CN113091963B - Optical pressure measuring device - Google Patents
Optical pressure measuring device Download PDFInfo
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- CN113091963B CN113091963B CN202110258090.4A CN202110258090A CN113091963B CN 113091963 B CN113091963 B CN 113091963B CN 202110258090 A CN202110258090 A CN 202110258090A CN 113091963 B CN113091963 B CN 113091963B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 30
- 230000003750 conditioning effect Effects 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims abstract description 18
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 18
- 238000006243 chemical reaction Methods 0.000 claims abstract description 12
- 238000004891 communication Methods 0.000 claims abstract description 8
- 239000003990 capacitor Substances 0.000 claims description 75
- 239000013078 crystal Substances 0.000 claims description 14
- 230000001143 conditioned effect Effects 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000009530 blood pressure measurement Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 17
- 238000005259 measurement Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 2
- 238000013139 quantization Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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Abstract
The invention discloses an optical pressure measuring device, which comprises an optical frequency conversion unit, a signal conditioning and collecting unit, a signal processing unit, a display unit and a direct current voltage stabilizing unit, wherein the optical frequency conversion unit is used for converting the optical frequency of a light source into a light signal; the optical frequency conversion unit comprises a driving circuit and a piezoelectric resonant sensor; the output end of the piezoelectric resonant sensor is connected with the input end of the driving circuit; the output end of the driving circuit is in communication connection with the input end of the signal conditioning and collecting unit; the signal processing unit is respectively in communication connection with the output end of the signal conditioning and collecting unit and the display unit; the direct-current voltage stabilizing unit is electrically connected with the driving circuit; the piezoelectric resonance type sensor includes: a sensor wafer, a first sensor electrode, and a second sensor electrode; the sensor wafer is secured between the first sensor electrode and the second sensor electrode. The invention converts the optical signal into the frequency signal, and quickly acquires the optical pressure information through the frequency difference, thereby improving the optical pressure measurement precision.
Description
Technical Field
The invention relates to the field of sensors, in particular to an optical pressure measuring device.
Background
Photon pressure (simply referred to as light pressure) refers to mechanical pressure generated by light irradiating on the surface of an object to face the object. The accurate measurement of light pressure has been a problem to be solved by the scientific community. The main reason is that the photon pressure is very slight, and the existing measuring equipment cannot directly detect the photon pressure due to insufficient sensitivity. In addition, in the international system of units, the mechanical quantity is a derived quantity, which cannot be directly observed, and usually needs to be converted into visible macroscopic object motion or deformation, or converted into other types of physical signals by using special physical effects for measurement. In the era of the development of international units to quantization, the optical pressure is used as a tiny force value of energy quantization, has very high research value, plays a crucial role in interstellar navigation, satellite attitude control and tracing of the tiny force value, living cell control and atomic density map drawing, needs to be increased continuously to enhance the strength of optical pressure measurement and measurement research, and has important significance in aerospace industry and precision manufacturing industry.
