CN102095379B - Absolute grating scale - Google Patents

Absolute grating scale Download PDF

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CN102095379B
CN102095379B CN2010105753983A CN201010575398A CN102095379B CN 102095379 B CN102095379 B CN 102095379B CN 2010105753983 A CN2010105753983 A CN 2010105753983A CN 201010575398 A CN201010575398 A CN 201010575398A CN 102095379 B CN102095379 B CN 102095379B
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absolute
signal
grating
position
reference
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CN2010105753983A
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CN102095379A (en
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乔栋
孙强
曾琪峰
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中国科学院长春光学精密机械与物理研究所
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Abstract

The invention relates to an absolute grating scale comprising a standard grating, a photoelectric detector and a light source. The absolute grating scale further comprises a scanning mask. The light source emits ray; the ray is sent into the standard grating via the scanning mask; the photoelectric detector receives an absolute position signal, a reference position signal and a subdivided signal.The reference position signal is divided into two paths, wherein one path is the combination of two translucidus signals, and the other path is the combination of a completely-lighttight signal and acompletely-transmitting signal. The absolute grating scale has the advantage of simple reading circuit.

Description

绝对式光栅尺 Absolute encoders

【技术领域】 TECHNICAL FIELD

[0001] 本发明涉及一种绝对式光栅尺,一种用于测量长度的精确测量仪器。 [0001] The present invention relates to an absolute scale, an accurate measuring instrument for measuring the length.

【背景技术】 【Background technique】

[0002] 用于位置测量的光栅尺,在机械加工业中有很广泛的应用,其性能影响到机械加 [0002] Grating for position measurement, there are widely used in the machinery industry, which affect the performance of the machining

工的质量。 Quality workers.

[0003]目前,公知的用来精密测量物体的移动位移的工具的光栅尺主要包括增量式和绝对式两种。 [0003] Currently, grating displacement movement of the tool known for precision measurement of an object including two kinds of incremental and absolute. 其中绝对式光栅尺在逐渐得到较大的应用,其主要优点就是不需要寻找参考原点,可以在断电以后,任何给电时对位置进行测量。 Wherein the absolute encoders are gradually larger applications, and its main advantage is not need to find the reference origin, may be measured for any position when the power is off later. 因此,其在数控机床上有很广泛的应用前景。 Therefore, it has a very wide range of applications on CNC machine tools.

[0004] 一般的三轨道绝对式光栅尺,除了带有绝对位置信息的绝对码道和用来产生细分位置信息的增量码道,还有一个增量码道,在进行测量时,为了接收增量码道入射的参考信号需要很多的光电接受元件,使得电路较复杂,且要在信号处理过程当中进行平均作用消除噪声,电路处理信号难度较大。 [0004] Usually three absolute scale track, in addition to the absolute track with absolute position information and position information for generating incremental subdivision code channel, there is an incremental code track, taking measurements, in order to receiving a reference signal of the incremental track is incident requires a lot of the photoelectric receiving element, so that the circuit is more complex, and the role to be averaged in the signal processing which remove noise, the signal processing circuit difficult.

【发明内容】 [SUMMARY]

[0005] 为解决现有技术绝对式光栅尺中电路较复杂,信号处理难度较大的问题,有必要提供一种电路结构较简单且信号处理较简单的绝对式光栅尺。 [0005] In order to solve the prior art absolute encoders are more complex circuit, the signal processing difficult problems, it is necessary to provide a relatively simple circuit configuration and the signal processing simpler absolute scale.

[0006] 一种绝对式光栅尺,其包括一标准光栅、一光电探测器、及一光源,该绝对式光栅尺进一步包括一扫描掩膜,该光源发出光线,经由该扫描掩膜射入该标准光栅,该光电探测器探测由该标准光栅滤光形成的光信号,分别为绝对位置信号、参考位置信号及细分信号。 [0006] An absolute encoders, which comprise a master grating, a photodetector, and a light source, the absolute grating mask further comprises a scanning, the light source emits light, which is incident through the scanning reticle standard grating, the photodetector detecting a light signal formed by the standard grating filter, respectively, the absolute position signal, the position signal and the reference signal segments. 该参考位置信号包括两路,其中一路为两个半透光信号的组合,另一路为一完全不透光信号和一完全透光信号的组合。 The reference position signal comprises two parts, wherein a combination of two semi-transparent way signals, and the other way is a completely opaque combined signal and a fully light-transmitting signals.

