CN201395637Y - 单晶炉翻板箱的冷却结构 - Google Patents
单晶炉翻板箱的冷却结构 Download PDFInfo
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- CN201395637Y CN201395637Y CN200920039686XU CN200920039686U CN201395637Y CN 201395637 Y CN201395637 Y CN 201395637Y CN 200920039686X U CN200920039686X U CN 200920039686XU CN 200920039686 U CN200920039686 U CN 200920039686U CN 201395637 Y CN201395637 Y CN 201395637Y
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CN200920039686XU CN201395637Y (zh) | 2009-04-20 | 2009-04-20 | 单晶炉翻板箱的冷却结构 |
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CN200920039686XU CN201395637Y (zh) | 2009-04-20 | 2009-04-20 | 单晶炉翻板箱的冷却结构 |
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CN201395637Y true CN201395637Y (zh) | 2010-02-03 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102517628A (zh) * | 2011-12-21 | 2012-06-27 | 西安创联新能源设备有限公司 | 单晶炉翻板限位机构 |
CN103511715A (zh) * | 2012-06-20 | 2014-01-15 | 费海鸿 | 水冷真空翻板阀 |
CN103993350A (zh) * | 2014-04-21 | 2014-08-20 | 洛阳金诺机械工程有限公司 | 一种用于拉制硅芯的炉室 |
CN108456918A (zh) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | 一种用于半导体硅单晶炉的翻板阀及单晶炉 |
-
2009
- 2009-04-20 CN CN200920039686XU patent/CN201395637Y/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102517628A (zh) * | 2011-12-21 | 2012-06-27 | 西安创联新能源设备有限公司 | 单晶炉翻板限位机构 |
CN102517628B (zh) * | 2011-12-21 | 2014-12-17 | 西安创联新能源设备有限公司 | 单晶炉翻板限位机构 |
CN103511715A (zh) * | 2012-06-20 | 2014-01-15 | 费海鸿 | 水冷真空翻板阀 |
CN103993350A (zh) * | 2014-04-21 | 2014-08-20 | 洛阳金诺机械工程有限公司 | 一种用于拉制硅芯的炉室 |
CN108456918A (zh) * | 2018-06-20 | 2018-08-28 | 南京晶能半导体科技有限公司 | 一种用于半导体硅单晶炉的翻板阀及单晶炉 |
CN108456918B (zh) * | 2018-06-20 | 2024-04-05 | 南京晶能半导体科技有限公司 | 一种用于半导体硅单晶炉的翻板阀及单晶炉 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changzhou Meng River Pharmaceutical Chemical Machinery Plant Assignor: Pan Yanping|Pan Guoqiang Contract record no.: 2010320000597 Denomination of utility model: Cooling structure of plate turning box of mono-crystal furnace Granted publication date: 20100203 License type: Exclusive License Record date: 20100513 |
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ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: PAN GUOQIANG Owner name: CHANGZHOU TIANLONG OPTOELECTRONICS EQUIPMENT CO., Free format text: FORMER OWNER: PAN YANPING Effective date: 20101203 |
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Free format text: CORRECT: ADDRESS; FROM: 213129 NO.157, QILIANG ROAD, WANSUI, MENGHE TOWN, XINBEI DISTRICT, CHANGZHOU CITY, JIANGSU PROVINCE TO: 213138 NO.16, GANGXI AVENUE, MENGHE TOWN, CHANGZHOU CITY, JIANGSU PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20101203 Address after: 213138, No. 16, West Avenue, Meng Meng Town, Jiangsu, Changzhou Patentee after: Changzhou Tianlong Optical Equipment Co., Ltd. Address before: 213129, Changzhou, Jiangsu province new North Meng Town, Wan Sui Qi Liang Road, No. 157 Co-patentee before: Pan Guoqiang Patentee before: Pan Yanping |
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EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Changzhou Meng River Pharmaceutical Chemical Machinery Plant Assignor: Pan Yanping|Pan Guoqiang Contract record no.: 2010320000597 Date of cancellation: 20101026 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100203 Termination date: 20150420 |
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EXPY | Termination of patent right or utility model |