At present, there are 6 main methods for measuring light pressure, which are: (1) the torsion balance method for measuring Light Pressure by measuring the rotation angle of the torsion balance (see the paper Lebedev P.N. "Experimental examination of Light Pressure [ J ]". Ann der Physik,1901,6(433): 1-26; Berzanskaya V.M, Doskoch I.Y, Man' ko M A. "Light Pressure Experiments by P.N Lebedev and model schemes of Optomechanics and Quantum Optics [ J ]". Journal of Russian Laser Research, 2016, 37(5): 425) 433); (2) the piezoelectric ceramic method for establishing the relationship between the light pressure and the energy by utilizing the special properties of certain crystals (see the paper of Cuiyuan, Li Cheng ren, Liuyufeng. "development of a light pressure observation instrument" [ J ]. physical experiment, 1999, 1(1): 29-30; Dragon, Zhaoqiao modified Qing, Du Zhu Qing, etc. "measuring the light pressure by using the piezoelectric ceramic" [ J ]. physical experiment, 2016, 36(11): 20-22); (3) capacitance methods for measuring optical pressure using the capacitive gradient of plate capacitance (see the paper New geosov V. "A nanonewton force and a novel method for measures of the air and vacuum property at zero frequencies [ J ]". Measurement Science and Technology,2009,20(8): 084012-1-6; Nesterov, Buetespich S, Koenders L. "A nanonewton force to surface new' S law of gradient at micro and sub-micrometer distance [ J ]" Annalen der Physik,2013,525(8-9):728 737); (4) a pellicle method for indirectly measuring The Light Pressure by measuring The deformation of The surface of a pellicle by laser (see The article Petrov M P. "The case Force and Light Pressure [ M ]", America: Optical Society of America, 2007; Petrov V M, Petrter J, Petrov M P., et. Nanopotomeics: From The Light Pressure to The case Force [ J ] ". Materials Science & Engineering C,2007,27(5-8):981 + 984); (5) the liquid method of measuring the light spot size variation of the liquid interface by obliquely striking the laser to the liquid interface to deform the liquid interface so as to influence the spot size of the emitted light (see the paper Zhang L, She W, Peng N, et al, "Experimental evidence for Abstract ham compression of light [ J ]," New Journal of Physics, 2015, 17(5): 053035-1-12; Glenzer S H, Macgowan B J, Michel P, et al, "symmetry in ideal definition fusion processes at an ultra-high energy sources [ J ]," Science 2010, 327(5970):1228 + 1231); (6) on the basis of the torsion balance, the torsion balance is driven by sine modulation light, and a resonance light pressure measurement method that the frequency of the modulation light intensity change is consistent with the natural frequency of the torsion balance to generate resonance is utilized (see paper Liu Yang gang, Huanggunn stone, Li vibrating column, et al. light pressure measurement based on resonance [ J ]. physical experiment, 2017(01):5-10+ 16).
Of course, the above-mentioned several light pressure methods have certain drawbacks and disadvantages, such as: the torsion balance method has higher requirements on the vacuum environment and more influence factors of uncertainty. The measurement results of the piezoceramic method depend to a large extent on the piezoelectric crystal itself. The capacitance method has the disadvantages that the resolution and the uncertainty are limited by the influence of the resolution of an interferometer and the uncertainty of a capacitance gradient on the electrostatic force reproduction, the requirement on the vacuum condition is high, the device needs to be kept still before a formal experiment, the device consumes a long time, the whole device is too large in size, and the measurement of the field light pressure is not facilitated. The thin film method is only suitable for light sources with smaller power due to the limitation of the characteristics of the thin film. The liquid method has different temperature field distributions and heat transfer characteristics for different liquid interfaces, and has a non-negligible influence on the light pressure measurement precision.
Disclosure of Invention
Aiming at the defects in the prior art, the optical pressure measuring device provided by the invention solves the problem of low precision of the existing optical pressure measuring method.
In order to achieve the purpose of the invention, the invention adopts the technical scheme that:
the optical pressure measuring device comprises an optical frequency conversion unit, a signal conditioning and collecting unit, a signal processing unit, a display unit and a direct current voltage stabilizing unit;
the optical frequency conversion unit comprises a driving circuit and a piezoelectric resonant sensor; the output end of the piezoelectric resonant sensor is connected with the input end of the driving circuit; the output end of the driving circuit is in communication connection with the input end of the signal conditioning and collecting unit; the signal processing unit is respectively in communication connection with the output end of the signal conditioning and collecting unit and the display unit; the direct-current voltage stabilizing unit is electrically connected with the driving circuit;
the piezoelectric resonance type sensor includes: a sensor wafer, a first sensor electrode, and a second sensor electrode; the sensor wafer is fixed between the first sensor electrode and the second sensor electrode;
the driving circuit is used for driving the piezoelectric resonant sensor and acquiring the frequency value of the piezoelectric resonant sensor;
the signal conditioning acquisition unit is used for acquiring and conditioning the received real-time frequency information and sending the conditioned data to the signal processing unit;
the signal processing unit is used for calculating the current light pressure according to the output of the signal conditioning and collecting unit under the environment without light pressure and the output data of the current signal conditioning and collecting unit;
the display unit is used for displaying data and comprises light pressure calculated by the signal processing unit;
and the direct current voltage stabilizing unit is used for providing electric energy for the piezoelectric resonant sensor.
