CN103575220B - Miniaturization monochromatic light grid interferometer measuration system based on fiber coupler and measuring method - Google Patents
Miniaturization monochromatic light grid interferometer measuration system based on fiber coupler and measuring method Download PDFInfo
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Abstract
A kind of miniaturization monochromatic light grid interferometer measuration system based on fiber coupler and measuring method, this system includes laser instrument, for producing the grating of diffraction, fiber coupler and photodetector, the light of described laser instrument output is through fiber-optic transfer and incides and forms diffraction light at different levels on grating；The diffraction light of one group of order of symmetry time is by entering fiber coupler after coupling；This group diffraction light exports interference of light field signal through fiber coupler after interfering in fiber coupler, be provided with the photodetector of record output optical signal at fiber coupler outfan, the subsequent conditioning circuit docking collection of letters number obtains the grating displacement in a direction after processing.The method is the measuring method carried out based on above-mentioned measurement system.The present invention has the advantages such as miniaturization, integration, wide range, high accuracy.
Description
Technical field
Present invention relates generally to measuring instrument apparatus field, refer in particular to a kind of miniaturization list grating interference based on fiber coupler and survey
Amount system and measuring method.
Background technology
Nano measurement is the key technology of advanced manufacturing industry development, is also guide and the basis in whole nanosecond science and technology field.Along with super
Precision Machining and the development of superfine processing technology, stroke reaches 100 millimeters of magnitudes, Motion Resolution rate reaches nano level ultraprecise
With superstructure technologies equipment, the means of testing of wide range, nano high-precision is proposed urgent needs.At numerous nano measurements
In instrument, grating measuring apparatus utensil has that measurement scope is big, Measurement Resolution high.And fibre optic interferometer owing to volume is little,
Lightweight, electromagnetism interference, wavelength-division multiplex, the advantage such as highly integrated and cheap can be widely used in field of precision measurement,
The parameters such as displacement, vibration, speed, acceleration, strain and temperature are measured.
Increment type measurement outside absolute type in the pitch cycle is measured with the cycle by grating measuring instrument combines, and measuring basis is
The pitch of grating rather than the wavelength of light wave.What certainty of measurement depended primarily on grating scribes precision, is changed by lambda1-wavelength
Affect relatively small.At present, although grating measuring instrument can obtain higher Measurement Resolution, but its certainty of measurement receives
More multifactorial restriction, not yet reaches due nano-scale.First, it is all by two bundle diffraction that traditional grating interference is measured
Light interferes in atmosphere through certain light path system, phase that on the one hand light channel structure is complex, staff's debugging is got up
To difficulty；On the other hand light path system change over time can occur the most small skew, light path opposed configuration to there occurs change
Change, affect measurement result.Secondly, the light beam steering caused along with aging, the atmospheric turbulance of laser instrument and wave deformation, the external world
The factors such as vibration are likely to cause the fluctuation of light intensity.Especially for traditional interferometry, interference field is at common big compression ring
Under border, the measurement error that air agitation, atmospheric turbulance cause is especially prominent.And in the optical fibre interference system of existing measurement displacement
In system, in order to improve certainty of measurement, the change at random of the phase place that environmental disturbances is caused is needed to compensate.Utilize common path interference
Method suppression environmental disturbances on measure system impact, but measure range the least.
Therefore, although existing grating measuring instrument can obtain nano level Measurement Resolution, but certainty of measurement not yet reaches nanometer
Level level；And the most traditional grating interference measurement system is combined the tightst with optical fibre interference.
Summary of the invention
The technical problem to be solved in the present invention is that the technical problem existed for prior art, and the present invention provides a kind of small-sized
Change, integration, wide range, high-precision miniaturization monochromatic light grid interferometer measuration system based on fiber coupler and measuring method.
For solve above-mentioned technical problem, the present invention by the following technical solutions:
A kind of miniaturization monochromatic light grid interferometer measuration system based on fiber coupler, including laser instrument, for produce diffraction grating,
Fiber coupler and photodetector, the light of described laser instrument output through fiber-optic transfer and incides and forms diffraction light at different levels on grating；
The diffraction light of one group of order of symmetry time is by entering fiber coupler after coupling；After this group diffraction light interferes in fiber coupler
Export interference of light field signal through fiber coupler, be provided with the photodetector of record output optical signal at fiber coupler outfan,
And dock after the collection of letters number processes and obtain the grating displacement in a direction.