[0007] 相对于现有技术,该绝对式光栅尺设置的扫描掩膜与标准光栅配合对入射光进行光栅过滤处理,得到两路分别代表完全透光区域和完全不透光区域的信号,确定了参考位置信号,解决了绝对位置粗读数与细分读数的问题;且上述设置确定的参考位置信号为一光学平均信号,无需再进行电子平均,简化了读数电路,减少了电路处理难度。 [0007] with respect to the prior art, the absolute standard raster scanning a mask and a grating provided with a grating for the incident light was filtered to give two represent a transparent region and a signal region is completely opaque, determined reference position signal, solves the problem of rough absolute position readings subdivision readings; and setting a reference position signal of the average determined for an optical signal, the electron mean no longer necessary, simplifying the reading circuit, the processing circuit is difficult to reduce.

【附图说明】 BRIEF DESCRIPTION

[0008] 图I是本发明绝对式光栅尺的光学结构示意图。 [0008] FIG. I is a schematic diagram of the present invention, absolute optical grating structure.

[0009] 图2是图I所示绝对式光栅尺的光电原理示意图。 [0009] FIG. 2 is a schematic diagram illustrating the principle of a photoelectric grating absolute I below.

[0010] 图3是图I所示的扫描掩膜的结构示意图。 [0010] FIG. 3 is a scanning reticle structure I shown in FIG.

[0011] 图4是图I所示绝对式光栅尺的读取的信号示意图 [0011] FIG. 4 is a schematic view of a signal absolute encoders read I shown in FIG.

【具体实施方式】 【Detailed ways】

[0012] 请参阅图I至图3,图I是是本发明绝对式光栅尺的光学结构示意图。 [0012] Referring to FIG I to 3, the structure of FIG. I is a schematic diagram of the optical encoder is an absolute present invention. 图2是图I所示绝对式光栅尺的光电原理示意图。 FIG 2 is a schematic diagram illustrating the principle of a photoelectric grating absolute I below. 图3图I所示的扫描掩膜的结构示意图。 I schematic structure of a scan mask shown in FIG. 3 FIG. 该绝对式光栅尺800主要包括一标准光栅19,一扫描掩膜20,一光电探测器18,一信号处理电路100,—光学系统(图未不)及一光源30。 The absolute grating 800 includes a master grating 19, a mask 20 is scanned, a photodetector 18, a signal 100, the processing circuit - an optical system (not not), and a light source 30. 该光源30发出光线,经由该光学系统转换为准直入射光线,该准直入射光线经由该扫描掩膜20射入该标准光栅19,该光电探测器18是接收从该标准光栅19入射的光信号并输出至该信号处理电路100进行处理。 The light source 30 emits light, converted into collimated incident light rays through the optical system, the collimating incident light rays 20 incident on the grating 19, via the standard scanning mask, the photodetector 18 receives incident light from the master grating 19 and outputs the signal to the signal processing circuit 100 for processing. 该光源可为激光二极管。 The light source may be a laser diode.

[0013] 请再参阅图2,该标准光栅19包括一参考码道16、一增量码道17及一绝对码道15。 [0013] Please refer to FIG. 2, the grating 19 comprises a standard reference code track 16, an incremental track and an absolute track 17 15. 该绝对码道15、该参考码道16及该增量码道17依序相互平行排成一列。 The absolute track 15, the track 16 and the reference code track 17 increments sequentially arranged in a row parallel to each other. 该增量码道17为具有某一周期的增量刻轨,其透光和不透光部分具有相同的周期和宽度。 The incremental track having a track 17 increments moment a certain period, which is light transmissive and opaque portions having the same period and width. 该参考码道16也为一增量刻轨,其透光和不透光部分同样具有相同的周期和宽度,且其透光和不透光部分较该增量码道17的透光和不透光部分的宽度大。 The reference track 16 is also a moment incremental track, opaque and light transmitting portions which have the same period and the same width, and it more opaque and light transmitting portions of the incremental track 17 and the light-transmissive not the width of the transparent portion is large. 该绝对码道15上面是表征绝对位置信息的图案是伪随机码,各码元的码字按顺序的排列在码道上,分别标注为:“C1、C2、C4、 The absolute track 15 is above the absolute position information characterizing the pattern is a pseudo random code, each codeword symbols in the order of code channels, are labeled as: "C1, C2, C4,

C5、C6......”。其中,每一码元随机的代表具有相同宽度的透光部分或不透光部分,可设定透光部分和不透光部分分别代表'0'或者'I',则该连续的若干码元,构成一个完整的码字,对应唯一的一个绝对位置值。 C5, C6 ...... ". Wherein each symbol represents a random part of the same light-transmitting or non-transmitting portions width, it can be set to the light-transmitting portions and non-transmitting portions representing '0' or 'I', the number of successive symbols, to form a complete code word, the absolute position corresponds to a unique value.

