CN201463833U - Capacitive angle sensor - Google Patents

Capacitive angle sensor Download PDF

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Publication number
CN201463833U
CN201463833U CN2009201097102U CN200920109710U CN201463833U CN 201463833 U CN201463833 U CN 201463833U CN 2009201097102 U CN2009201097102 U CN 2009201097102U CN 200920109710 U CN200920109710 U CN 200920109710U CN 201463833 U CN201463833 U CN 201463833U
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excitation signal
plate
pole plate
angle sensor
circuit
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肖跃华
李建春
谭映戈
孙昕
郑浩然
才小士
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Beijign Institute of Aerospace Control Devices
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Beijign Institute of Aerospace Control Devices
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Abstract

A capacitor type angle sensor comprises a front pole plate, a shaft, a ceramic medium, a rear pole plate and a gasket, wherein the ceramic medium is fixed on the shaft, the front pole plate and the rear pole plate penetrate through the shaft and keep a gap between the pole plates fixed through the gasket and the same as the gap of the ceramic medium, the front pole plate and the rear pole plate are made of hydrocarbon ceramic materials, an excitation signal circuit is arranged on the front pole plate, an external automatic gain control circuit provides an excitation power supply for the excitation signal circuit, and a capacitor differential amplitude modulation circuit is arranged on the rear pole plate. The utility model discloses a hydrocarbon ceramic polar plate material of low linear expansion coefficient has effectively reduced capacitanc angle sensor inherent temperature drift, sets up excitation signal circuit and electric capacity difference amplitude modulation circuit respectively on the bipolar plate, has simplified the structure of sensor, and excitation signal circuit produces the excitation signal of higher frequency, has improved the sensitivity and the angle precision of sensor, utilizes outside automatic gain control circuit simultaneously, makes the sensitivity of sensor unchangeable basically under the high temperature condition.

Description

一种电容式角度传感器 A capacitive angle sensor

技术领域technical field

本实用新型涉及一种电容式角度传感器,特别是一种高灵敏度低温漂电容式角度传感器,可作为工业级温度(-40℃~+85℃)环境下的无接触有限角测角传感器,摆动电机的角度传感器。The utility model relates to a capacitive angle sensor, in particular to a high-sensitivity low-temperature drift capacitive angle sensor, which can be used as a non-contact limited-angle angle measuring sensor in an industrial-grade temperature (-40°C to +85°C) environment. Angle sensor for the motor.

背景技术Background technique

目前,国内外采用的电容式角度传感器分为变间隙,变面积,变介质等,同时在还采用差分式结构,但均会有温漂现象,由于电容本身的特点,在高温条件下极板材料的变形,极板间隙的改变,极板间有效面积的改变,元器件固有的温度特性等,都会带来温漂。用在幀扫电机上的角度传感器,是一个随动系统,对角位置要求非常严格,要求在工业级温度范围内输入控制电压与位置反馈严格成一定比例关系,如果角度传感器出现大的温度漂移将会直接影响电机的扫描精度。At present, the capacitive angle sensors used at home and abroad are divided into variable gap, variable area, variable medium, etc. At the same time, the differential structure is also used, but there will be temperature drift phenomenon. Due to the characteristics of the capacitor itself, the polar plate under high temperature conditions The deformation of the material, the change of the gap between the plates, the change of the effective area between the plates, and the inherent temperature characteristics of the components will all bring about temperature drift. The angle sensor used on the frame scan motor is a servo system with very strict requirements on the angular position. It is required that the input control voltage and the position feedback be strictly proportional to a certain ratio within the industrial temperature range. If the angle sensor has a large temperature drift It will directly affect the scanning accuracy of the motor.

实用新型内容Utility model content

本实用新型的技术解决问题是:克服现有技术的不足,提供一种电容式角度传感器,该传感器结构简单、温漂低、灵敏度高。The technical solution of the utility model is to overcome the deficiencies of the prior art and provide a capacitive angle sensor with simple structure, low temperature drift and high sensitivity.