Measure the further of system as the present invention to improve:
Described grating, fiber coupler and photodetector are enclosed in a miniaturization measurement module, described photodetector
Output signal is drawn by measurement module through wire, and the light of described laser instrument output is in fiber-optic transfer enters miniaturization measurement module.
Described laser instrument enters in miniaturization measurement module and vertical incidence grating after optical fiber couples, and it is right to be formed in incident illumination both sides
Claim at different levels diffraction lights of distribution.
In the diffraction light light path that two inputs of described fiber coupler are arranged between grating and bonder, described optical fiber couples
Two inputs of device are symmetrically placed along the both sides of input path, and the diffraction light of one group of order of symmetry time is coupled into optical fiber coupling
Device.
Described fiber coupler is excellent is 2 × 1,2 × 2,2 × 3 or 3 × 3 bonders.
Described fiber coupler operation wavelength should be consistent with laser instrument output light wavelength, and coupling ratio is uniform.
Described grating is excellent for reflecting grating or transmission grating.
Described grating is quartz or the grating of zero expansion glass material making of low thermal coefficient of expansion.
The present invention further provides a kind of measuring method based on above-mentioned measurement system, the steps include: a shilling light for laser instrument output
It is coupled into optical fiber, and is impinged perpendicularly on grating by fiber-optic transfer；The described diffraction light forming at different levels times through optical grating diffraction, will
Therein ± n order diffraction light is coupled into two inputs of fiber coupler respectively, and two bundle diffraction lights focus on thoroughly through input
Mirror is coupled into fiber coupler and interferes in fiber coupler；From M outfan output M road of fiber coupler
Optical interference signals, wherein M is 2 or 3；With N number of photodetector, optical signal is received, by the signal received through leading
Line is drawn and is closed measurement module and process, wherein N≤M；When grating is subjected to displacement, N road detector can be caused to receive
Signal changes so that described optical path produces the N road signal of phase particular degree, the periodicity of signal and displacement
There is corresponding relation in amount, the change of parameter to be measured is converted to the motion of described grating；N road is received signal be acquired and divide
The change of recording light interference signal, finally carries out the electronic fine-grained of high multiple again with digit phase measurement method not simultaneously, can be accurately
Measure the displacement of grating.
Compared with prior art, it is an advantage of the current invention that:
1, material object grating, both fiber couplers are combined by the present invention first, construct interferometer measuration system, not only make use of material object
The feature that grating measuring benchmark is reliable, drift is little, in combination with fiber coupler simple in construction, stable performance, debugging conveniently
Feature.
2, the present invention is by grating, fiber coupler, and photodetector etc. is placed in the miniaturization measurement module of a closing, light
Source is coupled into optical fiber and enters module by optical fiber, and the output signal of telecommunication of photodetector is drawn from measurement module by wire.
Whole system is all arranged in a small-sized measurement module in addition to light source and checking system for PCB, it is achieved that test system compact,
The feature of integration.
3, the present invention uses the laser instrument of power stability, and diffraction light is coupled into optical fiber, interferes in fiber coupler,
Fiber coupler simple in construction, optical path adjusting convenience, capacity of resisting disturbance are by force compared with common grating interference measuring method, and
Owing to interference field is in fiber coupler, compared with common grating interference measurement, the measurement that air agitation, atmospheric turbulance cause
Error can all eliminate；
4, the present invention uses grating physical form to provide measuring basis, when quartz (its thermal coefficient of expansion using low thermal coefficient of expansion
Less than 6 × 10-7/ DEG C) or time the glass etc. of zero thermal expansion coefficient makes grating, its measuring basis is reliable and stable, null offset is minimum,
And the temperature impact on certainty of measurement can be reduced, put forward the height measuring system adaptation ability to environment.
5, the present invention uses produced by optical grating diffraction symmetrical senior diffraction light (such as ± 3 grades, ± 5 grades) to form interference fringe,
Produce double Doppler frequency shift amount by design asymmetrical diffraction light path, under equal conditions make theoretical resolution be doubled,
Obtain the optical fine of high multiple, produce micron or the stripe signal of submicron order；
6, the present invention uses three road signal high precision divided methods based on arc tangent conversion and DSP Digital Signal Processing phase
In conjunction with, utilize the methods such as the signal high power segmentation that arc tangent converts, two-way phase demodulation, it is achieved that interference signal wide range phase information
Accurately measure and the high power segmentation of fractional phase, effectively the resolution of grating measuring is brought up to nanometer scale, and then realizes
(it is electronic fine-grained that employing digit phase measuring method obtains high multiple, can be effective in the nano-precision measurement of 100 millimeters of order magnitude range
The resolution of grating measuring is brought up to nanometer scale by ground, and the nano-precision realizing 100 millimeters of order magnitude range is measured).