Further, the sensor wafer is a piezoelectric quartz crystal.
Further, the driving circuit includes: the circuit comprises a resistor R1, a resistor R2, a resistor R3, a grounding resistor R4, a resistor R5, a grounding resistor R6, a grounding capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a grounding capacitor C5, a capacitor C6, a grounding capacitor C7, a grounding capacitor C8, a capacitor C9, a grounding capacitor C10, a voltage stabilizing diode D1, a crystal oscillator Y1, an inductor L1, an inductor L2, a driving chip U1 and a triode Q1;
one end of the resistor R1 is used as an input end of the driving circuit, and the other end of the resistor R1 is respectively connected with one end of the inductor L1, the grounded capacitor C1, the cathode of the voltage stabilizing diode D1 and one end of the capacitor C4; the other end of the inductor L1 is respectively connected with one end of a capacitor C2, one end of a capacitor C3 and one end of a crystal oscillator Y1; the other end of the capacitor C4 is connected with one end of the capacitor C2 and one end of the capacitor C3 respectively; the anode of the zener diode D1 is grounded; the base electrode of the triode Q1 is respectively connected with one end of a resistor R2, the other end of a crystal oscillator Y1 and one end of a capacitor C6, the collector electrode of the triode Q1 is connected with one end of a resistor R3, and the emitter electrode of the triode Q1 is respectively connected with one end of a capacitor C6, one end of a grounding capacitor C7, one end of a grounding resistor R4, one end of an inductor L2 and one end of a capacitor C9; an input end IN of the driving chip U1 is respectively connected with the other end of the capacitor C9, one end of the resistor R5 and the grounding resistor R6, and a VCC end of the driving chip U1 is respectively connected with the other end of the resistor R2, the other end of the resistor R3, the grounding capacitor C5, the other end of the resistor R5 and the grounding capacitor C10; the other end of the inductor L2 is connected with a grounding capacitor C8; the output terminal OUT of the driving chip U1 serves as an output terminal of the driving circuit.
The invention has the beneficial effects that:
1. the invention can quickly obtain the light pressure through the frequency difference, thereby avoiding the influence of dark current or environmental factors on the measurement and improving the light pressure measurement precision.
2. The time frequency is one of seven basic physical quantities, can be used as a measuring standard, and is easy to measure accurately, so that the photoelectric conversion method has higher precision.
3. The invention utilizes the relationship of the light pressure-frequency characteristic of the sensor to represent the illumination pressure by the frequency quantity of the sensor, and is easier to realize high-precision measurement.
4. The invention has the characteristics of quick response, wide response frequency band and the like, is matched with the integrated drive circuit and the light-transmitting sheet, and is easy for mass production.
5. The driving circuit has a temperature compensation function, and can offset frequency drift of the piezoelectric resonant converter caused by the external environment temperature.
Drawings
FIG. 1 is a block diagram of the present optical pressure measuring device;
fig. 2 is a schematic structural diagram of a piezoelectric resonant sensor;
fig. 3 is a circuit diagram of the driving circuit.
Wherein: 1. a sensor wafer; 2. a first sensor electrode; 3. a second sensor electrode.
Detailed Description
The following description of the embodiments of the present invention is provided to facilitate the understanding of the present invention by those skilled in the art, but it should be understood that the present invention is not limited to the scope of the embodiments, and it will be apparent to those skilled in the art that various changes may be made without departing from the spirit and scope of the invention as defined and defined in the appended claims, and all matters produced by the invention using the inventive concept are protected.