本实用新型的技术解决方案是:一种电容式角度传感器,包括前极板、轴、陶瓷介质、后极板、垫片,陶瓷介质固定在轴上,前极板和后极板穿过轴通过垫片保持极板间的间隙固定,并保持与陶瓷介质的间隙相同,所述的前极板为1/4扇形极板,陶瓷介质的形状与前极板的形状相同,前极板和后极板采用碳氢化合物陶瓷材料,前极板上设置电容差分调幅电路将角度传感器的输出电容进行差分转换成电压值,后极板上设置激磁信号电路为角度传感器提供激磁信号,激磁信号电路由外部自动增益控制电路提供激磁电源。The technical solution of the utility model is: a capacitive angle sensor, including a front plate, a shaft, a ceramic medium, a back plate, a gasket, the ceramic medium is fixed on the shaft, and the front plate and the back plate pass through the shaft The gap between the plates is kept fixed by the spacer, and the same gap as that of the ceramic medium is maintained. The front plate is a 1/4 fan-shaped plate, and the shape of the ceramic medium is the same as that of the front plate. The front plate and the The rear pole plate is made of hydrocarbon ceramic material, and the capacitance differential amplitude modulation circuit is set on the front pole plate to convert the output capacitance of the angle sensor into a voltage value. The excitation signal circuit is set on the rear pole plate to provide the excitation signal for the angle sensor. The excitation power is provided by the external automatic gain control circuit.

所述的前极板、后极板为RO4350B型碳氢化合物陶瓷材料。The front plate and the rear plate are made of RO4350B hydrocarbon ceramic material.

所述的后极板中激磁信号电路产生的激磁信号频率为2Mhz、峰峰值为500V。The frequency of the excitation signal generated by the excitation signal circuit in the rear pole plate is 2Mhz, and the peak-to-peak value is 500V.

所述的垫片、轴采用钛合金材料。The gasket and the shaft are made of titanium alloy.

本实用新型与现有技术相比的有益效果是:本实用新型通过采用低线胀系数的碳氢化合物陶瓷极板材料,有效减小了电容式角度传感器固有温度漂移,在两极板上分别设置激磁信号电路和电容差分调幅电路,简化了传感器的结构,激磁信号电路产生更高频率的激磁信号,提高了电容式角度传感器的灵敏度与角度精度,同时利用外部自动增益控制电路,使电容式角度传感器的灵敏度在高温情况下基本不变,使电容式角度传感器在工业级温度范围内从以前漂移的50角分减小到了2角分。Compared with the prior art, the utility model has the beneficial effects that: the utility model effectively reduces the inherent temperature drift of the capacitive angle sensor by adopting the hydrocarbon ceramic plate material with a low linear expansion coefficient, and the two pole plates are respectively arranged The excitation signal circuit and the capacitor differential amplitude modulation circuit simplify the structure of the sensor. The excitation signal circuit generates a higher frequency excitation signal, which improves the sensitivity and angle accuracy of the capacitive angle sensor. At the same time, the external automatic gain control circuit is used to make the capacitive angle The sensor's sensitivity remains essentially unchanged at high temperatures, reducing the capacitive angle sensor's previous drift of 50 arc minutes to 2 arc minutes over the industrial temperature range.

附图说明Description of drawings

图1为本实用新型的结构示意图;Fig. 1 is the structural representation of the utility model;

图2为本实用新型前极板的平面图;Fig. 2 is the plan view of the utility model front plate;

图3为本实用新型后极板的平面图;Fig. 3 is the plane view of the rear plate of the utility model;

图4为本实用新型电容差分调幅电路图;Fig. 4 is the utility model electric capacity difference amplitude modulation circuit diagram;

图5为本实用新型激磁信号电路图;Fig. 5 is the utility model excitation signal circuit diagram;

图6为本实用新型采用的自动增益控制电路图;Fig. 6 is the automatic gain control circuit diagram that the utility model adopts;

图7为本实用新型高低温漂移测试原理图。Fig. 7 is a schematic diagram of the high and low temperature drift test of the utility model.