[0014] 请再参阅图3,该扫描掩膜20包括一第一刻轨21、第二刻轨22及一全透明部分23。 [0014] Please refer to FIG. 3, the mask 20 comprises a first scanning moment rail 21, rail 22 and a second engraved transparent portion 23. 该第二刻轨22上的刻线排布与该增量码道17上的刻线相对应,同通常的增量光栅尺的中用到的扫描光栅刻线一样,其透光部分和不透光部分具有相同周期和宽度。 The second engraved tracks on the reticle 22 arranged corresponding to the delta reticle 17 code channels, with generally the same incremental grating used in the scanning grating lines which are not light-transmitting portions and light transmitting portions having the same period and width. 该第一刻轨21的刻线对应于该参考码道16上的刻线,是具有特定图案特点的指示光栅。 The first rail engraved reticle 21 on the reticle corresponding to the reference code channel 16, it is a grating having a specific pattern indicating characteristics. 该第一刻轨21上的透光和不透光部分具有相同周期,但二者宽度不同,每一不透光部分的宽度较每一透光部分宽。 The first moment of the rail 21 and the light-transmissive opaque portions having the same period, but with different widths, the width of each opaque portion than the width of each light-transmitting portion. 但,该第一刻轨21上一透光部分与不透光部分的宽度之和与该参考码道16上一透光部分与不透光部分的宽度之和相等。 However, the first moment of the rail 21 and a transparent portion of the width of the opaque portion and the reference code track on a light-transmissive portion 16 and the width of the opaque portions and equal. 该全透明部分23与该标准光栅上的绝对码道15相对应。 The transparent portion 23 and the absolute track 15 on the corresponding standard raster. 参考码道对应的指示光栅上的透光部分与不透光部分的宽度比为3 : 1,参考码道对应的标准光栅上透光部分与不透光部分的宽度比为I : I。 Width than the light-transmitting portion of the code channel corresponding to the reference index grating and the opaque portion is 3: 1, standard raster reference code channel corresponding to the transmissive portion and the opaque portion width ratio of I: I.

[0015] 请再一并参阅图2及图3,该光电探测器18用于读取标准光栅出射的光信号,其包括三组读数单元,分别为增量读数单元12、参考读数单元13及绝对位置读数单元14。 [0015] Please refer to FIG. 2 and FIG. 3, the photodetector 18 for reading standard raster optical signal emitted, which includes three sets of reading unit, the reading unit 12 increments respectively, and the reference reading unit 13 the absolute position of the reading unit 14. 该绝对位置读数单元14用线阵CCD对绝对位置信号进行接收,在其中把信号分成若干部分,每个码字宽度有两部分,分别为绝对指征部分和扩展部分。 The absolute position of the reading unit 14 with the absolute position of the linear CCD signal reception, where the signal is divided into several parts, each code word has a width of two parts, namely an absolute indication portion and the extension portion. 该参考读数单元12包括四个探测器,有两个分别对应读取该参考码道16上全透光和全不透光的区域信号,而其它两个读数头则对应读取半透光区域的信号,以获得该参考码道16对应的参考读数信息。 The reading unit 12 includes four reference detectors, two full transmission and corresponding read full opaque area signal to the reference code channel 16, while the other two readings by the read head corresponding to the semi-transparent region signal, to obtain a reference reading of the information track 16 corresponding to the reference code. 这种经过特殊安排的装置,每个光电探测器读到的信号在进行电子学处理之前就已经经过了平均作用。 This special arrangement via means, each photodetector read signal processing electronics before performing an averaging has elapsed. 该增量读数单元12则对应读取该增量码道17输出的细分信号。 The increment signal reading unit reads the subdivision delta output code 12 corresponding to the channel 17.

