtains obtains the needed absolute position of absolute position signal processing unit 6-1 and selects signal; Absolute position signal S4 to obtaining further selects, and in absolute position signal processing unit 6-1, obtains corresponding rough absolute position value through searching the coding and the absolute position value correspondence table that are stored among the absolute position signal processing unit 6-1; Utilize the second reference position signal S2, the mode of in reference position signal processing unit 6-2, tabling look-up is D
3Precision is accurate to less than D in cycle
3/ 4, finally in reference position signal processing unit 6-2, synthesize at D
2Precision is higher than D in cycle
3/ 4 reference position, segmentation position signalling S1, the mode of in segmentation position signalling processing unit 6-3, tabling look-up obtains increment segmentation positional value, finally utilizes rough absolute position value, the reference position, increment segmentation positional value obtains high-precision absolute position value.
The difference of embodiment of the present invention and prior art is described below.
In the prior art, many code channels absolute type grating chi mainly is to have used simple binary sign indicating number, perhaps Gray code; Each row coding is represented one, increases the figure place that resolution or length need increase read head, and also having a kind of method is exactly the coding techniques of three code channels; Wherein an increment segments code channel; Article one, with reference to code channel, an absolute code channel is through combining to form the absolute position to increment segmentation reading and absolute reading with reference to code channel as bridge; Yet used the characteristics of two kinds of coded systems in this embodiment simultaneously, further increased the size of basic code photosensitive unit, used many to participate in forming absolute reading simultaneously, and utilized absolute code channel to form the absolute reading of high bit with reference to code channel.
In sum, the invention is not restricted to above-mentioned embodiment, as utilize above-mentioned ultimate principle; Can further increase with reference to code channel; Such as being increased to three with reference to code channel, so just can further increase the size of absolute photosensitive unit, reduce the figure place of its absolute reading; Each lightproof part as on this first quarter the rail 4-2 and the second quarter rail 4-3 can be narrower than its light transmission part, and need only keep printing opacity and lightproof part on the rail 4-2 at this first quarter is not wide getting final product.In addition, when light signal is converted into electric signal, to the light transmission part or the lightproof part of high level and low level representative, can be according to required setting.
Claims (7)
1. absolute displacement measurement mechanism; This device comprises light source (1), optical system (2), master grating (3), scanning mask (4), photodetector (5) and signal processing circuit (6), and said master grating (3) comprises that absolute code channel (3-1), increment code channel (3-2) and n bar are with reference to code channel (3-3); And absolute code channel (3-1), increment code channel (3-2) and n bar are arranged parallel to each other with reference to code channel (3-3); The pattern that comprises absolute location information on the said absolute code channel (3-1); Increment code channel (3-2) comprises the first light and shade striped of arranging along direction of measurement according to the first increment cycle; Every comprises the light and shade striped of arranging along direction of measurement according to a kind of increment cycle with reference to code channel (3-3), and the cycle of said period ratio increment code channel (3-2) with reference to code channel (3-3) is long; N is a positive integer, and n is more than or equal to 2; It is characterized in that,
Said light source (1) emits beam and converts the collimation incident ray into through optical system (2); Said collimation incident ray reflects through master grating (3) or is transmitted through scanning mask (4) back and received by photodetector (5); Said photodetector (5) reception forms absolute position signal, n bar reference position signal respectively and segments signal and export signal processing circuit (6) to and handle after the absolute code channel (3-1) on the master grating (3), n bar are with reference to code channel (3-3) and increment code channel (3-2), said signal processing circuit (6) is exported accurate absolute position signal.
2. device is surveyed in absolute displacement according to claim 1; It is characterized in that; The light that said light source (1) sends converts the collimation incident ray into through optical system (2); Said collimation incident ray shines on the master grating (3) through scanning mask (4), and the light after master grating (3) reflection or transmission is received by photodetector (5).
3. device is surveyed in absolute displacement according to claim 1; It is characterized in that; The light that said light source (1) sends converts the collimation incident ray into through optical system (2), and said collimation incident ray reflects through master grating (3) or is transmitted through scanning mask (4) back and received by photodetector (5).
4. device is surveyed in absolute displacement according to claim 1; It is characterized in that said signal processing circuit (6) comprises absolute position signal processing unit (6-1), reference position signal processing unit (6-2), segmentation position signalling processing unit (6-3) and high precision absolute position synthesis unit (6-4); Said reference position signal processing unit (6-2) is handled the n road reference position signal of photodetector (5) output, obtains screening signal and preliminary segmentation signal, tentatively segments signal and gets into high precision absolute position synthesis unit (6-4); Said segmentation position signalling processing unit (6-3) is handled the segmentation position signalling of photodetector (5) output, obtains segmenting positional value to high precision absolute position synthesis unit (6-4); Said absolute position signal processing unit (6-1) is handled with the screening signal the absolute position signal of photodetector (5) output, obtains skimming reading signal to the high precision absolute position synthesis unit (6-4) of absolute position; It is synthetic that said high precision absolute position synthesis unit (6-4) carries out displacement to the skimming reading signal of preliminary segmentation signal, segmentation positional value and absolute position, obtains the high precision position value.
5. device is surveyed in absolute displacement according to claim 1; It is characterized in that; Said many cycles that comprise with reference at least two code channels in the code channel (3-3) are inequality, and the cycle of the reference code channel (3-3) that the cycle is less is less than the minimum line width of absolute code channel (3-1).
6. device is surveyed in absolute displacement according to claim 1; It is characterized in that; Absolute code channel (3-1) on the said master grating (3), many delineation precision with reference to code channel (3-3) and increment code channel (3-2) be arranged in order from low to high into, absolute code channel (3-1), bigger less reference code channel (3-3) and increment code channel (3-2) of reference code channel (3-3), cycle of cycle.
7. device is surveyed in absolute displacement according to claim 7, it is characterized in that, the cycle of said reference code channel (3-3) than large period is the integral multiple than the cycle of the reference code channel (3-3) of minor cycle.
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