具体实施方式Detailed ways

如图1所示,轴2事先安装在电机上,先将图2所示的前极板1通过两个销钉定位贴在电机的底板壳体上,然后将陶瓷介质3套在轴2上,用四个垫片5把图2所示的前极板1与图3所示的后极板4之间的间隙固定,并用螺钉固定拧紧,把外接电路控制板的信号通过DB9连接器连接传感器,构成整个测角系统,最后用顶丝将陶瓷介质3与轴2固定,并保证陶瓷介质3与两极板间的间隙d1,d2一样。其中图2所示的前极板1的形状为1/4扇形极板,陶瓷介质3的形状与图2所示的前极板1的形状、大小相同,轴2带动陶瓷介质3转动,使图1所示的电容式角度传感器的极板面积发生改变,从而使输出电容值改变即可以测量角度。该电容式角度传感器为绝缘介质分开的两个平行金属板组成的差分式平板电容器,旋转陶瓷介质3在两个定极板间形成一个介质,它的旋转导致介质的改变,电容也随之改变,再由前极板1上设置的电容差分调幅电路6对其两路电容进行容值的电压变换,然后再采用差分放大将陶瓷介质3旋转角度转换为电压量,由差分放大两路信号与基准电压形成一个自动增益控制电路为后极板4上的激磁信号电路7提供激磁电源。As shown in Figure 1, the shaft 2 is installed on the motor in advance, and the front plate 1 shown in Figure 2 is positioned on the bottom plate shell of the motor through two pins, and then the ceramic medium 3 is set on the shaft 2, Use four gaskets 5 to fix the gap between the front plate 1 shown in Figure 2 and the rear plate 4 shown in Figure 3, and fix and tighten with screws, and connect the signal of the external circuit control board to the sensor through the DB9 connector , constitute the entire angle measurement system, and finally fix the ceramic medium 3 and the shaft 2 with a top wire, and ensure that the gaps d1 and d2 between the ceramic medium 3 and the two pole plates are the same. Wherein the shape of the front pole plate 1 shown in Figure 2 is a 1/4 fan-shaped pole plate, the shape of the ceramic medium 3 is the same as the shape and size of the front pole plate 1 shown in Figure 2, and the shaft 2 drives the ceramic medium 3 to rotate, so that The plate area of the capacitive angle sensor shown in Figure 1 changes, so that the output capacitance value can be changed to measure the angle. The capacitive angle sensor is a differential plate capacitor composed of two parallel metal plates separated by an insulating medium. The rotating ceramic medium 3 forms a medium between the two fixed plates. Its rotation causes the change of the medium, and the capacitance also changes accordingly. , and then the capacitor differential amplitude modulation circuit 6 provided on the front plate 1 performs voltage conversion of the capacitance values of the two capacitors, and then uses differential amplification to convert the rotation angle of the ceramic medium 3 into a voltage, and the two signals are amplified by the differential. The reference voltage forms an automatic gain control circuit to provide excitation power for the excitation signal circuit 7 on the rear plate 4 .

目前,国内极板一般采用低温度线胀系数的陶瓷材料,或者石英材料,由于本传感器的后极板4上还带有激磁信号电路7,前极板1上设置有电容差分调幅电路6,所以前、后极板材料采用低介电常数、低线胀系数的高频复合陶瓷材料,本实用新型主要采用RO4350B型碳氢化合物陶瓷材料。At present, domestic pole plates generally adopt ceramic materials with low temperature linear expansion coefficients, or quartz materials. Since the rear pole plate 4 of the sensor also has an excitation signal circuit 7, and the front pole plate 1 is provided with a capacitance differential amplitude modulation circuit 6, Therefore, the front and rear plate materials adopt high-frequency composite ceramic materials with low dielectric constant and low linear expansion coefficient. The utility model mainly adopts RO4350B hydrocarbon ceramic materials.

本实用新型在前极板1上设置电容差分调幅电路6,如图4所示,电路由四个二极管D1、D2、D3、D4和电容C1、C2组成,差分电容S1通过正接二极管D1或D2和C1组成的整流电路转转成电压信号V1,差分电容S2通过正接二极管D3或D4和C2组成的整流电路转转成电压信号V2,其中电容C1、C2起滤波作用。The utility model is provided with a capacitor differential amplitude modulation circuit 6 on the front plate 1, as shown in Figure 4, the circuit is composed of four diodes D1, D2, D3, D4 and capacitors C1, C2, and the differential capacitor S1 is connected to the diode D1 or D2 The rectifier circuit composed of C1 and C1 is converted into a voltage signal V1, and the differential capacitor S2 is converted into a voltage signal V2 through a rectifier circuit composed of a positive diode D3 or D4 and C2, and the capacitors C1 and C2 act as filters.