[0016] 该信号处理电路100包括绝对位置信号处理单兀5、参考位置信号处理单兀6、细分位置信号处理单元7及一高精度绝对位置合成单元11。 [0016] The signal processing circuit 100 comprises an absolute position signal processing unit 5 Wu, Wu reference position signal processing unit 6, the position signal processing unit 7 segments and a high-precision absolute position combining unit 11. 该高精度绝对位置合成单元11对上述绝对位置信号处理单元5、参考位置信号处理单元6及细分位置信号处理单元7输出的信号进行合成处理,以输出精确的位置信号。 The high-precision absolute position of the composite unit 11 the above-described absolute position signal processing unit 5, a reference position signal processing unit 6 and the position signal output from the signal processing unit 7 subdivision synthesis processing to output an accurate position signal.

[0017] 绝对式光栅尺进行测量时,该光源30发出光线,经由该光学系统转换为准直入射光线,该准直入射光线经由该扫描掩膜20射入该标准光栅19。 When the [0017] absolute measurement grating, the light source 30 emits light, converted into collimated incident light rays through the optical system of the collimated incident light 20 incident on the mask 19 via the standard raster scan. 当该准直入射光线依序通过该全透明部分23及该绝对码道15后,该绝对位置读数单元14读取到构成一个完整码字的光学信号,代表一个粗略的绝对位置信号I ;当该准直入射光线依序经过该第一刻轨21及该参考码道16后,得到相互相差四分之一个周期的信号,如图4所示,该参考读数单元13的四个读数窗口(1)-(4),将读到四个正弦信号,该四个正弦信号一次相位一次相差90度。 When the collimated incident light sequentially through the transparent rear portion 23 and the absolute track 15, the absolute position of the reading unit 14 reads a complete codeword constituting an optical signal representing a rough absolute position signal I; when the collimating the incident light and the reference sequence through 16 21 of the track rail first moment, the signal obtained from each other by a quarter period, as shown in FIG, four readings of the reference cell reading window 13 4 (1) - (4), the read four sinusoidal signal, a sinusoidal signal of the four primary phases different by 90 degrees. 由图4可知,上述四个正弦信号在由四条虚线构成的四个区间内随着位移发生波形的改变,在任一区间内,有两路正弦信号分别处于高电平信号位置和低电平信号位置,而另外两路信号则处于中间位置。 From Figure 4 the sine signal four by four in four segments constituting a broken line changes as the waveform of displacement, in any one zone, there are two sinusoidal signals at a high level and a low level signal position signal position, while the other two signals are in an intermediate position. 如在图4中最靠近该读数窗口的区间,读数窗口(I)及(3)对应的正弦信号分别处于低电平和高电平位置,而读数窗口(2)及(4)对应的正弦信号则分别处于上升和下降的中间位置。 As in FIG. 4 interval closest to the reading window, read window (I) and (3) respectively corresponding to a sinusoidal signal at a low level and a high level position, while the reading window (2) and (4) corresponding to the sinusoidal signal respectively raised and lowered in the intermediate position. 依据上述正弦信号,可得到两路完全透光和完全不透光的信号,得到参考位置信号2,参考位置信号代表这在四个读数窗口中,有两个分别在参考码道16上是处在全透光和全不透光的区域,而其它两个读数头处在半透光区域,所以可以对其进行细分处理;当该准直入射光线依序通过该刻轨22及该增量码道17后,该增量读数单元12页读取到四组正弦信号,即细分位置信号3。 Based on the sine signal obtained two partial transparent and completely opaque signal 2 to obtain the reference position signal, the reference signal representing the position of the reading window, these four, two each on the reference track 16 is at a the total light transmittance and full opaque region and the other two reading heads in semi-transparent regions, can be subjected to segmentation processing; when the collimating incident light sequentially through the rail 22 and the engraved by after the amount of the code channel 17, the increment to the reading unit 12 reads the four sinusoidal signals, i.e., signal segments 3 position.

