CN103063289A - Draught fan impeller disturbance measurement system in pulse gas laser device cavity - Google Patents
Draught fan impeller disturbance measurement system in pulse gas laser device cavity Download PDFInfo
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- CN103063289A CN103063289A CN201210533922XA CN201210533922A CN103063289A CN 103063289 A CN103063289 A CN 103063289A CN 201210533922X A CN201210533922X A CN 201210533922XA CN 201210533922 A CN201210533922 A CN 201210533922A CN 103063289 A CN103063289 A CN 103063289A
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Abstract
The invention discloses a draught fan impeller disturbance measurement system in a pulse gas laser device cavity. The draught fan impeller disturbance measurement system in the pulse gas laser device cavity comprises a laser light source, a quadrant photoelectricity detector and a signal processing subsystem. A detecting laser light source and a four-quadrant detector are respectively used for being placed at two ends of the measured flow field area, the detecting laser light source is used for enabling an emitted laser light beam to be parallel to a rotary shaft of the draught fan in a measuring process, the light beam passes the fluid area of a draught fan passageway, and the laser which is produced by the detecting laser light source passes through the measured fluid field and then directly irradiates on a photosensitive surface of the four-quadrant photoelectricity detector. The four-quadrant photoelectricity detector is used for collecting signals which are provided to the signal processing subsystem to be processed and obtaining draught fan impeller disturbance signals. The draught fan impeller disturbance measurement system in the pulse gas laser device cavity is capable of well measuring micro disturbance of a pulse gas laser device draught fan impeller, possesses good accuracy and high precision and has the advantages of being simple in measuring device, simply in method and the like.
Description
Technical field
The invention belongs to the laser measuring technique field, what relate to is the measurement that blower fan rotates the disturbance of stream field, the measurement mechanism of the staggered flow field small sample perturbations that brings of impeller when particularly cooperating four-quadrant photo detector to come crossflow fan worked, the method is specially adapted to the measurement of the small sample perturbations of paired pulses gas laser chamber inner blower.
Background technology
The pulsed gas laser of pulsed discharge pumping industrial processes, integrated circuit (IC) etching and laser medicine and etc. the field obtain a wide range of applications, such as CO
2Gas laser and excimer laser etc.The homogeneity of main discharge region actuating medium has material impact to Uniform discharge and far field beam quality in the pulsed gas laser, therefore needs the circulation system that the actuating medium of region of discharge is constantly updated, thereby guarantees the homogeneity of actuating medium.Circulating by blower fan of gas drives, and the blower fan kind mainly contains crossflow fan, axial flow blower and centrifugal blower.Be accompanied by the requirement of repetition frequency index is increased, rotating speed to blower fan in the circulation system requires also improving constantly, and under conditions of high flow rate, the cost of axial flow blower and centrifugal blower is higher, and crossflow fan can not only obtain higher flow velocity under hyperbar, and crossflow fan approaches with discharge electrode structure in length and breadth, makes whole laser structure compact.Crossflow fan is general main to be made of rotor, spiral case, impeller etc., fan leaf is staggered in the flow field can produce periodic disturbance, although these disturbances are less, but in being applied to the excimer laser of photoetching, stability requirement to light source is high, therefore need continuous structure to impeller to be optimized, reduce the disturbance in flow field, equally also be badly in need of having highly sensitive flow field disturbance detecting method to come the small sample perturbations of stream field to detect.
Summary of the invention
The purpose of this invention is to provide a kind of pulsed gas laser chamber inner blower impeller disturbance measuring system, the small sample perturbations that wheel rotation was brought when the method can simply and exactly be measured blower fan work.
A kind of pulsed gas laser provided by the invention chamber inner blower impeller disturbance measuring system is characterized in that this system comprises measurement subsystem and signal processing subsystem; Described measurement subsystem comprises surveys LASER Light Source and four-quadrant photo detector;
Exploring laser light light source and 4 quadrant detector are respectively applied to be placed on the two ends of tested flow field regions, the laser beam that the exploring laser light light source sends when being used for measuring is with the shaft parallel of blower fan, and light beam is by the flow field of blower fan runner, and direct irradiation was on the photosurface of four-quadrant photo detector after the laser that the exploring laser light light source produces passed tested flow field regions; Four-quadrant photo detector is used for collection signal, and offers signal processing subsystem and process, and obtains the draught fan impeller disturbing signal.