本实用新型在后极板4上设置激磁信号电路7,如图5所示,电路由电阻R10、R11、三极管Q3、Q4以及罐型磁芯变压器JP2组成,该电路可以通过罐型磁芯变压器JP2输出激磁振荡信号,该电路采用自激推挽式产生高频交流信号,通过改变变压器JP2磁芯电感改变激磁频率,由于容抗

Figure G2009201097102D00031
随着频率升高,容抗减小,输出电压增大,传感器灵敏度的提高依靠传感器激磁信号的频率,所以提高激磁频率也就意味着提高传感器的灵敏度,高变压比将交流信号峰峰值放大到几百伏,这样的信号在两路差分电容极板上感应出峰峰值几伏的同频率交流信号,本实用新型激磁信号电路产生的激磁信号频率为2Mhz、峰峰值为500V。The utility model is provided with an excitation signal circuit 7 on the rear pole plate 4, as shown in Figure 5, the circuit is composed of resistors R10, R11, triodes Q3, Q4 and pot-type magnetic core transformer JP2, and the circuit can pass through the pot-type magnetic core transformer JP2 outputs excitation oscillation signal, the circuit adopts self-excited push-pull type to generate high-frequency AC signal, and the excitation frequency is changed by changing the inductance of transformer JP2 magnetic core, due to capacitive reactance
Figure G2009201097102D00031
As the frequency increases, the capacitive reactance decreases, the output voltage increases, and the improvement of sensor sensitivity depends on the frequency of the sensor excitation signal, so increasing the excitation frequency means improving the sensitivity of the sensor, and the high transformation ratio will amplify the peak-to-peak value of the AC signal To hundreds of volts, such a signal induces an AC signal with a peak-to-peak frequency of several volts on the two-way differential capacitance plates. The frequency of the excitation signal produced by the excitation signal circuit of the utility model is 2Mhz, and the peak-to-peak value is 500V.

图5所示的激磁信号电路7的输入电压AGC由如图6所示的AGC电路输出,AGC电路由可变电阻R1、电阻R2、电阻R3、电阻R4、电阻R5、可变电阻R6、电阻R7、电阻R8、电阻R9、由二极管D5、电容C3和运算放大器LM324组成的反向比例放大电路以及三极管Q1组成,可变电阻R1的两端接±5伏电压,电阻R7的一端接-5伏电压,另一端连接放大器LM324的伏输入端、电阻R2、电阻R3、电阻R4、电阻R5、电容C3以及二极管D5的正极,三极管的集电极接正15伏电压,放大器LM324的正输入端接地.提高本实用新型的灵敏度是降低温漂的一种重要手段,只有灵敏度高了电容才能敏感微小变化,采用自动增益控制电路(即AGC)对传感器的灵敏度进行校正.该电路的工作原理是:当环境温度升高时,由于极板材料的膨胀电容间隙减小,电容增大,附图4中两相调幅信号V1、V2也增大,经过低通滤波相应放大成附图6电路中的VA和VB,VA与VB和基准电压进行求和,得到的误差就减小,将误差进行积分,积分结果连接到三极管Q1的基极,三极管将此电流放大并通过电阻R9输出AGC电压给电容角度传感器做激磁电源,激磁电压变小,则两路调幅后的信号VA和VB也减小,所以AGC电路始终可以保证传感器的灵敏度不变,也就是保证VA与VB不变.The input voltage AGC of the excitation signal circuit 7 shown in Figure 5 is output by the AGC circuit shown in Figure 6, and the AGC circuit is composed of variable resistor R1, resistor R2, resistor R3, resistor R4, resistor R5, variable resistor R6, resistor R7, resistor R8, resistor R9, an inverse proportional amplifier circuit composed of diode D5, capacitor C3 and operational amplifier LM324, and a triode Q1. Both ends of variable resistor R1 are connected to ±5 volts, and one end of resistor R7 is connected to -5 The other end is connected to the volt input terminal of the amplifier LM324, resistor R2, resistor R3, resistor R4, resistor R5, capacitor C3 and the positive pole of the diode D5, the collector of the triode is connected to a positive 15 volt voltage, and the positive input terminal of the amplifier LM324 is grounded .Improving the sensitivity of the utility model is an important means of reducing temperature drift. Only when the sensitivity is high can the capacitance be sensitive to small changes. An automatic gain control circuit (i.e. AGC) is used to correct the sensitivity of the sensor. The working principle of the circuit is: When the ambient temperature rises, due to the reduction of the expansion capacitance gap of the plate material, the capacitance increases, and the two-phase amplitude modulation signals V1 and V2 in the accompanying drawing 4 also increase, which are correspondingly amplified into the circuit in the accompanying drawing 6 after low-pass filtering. VA and VB, VA and VB and the reference voltage are summed, the error obtained is reduced, the error is integrated, and the integration result is connected to the base of the transistor Q1, the transistor amplifies the current and outputs the AGC voltage to the capacitor through the resistor R9 The angle sensor is used as the excitation power supply, and the excitation voltage becomes smaller, and the signals VA and VB after the two amplitude modulations also decrease, so the AGC circuit can always ensure that the sensitivity of the sensor remains unchanged, that is, the VA and VB remain unchanged.