[0018] 该光电探测器18输出其读取的参考位置信号2通过滤波和A/D转换进入参考位置信号处理单元6,得到筛选信号4和初步细分信号8,该筛选信号4进入该绝对位置信号处理单元5及该该高精度绝对位置合成单元11。 [0018] The photodetector 18 outputs a reference position signal which reads the position of the reference signal 2 into the processing unit by filtering and A / D converter 6, to give a preliminary screening signal segments 4 and 8 signal, the filter 4 to enter the absolute signal the signal processing unit 5 and the position of the high-precision absolute position of the combining unit 11. 该光电探测器18输出其读取的该细分位置信号3通过滤波和A/D转换进入到细分位置信号处理单元7,得到位置的细分位置值10并输入该高精度绝对位置合成单元11。 The segment position signal output of the photodetector 18 reads the position of the segments 3 into the signal processing unit 7 by filtering and A / D conversion, the resulting position of segments 10 and enter the position value with high accuracy absolute position combining unit 11. 该光电探测器18输出其读取的该绝对位置信号I通过滤波和A/D转换进入到绝对位置信号处理单元5 ;该绝对位置信号处理单元5处理该绝对位置信号I及该筛选信号4,通过索引的方式寻找得到该绝对位置的粗读数信号9。 The photodetector 18 outputs the absolute position signal which is read into the I signal processing unit 5 the absolute position by filtering and A / D conversion; the absolute position signal processing unit 5 processes the absolute position signal and the I signal filter 4, Looking by way of obtaining the index of the absolute position of the reading signal crude 9. 该高精度绝对位置合成单元11对该粗读数信号9、该初步细分信号8、该细分信号10进行位移的合成,最后得到高精度位置值12。 The precision of the absolute position crude synthesis unit 11 reading signal 9, the initial signal segment 8, the segment 10 synthesizes the displacement signal, a highly accurate final position value 12.

[0019] 本发明中,该绝对式光栅尺800的该参考码道16与该扫描掩膜的第一刻轨21配合,得到两路完全透光和完全不透光的信号,以确定参考位置信号,解决了绝对位置粗读数与细分读数的问题;且上述设置确定的参考位置信号为一光学平均信号,无需再进行电子平均,简化了读数电路,减少了电路处理难度。 [0019] In the present invention, the absolute grating 800 the reference code track rail 16 and the first facet with the scanning mask 21, to obtain two partial transparent and completely opaque signals, to determine a reference position signal, solves the problem of rough absolute position readings subdivision readings; and setting a reference position signal of the average determined for an optical signal, the electron mean no longer necessary, simplifying the reading circuit, the processing circuit is difficult to reduce.

[0020] 综上所述,本发明不限于上述实施方式,如该第一刻轨21上的每一不透光部分可窄于其透光部分,只须保持该第一刻轨21上的透光和不透光部分是不等宽的即可。 [0020] In summary, the present invention is not limited to the above embodiment, as the first moment of each rail 21 on the non-transmitting portions may be narrower than the light-transmitting portion, only the first moment of the retaining rail 21 translucent and opaque portions of unequal width can be. 另,在将光信号转化为电信号时,对高电平和低电平所代表的透光部分或不透光部分,可依据所 Also, when the optical signals into electrical signals, the light-transmitting portion or portions of the opaque represented by high and low, can be based on the

需设定。 It needs to be set.

Claims (9)