In sum, the present invention utilizes fiber coupler and laser configuration miniaturization, integration, wide range, high-precision list
Grating homodyne interference offset measuring system, enhances capacity of resisting disturbance and the stability of optical grating measuring system, improves it to outside
The adaptation ability of environment, the nano-precision that can realize 100 millimeters of order magnitude range is measured, it is possible to meet micro photo-electro-mechanical, integrated electricity
A large amount of involved by the fields such as road chip manufacturing, Ultra-precision Turning, superstructure technologies, biological engineering, Aero-Space and new material
Journey nanometer measurement positioning requirements.The present invention defines new wide range, the nano measurement philosophy and technique prototype of strong interference immunity,
Its range depends primarily on the length of used grating, substantially increases the independent development of China's low to medium price level nanometer measurement instrument
Ability, has important practical significance to promoting the development of advanced manufacturing technology further.
Accompanying drawing explanation
Fig. 1 be the present invention in concrete Application Example 1(based on 3 × 3 fiber couplers) in structural principle schematic diagram.
Fig. 2 be the present invention in concrete Application Example 2(based on 3 × 3 fiber couplers) in structural principle schematic diagram.
Fig. 3 be the present invention in concrete Application Example 3(based on 2 × 2 fiber couplers) in structural principle schematic diagram.
Fig. 4 be the present invention in concrete Application Example 4(based on 2 × 2 fiber couplers) in structural principle schematic diagram.
Fig. 5 is the schematic flow sheet of the inventive method.
Marginal data:
1, laser instrument；21, reflecting grating；22, transmission grating；3, first input end；4, the second input；5, first
Outfan；6, the second outfan；7, the 3rd outfan；8, the first photodetector；9, the second photodetector；10、
3rd photodetector；11, fiber coupler；12, single-mode fiber；13, miniaturization measurement module.
Detailed description of the invention
Below with reference to Figure of description and specific embodiment, the present invention is described in further details.
A kind of based on fiber coupler the miniaturization monochromatic light grid interferometer measuration system of the present invention, including laser instrument 1, for producing
The grating of diffraction, photodetector and fiber coupler 11, the light of laser instrument 1 output through fiber-optic transfer and incides shape on grating
Becoming diffraction light at different levels, on optical diffraction, the diffraction light of one group of order of symmetry time is by entering fiber coupler 11 after coupling；Diffraction
Light exports interference of light field signal through fiber coupler 11 after interfering in fiber coupler 11, exports at fiber coupler 11
The output light path of end exports optical signal by photodetectors register.
In concrete application example, when grating is static, optical grating diffraction the symmetrical two-stage diffraction light produced, enter optical fiber coupling
Device 11 forms interference field, and the interference field signal of output keeps static；When grating moves, symmetrical two-stage diffraction light will produce size
The Doppler frequency shift amount that equal, symbol is contrary so that if optical path produces the main line signal of phase particular degree.Finally,
Received the interference field signal of optical path by photodetector, and dock after the collection of letters number processes, can accurately measure grating at certain
The displacement in one direction.
Further, grating, fiber coupler 11 and photodetector are enclosed in a miniaturization measurement module 13, photoelectricity
The output signal of detector is drawn by measurement module through wire, and the light of laser instrument 1 output enters miniaturization through fiber-optic transfer and measures mould
In block 13.
Further, laser instrument 1 can also enter in miniaturization measurement module 13 after optical fiber couples, and vertical incidence grating.
Further, after the light vertical incidence grating of laser instrument 1 output, at different levels times symmetrical diffraction are formed in incident illumination both sides
Light.
Further, two input condenser lenses of fiber coupler 11 are arranged on the diffraction between grating and fiber coupler 11
In light path.Two inputs of fiber coupler 11 are symmetrically placed along the both sides of input path, produce symmetry after optical grating diffraction
At different levels diffraction lights of distribution, respectively by entering fiber coupler 11 after coupling, ± n order diffraction interference of light couples at optical fiber
Device 11 occurs.
Further, the fiber coupler 11 in the present invention is excellent is 2 × 1,2 × 2,2 × 3 or 3 × 3 bonders；Fiber coupler
The operation wavelength of 11 should be consistent with laser instrument 1 output wavelength, and coupling ratio is uniform.