The present invention by with the exploring laser light light beam with the parallel placement of fan shaft, and pass in the flow field that blower fan work produces, adopt four-quadrant photo detector to survey exploring laser light light beam through tested flow field regions.Because blower fan rotates in tested flow field regions and produces small sample perturbations, makes light beam that small deviation occur, the light intensity signal that each quadrant of 4 quadrant detector detects can change; And the disturbance that fan leaf alternately produces is periodic, so the fan leaf disturbing signal of four-quadrant photo detector record also has periodically.A/D converter is converted into digital signal with these signals, and processes by the method for digital signal processing, and the signal of draught fan impeller disturbance is extracted, and obtains frequency and the size of the disturbance that draught fan impeller causes.
Disturbance information when the mode of the present invention by optical measurement obtains wheel rotation has the advantages that measurement mechanism is simple, precision is high, easy to operate, has very strong practicality.
Description of drawings
Fig. 1 is measurement subsystem theory diagram of the present invention;
Fig. 2 is the time domain output signal of the single quadrant of four-quadrant photodetection;
The frequency-region signal of Fig. 3 for the detectable signal of time domain being carried out obtain after the digital signal processing, wherein horizontal ordinate is different frequency signals, the amplitude size of ordinate corresponding signal.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described further.Need to prove at this, understand the present invention for the explanation of these embodiments for helping, but do not consist of limitation of the invention.In addition, below in each embodiment of described the present invention involved technical characterictic just can mutually not make up as long as consist of each other conflict.
As shown in Figure 1, a kind of pulsed gas laser provided by the invention chamber inner blower impeller disturbance measuring system, it mainly comprises measurement subsystem and two aspects of signal processing subsystem.Described measurement subsystem mainly is made of exploring laser light light source 101 and four-quadrant photo detector 102, and described signal processing subsystem comprises data processing circuit 103, A/D data converter 104, processor 105 and display 106.
Exploring laser light light source 101 and 4 quadrant detector 102 lay respectively at the two ends of tested flow field regions, the laser beam that exploring laser light light source 101 sends is with the shaft parallel of blower fan, and light beam is by the flow field of blower fan runner, and the laser that exploring laser light light source 101 produces passes tested flow field regions 100 rear direct irradiations on the photosurface of four-quadrant photo detector 102.The collection signal of four-quadrant photo detector 102 is access A/D data converter 104 after data processing circuit 103 is processed, and adopts 105 pairs of these signals of processor to carry out digital signal processing, is shown at display 106 at last; Described four-quadrant photo detector 102 can be common PIN or APD four-quadrant photo detector, its response frequency is greater than 1MHz, described A/D data converter can be common data collecting card, can control the size of sample frequency and hits, described processor 105 can be realized by software, can carry out the digital signal processing methods such as High frequency filter and Fourier transform.
Before the work, probe source 201 emitting laser hot spots are evenly distributed in four quadrants of four-quadrant photo detector, the output equal and opposite in direction of each quadrant; During blower fan work, alternately meeting between the different leaves bring disturbance in tested flow field regions, the gas refracting index of tested flow field regions is changed, cause detecting light beam generation deviation, the distribution of hot spot on four-quadrant photo detector 202 surveyed in impact, and the output signal of each quadrant of four-quadrant photo detector 202 is changed.Because the disturbance that alternately produces between the different leaves is to have periodically, it also is to have periodically that the output signal of four-quadrant photo detector 202 each quadrant changes, and it is relevant that the cycle T of this fluctuation and the sheet of the rotation speed n of blower fan and impeller are counted N, and satisfied:
T＝1/Nn (1)
Four-quadrant photo detector 102 is transferred to data converting circuit 103 with the live signal of each quadrant and is carried out filtering, amplify and process rear access A/D converter 104, sample frequency fs and sample by A/D converter 104 control signals are counted N, digital signal is transferred to processor 105 carry out digital signal processing, this signal is carried out after filtering and Fourier transform process, convert the live signal of four-quadrant photo detector 102 records to frequency-region signal, because disturbance has periodically, the disturbing signal of above-mentioned draught fan impeller can be extracted from background signal, and show in real time by display 106.
The present invention is based on above-mentioned principle design and form, the present invention is further detailed explanation below in conjunction with accompanying drawing and example.
Before blower fan rotates, adjust exploring laser light light source 101, make its laser facula that sends divide four quadrants in four-quadrant photo detector 102 equally, keep the output equal and opposite in direction of each quadrant and remain unchanged.The vibration frequency of estimation disturbing source is counted N by sampling rate frequency f s and the sample of A/D converter 104 control data, thereby data is measured in real time.For fear of aliasing, should guarantee that sample frequency fs is greater than the tested disturbing signal frequency of twice.During blower fan work, produce disturbance in the flow field, make light beam generation deviation, hot spot is moved at four-quadrant photo detector, and the output of each quadrant changes, and the signal after gathering via A/D converter 104 as shown in Figure 2.In data acquisition, can comprise the noise signal of some high frequencies in the signal.Take after filtering, Fourier pair data are processed signal as shown in Figure 3, the frequency that can judge the blower fan disturbance from figure is 854Hz, the relative initial amplitude of blower fan response excursion, i.e. disturbance relative size is 0.86%.