1. 一种绝对式光栅尺,其包括一标准光栅、一光电探测器、及一光源,其特征在于:该绝对式光栅尺进一步包括一扫描掩膜,该光源发出光线,经由该扫描掩膜射入该标准光栅,该光电探测器探测由该标准光栅滤光形成的光信号,分别为绝对位置信号、参考位置信号及细分信号,其中,该参考位置信号包括两路,其中一路为两个半透光信号的组合,另一路为一完全不透光信号和一完全透光信号的组合。 An absolute encoders, which comprise a master grating, a photodetector, and a light source, wherein: the absolute grating mask further comprises a scanning, the light source emits light through the mask scanning the standard raster incident on the photodetector detects the light signal formed by the standard grating filter, respectively, the absolute position signal, the position signal and the reference signal segment, wherein the reference signal comprises a two position, two-way wherein combination, the other signal path is a semi-transparent opaque totally a combined signal and a fully light-transmitting signals.
2.根据权利要求I所述的绝对式光栅尺,其特征在于:该扫描掩膜包括一第一刻轨、一第二刻轨及一完全透光部分,该第一刻轨为具有特定周期性排列图案的指示光栅,其透光和不透光部分具有相同周期,该透光部分的宽度与该不透光部分的宽度不同。 The absolute scale according to claim I, wherein: the mask comprises a first moment of scanning track, a rail, and a second engraved into the transparent portion, the first rail having a specific cycle engraved permutations grating pattern indicates which opaque and light transmitting portions having the same period, the width of the transparent portion and the opaque portion of the width different.
3.根据权利要求2所述的绝对式光栅尺,其特征在于:该第二刻轨为具有特定周期性排列图案的指示光栅,其透光部分和不透光部分具有相同周期和宽度。 The absolute scale according to claim 2, wherein: the second index grating is inscribed rail having a particular pattern of periodically arranged, the light-transmitting portions and non-transmitting portions having the same period and width.
4.根据权利要求3所述的绝对式光栅尺,其特征在于:该标准光栅包括一参考码道、一增量码道及一绝对码道,该参考码道与该第一刻轨相对应,该增量码道与该第二刻轨相对应,绝对码道对应该扫描掩膜的完全透光部分。 Absolute according to claim 3, said grating, wherein: the reference criterion comprises a grating track, an incremental track and an absolute track, the track and the reference code corresponding to the first moment rail the incremental code track and the second track corresponding to the engraved, absolute scanning track should be fully transmissive portion of the mask.
5.根据权利要求4所述的绝对式光栅尺,其特征在于:该光电探测器用于读取该标准光栅出射的光信号,其包括三组读数单元,分别为增量读数单元、参考读数单元及绝对位置读数单元。 The absolute grating claim 4, wherein: the photodetector for reading the standard grating optical signal emitted, which includes three sets of reading unit, the reading unit increments respectively, with reference to the reading unit and the absolute position of the reading unit.
6.根据权利要求5所述的绝对式光栅尺,其特征在于:该参考读数单元包括四个探测器,有两个分别对应读取该参考码道上全透光和全不透光的区域信号,而其它两个探测器则对应读取半透光区域的信号。 The absolute grating claim 5, wherein: the reference reading unit comprises four detectors, there are two reference code corresponding to the read track and the total light transmittance of the whole area signal opaque and the other two detectors read signal corresponding to the semi-transparent region.
7.根据权利要求5所述的绝对式光栅尺,其特征在于:该绝对位置读数单元为线阵CCD,其对绝对位置信号进行接收,并把绝对位置信号分成若干部分,每个码字宽度有两部分。 The absolute grating claim 5, wherein: the absolute position of the reading unit is a line array CCD, boosts the signal receiving absolute position, the absolute position signal and divided into several parts, each code word width there are two parts.
8.根据权利要求I所述的绝对式光栅尺,其特征在于:该绝对式光栅尺进一步包括一信号处理电路,该信号处理电路包括绝对位置信号处理单元、参考位置信号处理单元、细分位置信号处理单元及一高精度绝对位置合成单元,该参考位置信号处理单元接收该光电探测器的信号处理后分别输出两路不同信号至绝对位置信号处理单元及高精度绝对位置合成单元,细分位置信号处理单元收该光电探测器的信号处理后直接输出至高精度绝对位置合成单元,该绝对位置信号处理单元接收该光电探测器的信号及该参考位置信号处理单元输出的信号处理后输出至高精度绝对位置合成单元,该高精度绝对位置合成单元合成输入其内的信号,以得到精确的绝对位置。 The absolute scale according to claim I, wherein: the absolute grating further comprises a signal processing circuit, the signal processing circuit comprises an absolute position signal processing unit, the reference position signal processing unit, the position of segments respectively output two different signals to the signal processing unit and the absolute position of the absolute position of the composite unit with high accuracy, finely divided position signal processing unit and a synthesis unit with high accuracy absolute position, the reference position signal processing unit processing a received signal of the photodetector outputs the signal after the signal processing unit receiving the signal processing of the photodetector directly to the high-precision absolute position combining unit, the absolute position signal processing unit receives the photodetector signal and the reference position signal output from the output processing unit to the high-precision absolute position of the composite unit, the high-precision absolute position combining unit within the input signal to obtain an accurate absolute position.
9.根据权利要求6所述的绝对式光栅尺,其特征在于:参考码道对应的指示光栅上的透光部分与不透光部分的宽度比为3:1,参考码道对应的标准光栅上透光部分与不透光部分的宽度比为1:1。 9. The absolute scale according to claim 6, wherein: the light-transmissive portion corresponding to the reference code channel index grating width ratio opaque portion is 3: 1, corresponding to the standard reference code track grating width than the light-transmitting portion and the opaque portion is 1: 1.
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