Further, the grating in the present invention is preferably reflecting grating 21 or transmission grating 22.System is measured at above-mentioned grating interference
In system, grating is preferably quartz or the grating of zero expansion glass material making of low thermal coefficient of expansion, so can better ensure that
Measuring basis is reliable and stable, null offset is minimum, and can reduce the temperature impact on certainty of measurement, improves interferometry of the present invention
The method adaptation ability to environment.
Concrete application example 1: as it is shown in figure 1, the measurement system of the present invention includes laser instrument 1, reflecting grating 21 and for two
The bundle fiber coupler 11 that interferes of diffraction light, wherein reflecting grating 21, fiber coupler the 11, first photodetector 8,
Second photodetector the 9, the 3rd photodetector 10 is respectively positioned in miniaturization measurement module 13.The light warp of laser instrument 1 output
It is coupled into single-mode fiber 12, and is transferred into miniaturization measurement module 13 by single-mode fiber 12, impinge perpendicularly on reflecting grating
On 21.It is reflected grating 21 diffraction and forms the diffraction light of at different levels times, by therein ± n order diffraction light line focus Lens Coupling respectively
Entering first input end 3 and the second input 4, two bundle diffraction lights enter fiber coupler 11 after two inputs, and at light
Fine bonder 11 interferes.Then from first outfan the 5, second outfan the 6, the 3rd outfan of fiber coupler 11
7 output three road phase about 120 ° optical interference signals, outfan lens carry out collimator and extender, by the first photodetector 8,
The change of the second photodetector the 9, the 3rd photodetector 10 recording light interference signal respectively.Electricity produced by photodetector
Signal is drawn through miniaturization measurement module 13 by three of the wires.When reflecting grating 21 is subjected to displacement in the x direction, can cause
Three road detectors receive signal and change, and process by three tunnels are received signal, can accurately measure reflecting grating 21 at x
The displacement in direction.
Concrete application example 2: as in figure 2 it is shown, this measurement system includes laser instrument 1, transmission grating 22 and restraints diffraction for two
The fiber coupler 11 that light interferes, wherein transmission grating 22, fiber coupler the 11, first photodetector the 8, second light
Electric explorer the 9, the 3rd photodetector 10 is respectively positioned in miniaturization measurement module 13.Laser instrument 1 output light coupled enter
Enter single-mode fiber 12, and be transferred into miniaturization measurement module 13 by single-mode fiber 12, impinge perpendicularly on transmission grating 22.
Form diffraction lights at different levels time through transmission grating 22 diffraction, therein ± n order diffraction light line focus Lens Coupling respectively is entered the
One input 3 and the second input 4, two bundle diffraction lights enter fiber coupler 11 through two inputs, and at fiber coupler
Interfere in 11.Then export three from first outfan the 5, second outfan the 6, the 3rd outfan 7 of fiber coupler 11
The optical interference signals that road phase is about 120 °, outfan lens carry out collimator and extender, by first photodetector the 8, second light
The change of electric explorer the 9, the 3rd photodetector 10 recording light interference signal respectively.The signal of telecommunication that photodetector produces is by three
Root wire is drawn through miniaturization measurement module 13.When transmission grating 22 is subjected to displacement in the x direction, three tunnel detections can be caused
Device receives signal and changes, and processes by three tunnels are received signal, can accurately measure the transmission grating 22 position in x direction
Shifting amount.
Concrete application example 3: as it is shown on figure 3, the measurement system of the present invention includes laser instrument 1, reflecting grating 21 and for two
The bundle fiber coupler 11 that interferes of diffraction light, wherein reflecting grating 21, fiber coupler the 11, first photodetector 8,
Second photodetector the 9, the 3rd photodetector 10 is respectively positioned in miniaturization measurement module 13.The light warp of laser instrument 1 output
It is coupled into single-mode fiber 12, and is transferred into miniaturization measurement module 13 by single-mode fiber 12, impinge perpendicularly on reflecting grating
On 21.It is reflected grating 21 diffraction and forms the diffraction light of at different levels times, by therein ± n order diffraction light line focus Lens Coupling respectively
Entering first input end 3 and the second input 4, two bundle diffraction lights enter fiber coupler 11 through two inputs, and at optical fiber
Bonder 11 interferes.Then export two-way phase place from the first outfan the 5, the 3rd outfan 7 of fiber coupler 11
The optical interference signals of different (90 ° or 180 °), outfan lens carry out collimator and extender, by the first photodetector the 8, the 3rd
The change of photodetector 10 recording light interference signal respectively.The signal of telecommunication that photodetector produces is surveyed through miniaturization by three of the wires
Amount module 13 is drawn.When reflecting grating 21 is subjected to displacement in the x direction, two-way detector can be caused to receive signal and to become
Change, process by two-way is received signal, can accurately measure the reflecting grating 21 displacement in x direction.