本实用新型的元器件采用低温漂元器件,检波二极管D1、D2、D3、D4、D5均采用阵列二极管,运算放大器LM324采用工业级的四运放,其余电阻、电容均采用温度系数为50ppm/℃以下的元器件。The components of the utility model adopt low-temperature drift components, the detection diodes D1, D2, D3, D4, and D5 all use array diodes, the operational amplifier LM324 adopts industrial-grade four-operation amplifiers, and the remaining resistors and capacitors all use temperature coefficients of 50ppm/ Components below ℃.

对本实用新型进行高低温漂移测试,测试原理如图7所示,将本实用新型所述的电容式角度传感器安装在帧扫电机72上并与电路控制板放入高低温箱71,将帧扫电机72上电,用激光器73发出的激光光束透过高低温箱的玻璃74打到电机负载镜片75上,并反射到对面的坐标纸76上。在常温通电5分钟后,用精密直流稳流器调节给定电压值U1(该试验中给定±5V,±7V,±9V),分别在坐标纸76上做出这6个电压值相应的刻线标记,标记完关机。然后先高温+60℃,保温1h后再用精密直流稳流器调节给定电压值U1(该试验中给定±5V,±7V,±9V),记录下相应的输出电压U2′(表1中引脚3)。观察光点位置,在坐标纸76上做出标记,标记完关机,此时标记的位置和常温时标记的位置有一个变化,在坐标纸上量出这个差值后除以对应的该点到镜子的距离得到漂移的弧度值,再换算成角度值记为a(a有正负号,单位为角分),a就是温度为+60℃对应输入电压的角度漂移值。带入公式|U2-U2′|×120′-a,计算出漂移位置精度(U2为常温下对应相同U1的输出电压)。在高温保温情况下,由AGC电路输出的电压一直在减小,也就是由于高温的影响电容式角度传感器灵敏度改变了,出现了漂移,AGC电路一直在对传感器的灵敏度进行校正,光点以前漂移50角分,现在漂移在2角分以内,温漂结果大大减小,也就是实现了低温漂电容式角度传感器。Carry out the high and low temperature drift test to the utility model, the test principle is shown in Figure 7, the capacitive angle sensor described in the utility model is installed on the frame scanning motor 72 and put into the high and low temperature box 71 with the circuit control board, the frame scanning The motor 72 is powered on, and the laser beam sent by the laser 73 passes through the glass 74 of the high and low temperature box and hits the motor load lens 75, and is reflected on the opposite coordinate paper 76. After energizing at room temperature for 5 minutes, use a precision DC current regulator to adjust the given voltage value U1 (given ±5V, ±7V, ±9V in this test), and draw the corresponding values of these 6 voltage values on the coordinate paper 76. Engraved markings, turn off the machine after marking. Then first heat at +60°C, keep warm for 1 hour, and then use a precision DC current stabilizer to adjust the given voltage value U1 (given ±5V, ±7V, ±9V in this test), and record the corresponding output voltage U2′ (Table 1 middle pin 3). Observe the position of the light spot, make a mark on the coordinate paper 76, and turn off the machine after marking. At this time, there is a change between the position of the mark and the position of the mark at room temperature. After measuring the difference on the coordinate paper, divide it by the corresponding point to get The distance from the mirror is the radian value of the drift, and then converted into an angle value and recorded as a (a has a plus or minus sign, and the unit is arc minutes), a is the angle drift value corresponding to the input voltage at a temperature of +60°C. Bring in the formula |U2-U2'|×120'-a to calculate the drift position accuracy (U2 is the output voltage corresponding to the same U1 at room temperature). In the case of high temperature and heat preservation, the voltage output by the AGC circuit has been decreasing, that is, due to the influence of high temperature, the sensitivity of the capacitive angle sensor has changed, and there has been drift. The AGC circuit has been correcting the sensitivity of the sensor, and the light spot drifted before. 50 arc minutes, now the drift is within 2 arc minutes, and the temperature drift is greatly reduced, that is, the low temperature drift capacitive angle sensor is realized.

