CN201518309U - Plasma discharge and atomizing grafting device - Google Patents

Plasma discharge and atomizing grafting device Download PDF

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Publication number
CN201518309U
CN201518309U CN2009202466284U CN200920246628U CN201518309U CN 201518309 U CN201518309 U CN 201518309U CN 2009202466284 U CN2009202466284 U CN 2009202466284U CN 200920246628 U CN200920246628 U CN 200920246628U CN 201518309 U CN201518309 U CN 201518309U
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CN
China
Prior art keywords
atomizing
plasma discharge
grafting device
grafting
roller bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2009202466284U
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Chinese (zh)
Inventor
赵玲利
杨景华
张超前
王守国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xinjiang Zhongke Silk Road Technology Co., Ltd.
Original Assignee
Institute of Microelectronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN2009202466284U priority Critical patent/CN201518309U/en
Application granted granted Critical
Publication of CN201518309U publication Critical patent/CN201518309U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses a plasma discharge and atomizing grafting device, which comprises a group of atomizing jet heads and two high-pressure electric poles, wherein, the atomizing jet heads are installed on a shielding case connected with a bracket; the two high-pressure electric poles are positioned on both sides of the atomizing jet heads; the two high-pressure electric poles are connected with one end of a power supply; the shielding case connected with the earth is arranged outside the two high-pressure electric poles; and a metal round roller ground electrode is arranged inside the two high-pressure electric poles. By adopting the plasma discharge and atomizing grafting device, an atomizing device is additionally arranged among intervals generating air glow discharge under the atmospheric pressure, and plasma electro-discharge technology and surface atomizing grafting technology are integrated. In addition, timeliness is good after surface grafting, so that the plasma electro-discharge and atomizing grafting device can be used for surface grafting and modification processing of thin-film material.

Description

Plasma discharge and atomizing grafting device
Technical field
The utility model relates to plasma applicating technology field, relates in particular to a kind of plasma discharge and atomizing grafting device, is the realization of installing between between two circular arc plasma discharge regions under the normal pressure device to the film surface grafting.
Background technology
Past generally is the surface of adopting naphthalene sodium method corrosion material for the hydrophily that improves material surface, adopts this method can bring serious poisonous and hazardous fluid discharge, brings very big hidden danger to environmental protection.
Utilize atmospheric plasma to handle thin-film material, the hydrophily that improves material surface is in one of plasma application technology that develops rapidly in recent years, but general material generally all keeps not long-time through the ageing of its surface hydrophilic after the plasma treatment, in order to keep hydrophilic ageing of thin-film material surface, after carrying out plasma treatment, also need carry out a kind of new hydrophilic radical of glycerol polymerization at film surface.
The hydrophily that the utility model is based on the maintenance thin-film material is a purpose, again at a kind of hydrophilic radical of its surface grafting, the device of being developed is that a binding plasma discharging surface is handled and the atomizing grafting is a kind of new equipment of continuous combined treatment after the process plasma treatment.
The utility model content
(1) technical problem that will solve
In view of this, main purpose of the present utility model is to provide a kind of plasma discharge and atomizing grafting device, handle the various thin-film materials that pass this passage with the zone that utilizes the integrated glow plasma discharge and the atomization of liquid, especially graft modification is carried out on the surface of material and handled.
(2) technical scheme
For achieving the above object, the utility model provides a kind of plasma discharge and atomizing grafting device, and this device comprises:
One group of atomizer, this group atomizer be installed in one with radome that support is connected on; With
Two high-field electrodes are positioned at the both sides of atomizer, and these two high-field electrodes are connected with an end of power supply, and a radome that is connected with the earth is installed in the outside, and the inboard is provided with a round metal roller bearing ground electrode.
In the such scheme, the liquid of this group atomizer atomizing ejection constitutes a plane, is sprayed on the surface of film.
In the such scheme, this high-field electrode be shaped as the segmental tile plate shape, the output voltage of the high voltage source that is connected is greater than 5KV, frequency range is 1 to 40KHz.
In the such scheme, this high voltage source is to adopt high frequency electric source, or adopts radio-frequency power supply.
In the such scheme, the circular arc medial surface of this high-field electrode and the outer surface of this round metal roller bearing have certain spacing.
In the such scheme, this round metal roller bearing ground electrode be installed in one with support that the earth is connected on, be separately installed with the film axis of guide at this in round metal roller bearing ground electrode both sides, thin-film material can be by the plasma discharge between high-field electrode and the round metal roller bearing ground electrode.
In the such scheme, these two high-field electrodes and this round metal roller bearing ground electrode adopt aluminum to make.
In the such scheme, this radome adopts aluminum to make.
(3) beneficial effect
This plasma discharge that the utility model provides and atomizing grafting device, its advantage is:
1, under atmospheric pressure produces and add an atomising device, integrated and plasma discharge and surface atomizing crosslinking technology between the interval of air glow discharge.
2, ageing good behind the surface grafting, can be used for the surface grafting and the modification of thin-film material are handled.
Description of drawings
Fig. 1 is the side structure schematic diagram according to the utility model embodiment plasma discharge that provides and the grafting device that atomizes;
Fig. 2 is the Facad structure schematic diagram according to the utility model embodiment plasma discharge that provides and the grafting device that atomizes.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer,, and, the utility model is further described with reference to accompanying drawing below in conjunction with specific embodiment.
Consult side structure schematic diagram and Facad structure schematic diagram that Fig. 1 and Fig. 2 figure are respectively the utility model embodiment.One group of atomizer 109 be installed in one with radome 104 that support 111 is connected on, this atomizer can atomize and spray various liquid, in the both sides of atomizer two high-field electrodes 103 are installed respectively, this high-field electrode 103 is connected with the high-pressure side of power supply 110, a radome that is connected with the earth 104 is installed in the outside at this high-field electrode 103, these high-field electrode 103 inboards are provided with a round metal roller bearing ground electrode 112, this round metal roller bearing ground electrode 112 is installed on the support that is connected with the earth 113 by bearing 107, this support is installed on the base 101, be separately installed with the film axis of guide 102 in these both sides at round metal roller bearing ground electrode 112, when between high-field electrode 103 and metallic cylinder axle ground electrode 112, adding high frequency or radio-frequency voltage, produce plasma in the zone (slit) between two electrodes 103 and 112.Thin-film material 114 can pass the slit between these two electrodes.
Among Fig. 1 and Fig. 2,105,106,108 and 107 is fixed screws, and wherein 106 is to be connected with dielectric panel, and this dielectric panel is that to be used for fixing electrode 103,113 and 111 are metal fixed connecting plates.
Electrode 112 and 103 is to make with aluminum, and radome 104 can be used aluminum, also can make with other material.
Power supply 110 can be to adopt high frequency electric source, also can be to adopt radio-frequency power supply.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; institute is understood that; the above only is a specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.