Concrete application example 4: as shown in Figure 4, this measurement system includes laser instrument 1, transmission grating 22 and restraints diffraction for two
The fiber coupler 11 that light interferes, wherein transmission grating 22, fiber coupler the 11, first photodetector the 8, second light
Electric explorer the 9, the 3rd photodetector 10 is respectively positioned in miniaturization measurement module 13.Laser instrument 1 output light coupled enter
Enter single-mode fiber 12, and be transferred into miniaturization measurement module 13 by single-mode fiber 12, impinge perpendicularly on transmission grating 22.
Form diffraction lights at different levels time through transmission grating 22 diffraction, therein ± n order diffraction light line focus Lens Coupling respectively is entered the
One input 3 and the second input 4, two bundle diffraction lights enter fiber coupler 11 through two inputs, and at fiber coupler
Interfere in 11.Then export different (90 ° of two-way phase place from the first outfan the 5, the 3rd outfan 7 of fiber coupler 11
Or 180 °) optical interference signals, outfan lens carry out collimator and extender, by the first photodetector the 8, the 3rd photodetector
The changes of 10 respectively recording light interference signals, the signal of telecommunication that photodetector produces by three of the wires through miniaturization measurement module 13
Draw.When transmission grating 22 is subjected to displacement in the x direction, two-way detector can be caused to receive signal and to change, by right
Two-way receives signal and processes, and can accurately measure the reflecting grating 21 displacement in x direction.
As it is shown in figure 5, based on above-mentioned measurement system, invention further provides a kind of single pattern zero based on fiber coupler
Difference interference displacement measuring method, concretely comprises the following steps:
What Schilling laser instrument 1 exported is optically coupled into optical fiber, and by fiber-optic transfer entrance miniaturization measurement module 13 and vertically entering
It is mapped on grating.Form diffraction lights at different levels time through optical grating diffraction, by secondary for one group of order of symmetry therein diffraction light (± 3 grades, ± 5
Level etc.) respectively line focus Lens Coupling enter two inputs of fiber coupler 11, two bundle diffraction lights enter light through input
Fine bonder 11, and interfere in fiber coupler 11.Then from the M(M of fiber coupler 11 be 2 or 3) individual
Outfan output M road optical interference signals, with N(N≤M) optical signal is received, by receive by individual photodetector
Signal is drawn through wire and is closed measurement module and processed by Subsequent electronic system.
When grating is subjected to displacement, N road detector can be caused to receive signal and to change so that described optical path produces phase place
The N road signal of difference particular degree, there is corresponding relation in the periodicity of signal and displacement, it is achieved that by the change of parameter to be measured
Be converted to the motion of described grating.N road is received the change that signal is acquired and distinguishes recording light interference signal simultaneously, finally
Carry out the electronic fine-grained of high multiple with digit phase measurement method again, get final product the displacement of precise measuring grid.
In above-mentioned grating interference measuring method, grating is preferably the quartz of low thermal coefficient of expansion or zero expansion glass material makes
Grating, so can better ensure that measuring basis is reliable and stable, null offset is minimum, and can reduce temperature to certainty of measurement
Impact, improves the interferometric method of the present invention adaptation ability to environment.
Below being only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment, all belongs to
Technical scheme under thinking of the present invention belongs to protection scope of the present invention.It should be pointed out that, the ordinary skill for the art
For personnel, some improvements and modifications without departing from the principles of the present invention, should be regarded as protection scope of the present invention.