As shown in fig. 1 and fig. 2, the optical pressure measuring apparatus includes an optical frequency conversion unit, a signal conditioning and collecting unit, a signal processing unit, a display unit, and a dc voltage stabilizing unit;
the optical frequency conversion unit comprises a driving circuit and a piezoelectric resonant sensor; the output end of the piezoelectric resonant sensor is connected with the input end of the driving circuit; the output end of the driving circuit is in communication connection with the input end of the signal conditioning and collecting unit; the signal processing unit is respectively in communication connection with the output end of the signal conditioning and collecting unit and the display unit; the direct-current voltage stabilizing unit is electrically connected with the driving circuit;
the piezoelectric resonance type sensor includes: a sensor wafer 1, a first sensor electrode 2, and a second sensor electrode 3; the sensor wafer 1 is fixed between the first sensor electrode 2 and the second sensor electrode 3; the sensor wafer is a piezoelectric quartz crystal;
the driving circuit is used for driving the piezoelectric resonant sensor and acquiring the frequency value of the piezoelectric resonant sensor;
the signal conditioning acquisition unit is used for acquiring and conditioning the received real-time frequency information and sending the conditioned data to the signal processing unit;
the signal processing unit is used for calculating the current light pressure according to the output of the signal conditioning and collecting unit under the environment without light pressure and the output data of the current signal conditioning and collecting unit;
the display unit is used for displaying data and comprises light pressure calculated by the signal processing unit;
and the direct current voltage stabilizing unit is used for providing electric energy for the piezoelectric resonant sensor.
As shown in fig. 3, the driving circuit includes: the circuit comprises a resistor R1, a resistor R2, a resistor R3, a grounding resistor R4, a resistor R5, a grounding resistor R6, a grounding capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a grounding capacitor C5, a capacitor C6, a grounding capacitor C7, a grounding capacitor C8, a capacitor C9, a grounding capacitor C10, a voltage stabilizing diode D1, a crystal oscillator Y1, an inductor L1, an inductor L2, a driving chip U1 and a triode Q1;
one end of the resistor R1 is used as an input end of the driving circuit, and the other end of the resistor R1 is respectively connected with one end of the inductor L1, the grounded capacitor C1, the cathode of the voltage stabilizing diode D1 and one end of the capacitor C4; the other end of the inductor L1 is respectively connected with one end of a capacitor C2, one end of a capacitor C3 and one end of a crystal oscillator Y1; the other end of the capacitor C4 is connected with one end of the capacitor C2 and one end of the capacitor C3 respectively; the anode of the zener diode D1 is grounded; the base electrode of the triode Q1 is respectively connected with one end of a resistor R2, the other end of a crystal oscillator Y1 and one end of a capacitor C6, the collector electrode of the triode Q1 is connected with one end of a resistor R3, and the emitter electrode of the triode Q1 is respectively connected with one end of a capacitor C6, one end of a grounding capacitor C7, one end of a grounding resistor R4, one end of an inductor L2 and one end of a capacitor C9; an input end IN of the driving chip U1 is respectively connected with the other end of the capacitor C9, one end of the resistor R5 and the grounding resistor R6, and a VCC end of the driving chip U1 is respectively connected with the other end of the resistor R2, the other end of the resistor R3, the grounding capacitor C5, the other end of the resistor R5 and the grounding capacitor C10; the other end of the inductor L2 is connected with a grounding capacitor C8; the output terminal OUT of the driving chip U1 serves as an output terminal of the driving circuit.
In the specific implementation process, the optical frequency conversion unit can be packaged in the transparent shell, so that the optical frequency conversion unit is prevented from being polluted by the external environment, and the sensing precision and sensitivity of the device are ensured.
The formula for calculating the current light pressure by the signal processing unit according to the output of the signal conditioning and collecting unit under the no-light-pressure environment and the output data of the current signal conditioning and collecting unit is as follows:
Δf＝K Ff ·f 0 ·F
where Δ F is the frequency change caused by the pressure F applied by the light to the sensor surface; k Ff Is the pressure-frequency sensitivity coefficient of the sensor; f. of 0 Is the natural resonant frequency of the sensor.