本实用新型未说明内容为本领域技术人员公知技术。The content not described in the utility model is the well-known technology of those skilled in the art.

Claims (4)

1.一种电容式角度传感器,其特征在于:包括前极板(1)、轴(2)、陶瓷介质(3)、后极板(4)、垫片(5),陶瓷介质(3)固定在轴(2)上,前极板(1)和后极板(4)穿过轴(2)通过垫片(5)保持极板间的间隙固定,并保持与陶瓷介质(3)的间隙相同,所述前极板(1)为1/4扇形极板,陶瓷介质(3)的形状与前极板(1)的形状相同,前极板(1)和后极板(4)采用碳氢化合物陶瓷材料,前极板(1)上设置电容差分调幅电路(6)将角度传感器的输出电容进行差分转换成电压值,后极板(4)上设置激磁信号电路(7)为角度传感器提供激磁信号,激磁信号电路(7)由外部自动增益控制电路提供激磁电源。1. A capacitive angle sensor, characterized in that: comprising front plate (1), shaft (2), ceramic medium (3), rear plate (4), gasket (5), ceramic medium (3) Fixed on the shaft (2), the front plate (1) and the rear plate (4) pass through the shaft (2) through the gasket (5) to keep the gap between the plates fixed, and maintain the contact with the ceramic medium (3) The gap is the same, the front plate (1) is a 1/4 fan-shaped plate, the shape of the ceramic medium (3) is the same as that of the front plate (1), the front plate (1) and the rear plate (4) The hydrocarbon ceramic material is used, and the capacitance differential amplitude modulation circuit (6) is set on the front plate (1) to convert the output capacitance of the angle sensor into a voltage value, and the excitation signal circuit (7) is set on the back plate (4). The angle sensor provides an excitation signal, and the excitation signal circuit (7) is provided with excitation power by an external automatic gain control circuit. 2.根据权利要求1所述的一种电容式角度传感器,其特征在于:所述的前极板(1)、后极板(4)为RO4350B型碳氢化合物陶瓷材料。2. A capacitive angle sensor according to claim 1, characterized in that: said front plate (1) and rear plate (4) are made of RO4350B hydrocarbon ceramic material. 3.根据权利要求1所述的一种电容式角度传感器,其特征在于:所述的后极板(4)中激磁信号电路(7)产生的激磁信号频率为2Mhz、峰峰值为500V。3. A capacitive angle sensor according to claim 1, characterized in that: the excitation signal generated by the excitation signal circuit (7) in the rear plate (4) has a frequency of 2Mhz and a peak-to-peak value of 500V. 4.根据权利要求1所述的一种电容式角度传感器,其特征在于:所述的垫片(5)、轴(2)采用钛合金材料。4. A capacitive angle sensor according to claim 1, characterized in that: said gasket (5) and shaft (2) are made of titanium alloy.
CN2009201097102U 2009-07-03 2009-07-03 Capacitive angle sensor Expired - Lifetime CN201463833U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102636193A (en) * 2012-03-30 2012-08-15 程有信 Duplex differential capacitor sensor
CN114608435A (en) * 2022-03-10 2022-06-10 天津大学 Radial and axial clearance measurement system and method for low pressure turbine blade grate with crown
CN115856396A (en) * 2022-12-09 2023-03-28 珠海多创科技有限公司 Sensing probe module, non-contact voltage measurement circuit, non-contact voltage measurement method and electronic equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102636193A (en) * 2012-03-30 2012-08-15 程有信 Duplex differential capacitor sensor
CN114608435A (en) * 2022-03-10 2022-06-10 天津大学 Radial and axial clearance measurement system and method for low pressure turbine blade grate with crown
CN114608435B (en) * 2022-03-10 2023-09-26 天津大学 Radial and axial clearance measurement system and method for shrouded blade comb teeth of low-pressure turbine
CN115856396A (en) * 2022-12-09 2023-03-28 珠海多创科技有限公司 Sensing probe module, non-contact voltage measurement circuit, non-contact voltage measurement method and electronic equipment
CN115856396B (en) * 2022-12-09 2023-08-29 珠海多创科技有限公司 Sensing probe module, non-contact voltage measurement circuit, non-contact voltage measurement method and electronic equipment

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