Claims (8)

1. plasma discharge and atomizing grafting device, it is characterized in that: this device comprises:
One group of atomizer, this group atomizer be installed in one with radome that support is connected on; With
Two high-field electrodes are positioned at the both sides of atomizer, and these two high-field electrodes are connected with an end of power supply, and a radome that is connected with the earth is installed in the outside, and the inboard is provided with a round metal roller bearing ground electrode.
2. plasma discharge according to claim 1 and atomizing grafting device is characterized in that: the liquid of this group atomizer atomizing ejection constitutes a plane, is sprayed on the surface of film.
3. plasma discharge according to claim 1 and atomizing grafting device is characterized in that: this high-field electrode be shaped as the segmental tile plate shape, the output voltage of the high voltage source that is connected is greater than 5KV, frequency range is 1 to 40KHz.
4. plasma discharge according to claim 3 and atomizing grafting device is characterized in that: this high voltage source is to adopt high frequency electric source, or adopts radio-frequency power supply.
5. plasma discharge according to claim 1 and atomizing grafting device, it is characterized in that: the circular arc medial surface of this high-field electrode and the outer surface of this round metal roller bearing have certain spacing.
6. plasma discharge according to claim 1 and atomizing grafting device, it is characterized in that: this round metal roller bearing ground electrode be installed in one with support that the earth is connected on, be separately installed with the film axis of guide at this in round metal roller bearing ground electrode both sides, thin-film material can be by the plasma discharge between high-field electrode and the round metal roller bearing ground electrode.
7. plasma discharge according to claim 1 and atomizing grafting device, it is characterized in that: these two high-field electrodes and this round metal roller bearing ground electrode adopt aluminum to make.
8. plasma discharge according to claim 1 and atomizing grafting device, it is characterized in that: this radome adopts aluminum to make.
CN2009202466284U 2009-10-21 2009-10-21 Plasma discharge and atomizing grafting device Expired - Lifetime CN201518309U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202466284U CN201518309U (en) 2009-10-21 2009-10-21 Plasma discharge and atomizing grafting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009202466284U CN201518309U (en) 2009-10-21 2009-10-21 Plasma discharge and atomizing grafting device

Publications (1)

Publication Number Publication Date
CN201518309U true CN201518309U (en) 2010-06-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009202466284U Expired - Lifetime CN201518309U (en) 2009-10-21 2009-10-21 Plasma discharge and atomizing grafting device

Country Status (1)

Country Link
CN (1) CN201518309U (en)

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20160701

Address after: 830002, the Xinjiang Uygur Autonomous Region economic and Technological Development Zone, Urumqi, Kashi West Road, No. 499, Longhai property building, room 628

Patentee after: Xinjiang Zhongke Silk Road Technology Co., Ltd.

Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3

Patentee before: Institute of Microelectronics, Chinese Academy of Sciences

CX01 Expiry of patent term

Granted publication date: 20100630

CX01 Expiry of patent term