Claims (5)
1. a miniaturization monochromatic light grid interferometric method based on fiber coupler, it is characterized in that, including laser instrument, for producing the grating of diffraction, fiber coupler and photodetector, the light of described laser instrument output through fiber-optic transfer and incides and forms diffraction light at different levels on grating；The diffraction light of one group of order of symmetry time is by entering fiber coupler after coupling；The diffraction light of described one group of order of symmetry time exports interference of light field signal through fiber coupler after interfering in fiber coupler, it is provided with the photodetector of record output optical signal at fiber coupler outfan, and docks after the collection of letters number processes and obtain the grating displacement in a direction；
Described grating, fiber coupler and photodetector are enclosed in a miniaturization measurement module, and the output signal of described photodetector is drawn by measurement module through wire, and the light of described laser instrument output is in fiber-optic transfer enters miniaturization measurement module；
Described laser instrument enters in miniaturization measurement module and vertical incidence grating after optical fiber couples, and forms at different levels times symmetrical diffraction lights in incident illumination both sides；
Two inputs of described fiber coupler are arranged on the optical diffraction between grating and bonder, and two inputs of described fiber coupler are symmetrically placed along the both sides of input path, and the diffraction light of one group of order of symmetry time is coupled into fiber coupler；
Step is: what Schilling laser instrument exported is optically coupled into optical fiber, and is impinged perpendicularly on grating by fiber-optic transfer；The described diffraction light forming at different levels times through optical grating diffraction, is coupled into two inputs of fiber coupler respectively by therein ± n order diffraction light, and two bundle diffraction lights are coupled into fiber coupler through input condenser lens and interfere in fiber coupler；From M outfan output M road optical interference signals of fiber coupler, wherein M is 2 or 3；With N number of photodetector, optical signal is received, the signal received is drawn through wire and closes measurement module and process, wherein N≤M；When grating is subjected to displacement, N road detector can be caused to receive signal change, making described optical path produce the N road signal of phase particular degree, there is corresponding relation, the change of parameter to be measured is converted to the motion of described grating in the periodicity of signal and displacement；N road is received the change that signal is acquired and distinguishes recording light interference signal simultaneously, finally carries out the electronic fine-grained of high multiple with digit phase measurement method again, get final product the displacement of precise measuring grid.
Miniaturization monochromatic light grid interferometric method based on fiber coupler the most according to claim 1, it is characterised in that described fiber coupler is 2 × 1,2 × 2,2 × 3 or 3 × 3 bonders.
Miniaturization monochromatic light grid interferometric method based on fiber coupler the most according to claim 2, it is characterised in that described fiber coupler operation wavelength should be consistent with laser instrument output light wavelength, and coupling ratio is uniform.
Miniaturization monochromatic light grid interferometric method based on fiber coupler the most according to claim 1, it is characterised in that described grating is reflecting grating or transmission grating.
Miniaturization monochromatic light grid interferometric method based on fiber coupler the most according to claim 4, it is characterised in that described grating is quartz or the grating of zero expansion glass material making of low thermal coefficient of expansion.
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| CN104677287A (en) * | 2015-03-05 | 2015-06-03 | 哈尔滨工业大学 | Micro-scale measurement device and method adopting three-core optical fiber grating probe and based on optical fiber ring laser |
| CN109084883A (en) * | 2018-08-09 | 2018-12-25 | 合肥工业大学 | Based on phase-BOTDR optical fiber distributed type Brillouin's vibrating sensing measurement method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101825432A (en) * | 2010-04-01 | 2010-09-08 | 北京交通大学 | Dual-wavelength optical-fiber interference large-range high-resolution displacement measurement system |
| CN102168944A (en) * | 2010-12-24 | 2011-08-31 | 中国科学院上海光学精密机械研究所 | Double frequency laser interferometer for absolute distance measurement and measurement method thereof |
| CN102944176A (en) * | 2012-11-09 | 2013-02-27 | 清华大学 | Displacement measuring system of heterodyne grating interferometer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5695478B2 (en) * | 2011-04-15 | 2015-04-08 | Dmg森精機株式会社 | Optical displacement measuring device |
-
2013
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101825432A (en) * | 2010-04-01 | 2010-09-08 | 北京交通大学 | Dual-wavelength optical-fiber interference large-range high-resolution displacement measurement system |
| CN102168944A (en) * | 2010-12-24 | 2011-08-31 | 中国科学院上海光学精密机械研究所 | Double frequency laser interferometer for absolute distance measurement and measurement method thereof |
| CN102944176A (en) * | 2012-11-09 | 2013-02-27 | 清华大学 | Displacement measuring system of heterodyne grating interferometer |
Non-Patent Citations (2)
| Title |
|---|
| 一种小型化纳米级单光栅位移测量系统的研制;杨东兴等;《红外与激光工程》;20130430;第42卷(第4期);第1020-1025页 * |
| 小型化单光栅纳米级位移测量技术的研究;杨东兴;《中国优秀硕士学位论文全文数据库》;20121231;第49-54页 * |
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