Claims (2)
1. An optical pressure measuring device is characterized by comprising an optical frequency conversion unit, a signal conditioning and collecting unit, a signal processing unit, a display unit and a direct current voltage stabilizing unit;
the optical frequency conversion unit comprises a driving circuit and a piezoelectric resonant sensor; the output end of the piezoelectric resonant sensor is connected with the input end of the driving circuit; the output end of the driving circuit is in communication connection with the input end of the signal conditioning and collecting unit; the signal processing unit is respectively in communication connection with the output end of the signal conditioning and collecting unit and the display unit; the direct-current voltage stabilizing unit is electrically connected with the driving circuit;
the piezoelectric resonant sensor includes: a sensor wafer (1), a first sensor electrode (2) and a second sensor electrode (3); the sensor wafer (1) is fixed between a first sensor electrode (2) and a second sensor electrode (3);
the driving circuit is used for driving the piezoelectric resonant sensor and acquiring the frequency value of the piezoelectric resonant sensor;
the signal conditioning and acquiring unit is used for acquiring and conditioning the received real-time frequency information and sending the conditioned data to the signal processing unit;
the signal processing unit is used for calculating the current light pressure according to the output of the signal conditioning and collecting unit under the environment without light pressure and the output data of the current signal conditioning and collecting unit;
the display unit is used for displaying data and comprises light pressure obtained by calculation of the signal processing unit;
the direct current voltage stabilizing unit is used for providing electric energy for the piezoelectric resonant sensor;
the drive circuit includes: the circuit comprises a resistor R1, a resistor R2, a resistor R3, a grounding resistor R4, a resistor R5, a grounding resistor R6, a grounding capacitor C1, a capacitor C2, a capacitor C3, a capacitor C4, a grounding capacitor C5, a capacitor C6, a grounding capacitor C7, a grounding capacitor C8, a capacitor C9, a grounding capacitor C10, a voltage stabilizing diode D1, a crystal oscillator Y1, an inductor L1, an inductor L2, a driving chip U1 and a triode Q1;
one end of the resistor R1 is used as an input end of the driving circuit, and the other end of the resistor R1 is respectively connected with one end of the inductor L1, the grounded capacitor C1, the cathode of the voltage stabilizing diode D1 and one end of the capacitor C4; the other end of the inductor L1 is respectively connected with one end of a capacitor C2, one end of a capacitor C3 and one end of a crystal oscillator Y1; the other end of the capacitor C4 is respectively connected with one end of a capacitor C2 and one end of a capacitor C3; the anode of the voltage stabilizing diode D1 is grounded; the base electrode of the triode Q1 is respectively connected with one end of a resistor R2, the other end of a crystal oscillator Y1 and one end of a capacitor C6, the collector electrode of the triode Q1 is connected with one end of a resistor R3, and the emitter electrode of the triode Q1 is respectively connected with one end of a capacitor C6, one end of a grounding capacitor C7, one end of a grounding resistor R4, one end of an inductor L2 and one end of a capacitor C9; the input end IN of the driving chip U1 is respectively connected with the other end of the capacitor C9, one end of the resistor R5 and the grounding resistor R6, and the VCC end of the driving chip U1 is respectively connected with the other end of the resistor R2, the other end of the resistor R3, the grounding capacitor C5, the other end of the resistor R5 and the grounding capacitor C10; the other end of the inductor L2 is connected with a grounding capacitor C8; the output end OUT of the driving chip U1 is used as the output end of the driving circuit.
2. An optical pressure measuring device according to claim 1, wherein the sensor wafer is a piezoelectric quartz crystal.
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| CN204361902U (en) * | 2015-01-31 | 2015-05-27 | 西安科技大学 | A kind of DC-stabilized circuit |
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