In sum, the present invention well small sample perturbations of paired pulses gas laser fan blade measures, and has preferably accuracy and higher precision, and has the series of advantages such as measurement mechanism is simple, method is easy.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.So everyly do not break away from the equivalence of finishing under the spirit disclosed in this invention or revise, all fall into the scope of protection of the invention.
Claims (3)
1. a pulsed gas laser chamber inner blower impeller disturbance measuring system is characterized in that this system comprises measurement subsystem and signal processing subsystem; Described measurement subsystem comprises surveys LASER Light Source and four-quadrant photo detector;
Exploring laser light light source and 4 quadrant detector are respectively applied to be placed on the two ends of tested flow field regions, the laser beam that the exploring laser light light source sends when being used for measuring is with the shaft parallel of blower fan, and light beam is by the flow field of blower fan runner, and direct irradiation was on the photosurface of four-quadrant photo detector after the laser that the exploring laser light light source produces passed tested flow field regions; Four-quadrant photo detector is used for collection signal, and offers signal processing subsystem and process, and obtains the draught fan impeller disturbing signal.
2. pulsed gas laser according to claim 1 chamber inner blower impeller disturbance measuring system is characterized in that described signal processing subsystem comprises data processing circuit, A/D data converter, processor and display;
Data processing circuit offers processor for the signal of the four-quadrant photo detector that will receive by the A/D data converter, and processor carries out digital signal processing to this signal, is shown at display at last.
3. pulsed gas laser according to claim 1 and 2 chamber inner blower impeller disturbance measuring system is characterized in that described four-quadrant photo detector is PIN or APD four-quadrant photo detector, and its response frequency is greater than 1MHz.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210533922.XA CN103063289B (en) | 2012-12-11 | 2012-12-11 | Draught fan impeller disturbance measurement system in pulse gas laser device cavity |
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| CN201210533922.XA CN103063289B (en) | 2012-12-11 | 2012-12-11 | Draught fan impeller disturbance measurement system in pulse gas laser device cavity |
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| CN103063289B CN103063289B (en) | 2015-05-20 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108645506A (en) * | 2018-01-31 | 2018-10-12 | 天津大学 | Blade vibration measurement method of parameters based on APD array and device |
| CN113495010A (en) * | 2020-03-20 | 2021-10-12 | 上海微电子装备（集团）股份有限公司 | Disturbance force generating device and method |
| CN114088188A (en) * | 2021-11-19 | 2022-02-25 | 中国计量科学研究院 | Vibration measuring system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006138862A (en) * | 2005-12-01 | 2006-06-01 | Electron & Photon Laboratory Inc | Laser vibrometer |
| CN201583242U (en) * | 2009-12-30 | 2010-09-15 | 核工业理化工程研究院华核新技术开发公司 | Facula position measurement instrument |
| CN102323445A (en) * | 2011-06-14 | 2012-01-18 | 华中科技大学 | Method for measuring flowing velocity of recycle gas in multiple laser cavity |
-
2012
- 2012-12-11 CN CN201210533922.XA patent/CN103063289B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006138862A (en) * | 2005-12-01 | 2006-06-01 | Electron & Photon Laboratory Inc | Laser vibrometer |
| CN201583242U (en) * | 2009-12-30 | 2010-09-15 | 核工业理化工程研究院华核新技术开发公司 | Facula position measurement instrument |
| CN102323445A (en) * | 2011-06-14 | 2012-01-18 | 华中科技大学 | Method for measuring flowing velocity of recycle gas in multiple laser cavity |
Non-Patent Citations (1)
| Title |
|---|
| 贺锋涛等: "像散法对微位移和微振动的实时测量", 《光子学报》, vol. 32, no. 10, 31 October 2003 (2003-10-31), pages 1208 - 1211 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108645506A (en) * | 2018-01-31 | 2018-10-12 | 天津大学 | Blade vibration measurement method of parameters based on APD array and device |
| CN113495010A (en) * | 2020-03-20 | 2021-10-12 | 上海微电子装备（集团）股份有限公司 | Disturbance force generating device and method |
| CN113495010B (en) * | 2020-03-20 | 2023-04-07 | 上海微电子装备（集团）股份有限公司 | Disturbance force generating device and method |
| CN114088188A (en) * | 2021-11-19 | 2022-02-25 | 中国计量科学研究院 | Vibration measuring system |
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